FA95E-25XY-25Z

FA95E-25XY-25Z AEROTECH | Alldatasheet

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FA95e and FA130e Series Photonics Solutions 1 www.aerotech.com FA95e and FA130e Series Direct-Drive, Multi-Axis Photonics Alignment System Introduction Aerotech’s enhanced FiberAlign™ FAe series is the latest high-performance photonics aligning system incorporating best-in-class drive and state-of-the-art axis control technology. It builds on the success of the original FiberAlign systems while improving accuracies and shrinking step sizes. The modular design permits the selection of the number of axes, travel distance, and load capacity to exactly fit the application, all while maintaining high-speed, resolution, and accuracy. Automated Production As alignment accuracies, the quest for higher yields, and device volumes increase, the need for a precise, reliable, and repeatable motion system becomes increasingly important. Due to the rapidly changing nature of components and manufacturing processes, flexibility in system configuration becomes a must. Aerotech’s FAe series responds to and satisfies all of these requirements. With the selection of robust system components and decades of precision motion experience, high-volume production in a 24/7 manufacturing environment has become a reality. Advanced Drive Technology Only noncontact direct-drive technology offers the robust, accurate, high-speed, and high-resolution positioning necessary for mass production of precision devices. Aerotech’s state-of-the-art drive technology offers industry- leading resolution combined with travels up to 160 mm and 3- to 6-axis photonics alignment High resolution (2 nm), repeatability (100 nm), and accuracy (300 nm) Anti-creep crossed-roller bearings Noncontact direct-drive linear motors Direct-drive rotary and goniometer options Raster, spiral, or power peaking algorithms Interface to industry-standard power meters positioning speeds up to 200 mm/s. Utilizing ultra-quiet linear drives and advanced control technology, Aerotech’s FAe series offers the best position repeatability, accuracy, and in-position stability to meet the motion system requirement of higher yields. Fast Vision Alignment and Power Scanning Algorithms A comprehensive software toolkit provides easy access to commonly used functions. Alignment functions such as hill climbing from a power meter input, and raster, square, or circular spiral scans are easily implemented via standard functions. In addition to the automated tools, both joystick and on-screen jog control are available for manual operations. FA95e or FA130e – Which is Right for You? To satisfy the ongoing positioning and processing needs of the photonics manufacturing industry, Aerotech offers both the FA95e and FA130e. Both basic three-axis models can be extended with additional axes to satisfy the requirement to control motion in six axes: X, Y, Z, T (yaw), P (pitch), R (roll). FA95e represents the more compact version (one-third of the volume of FA130e) and is ideal where space is limited. Additional axes can be attached to provide high-resolution, high-accuracy rotary motion. Yaw rotary motion is provided by Aerotech’s ANT95-R direct-drive, high-resolution rotary actuators, while pitch

Photonics SolutionsFA95e and FA130e Series and roll motion are provided by Aerotech’s advanced ANT- 20G series direct-drive, high-resolution goniometers. The rotary devices offer a 20 degree angular range with industry-leading step resolution of 0.01 arc-seconds. The FA130e is similar in construction to the FA95e but offers a larger travel and larger load carrying capability in a slightly larger envelope. Travel for the X and Y axes are selectable up to 160 millimeters. The FA130e also accepts the ANT95-R rotary actuator and the ANT-20G goniometers, providing up to six axes of motion control. FA95e Series SPECIFICATIONS Mechanical Specifications FA95e-25XY-25Z FA95e-25XY-50Z FA95e-50XY-25Z FA95e-50XY-50Z Number of Axes 25 x 25 x 25 mm 25 x 25 x 50 mm 50 x 50 x 25 mm 50 x 50 x 50 mm Accuracy(1) XY Std ±2.5 µm Plus ±250 nm Z Std ±4 µm Plus ±300 nm Resolution (Minimum Incremental Motion)(1) 2 nm Repeatability (Bidirectional)(1) ±100 nm Orthogonality XY Std 10 arc-sec Plus 3 arc-sec Z to XY Std 10 arc-sec Plus 10 arc-sec Maximum Speed(2) 200 mm/s In-Position Stability(3) <2 nm Maximum Force (Continuous) XY 7.75 N 7.75 N 9.5 N 9.5 N Z 7.75 N 9.5 N 7.75 N 9.5 N Load Capacity 3.0 kg 3.0 kg 5.0 kg 5.0 kg Moving Mass XY (Lower) 3.0 kg 3.7 kg 4.0 kg 4.6 kg XY (Upper) 2.4 kg 3.0 kg 2.7 kg 3.3 kg Z 0.46 kg 0.46 kg 0.52 kg 0.52 kg Stage Mass 3.7 kg 4.3 kg 5.1 kg 5.7 kg Material Aluminum body, Black Hardcoat Finish MTBF (Mean Time Between Failure) 20,000 hrs Drive System Brushless Linear Servomotor Feedback Noncontact Linear Encoder Maximum Bus Voltage ±40 VDC Limit Switches 5 V, Normally-closed Home Switch Near center of travel Notes: 1. Values listed are per axis. 2. Requires the selection of an appropriate amplifier with sufficient voltage and current. 3. In-position stability listing is 3 sigma value. to the stage. 5. -PLUS requires the use of an Aerotech controller. Note: To ensure the achievement and repeatability of specifications over an extended period of time, environmental temperature must be controlled to within 0.25°C/24 hours. If this is not possible, alternate products are available. Please consult Aerotech. www.aerotech.com

FA95e and FA130e Series Photonics Solutions 3 www.aerotech.com Drive System Brushless Linear Servomotor Feedback Noncontact Linear Encoder Maximum Bus Voltage ±40 VDC Limit Switches 5 V, Normally-closed Home Switch Near center of travel Notes: 1. Values listed are per axis. 2. Requires the selection of an appropriate amplifier with sufficient voltage and current. 3. In-position stability listing is 3 sigma value. to the stage. 5. -PLUS requires the use of an Aerotech controller. FA130e Series SPECIFICATIONS Mechanical Specifications FA130e-60XY-35Z FA130e-60XY-60Z FA130e-110XY-35Z FA130e-110XY-60Z Number of Axes 60 x 60 x 35 mm 60 x 60 x 60 mm 110 x 110 x 35 mm 110 x 110 x 60 mm Accuracy(1) XY Std ±2.5 µm ±2.5 µm ±4.0 µm ±4.0 µm Plus ±250 nm ±250 nm ±300 nm ±300 nm Z Std ±3 µm Plus ±300 nm Resolution (Minimum Incremental Motion)(1) 2 nm Repeatability (Bidirectional)(1) ±100 nm Orthogonality XY Std 10 arc-sec Plus 3 arc-sec Z to XY Std 10 arc-sec Plus 10 arc-sec Maximum Speed(2) 200 mm/s In-Position Stability(3) <2 nm Maximum Force (Continuous) XY 23 N Z 23 N Load Capacity 8.0 kg Moving Mass XY (Lower) 8.5 kg 9.4 kg 10.0 kg 10.9 kg XY (Upper) 5.8 kg 6.7 kg 6.4 kg 7.3 kg Z 1.2 kg 1.4 kg 1.2 kg 1.4 kg Stage Mass 9.8 kg 10.7 kg 11.7 kg 12.6 kg Material Aluminum body, Black Hardcoat Finish MTBF (Mean Time Between Failure) 20,000 hrs Note: To ensure the achievement and repeatability of specifications over an extended period of time, environmental temperature must be controlled to within 0.25°C/24 hours. If this is not possible, alternate products are available. Please consult Aerotech.

Photonics SolutionsFA95e and FA130e Series 4www.aerotech.com Mechanical Specifications FA130e-160XY-35Z FA130e-160XY-60Z Number of Axes 160 x 160 x 35 mm 160 x 160 x 60 mm Accuracy(1) XY Std ±5.0 µm ±5.0 µm Plus ±300 nm Z Std ±3 µm Plus ±300 nm Resolution (Minimum Incremental Motion)(1) 2 nm Repeatability (Bidirectional)(1) ±100 nm Orthogonality XY Std 10 arc-sec Plus 3 arc-sec Z to XY Std 10 arc-sec Plus 10 arc-sec Maximum Speed(2) 200 mm/s In-Position Stability(3) <2 nm Maximum Force (Continuous) XY 23 N Z 23 N Load Capacity 8.0 kg Moving Mass XY (Lower) 11.2 kg 12.1 kg XY (Upper) 6.7 kg 7.6 kg Z 1.2 kg 1.4 kg Stage Mass 13.2 kg 14.1 kg Material Aluminum body, Black Hardcoat Finish MTBF (Mean Time Between Failure) 20,000 hrs FA130e Series SPECIFICATIONS Note: To ensure the achievement and repeatability of specifications over an extended period of time, environmental temperature must be controlled to within 0.25°C/24 hours. If this is not possible, alternate products are available. Please consult Aerotech. Notes: 1. Values listed are per axis. 2. Requires the selection of an appropriate amplifier with sufficient voltage and current. 3. In-position stability listing is 3 sigma value. to the stage. 5. -PLUS requires the use of an Aerotech controller.

FA95e and FA130e Series Photonics Solutions 5 www.aerotech.com FA95e Series DIMENSIONS 140 60 7.5 AT MID TRAVEL 234.2 100 1/2 NOMINAL TRAVEL 1/2 NOMINAL TRAVEL 246.7 MAX ENVELOPE 12.5 1/2 NOMINAL TRAVEL 12.5 1/2 NOMINAL TRAVEL

2.5 TYP

147.2 1/2 NOMINAL TRAVEL 1/2 NOMINAL TRAVEL A CUSTOMER MOUNTING HOLES 8X M4 SHCS CLEARANCE HOLES 100 50 75 32.5 12.5 140 ~85 POST LOCATION ~50 CABLE BEND RADIUS ~700MM CABLE LENGTHS COUNTERBALANCE AIR SUPPLY 6MM O.D. TUBING CONNECTION LEFT HAND CABLE EXIT SHOWN REGULATOR KNOB FOR COUNTERBALANCE ADJUSTMENT CUSTOMER MOUNTING HOLES 13X M4X0.7 4 CENTERED ON CARRIAGE 50 75 DOWEL PIN MOUNTING 2X 4 4 CENTERED ON CARRIAGE DETAIL A SCALE 1 : 4 DIMENSIONS: MILLIMETERS FA95e-50XY-25Z SHOWN OTHER TRAVELS AVAILABLE. SEE SPECIFICATIONS AND ORDERING INFORMATION. FA95e

Photonics SolutionsFA95e and FA130e Series 6www.aerotech.com AT MID TRAVEL 280 COUNTERBALANCE AIR SUPPLY 6MM O.D. TUBING CONNECTION 210 155 7.5 CUSTOMER MOUNTING HOLES 21X M6X1.0 9 CENTERED ON CARRIAGE 126.5 17.5 1/2 NOMINAL TRAVEL 17.5 1/2 NOMINAL TRAVEL 354 MAX ENVELOPE A CUSTOMER MOUNTING HOLES 8X M4 SHCS CLEARANCE HOLES 120 40 40 280 280 ~185 POST LOCATION 1/2 NOMINAL TRAVEL 1/2 NOMINAL TRAVEL 1/2 NOMINAL TRAVEL 1/2 NOMINAL TRAVEL ~125 CABLE BEND RADIUS ~400MM CABLE LENGTH FOR X AND Y AXES ~800MM CABLE LENGTH FOR Z AXIS REGULATOR KNOB FOR COUNTERBALANCE ADJUSTMENT 120 128 75 90 153 50 37.5 37.5 DETAIL A SCALE 1 : 5DIMENSIONS: MILLIMETERS FA130e-160XY-35Z SHOWN OTHER TRAVELS AVAILABLE. SEE SPECIFICATIONS AND ORDERING INFORMATION. FA130e FA130e Series DIMENSIONS

FA95e and FA130e Series Photonics Solutions 7 www.aerotech.com FA95e Direct-Drive, Multi-Axis Photonics Alignment System FA95e Proprietary direct-drive motor technology, linear-encoder-based fiber translator; XYZ axes aligned to 10 arc-sec orthogonal XY Axis -25XY 25 mm x 25 mm XY travel -50XY 50 mm x 50 mm XY travel Z Axis -25Z 25 mm Z travel Z-Axis Cable Exit -RH Z-axis right-hand cable exit -LH Z-axis left-hand cable exit Optional rotary axes The axis orientation is X,Y,Z working from the bottom to the top axis. X is bottom axis, Y is middle axis, and Z is the top (vertical) axis. -T Single rotary-axis oriented as yaw; rotation about Y-axis (ANT95-20-R) -P Single goniometer rotary-axis oriented as pitch; rotation about Y-axis (ANT-20G) -R Single goniometer rotary-axis oriented as roll; rotation about X-axis (ANT-20G) Note: Other axis combinations available upon request. Axis Orientation The letters in the axis orientation correspond to the standard XYZ configurations detailed in Aerotech's multi-axis assembly specification. The letter indicates the orientation of the vertical axis (Z) relative to the bottom axis (X). -A XY cable exits in the rear; vertical axis tabletop parallel to middle-axis (Y) facing to the front -B XY cable exits in the rear; vertical axis tabletop parallel to bottom-axis (X) facing to the left -C XY cable exits in the rear; vertical axis tabletop parallel to bottom-axis (X) facing to the right Optional Accuracy Grade -PLUS High-accuracy version FA95e Series ORDERING INFORMATION FA95e -25XY -25Z -RH -T -A -PLUS Series XY Axis Z Axis Z-Axis Cable Exit Optional Rotary Axes Axis Orientation Accuracy Grade FA95e -25XY -50XY -25Z -RH -LH -PLUS Ordering Example

Photonics SolutionsFA95e and FA130e Series 8www.aerotech.com FA130e Direct-Drive, Multi-Axis Photonics Alignment System FA130e Proprietary direct-drive motor technology, linear-encoder-based fiber translator; XYZ axes aligned to 10 arc-sec orthogonal XY Axis -60XY 60 mm x 60 mm XY travel -110XY 110 mm x 100 mm XY travel -160XY 160 mm x 160 mm XY travel Z Axis -35Z 35 mm Z travel -60Z 60 mm Z travel Optional Rotary Axes The axis orientation is X,Y,Z working from the bottom to the top axis. X is bottom axis, Y is middle axis, and Z is the top (vertical) axis. -T Single rotary-axis oriented as yaw; rotation about Y-axis (ANT95-20-R) -P Single goniometer rotary-axis oriented as pitch; rotation about Y-axis (ANT-20G) -R Single goniometer rotary-axis oriented as roll; rotation about X-axis (ANT-20G) Note: Other axis combinations available upon request. Axis Orientation The letters in the axis orientation correspond to the standard XYZ configurations detailed in Aerotech's multi-axis assembly specification. The letter indicates the orientation of the vertical axis (Z) relative to the bottom axis (X). -A XY cable exits in the rear; vertical axis tabletop parallel to middle-axis (Y) facing to the front -B XY cable exits in the rear; vertical axis tabletop parallel to bottom-axis (X) facing to the left -C XY cable exits in the rear; vertical axis tabletop parallel to bottom-axis (X) facing to the right Optional Accuracy Grade -PLUS High-accuracy version FA130e Series ORDERING INFORMATION FA130e -60XY -35Z -T -A -PLUS Series XY Axis Z Axis Optional Rotary Axes Axis Orientation Accuracy Grade FA130e -60XY -110XY -160XY -35Z -60Z -PLUS Ordering Example