AVF75-400 AEROTECH | Alldatasheet
Document overview
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Technical content
KEY FEATURES: 400 um closed-loop travel OUTSTANDING STEP- AND-SETTLE and scanning performance Designed for USE WITH LARGER, HIGH-NA OBJECTIVES SUPERIOR POSITIONING RESOLUTION and linearity MOUNTING FLEXIBILITY 29 mm diameter clear aperture Precision Design for Ultimate Performance The AVF75 Voice Coil Driven Objective Focuser enables microscope objective and optics positioning at a large travel without sacrificing speed or nanometer-level performance. Designed to accommodate optical instruments and next-generation laser micromachining applications, the AVF75 is ideal for demanding optical positioning applications that require high precision, high throughput and long travels. Key Applications The AVF75 is ideal for many applications, including: Microscopy Biotechnology Medical device manufacturing Laser processing Semiconductor / wafer inspection
aerotech.com Mechanical Specifications AVF75-400 Travel(1) 400 µm Resolution (Min. Incremental Motion)(2) 5 nm Accuracy(3) ±100 nm Bidirectional Repeatability(3) ±50 nm Pitch 30 urad (6 arc sec) Yaw 30 urad (6 arc sec) Straightness (X,Y) 100 nm Max Payload(4) 0.3 kg Moving Mass(5) 1.1 kg Stage Mass(5) 1.7 kg Material Anodized Aluminum AVF75 SPECIFICATIONS Notes: 1. Other travels available - consult factory. 2. Drive dependent - consult factory. 3. Certified with each stage. 4. On-axis loading listed. Higher load designs available - consult factory. 5. Mass assumes 0.3 kg payload.
aerotech.com AVF75 ORDERING OPTIONS Travel (Required) -400 400 µm closed-loop travel Objective Adapter (Optional) -OA1 W0.8 X 1/36” objective adapter -OA2 M19 X 0.75 objective adapter -OA3 M25 X 0.75 objective adapter -OA4 M26 X 0.75 objective adapter -OA5 M27 X 0.75 objective adapter -OA6 M28 X 0.75 objective adapter -OA7 M32 X 0.75 objective adapter -OA8 M26 X 1/36” objective adapter Integration (Required) Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required or if you desire custom integration support with your system. -TAS Integration - Test as system Testing, integration and documentation of a group of components as a complete system that will be used together (ex: drive, controller and stage). This includes parameter file generation, system tuning and documentation of the system configuration. -TAC Integration - Test as components Testing and integration of individual items as discrete components. This is typically used for spare parts, replacement parts or items that will not be used or shipped together (ex: stage only). These components may or may not be part of a larger system.
aerotech.com 7.5 80 70 62.5 4X M4 COUNTERBORE STAGE MOUNTING 5 MOTOR/FEEDBACK A 6.3 28 32 4.5 8 54.6 20.5 (OBJECTIVE ADAPTER INTERNAL THREAD) 75 12.2 105 53 60 (OBJECTIVE MAX DIAMETER) DIMENSIONS: MILLIMETERS * CARRIAGE THREAD SIZE WITH ADAPTER REMOVED REVISIONS ECO REV. DESCRIPTION DATE APPROVED BASIC MODEL A AVF75-XXX M19X0.75 M25X0.75 M26X0.75 M27X0.75 M28X0.75 M32X0.75 M26X1/36" W0.8X1/36" *M36X0.75 ACASSIADORO MODEL BY: MODEL FILENAME: AVF75 AVF75 PART CODE: CATALOG DRAWING AVF75-CAT PART NAME: DWG. NO. REV AVF75 SHEET 1 OF 1 30-SEP-24 DATE GMATHEWS DRAW ACASSIADORO ACASSIADORO NAME CHECK APPR. 01-OCT-24 30-SEP-24 PLACE DRAWING VIEWS BELOWAVF75 DIMENSIONS