AVSI100-06

AVSI100-06 AEROTECH | Alldatasheet

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Vertical Lift StagesAVS100/AVSI100 Series www.aerotech.com1www.aerotech.com AVS100/AVSI100 Series Mechanical-Bearing Screw-Driven Lift Stage Aerotech’s AVS100/AVSI100 series stages offer a solution for applications that require very small incremental movements in elevation above a horizontal plane. Low profiles and precise motion capability make these stages ideal for use in semiconductor wafer inspection and testing, fiberoptics assembly and inspection, automated tool alignment, machine vision inspection systems, and laser machining applications. The AVSI100 series stages provide identical performance to the AVS100 stages, but in an even smaller footprint. The AVSI100 integrates the motor directly with the drive screw with no motor coupling. This makes the stage significantly shorter in length. Quality Design Provides Superior Performance The AVS100/AVSI100 series provides precise elevation of a load in a vertical plane. Rotational movement of a precision-ground ballscrew is converted into vertical elevation of the AVS100/AVSI100 series tabletop. Sealed linear motion guide bearings with integral wipers are incorporated to provide excellent payload capability, long life, and smooth, precision motion. Stable and parallel vertical motion with no rocking or horizontal deviation of the platform is ensured. Careful mechanical design allows the AVS100/AVSI100 series to achieve submicron resolution and still maintain a compact profile. The optional HALAR factory calibration option is available to further increase standard accuracy and repeatability. Long-life linear guide bearing system Submicron closed-loop positioning Low-cost, high-performance stage 6, 13, and 25 mm travel models Precision-ground ball screw Integral or removable motor A Better Approach to Vertical Motion The vertical lift approach offers an alternative to traditional Z-plane oriented stages. Not only do the AVS100/AVSI100 series stages offer a lower profile, but the load can also be accessed easily from any side. And by centering the payload over the bearings, there are no cantilevering effects. The AVS100/AVSI100 series stages provide a space-saving alternative to traditional XYZ systems and are equally suited to laboratory and industrial applications. Optional stage finishes are available for various environments, including vacuum preparation. Additional Standard Features All AVS100/AVSI100 series stages are equipped standard with integral limit switches and mechanical hard stops. The stage tabletop is treated with a Teflon®-impregnated hardcoat (Rockwell 62 hardness) that is scratch-resistant and provides outstanding protection in the harshest environments. The stage itself has a black anodize finish. Motor and Drives The AVS100/AVSI100 series includes Aerotech’s high performance NEMA 23 frame-size BMS series brushless, slotless servomotor. The slotless motor has zero cogging and therefore is optimized for applications requiring very smooth motion. Aerotech manufactures a wide range of matching drives and controls to provide a fully integrated and optimized motion solution.

AVS100/AVSI100 Series Vertical Lift Stages www.aerotech.com AVS100/AVSI100 Series Vertical Lift Stages AVS100/AVSI100 Series SPECIFICATIONS ledoMcisaB AVS100-06/AVSI100-06 AVS100-13 / AVSI100-13AVS100-06 / AVSI100-25 levarT mmm6m 3m1m 52 metsySevirD rotomovreSsselhsurB/wercSllaBnoisicerP egatloVsuB CDV061otpU tnerruCsuounitnoC A kp A3.2 A smr A6.1 noituloseR with 1000-line TTL encoder noituloserrotomver/spets0004@mµ35.0 with 1000-line 1 Vpp encoder mµ601.0-mn3.5 with 2500-line TTL encoder noituloserrotomver/spets000,01@mµ2.0 deepSlevarTmumixaM s/mm05 daeLevitceffE ver/mm21.2 daoLmumixaM )1( gk0.52 ycaruccA Uncalibrated mµ5.1±m µ0.3±m µ0.5± Calibrated(2) mµ0.1± ytilibataepeR )lanoitceridiB( Uncalibrated mµ0.1± Calibrated(2) mµ57.0± ssentalFdnassenthgiartS )noitaiveDmumixaM( mµ5.1±m µ0.3±m µ0.5± lloRdnahctiP cescra5c±e scra5.7c±e scra01± )rotoMhtiW(thgieWegatSlanimoN gk1.4g k1.6g k5.01 noitcurtsnoC elbaTtaocdraH/ezidonAkcalB/munimulA :setoN .egatsseiresSVAehtnorotomregralhtiwelbissopdaolrehgiH.1 .rellortnochcetoreAseriuqeR.2 sixa-itlumrofyrotcaftlusnoC.tnednepedtniopkrowdnadaolyapsismetsyssixa-itlumfoecnamrofreP.potelbatehtevobamm05derusaem,smetsyssixa-elgnisroferasnoitacificepS.3 .snoitacilppadradnats-nonro .yrotcaftlusnoc,noitarepodetrevniroF.4 AVS100-13/AVSI100-13 AVS100-25/AVSI100-25

Vertical Lift StagesAVS100/AVSI100 Series www.aerotech.com AVS100-06/AVSI100-06 DIMENSIONS 4X C'BORES FOR M6 OR 1/4-20 CUSTOMER MOUNTING HOLES 9X M6X1.0 10

25 TYP

50.8

150.8 MOTOR LENGTH

74.2 75.2 76.2 51.8 CL CL 75.2 MIDDLE OF TRAVEL 57.8 59.4 68.7 82.4 31.8 6.2 C'BORE HEIGHT 3 (1/2 NOMINAL TRAVEL) 3.2 (1/2 ELECTRICAL TRAVEL) 3.8 (1/2 MECHANICAL TRAVEL) CL 105 128.5 125 47.1 5.5 4X M4X0.7 MOTOR MOUNTING NEMA 23 FRAME CL DIMENSIONS: MILLIMETERS MOTOR OPTIONS LENGTH -M9 110.9 AVS100-06 125 127

6 TRAVEL

77.2 BRAKE OPTION 141.9 140.9 76.2 24.4 24.9 REVISIONS ECN REV. DESCRIPTION DATE APPROVED

17967 A UPDATED TO THE CURRENT CATALOG

DRAWING TEMPLATE 12/14/2016 SMARCKS PLACE DRAWING VIEWS BELOW REV MODEL BY: A MODEL FILENAME: APPR. AVSI100-06 CATALOG MODEL SMARCKS AVSI100-06-CAT PART NAME: DWG. NO. AVSI100-06 SHEET 1 OF 1 PART CODE: 14-DEC-16 AVSI100-06 MSHOUPE 14-DEC-16 DRAW SMARCKS NAME CHECK DATE 14-DEC-16

7.0 THRU

(4 PLACES) 275.8 (9 PLACES) M6X1 X 10 DP 64.4 216.2 147 NEMA 23 MOTOR 105 125 72.3 128.8 AVSI100-06

AVS100/AVSI100 Series Vertical Lift Stages www.aerotech.com AVS100/AVSI100 Series Vertical Lift Stages AVS100-13/AVSI100-13 DIMENSIONS 4X C'BORES FOR M6 OR 1/4-20 CUSTOMER MOUNTING HOLES 9X M6X1.0 10 60.7

166 MOTOR LENGTH

89.3 90.3

50 TYP

62.1 76.2 CL CL 80.1 MIDDLE OF TRAVEL 67.7 69.3 83.9 97.5 31.8 6.2 C'BORE HEIGHT 110 6.5 (1/2 NOMINAL TRAVEL) 7 (1/2 ELECTRICAL TRAVEL) 7.6 (1/2 MECHANICAL TRAVEL) CL 130 153.5 150 47.1 5.5 4X M4X0.7 MOTOR MOUNTING NEMA 23 FRAME CL DIMENSIONS: MILLIMETERS MOTOR OPTIONS LENGTH -M9 110.9 AVS100-13 150 152.4

13 TRAVEL

77.2 BRAKE OPTION 141.9 140.7 76.6 76.236.9 37.5 (4 PLACES) 300.8 231.2 147 PLACE DRAWING VIEWS BELOW DRAW 14-DEC-16 MODEL BY: SMARCKS APPR. MODEL FILENAME: AVSI100-13 AVSI100-13 AAVSI100-13-CAT PART NAME: DWG. NO. PART CODE: CATALOG MODEL REV 14-DEC-16 AVSI100-13 MSHOUPE SHEET 1 OF 1 DATE SMARCKS NAME CHECK 14-DEC-16 REVISIONS ECN REV. DESCRIPTION DATE APPROVED

17968 A UPDATED TO THE CURRENT CATALOG

DRAWING TEMPLATE 12/14/2016 SMARCKS NEMA 23 MOTOR 130 73.6 150 153.8 AVSI100-13

Vertical Lift StagesAVS100/AVSI100 Series www.aerotech.com 100 4X C'BORES FOR M6 OR 1/4-20 CUSTOMER MOUNTING HOLES 75.6

200.9 MOTOR LENGTH

124.4 125.4 11X M6X1.0 10 101.6 77.8 CL CL 101.3 MIDDLE OF TRAVEL 87.6 89.2 118.8 132.6 31.8 6.2 C'BORE HEIGHT 150 12.5 (1/2 NOMINAL TRAVEL) 13 (1/2 ELECTRICAL TRAVEL) 13.6 (1/2 MECHANICAL TRAVEL) CL 175 203.3 200 47.1 5.5 4X M4X0.7 MOTOR MOUNTING NEMA 23 FRAME CL DIMENSIONS: MILLIMETERS MOTOR OPTIONS LENGTH -M9 110.9 AVS100-25 AVS100-25/AVSI100-25 DIMENSIONS 200 203.3

25 TRAVEL

77.2 BRAKE OPTION 150 144.3 142.7 100 101.6 49.2 100 SQ. 50 SQ. 100.7 PLACE DRAWING VIEWS BELOW SHEET 1 OF 1 AVSI100-25 MODEL BY: A SMARCKS REV AVSI100-25 CATALOG MODEL DATE AVSI100-25-CAT PART NAME: DWG. NO. MODEL FILENAME: DRAW PART CODE: 14-DEC-16 AVSI100-25 MSHOUPE APPR. 14-DEC-16SMARCKS NAME CHECK 14-DEC-16 REVISIONS ECN REV. DESCRIPTION DATE APPROVED

17969 A UPDATED TO THE CURRENT CATALOG

DRAWING TEMPLATE 12/14/2016 SMARCKS (4 PLACES) 358.3 NEMA 23 MOTOR 200 175 88.7 203.8 269.2 149.5 AVSI100-25

AVS100/AVSI100 Series Vertical Lift Stages www.aerotech.com AVS100/AVSI100 Series Vertical Lift Stages Travel (Required) -06 6 mm Travel -13 13 mm Travel -25 25 mm Travel Motor (Optional) -M1 BMS60 Servo Motor with 2500-Line TTL Encoder -M2 BMS60 Servo Motor with 2500-Line TTL Encoder and Holding Brake -M3 BMS60 Servo Motor with 1000-Line 1 Vpp Encoder -M4 BMS60 Servo Motor with 1000-Line 1 Vpp Encoder and Holding Brake -M5 BM75 Servo Motor with 2500-Line TTL Encoder -M6 BM75 Servo Motor with 2500-Line TTL Encoder and Holding Brake -M7 BM75 Servo Motor with 1000-Line 1 Vpp Encoder -M8 BM75 Servo Motor with 1000-Line 1 Vpp Encoder and Holding Brake -M9 SM60 High-Voltage Stepper Motor Foldback (Optional) -FB1 Motor Foldback Kit for .250 Inch Diameter Shaft -FB2 Motor Foldback Kit with Brake for .250 Inch Diameter Shaft Motor Orientation (Optional) -2 Bottom Cable Exit -3 Left-Side Cable Exit (Standard) -4 Top Cable Exit -5 Right-Side Cable Exit -8 Right-Side Foldback -12 Left-Side Foldback Limits (Required) -LI1 Normally-Closed Limit Switches, 9-Pin D Connector -LI2 Normally-Closed Limit Switches, Flying Leads -LI3 Normally-Open Limit Switches, 9-Pin D Connector -LI4 Normally-Open Limit Switches, Flying Leads Coupling (Optional) -CP1 Coupling for 0.250 Inch Diameter Shaft -CP2 Coupling for 0.375 Inch Diameter Shaft Metrology (Required) -PL1 Metrology, Uncalibrated with Performance Plots -PL2 Metrology, Calibrated (HALAR) with Performance Plots Integration (Required) Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required, or if you desire custom integration support with your system. AVS100 Series ORDERING INFORMATION -TAS Integration - Test as system Testing, integration, and documentation of a group of components as a complete system that will be used together (ex: drive, controller, and stage). This includes parameter file generation, system tuning, and documentation of the system configuration. -TAC Integration - Test as components Testing and integration of individual items as discrete components. This is typically used for spare parts, replacement parts, or items that will not be used or shipped together (ex: stage only). These components may or may not be part of a larger system.

Vertical Lift StagesAVS100/AVSI100 Series www.aerotech.com AVSI100 Series ORDERING INFORMATION Travel (Required) -06 6 mm Travel -13 13 mm Travel -25 25 mm Travel Motor (Optional) -M1 BMS60 Servo Motor with 2500-Line TTL Encoder -M2 BMS60 Servo Motor with 2500-Line TTL Encoder and Holding Brake -M3 BMS60 Servo Motor with 1000-Line 1 Vpp Encoder -M4 BMS60 Servo Motor with 1000-Line 1 Vpp Encoder and Holding Brake Motor Orientation (Optional) -3 Left-Side Cable Exit (Standard) -5 Right-Side Cable Exit Limits (Required) -LI1 Normally-Closed Limit Switches -LI3 Normally-Open Limit Switches Metrology (Required) -PL1 Metrology, Uncalibrated with Performance Plots -PL2 Metrology, Calibrated (HALAR) with Performance Plots Integration (Required) Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required, or if you desire custom integration support with your system. -TAS Integration - Test as system Testing, integration, and documentation of a group of components as a complete system that will be used together (ex: drive, controller, and stage). This includes parameter file generation, system tuning, and documentation of the system configuration. -TAC Integration - Test as components Testing and integration of individual items as discrete components. This is typically used for spare parts, replacement parts, or items that will not be used or shipped together (ex: stage only). These components may or may not be part of a larger system.