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WWW.MKSINST.COM Pressure & Vacuum Measurement Solutions DA03A HEATED (150°C OR 160°C) ABSOlUTE BARA TRO n® CAPACITAnCE MAnOMETER w ITH E THER CAT® COMMUnICATIOnS Operating at a high internal temperature, the DA03A minimizes the deposition of process byproducts within the sensor—nearly eliminating output drift caused by such contamination. The DA03A is available in operating temperatures of 150°C or 160°C, permitting use in the most demanding vacuum processes in semiconductor manufacturing such as metal etching and nitride film chemical vapor deposition (CVD). The DA03A is completely self-contained, requiring input power of +24 VDC or ±15 VDC for operation. No separate electronics modules are used, which provides the dual benefits of reducing the amount of installation space needed while providing better performance by eliminating noise-generating interconnecting cables. Its Inconel ® sensor is resistant to corrosion, and its overpressure rating of 45 psia ensures good repeatability and stability regardless of the system operating conditions. The integrated high-performance digital electronics of the DA03A also includes a fail-safe over temperature protection and LED status lamp to indicate operating state. It is available with an internally-mounted set of two (2) UL ®-approved solid state trip relays for pressure and one (1) for heater failure that allows the manometer to control external equipment or components. The pressure trip relays may be adjusted by the user independently at atmospheric pressure, eliminating the need for vacuum pumps during set point adjustment. Features & Benefits

  • Sensor oper ating temper ature of 150°C or 160°C All-Inconel capacitance sensor Standard or etch sensors a vailable High psia o verpressure r ating f or impro ved stability and repeatability Compact design fits small spaces Internally-mounted solid state process rela ys for external control
  • Long-term perf ormance in nitr ide CVD and metal etch Reduces installation space and eliminates noise caused b y interconnecting cab les Insensitive to gas composition Performance is unaff ected b y occasional pressure b ursts EtherCAT interf ace

Dimensional Drawing — Note: Unless otherwise specified, dimensions are nominal values in inches (mm referenced). For dimensions on other configurations, please contact MKS Applications Engineering).

Full Scale Pressure Ranges 1, 2, 3, 5, 10, 20, 100, 1000 Torr (mm Hg) Accuracy 0.50% of Reading T emperature Coefficients Zero 0.004% Full Scale/°C (0.008% Full Scale/°C f or 1 Torr range) for 150°C and 160°C products Span 0.02% Reading/°C Response Time 50 msec Internal V olume 6.3 cm3 Input P ower +24 VDC or ±15 VDC, 1 amp at start up Output Signal Analog 0-10 VDC into >10 ohm load, EtherCAT warm up Time 4 hours or less Operating T emperature Range 15 to 50°C Ambient Airflo w Requirements 150°C and 160°C Models 50 ft/min f or ambient temperatures of 45 – 50°C Resolution 0.01% of Full Scale Overpressure l imit 45 psia Materials Exposed to Pr ocess Gases Inconel® and Incoloy® nickel alloys Trip Relays T wo (2) internally mounted process pressure trip relays, solid state, independently adjustable b y customer at atmospheric pressure from 0.5% to 100% of Full Scale range. Relay capacity of 0.20 amps @ 30 VDC. Comply with UL1577 requirements. Option also includes one (1) UL-appro ved solid state relay for heater failure, rated at 1.0 amps @ 30 VDC. Fittings Standard 0.50'' (12 mm) OD tube Optional Sw agelok® 8 VCR® female, 8 VCR male, NW16-KF , NW25-KF , Mini-CF Compliance CE Specifications

T CE S AA Ordering Inf ormation DA03A - 12/18 © 2017-2018 MKS Instruments, Inc. All rights reserved. Some Baratron® capacitance manometer products may not be exported to many end user countries without both US and local government export licenses under ECCN 2B230. Specifications are subject to change without notice. mksinst™ is a trademark and Baratron ® is a registered trademark of MKS Instruments, Inc., Andover, MA. Swagelok ® and VCR® are registered trademarks of Swagelok Co., Solon, OH. Inconel® and Incoloy® are registered trademarks of Inco Alloys International, Inc., Huntington, WV. UL® is a registered trademark of Underwriters Laboratories, Inc., Northbrook, IL. EtherCAT® is a registered trademark and patented technology, licensed by Beckhoff Automation GmbH, Germany. MKS Instruments, Inc. Global Headquar ters

2 Tech Drive, Suite 201

Andover, MA 01810 Tel: 978.645.5500 Web: www.mksinst.com MKS Instruments, Inc. Pr essure & Vacuum Measurement Solutions Six Shattuck Road Andover, MA 01810 Tel: 978.975.2350 B 1 For CE compliance, the mating electrical connector must be properly grounded. 2 Engineering requires input if the relays are energized above or below the set point for standard products. 3 Contact MKS Applications Engineering for sealing material recommendations. Model Code Configuration D D A03A Ranges 100 200 500 1000 Units of Measurement T orr T Mbar M P ascal L Fittings ½'' OD T ube BA

8 VCR F

8 VCR Male

S Etch ( ≤100 Torr) E P ower Supply Voltage ±15 VDC +24 VDC Sensor T emperature 150°C 160°C Electrical Connector

15 Pin D with Scre w Locks B

15 Pin D with Slide Loc

P Integral Rela ys No Rela ys 00 T rip Point A Above Set Point, Trip Point B Above Set Point3 AA T rip Point A Above Set Point, Trip Point B Below Set Point3 AB T rip Point A Below Set Point, Trip Point B Below Set Point3 BB T rip Point A Below Set Point, Trip Point B Above Set Point3 BA Reser ve Reser ve Calibration Orientation Ranges 1 Torr and Above Accurac y 0.50% Reading Standard 0.25% Reading E Other Options None At Temp LED and Trip Point Relay At Temp/Heater Fail Indicator