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WWW.MKSINST.COM DA01A TEMPERATURE-CONTROLLED ABSOLUTE B ARATRON® CAPACITANCE MANOMETER WITH DEVICENET™ COMMUNICATIONS The DA01A is a dual-output absolute vacuum transducer with both DeviceNet digital communications and legacy 0-10 VDC analog output signals. Available in four different oper ating temperatures for different applications, the DA01A uses an efficient microprocessor- based digital structure that provides exceptional stability and repeatability under demanding conditions such as semiconductor manufacturing equipment. The DA01A also uses the patented MKS all-welded Inconel ® diaphragm sensor, which has exceptionally high resistance to corrosion from common process chemicals. It is able to tolerate bursts of pressure to as much as 45 psia (310 kPa) without suffering physical damage or permanent calibration shifts. The DeviceNet communications and main power are fed through a bayonet-style 5-pin connector on the top of the product, and the analog output signal is available on the standard 9-pin D-subminiature electrical connector. The product is available in unheated, 45°C, 80°C, or 100°C versions in Full Scale pressure ranges from 1000 to 1 Torr (133 to 0.13 kPa) for the unheated models, and 1000 to 0.1 Torr (133 to 0.013 kPa) for the heated versions. Features & Benefits

  • Excellent long-ter m stability
  • Microprocessor-based electronics pro vide super ior accuracy and repeatability Full Scale r anges of 1000 to 1 Torr/mbar (unheated), 1000 to 0.1 Torr/mbar heated) 100% bac k-compatible with previous DMA and DMB products
  • Fully-w elded Inconel and Incoloy® sensor off ers extremely high corrosion resistance from common process gases Standard or etch sensors a vailable
  • High o verpressure specification of 45 psia (3 bar/310 kP a) prevents shifting or per manent calibration changes Pressure & Vacuum Measurement Solutions

Dimensional Drawing — Note: Unless otherwise specified, dimensions are nominal values in inches (millimeters referenced).

Full Scale Measurement Ranges 0.1 (heated models only), 0.25 (heated models only), 1, 2, 10, 20, 100, 200, 500, and 1000 T orr/mbar Resolution 0.001% Full Scale on digital output Operating T emperatures Unheated, 45°C , 80°C, and 100°C Accuracy (includes non-linearity, h ysteresis, and non-repeatability) Unheated Models (All) 0.25% Reading 45°C Models 0.12% Reading f or 1-1000 Torr/mbar, 0.15% Reading for < 1 Torr/mbar 80°C and 100°C Models 0.25% Reading f or 1-1000 Torr/mbar, 0.50% Reading for < 1 Torr/mbar Temperature Coefficients Zero Unheated Models 10 - 1000 Torr 0.005% Full Scale/°C, 2 Torr 0.010% Full Scale/°C, 1 Torr 0.015% Full Scale/°C Heated Models 1 to 1000 Torr 0.002% Full Scale/°C; 45°C < 1 Torr 0.005% Full Scale/°C; 80°C and 100°C < 1 Torr 0.010% Full Scale/°C Span Unheated Models 0.04% Reading/°C Heated Models 0.02% Reading/°C Materials Exposed to Pr ocess Gases Inconel and Incoloy nickel alloys (Some optional fittings are made from 300-ser ies stainless steel) Internal Sensor Volume 6.3 cm3 Overpressure Limit 45 psia (310 kP a) Fittings Standard Fitting ½'' (12.7 mm) O .D. tube standard Optional Fittings 4 and 8 f emale VCR®, 8 male VCR, 8 female VCO®, 1.33'' (33.7 mm) and 2.75'' (69.9 mm) O .D. CF , NW16-KF , and NW25-KF (NW -KF fittings may be ordered with standard-length inlet port or reduced-length inlet port) Digital Protocol De viceNet, Group 2 Digital Electrical Connector 5-pin sealed micro-style male ba yonet with anti-rotation device Data Rate/Network Length User-selectab le data rate: 125 kbps and 500 m (1,640 ft), 250 kbps and 250 m (820 ft), or 500 kbps and 100 m (328 ft) Le vel of Filtering Adjustab le via user software Digital Functions Read pressure , set digital trip points and hysteresis, select units (Torr, Pa, mbar, in H2O, psi), set z ero, reset factory defaults, monitor transducer trip point status, change user tags and de vice address Data Rate Switch 4 positions: 125, 250, 500, PGM (programmable via network) MAC ID Switches 2 s witches, 10 positions: 0,0 to 6,3 are hardware ID numbers; 7,0 to 9,9 are software ID n umbers; 6,4 to 6,9 are unused and if selected will default to hard ID number 6,3 Network Message Control Master/sla ve information flow Input Power Unheated Models 11 to 25 VDC @ ≤5 watts 45°C Models Oper ation with heater requires 18 to 25 VDC @ ≤15 watts 80°C and 100°C Models Oper ation with heater requires 18 to 25 VDC @ ≤25 watts Heated Models Can pro vide only network communications at <18 VDC (i.e . heater does not operate if input voltage is <18 VDC) Network Size 64 nodes maxim um Network Topology Linear (tr unkline/dropline) power and signal on same network cable Analog I/O 0 to 10 VDC into > 10KΩ load Output Connector 9-pin f emale D-subminiature Compliance CE Specifications

S T Ordering Inf ormation DA01A - 4/19 © 2015-2019 MKS Instruments, Inc. All rights reserved. Some Baratron® capacitance manometer products may not be exported to many countries without both US and local go vernment export licenses under ECCN 2B230. Specifications are subject to change without notice. mksinst™ is a trademark and i-Baratron® and Baratron® are registered trademarks of MKS Instruments, Inc., Andover, MA. DeviceNet™ and ODVA™ are trademarks of the Open DeviceNet Vendor Association, Coral Springs, FL. Inconel® and Incoloy® are registered trademarks of Inco Alloys International, Huntington, WV. VCR® and VCO® are registered trademarks of Swagelok Company, Solon, OH. A CE D A01A DeviceNet™ Capacitance Manometer D A01A Rang e 0.1 (heated models only) 0.25 (heated models only) RE 100 200 500 1000 Units of Measurement T orr absolute T mbar absolute M kPa absolute K Fittings ½'' OD tube BA 4 f emale VCR (ranges > 2 Torr only) (V sensor only) CD female VCR CE male VCR CF 8 f emale VCR, short inlet tube CR* KF16 GA KF25 GC KF16, short inlet tube GD VCO female D A 1.33'' OD CF HA 2.75'' OD CF HC Sensor T ype Standard sensor S Etch sensor (r ange ≤ 100 Torr) E ¼'' dia. tube (CD fitting only) V Shor t tube standard sensor T Analog Output Voltage 0-10 VDC Sensor T emperature Unheated 45°C 80°C 100°C Electrical Connector De viceNet 5-pin bayonet-style A with f emale 9-pin D-subminiature analog connector Calibration Orientation Standard (r anges ≥ 1 Torr) V ertical (standard for ranges < 1 Torr) V Hor izontal (available for ranges < 1 Torr only) H Accurac y Standard accuracy MKS Instruments, Inc. Global Headquar ters

2 Tech Drive, Suite 201

Andover, MA 01810 Tel: 978.645.5500 Web: www.mksinst.com MKS Instruments, Inc. Pr essure & Vacuum Measurement Solutions Six Shattuck Road Andover, MA 01810 Tel: 978.975.2350 * CR fitting can only be used with code T sensors.