ATS100-050

ATS100-050 AEROTECH | Alldatasheet

Document overview

• Manufacturer or author: Provided By alldatasheet.com(free datasheet download site)
• PDF pages: 7

Technical content

Robust Performance in a Compact Design ATS100 stages provide excellent stiffness and long-term stability, thanks to a box-style design that features a precision-ground ballscrew and linear motion guide bearings. The compact design makes it easy to integrate ATS100 stages in confined spaces such as gantry bridges, machine enclosures and vacuum chambers. Driven by a selection of brushless rotary motors with integral feedback encoders, ATS100 stages will equip your process with smooth, ultra-precise motion performance. Plus, ATS100 stages contain features to protect against the effects of contamination, ensuring a long lifetime of highly reliable operation. Key Applications ATS100 stages are ideal for a variety of precision industrial and laboratory applications, including: ‹ Measurement, inspection & microscopy ‹ Semiconductor wafer testing & fabrication ‹ Laser microprocessing ‹ Precision dispensing ‹ Optics manipulation & processing ‹ Advanced manufacturing & precision micromachining ‹ Gantry Z-axis applications KEY FEATURES: Screw-Driven Linear Stages ATS100 ‹ Delivers submicron positioning accuracy & BIDIRECTIONAL REPEATABILITY TO 0.3 µm ‹ Integrates easily thanks to LOW- PROFILE, COMPACT FORM FACTOR ‹ Provides EXCEPTIONAL STIFFNESS & STABILITY ‹ PROTECTS AGAINST CONTAMINATION with integral bellows waycover ‹ Supports TRAVEL LENGTHS UP TO 200 mm ‹ Available in VACUUM-COMPATIBLE configurations

aerotech.com ATS100 SPECIFICATIONS Notes: 1. Excessive duty cycle may impact stage accuracy. 2. Payload specifications are for single axis systems and based on ball screw and bearing life of 2500 km of travel. 3. Available with Aerotech controllers. 4. Specifications are for single-axis systems, measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications. Base Model ATS100-050 ATS100-100 ATS100-150 ATS100-200 Total Travel 50 mm 100 mm 150 mm 200 mm Maximum Travel Speed(1) 100 mm/s Maximum Load(2) Horizontal 25.0 kg Vertical 10.0 kg Side 10.0 kg Accuracy Calibrated(3) ±0.5 µm ±0.5 µm ±0.75 µm ±1.0 µm Standard ±8 µm ±9 µm ±9 µm ±10 µm Repeatability (Bidirectional) Calibrated(3) ±0.3 µm Standard ±0.7 µm Straightness and Flatness ±1.0 µm ±2.0 µm ±2.0 µm ±3.0 µm Pitch and Yaw 5 arc sec 8 arc sec 10 arc sec 12 arc sec Nominal Stage Weight Less Motor 1.6 kg 1.8 kg 1.9 kg 2.1 kg With Motor 2.7 kg 2.9 kg 3.0 kg 3.2 kg Construction Aluminum Body/Stage and Table; Clear Anodize Finish ATS100 Cantilevered Load Capability ATS100s shown in XY configuration. Precision alignment options are available.

aerotech.com ATS100 ORDERING OPTIONS Travel (Required) -050 50 mm -100 100 mm -150 150 mm -200 200 mm Vacuum Preparation (Optional) -HV High vacuum preparation to 10-6 Torr Tabletop (Required) -TT1 Tabletop with metric dimension mounting pattern and holes -TT2 Tabletop with English dimension mounting pattern and holes Motor (Optional) -M1 BMS60 servomotor w/2500-line TTL encoder -M2 BMS60 servomotor w/2500-line TTL encoder and holding brake -M3 BMS60 servomotor w/1000-line 1 Vpp encoder -M4 BMS60 servomotor w/1000-line 1 Vpp encoder and holding brake -M5 BM75 servomotor w/2500-line TTL encoder -M6 BM75 servomotor w/2500-line TTL encoder and holding brake -M7 BM75 servomotor w/1000-line 1 Vpp encoder -M8 BM75 servomotor w/1000-line 1 Vpp encoder and holding brake -M9 SM60 stepper motor, SM60-CN1-VT2 -M10 SM60 stepper motor w/holding brake, SM60-CN1-VT2-BK Foldback (Optional) -FB1 Foldback kit for .250 inch diameter shaft NEMA 23 motor -FB2 Foldback kit w/brake for .250 inch diameter shaft NEMA 23 motor Motor Orientation (Optional) -2 Bottom cable exit, optional orientation -3 Left-side cable exit, standard orientation -4 Top cable exit, optional orientation -5 Right-side cable exit, optional orientation -8 Right-side foldback, standard orientation -12 Left-side foldback, optional orientation Limits (Required) -LI1 Normally-closed limit switches, 9-pin D connector -LI2 Normally-closed limit switches, flying leads -LI3 Normally-open limit switches, 9-pin D connector -LI4 Normally-open limit switches, flying leads

aerotech.com ATS100 ORDERING OPTIONS Coupling (Optional) -CP1 Coupling for 0.250 inch diameter shaft -CP2 Coupling for 0.375 inch diameter shaft Mounting Plate (Optional) -MP1 Mounting plate, metric -MP2 Mounting plate, English Metrology (Optional) -PL1 Metrology, uncalibrated with performance plots -PL2 Metrology, calibrated (HALAR) with performance plots Integration (Required) Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required, or if you desire custom integration support with your system. -TAS Integration - Test as system Testing, integration, and documentation of a group of components as a complete system that will be used together (ex: drive, controller, and stage). This includes parameter file generation, system tuning, and documentation of the system configuration. -TAC Integration - Test as components Testing and integration of individual items as discrete components that ship together. This is typically used for spare parts, replacement parts, or items that will not be used together. These components may or may not be part of a larger system. Accessories (to be ordered as a separate line item) ALIGN-NPA Non-precision XY assembly ALIGN-NPAZ Non-precision XZ or YZ assembly ALIGN-PA10 XY assembly; 10 arc sec orthogonality. Alignment to within 7 microns orthogonality for short travel stages. ALIGN-PA10Z XZ or YZ assembly with L-bracket; 10 arc second orthogonality. Alignment to within 10 microns orthogonality for short travel stages. ALIGN-PA5 XY assembly; 5 arc sec orthogonality. Alignment to within 3 microns orthogonality for short travel stages. ALIGN-PA5Z XZ or YZ assembly with L-bracket; 5 arc second orthogonality. Alignment to within 5 microns orthogonality for short travel stages. HDZ1 English right angle L-bracket; for ATS100-050 and ATS100-100 only HDZ1L English right angle L-bracket; for ATS100-150 and ATS100-200 only HDZ1M Metric right angle L-bracket; for ATS100-050 and ATS100-100 only HDZ1LM Metric right angle L-bracket; for ATS100-150 and ATS100-200 only

aerotech.com 38.9 36.4 MOTOR LENGTH "D" "A" STAGE LENGTH 2.8 101.6 7.0 "E" "F" OPTIONAL -M2 MOTOR SHOWN 199.9 FOLDBACK LENGTH -FB1 32.3 -FB2 70.4 101.6 OPTIONAL FOLDBACK -12 ORIENTATION SHOWN 63.5 82.5 50.0 50.8 STAGE MOUNTING HOLES 6.8 THRU 11.1 TO DEPTH SHOWN "C" "B" 4X M5X0.8 6.4 63.5 50.0 50.8 75 [76.2] 41.3 50 [50.8] 11X M6X1.0 [1/4-20] 8 2X 12.7 THRU ACCESS FOR STAGE MOUNTING 4X 8-32 UNC 8.3 TABLE TOP -TT1 [-TT2] DIMENSIONS: MILLIMETERS. REVISIONS ECN ZONE REV. DESCRIPTION DATE APPROVED BASIC MODEL NOMINAL TRAVEL ELEC LIMIT TRAVEL MECH LIMIT TRAVEL A B C ATS100-050 50 52.8 56.8 218.4 113.4 - ATS100-100 100 103.6 107.6 269.2 138.8 - MOTOR OPTION D E F -M9 110.9 64.1 - -M10 111.9 67.8 - JSTAHR MODEL BY: MODEL FILENAME: ATS100 ATS100 PART CODE: ASSEMBLY ATS100-CAT PART NAME: DWG. NO. REV ATS100 SHEET 1 OF 1 22-MAY-19 DATE BMIKLANCIE DRAW JSTAHR JSTAHR NAME CHECK APPR. 22-MAY-19 21-MAY-19 PLACE DRAWING VIEWS BELOW ATS100 SERIES DIMENSIONS

aerotech.com 50.0 [2.00] 100.0 [3.94] 12.5 [0.50] Typ 14.2 [0.56] 12.5 [0.47] 23.9 [0.94] 58.7 [2.31] A 1.5 [0.06] 1.5 [0.06] 25.0 [0.97] 50.0 [2.00] 36.5 [1.44] 75.0 [3.00] 12.5 [0.47] 31.8 [1.25] 50.0 [2.00] 25.0 [0.97] Ø3.0 [Ø0.15] Thru

2 Holes

18.8 [0.74] Dimensions - Millimeters [Inches] HDZ1L Model HDZ1 32303.3 [11.94] 241.3 [9.50] 1.39 [3.05] B For Basic Recommended ATS100-50 thru ATS100-100 ATS100-150 thru ATS100-200 kg [lb] Weight 1.49 [3.28] M6 x 1 Thd Thru 1/4-20 Thd Thru (B) Holes 25.0 [0.97] Ø6.6 [Ø0.28] Thru

8 Mounting Holes

50.0 [2.00] 100.0 [3.94] 12.5 [0.50] Typ 14.2 [0.56] 12.5 [0.47] 23.9 [0.94] 58.7 [2.31] A 1.5 [0.06] 1.5 [0.06] 25.0 [0.97] 50.0 [2.00] 36.5 [1.44] 75.0 [3.00] 12.5 [0.47] 31.8 [1.25] 50.0 [2.00] 25.0 [0.97] Ø3.0 [Ø0.15] Thru 18.8 [0.74] Dimensions - Millimeters [Inches] HDZ1L Model HDZ1 32303.3 [11.94] 241.3 [9.50] 1.39 [3.05] B For Basic Recommended ATS100-50 thru ATS100-100 ATS100-150 thru ATS100-200 kg [lb] Weight 1.49 [3.28] M6 x 1 Thd Thru 1/4-20 Thd Thru (B) Holes 25.0 [0.97] Ø6.6 [Ø0.28] Thru

8 Mounting HolesATS100 SERIES — HDZ1 BRACKET AND MP100 DIMENSIONS

aerotech.com 127 50 [50.8] 150 100 [101.6] 177.8 4X 6.6 [7.1] THRU 8X M6X1.0 [1/4-20 UNC] HELICOIL 10 [10.7] MOUNTING PLATE -MP1 [-MP2] 19.1 82.6 63.5 4X 5.6 THRU 8.6 7.9 DIMENSIONS: MILLIMETERS REVISIONS MCN REV. DESCRIPTION DATE APPROVED JSTAHR MODEL BY: MODEL FILENAME: MP-ATS100 MPX-ATS100 PART CODE: SUBASSEMBLY MOUNTING PLATE MP-ATS100-CAT PART NAME: DWG. NO. REV ATS100 SERIES SHEET 1 OF 1 22-MAY-19 DATE BMIKLANCIE DRAW JSTAHR JSTAHR NAME CHECK APPR. 22-MAY-19 21-MAY-19 PLACE DRAWING VIEWS BELOW 127 50 [50.8] 150 100 [101.6] 177.8 4X 6.6 [7.1] THRU 8X M6X1.0 [1/4-20 UNC] HELICOIL 10 [10.7] MOUNTING PLATE -MP1 [-MP2] 19.1 82.6 63.5 4X 5.6 THRU 8.6 7.9 DIMENSIONS: MILLIMETERS REVISIONS MCN REV. DESCRIPTION DATE APPROVED JSTAHR MODEL BY: MODEL FILENAME: MP-ATS100 MPX-ATS100 PART CODE: SUBASSEMBLY MOUNTING PLATE MP-ATS100-CAT PART NAME: DWG. NO. REV ATS100 SERIES SHEET 1 OF 1 22-MAY-19 DATE BMIKLANCIE DRAW JSTAHR JSTAHR NAME CHECK APPR. 22-MAY-19 21-MAY-19 PLACE DRAWING VIEWS BELOW ATS100 SERIES — HDZ1 BRACKET AND MP100 DIMENSIONS MP100