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WWW.MKSINST.COM TEMPERATURE-CONTROLLED ABSOLUTE B ARATRON® CAPACITANCE MANOMETER WITH ETHERCA T® COMMUNICATIONS For nearly 20 years, the MKS Baratron® capacitance manometers have led the industry in long-term performance, accuracy, reliability, and worldwide installed base. The DA02A Baratron capacitance manometer continues that progression of high performance into networked systems, using industry-standard EtherCAT digital communications to connect to complex process tools. Based on the proven 626C absolute analog and the 627E/628E Ethernet-equipped Baratron manometer products, the DA02A meets the current ETG.5003 Semiconductor Device Profile and is designed for use in advanced processing systems. It uses the exact same Inconel ®-based capacitance sensor as current MKS Baratron manometer products, and thus offers the same long lifetime, low maintenance, and high corrosion resistance as current analog Baratron capacitance manometers. Two (2) independent configurable solid state trip relays for pressure are available as an option to permit control for external components. It is available in four different operating temperatures (unheated, 45°, 80°, or 100°C), eleven different Full Scale measurement ranges from 0.1 to 1000 Torr (13.3 Pa to 133.3 kPa), and ten different connection fittings for use in nearly any application or process. Features & Benefits

  • Industr y-leading accuracy and repeatability Standard product includes both analog and EtherCA T communications Full Scale measurement r anges from 0.1 to 1000 Torr (13.3 Pa to 133.3 kPa) Inconel-based sensor off ers superior corrosion resistance to common process gases Pressure & Vacuum Measurement Solutions
  • Oper ating temperatures of unheated, 45°, 80°, or 100°C Excellent long-ter m stability P atented fluorine friendly etch baffle a vailable upon request DA02A

Dimensional Drawing — Note: Unless otherwise specified, dimensions are nominal values in inches (millimeters referenced).

Full Scale Ranges 0.1, 0.25, 1, 2, 10, 20, 50, 100, 200, 500, and 1000 Torr (and metric equivalents) Resolution1 0.001% Full Scale Operating Temperatures Unheated Models 0 to 50°C 45°C Models 15° to 40°C 80° and 100°C Models 15° to 50°C Accurac Unheated Models 0.50% of Reading f or ranges < 1 Torr; 0.25% of Reading for ranges ≥ 1 Torr 45°C Models 0.10% of Reading f or ranges ≥ 1 Torr; 0.15% Reading for ranges < 1 Torr 80° and 100°C Models 0.25% of Reading f or ranges ≥ 1 Torr; 0.50% of Reading for ranges < 1 Torr Temperature Coefficients Zero Unheated Models 0.005% Full Scale/°C f or 10 to 1000 Torr; 0.010% Full Scale/°C for 2 Torr; 0.015% Full Scale/°C f or 1 Torr; 0.020% Full Scale/°C for < 1 Torr 45°C Models 0.002% Full Scale/°C f or ranges ≥ 1 Torr; 0.005% Full Scale/°C for ranges < 1 Torr 80° and 100°C Models 0.002% Full Scale/°C f or ranges ≥ 1 Torr; 0.010% Full Scale/°C for ranges < 1 Torr Span Unheated Models 0.04% Reading/°C Heated Models 0.02% Reading/°C Materials Exposed to Pr ocess Gases Inconel® and Incoloy® nickel alloys Some optional fittings ma y be built from 300-series stainless steel. Internal Volume 6.3 cm3 Warmup Time 2 hours f or ranges ≥ 1 Torr; 4 hours for ranges < 1 Torr Overpressure Limit 45 psia (310 kP Input Power Required Unheated Models +24 VDC ±10% @ 300 mA or ±15 VDC @ 300 mA 45°C Models +24 VDC ±10% @ 600 mA or ±15 VDC @ 600 mA 80° and 100°C Models +24 VDC ±10% @ 800 mA or ±15 VDC @ 800 mA Output Signal Analog 0 – 10 VDC into > 10 kΩ load Digital EtherCA T Trip Relay Option T wo (2) internally mounted process pressure trip relays, solid state, independently adjustab le by customer at atmospheric pressure from 0.5% to 100% of Full Scale r ange. Relay capacity of 0.20 amps@ 30 VDC. Complies with UL1577 requirements. Electrical Connectors Analog 15-pin D-subminiature male EtherCA T T wo (2) RJ45 female receptacles for incoming and network signals External Indicators Multicolor status LED and tw o (2) red/green LEDs for EtherCAT communications status Connection Fittings Standard ½'' (12 mm) OD tube Optional 8 VCR® male or female, 8 VCO® female, NW16-KF , NW25-KF , and 1.33'' (34 mm) OD CF Compliance3 CE, ETG.5003.2080 Vacuum Pressure Gauge 1 Theoretical resolution under ideal laboratory conditions. Actual resolution in service is usually determined by system design factors not under MKS’s control. 2 Includes non-linear ity, hysteresis, and non-repeatability. 3 When connected to a proper ly shielded cable, grounded at both ends.

T Ordering Inf ormation DA02A - 12/18 © 2016-2018 MKS Instr uments, Inc. All rights reserved. Some Baratron® capacitance manometer products may not be exported to many end user countries without both US and local government export licenses under ECCN 2B230. Specifications are subject to change without notice. mksinst™ is a trademark and Baratron® is a registered trademark of MKS Instr uments, Inc., Andover, MA. Inconel® and Incoloy® are registered trademarks of Inco Alloys, Inc., Huntington, WV. EtherCA T® is a registered trademark and patented technology, licensed by Beckhoff Automation GmbH, Germany. VCR® and VCO® are registered trademarks of Swagelok Corporation, Solon, OH. SEMI ® is a registered trademark of SEMI, San Jose, CA. S DA02A C MKS Instruments, Inc. Global Headquar ters

2 Tech Drive, Suite 201

Andover, MA 01810 Tel: 978.645.5500 Web: www.mksinst.com MKS Instruments, Inc. Pr essure & Vacuum Measurement Solutions Six Shattuck Road Andover, MA 01810 Tel: 978.975.2350 AA D A02A Baratron Digital Capacitance Manometer D A02A Rang e 0.1 0.25 RE 100 200 500 1000 Units of Measurement T orr absolute T mbar absolute M kPa absolute K Fittings 1/2'' OD tube BA female VCR CE male VCR CF 8 f emale VCR, short tube CR KF16 GA KF25 GC

8 VCO® female D A

1.33'' OD CF HA Sensor T ype Standard sensor , standard inlet tube length S Etch sensor (r ange ≤ 100 Torr only), standard inlet tube length E Standard sensor , reduced inlet tube length T Etch sensor (r ange ≤ 100 Torr only), reduced inlet tube length H Input/Output V oltages +24 VDC or ±15 VDC input, 0-10 VDC analog output Sensor T emperatures Unheated 45°C 80°C 100°C Electrical Connector (2) RJ45 EtherCA T jacks with 15-pin D-subminiature connector C Calibration Orientation Standard (r anges ≥ 1 Torr) V ertical (ranges < 1 Torr only) V Hor izontal (ranges < 1 Torr only) H Accurac y Standard accuracy T rip Points None None T rip A above 50%, Trip B above 50% of Full Scale Range AA T rip A above 50%, Trip B below 50% of Full Scale Range AB T rip A below 50%, Trip B below 50% of Full Scale Range BB T rip A below 50%, Trip B above 50% of Full Scale Range BA