ANT95L-025 AEROTECH | Alldatasheet

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KEY FEATURES: Achieve Superior Nanometer- Scale Motion ANT95L linear stages are the leading solution for addressing your nanometer-level motion and positioning needs. Available in a variety of configurations, they are best-in-class in combining resolution, accuracy, repeatability, size and reliability. Plus, with impressive dynamic capabilities and an enhanced load-carrying capacity, ANT95L stages are an excellent choice to amplify your process. Key Applications ANT95L stages are ideal for high-precision and high- dynamic positioning applications, including: ‹ Photonics assembly and inspection ‹ Fiber alignment and optimization ‹ Optics manufacturing, testing and inspection ‹ Sensor testing and qualification ‹ Semiconductor processing and inspection ‹ Research and laboratory applications ‹ Delivers NANOMETER-LEVEL POSITIONING PERFORMANCE over travel lengths up to 100 mm ‹ Achieves MINIMUM INCREMENTAL MOTION TO 0.5 nm ‹ Features high-precision crossed-roller bearings for EXCELLENT DYNAMIC PERFORMANCE & GENEROUS LOAD CAPACITY ‹ OPTIMIZES PROCESS THROUGHPUT & MAXIMIZES RELIABILITY with ironless direct- drive linear motor ‹ Integrates easily into MULTI-AXIS ASSEMBLIES & motion subsystems ‹ ABSOLUTE and ULTRA-HIGH RESOLUTION incremental encoder options are available

aerotech.com ANT95L SERIES SPECIFICATIONS Notes: 1. Certified with each stage. 2. In-position stability is reported as 3-sigma value. Requires a 1 Vpp encoder. 3. Payload specifications assume payload is centered on-axis. 4. Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of combined multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications. 5. PLUS requires the use of an Aerotech controller. 6. To ensure the achievement and repeatability of specifications over an extended period of time, environmental temperature must be controlled to within 0.25°C per 24 hours. Consult factory for more information. A N T95L-025Mechanical Specifications A N T95L-050 25 mm 50 mm Accuracy(1) Travel ±2.5 µm ±175 nm (-E4) Resolution (Minimum Incremental Motion) ±75 nm Repeatability (Bidirectional) (1) 1 nm (-E1) 5 nm (-E3) 0.5 nm (-E4) Straightness(1) ±1.0 µm Flatness(1) ±1.0 µm Pitch 10 arc sec Roll Yaw Maximum Speed Maximum Acceleration 5 g (No Load) 4 g Speed Stability Settling Time In-Position Stability(2) <1 nm (-E1) <5 nm (-E3) <0.5 nm (-E4) Load Capacity(3) Horizontal 5 kg Side Moving Mass 0.45 kg 0.63 kg Stage Mass 0.96 kg 1.36 kg Material MTBF (Mean Time Between Failure) Base Performance (-PL1) Plus Performance (-PL2) A N T95L-100 100 mm ±200 nm (-E4) ±5.0 µm ±2.5 µm 10 arc sec 5 arc sec 500 mm/s (-E1, -E3, -E4) 145 mm/s (-E2) 3 g See graph for typical performance See graph for typical performance 7 kg 5 kg 0.95 kg 2.03 kg Anodized Aluminum 30,000 Hours ±2.5 µm A N T95L-025 A N T95L-050 A N T95L-100Electrical Specifications Brushless Linear Servomotor ±40 VDC

5 V, Normally Closed

1 Vpp with 20 µm signal period (-E1)

Digital RS422 with 5 nm electrical resolution (-E2) BiSS-C absolute + incremental 1 Vpp linear dual-track encoder (-E3)

1 Vpp with 4 µm signal period (-E4)

aerotech.com ANT95L SERIES ORDERING INFORMATION Travel (Required) -025 25 mm travel -050 50 mm travel -100 100 mm travel Other travel options are available upon request. Contact Aerotech for more information. Feedback (Required) -E1 Incremental linear encoder, 1 Vpp amplified sine output -E2 Incremental linear encoder, digital RS422 output, 5 nm electrical resolution -E3 Absolute + Incremental 1 Vpp linear dual-track encoder -E4 Incremental linear encoder, 1 Vpp amplified sine output, high-performance Mounting Plate (Optional) -MP Mounting plate Performance Grade (Required) -PL1 Base performance -PL2 High-accuracy performance, PLUS Integration (Required) Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required, or if you desire custom integration support with your system. -TAS Integration - Test as system Testing, integration, and documentation of a group of components as a complete system that will be used together (ex: drive, controller, and stage). This includes parameter file generation, system tuning, and documentation of the system configuration. -TAC Integration - Test as components Testing and integration of individual items as discrete components that ship together. This is typically used for spare parts, replacement parts, or items that will not be used together. These components may or may not be part of a larger system. 0 2 4 6 8 10 12 14 16 18 20 22 Time (s) 0.0 0.5 1.0 1.5 2.0 2.5 3.0 3.5 4.0 4.5 5.0 5.5 Displacement (nm) ANT95L-025-PL2 0.5 nm step plot. Best-in-class resolution and exceptional in-position stability for large-travel stages.

aerotech.com ANT95L SERIES SPECIFICATIONS ANT95L SERIES PERFORMANCE 20 15 10 5 0 5 10 15 20 99.75 99.8 99.85 99.9 99.95 100 100.05 100.1 100.15 100.2 100.25 Position (mm) Velocity (mm/s) ANT95L-050-PL2 velocity performance at 100 mm/s and 1 kg payload. Excellent speed stability is another feature of the ANT series stages. 0 100 200 300 400 500 600 700 800 100 100 Move Time (ms) Position Error (nm) 178 ms Move and Settle Step Size: 50 mm Speed: 500 mm/s Settle Spec: 20 nm ANT95L-050-PL2 step and settle performance at full travel and 1 kg payload. Outstanding settling time enhances throughput of most applications. 20 10 0 10 20 Position (mm) Yaw (arc-sec) ANT95L-050-PL2 yaw, five runs, bi-directional. Highly repeatable, minimal yaw error enhances system positioning accuracy. 10 5 0 5 10 500 400 300 200 100 100 200 300 400 500 Position (mm) Position Error (nm) ANT95L-025-PL2 accuracy and repeatability. This multiple test run over an extended period of time shows the high level of system accuracy and repeatability. 10 5 0 5 10 1000 750 500 250 250 500 750 1000 Position (mm) Straightness Error (nm) ANT95L-025-PL2 straightness error, five runs, bi-directional. Exceptional and highly repeatable – five times more accurate than the stated specification. 20 10 0 10 20 Position (mm) Pitch (arc-sec) ANT95L-050-PL2 pitch, five runs, bi-directional. Excellent repeatability/accuracy contribute to improved processing.

aerotech.com ANT95L-025 DIMENSIONS ANT95L -025 STAGE MOUNTING 4X 4.5 THRU STAGE MOUNTING 4X M5x0.8 6 CL 50 75 2X 4.025 H7 4 CUSTOMER MOUNTING 13X M4x0.7 4 ANT95L-025 STAGE CABLE MIN LENGTH 800 CL CL 100 TYP 2.5 115 1/2 HARD STOP TRAVEL 1/2 LIMIT TRAVEL 12.5 1/2 NOMINAL TRAVEL CL 50.8 50 75 BREADBOARD MOUNTING PATTERN 4X M6 OR 1/4-20 BOLT C'BORE SLOT STAGE MOUNTING 4X M4x0.7 THRU CL CL 100

3 TYP

DIMENSIONS: MILLIMETERS -MP (MOUNTING PLATE, BREADBOARD) REVISIONS MCN REV. DESCRIPTION DATE APPROVED

12615 A ADDED LIMIT TRAVEL AND REMOVED "NMT" LOGO 4/15/2010 JHAAG

18256 B NAMING CONVENTION CHANGED TO ANT95L-025 3/3/2017 THAHN

18453 C ADDED TOLERANCE TO PIN MOUNTING HOLES 6/26/2017 THAHN

BASE TAPPED HOLES WERE M6, NOW M5 REMOVED TRAILING ZEROS FROM DIMS 10-MAY-2021 BMIKLANCIE EPM MODEL BY: MODEL FILENAME: ANT95L-025-II-CAT D ANT95L-025-CAT PART CODE: ANT95L-025-CAT PART NAME: DWG. NO. REV ANT95L-025-CAT SHEET 1 OF 1 08-APR-09 DATE BOCONNOR DRAW JHAAG JHAAG NAME CHECK APPR. 08-APR-09 08-APR-09 PLACE DRAWING VIEWS BELOW

aerotech.com ANT95L-050 DIMENSIONS ANT95L -050 STAGE MOUNTING 4X 4.5 THRU CL STAGE MOUNTING 4X M5x0.8 6 50 75 100 125 2X 4.025 H7 4 CUSTOMER MOUNTING 23X M4x0.7 4 CL CL STAGE CABLE MIN LENGTH 775 100 140 TYP 2.5 155 1/2 HARD STOP TRAVEL 1/2 LIMIT TRAVEL 1/2 NOMINAL TRAVEL CL 140 76.2 100 125 50.8 75 CL CL STAGE MOUNTING 8X M4x0.7 THRU BREADBOARD MOUNTING 4X M6 OR 1/4-20 BOLT C'BORE SLOT DIMENSIONS: MILLIMETERS ANT95L-050 -MP (MOUNTING PLATE, BREADBOARD) REVISIONS MCN REV. DESCRIPTION DATE APPROVED

12299 A ADDED 4 CUSTOMER MOUNTING HOLES 11/18/2009 EMOSIER

12616 B ADDED LIMIT TRAVEL & REMOVED "NMT" LOGO 4/15/2010 JHAAG

12698 C ADDED ANT95-V MOUNTING HOLES TO MOUNTING PLATE 7/7/2010 BMIKLANCIE

18257 D NAMING CONVENTION CHANGED TO ANT95L-050 3/3/2017 THAHN

18454 E TOLERANCES ADDED TO PIN MOUNTING HOLES 6/26/2017 THAHN

O'ALL LENGTH CHANGE: 140 WAS 141.8, 155 WAS 156.8 PIN/SLOT IN BASE REMOVED BASE TAPPED HOLES WERE M6, NOW M5 REMOVED TRAILING ZEROS FROM DIMS 11-MAY-2021 BMIKLANCIE EPM MODEL BY: MODEL FILENAME: ANT95L-050-II-CAT F ANT95L-050-CAT PART CODE: ANT95L-050-CAT PART NAME: DWG. NO. REV ANT95L-050-CAT SHEET 1 OF 1 08-APR-09 DATE BOCONNOR DRAW JHAAG JHAAG NAME CHECK APPR. 08-APR-09 08-APR-09 PLACE DRAWING VIEWS BELOW

aerotech.com ANT95L-100 DIMENSIONS ANT95L -100 STAGE MOUNTING 4x 4.5 THRU STAGE MOUNTING 8x M5x0.8 6 CL 25 50 75 100 125 2X 4.025 H7 4 CUSTOMER MOUNTING 27x M4x0.7 5 STAGE CABLE MIN LENGTH 700 CL CL 125 2.5 TYP 263 210 175 1/2 NOMINAL TRAVEL 1/2 HARDSTOP TRAVEL 1/2 LIMIT TRAVEL CL 50 100 125 101.6 50.8 50.8 150152.4 STAGE MOUNTING 4x M4x0.7 THRU BREADBOARD MOUNTING PATTERN 12x M6 OR 1/4-20 SHCS C'BORE SLOTS CL CL 10 210 DIMENSIONS: MILLIMETERS ANT95L-100 -MP (MOUNTING PLATE, BREADBOARD) REVISIONS MCN REV. DESCRIPTION DATE APPROVED

12618 A ADDED LIMIT TRAVEL, REMOVED "NMT" LOGO, & ADDED

MOUNTING PATTERN TO CONNECTOR PLUG 4/15/10 JHAAG

18259 B NAME CHANGED TO ANT95L-100 3/3/2017 THAHN

18456 C TOLERANCES ADDED FOR PIN HOLE MOUNTING 6/26/2017 THAHN

BASE TAPPED HOLES WERE M6, NOW M5 REMOVED TRAILING ZEROS FROM DIMS REMOVED IMAGE OF CONNECTOR ASSY 11-MAY-2021 BMIKLANCIE JHAAG MODEL BY: MODEL FILENAME: ANT95L-100-II-Single-CAT D ANT95L-100-CAT PART CODE: CATALOG ANT95L-100-CAT PART NAME: DWG. NO. REV ANT95L-100 SHEET 1 OF 1 05-NOV-09 DATE BOCONNOR DRAW JHAAG JHAAG NAME CHECK APPR. 05-NOV-09 05-NOV-09 PLACE DRAWING VIEWS BELOW