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DLT2A2 - FLOW RATIO COnTROLLER P ROCE ss O PTI m IZATIO n Th RO ugh P RECI s E F LOW R ATIO C O n TROL The DELTA II Flow Ratio Controller is a critical process control instrument in the MKS line of digital control, web-enabled products providing the latest in gas flow ratio measurement and control technology necessary to meet the demands of multi-channel flow distribution. The DELTA II mass flow ratio controller divides and controls mixed process gas flows to either multiple chambers or zones within a process chamber at ratios specified by the user to maximize process uniformity and repeatability. The DELTA II flow ratio controller with its improved performance and more compact design is the second generation of MKS industry leading DELTA controllers enabling process gas flow ratio control. Widely used in a variety of flow splitting applications such as etch, strip, and CVD, the DELTA II provides the user with the ability to distribute gas or gas mixtures to two different zones in a process chamber. Send the DELTA II a gas – or any mixture – and a ratio set point and the DELTA II will split the gas into two separate output channels automatically and precisely. Features & Benefits Improves Process Perf ormance

  • Wider dynamic r atio control r ange and f aster gas flow response resulting in shor ter process cycle time and increased throughput Accurately controls flo w r atio pro viding f or better process optimization and repeatability
  • Digital control loop pro vides r apid response to set point independent of the gas mix Embedded e-diagnostics increases tool uptime through reduction of “No Prob lem Found” product replacements Ability to chec k functionality without remo ving the controller Allo ws monitoring of performance par ameters during operation Easy to Integrate and Operate
  • Straightforward configur ation and diagnostics through Ether net interface Uses standard w eb browser, no special softw are required Includes remote PC application Bright LED displa y pro vides easy vie wing of flow ratio, temperature and Ether net address Reduces Costs and Complexity
  • Fewer components than dual MFC arr angements reducing critical I/O costs
  • Smaller f ootprint Protected under one or more of the following U.S. patents: No. 6,418,954, No. 6,766,260, No. 7,007,007, US07621290B2 or International Patents and Patents pending. WWW.MKSINST.COM Flow Solutions

Full Scale Ranges (N2 equivalent) 500/500 sccm; 1000/1000 sccm; 2000/2000 sccm; 10000/10000 sccm Maxim um Operating Outlet Pressure1 200 T orr Max. Allowable Outlet Pressure Differential Torr (between Q1 and Q2) Nor mal Operating Pressure Differential (N2) <150 Torr (<450 Torr for 10000/10000) Proof Pressure 1000 psig Burst Pressure 1500 psig Input Flo w Range (N2 equivalent) 5 to 100% of each channel Full Scale r ating Ratio Control Range 1:1 to 20:1 and 20:1 to 1:1 Ratio Accur acy ±2% of r atio set point Ratio Repeatability & Reproducibility 0.3% of r atio set point Resolution 0.02% of channel Full Scale T emperature Coefficient (per channel) Zero 0.05% Full Scale/°C Span 0.08% Reading/°C Ratio Settling Time <2 seconds W arm-up Time 30 min utes Nor mal Ambient Operating Temperature Units with Date Code “01xx16” and earlier, 10 to 40°C Units with Date Code “02XX16” and after, 10 to 40°C or 10 to 35°C (if unit mounted on 45°C hot plate) Stor age Temperature -20 to 65°C Stor age Humidity 0 to 95% relativ e humidity, non-condensing T emperature Display 0 to 100°C T emperature Readout Units T emperature Accuracy ±2°C T emperature Resolution 0.1°C mechanical Fittings Sw agelok® 4 VCR® Inlet: male (non-rotatable) Outlets: male (non-rotatable) Displa y 4 digits f or value, 4 characters for unit Leak Integ rity Exter nal (scc/sec He) <1x10-10 Through Closed Valve <2% of Channel Full Scale at 400 Torr differential W etted Materials 316 S .S. VAR (equivalent to 316 S.S. SCQ for semiconductor quality); 316 S .S., Inconel®, KM-45, PTFE Surf ace Finish 5 microinch a verage Ra W eight Less than 5 lbs . (2.3 kg) Electrical Digital I/O Analog Connector 5 pin microconnector (De viceNet™) 9 pin D male Input V oltage 11-25 VDC +15 to 24 VDC ±5% Power Consumption <9 W atts <9 W atts Set Point and Output Signals Digital 0 to 5 VDC or 0 to 10 VDC Specifications 1 The Delta II will operate with outlet pressures above 200 Torr. For device performance at higher pressures, consult factory.

© 2008-2018 MKS Instruments, Inc. All rights reserved. MKS products provided subject to the US Export Regulations. Diversion or transfer contrary to US law is prohibited. Specifications are subject to change without notice . mksinst™ and DELTA™ are trademarks of MKS Instruments, Inc., Andover, MA. Sw agelok® and VCR® are registered trademarks of Swagelok Marketing Co., Solon, OH. DeviceNet™ is a trademark of the Open De viceNet Vendor Association, Coral Springs, FL. Inconel® is a registered trademark of Inco Alloys International. Analog PinOuts

9 Pin

Type D (not shown) Pin Description V alve Open/Close Ratio Signal Output +15 VDC P ower Common No connection Ratio Set point Signal Common Signal Common Remote Zero R Dimensional Drawing — Note: Dimensions are nominal values in inches (ref erence only). Q2 = FLOW 2← Q1 = FLOW 1← MKS Instruments, Inc. Global Headquarters

2 Tech Drive, Suite 201

Andover, MA 01810 Tel: 978.645.5500 Web: www.mksinst.com MKS Instruments, Inc. Flow Solutions Six Shattuck Road Andover, MA 01810 Tel: 978.975.2350 Flow Solutions DLT2A2 DEL TA II Flow Ratio Controller DL T2A2 Channel Flow Ranges (Flow 2/Flow 1) (XX) F or other ranges, Consult Factory Ratio (Flo w 2:Flow1) (Y) 1:1 Connector (B) Analog - 9-pin Type “D” (MKS pinout) A De viceNet - 5 pin microconnector Contr ol I/O (C) 0 to 5 VDC (analog devices) 0 to 10 VDC (analog devices) DeviceNet (DeviceNet units must select 3) Control Type (A) Ratio: Q2/Q1 or Q1/Q2 R P ercentage: Q2/(Q1+Q2) or Q1/(Q1+Q2) P De viceNet Units must select R Control Channel (Z) Q1 Control: Q1/Q2 or Q1/(Q1+Q2) 1 Q2 Control: Q2/Q1 or Q2/(Q1+Q2) 2 Firmware (QQ) Fir mware Revision Unless otherwise specified, MKS will ship fir mware revision current to date.