ANT180L-160

ANT180L-160 AEROTECH | Alldatasheet

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KEY FEATURES:Achieve Nanometer-Scale Performance with Longer Travel ANT180L stages are the leading solution for addressing your nanometer-level motion and positioning needs. They deliver superior accuracy, repeatability and speed -- all with the utmost reliability. Compared to our smaller ANT130L and ANT95L models, ANT180L offers longer travel lengths and higher payload capacities. With impressive dynamic capabilities and ample load capacity, ANT180L stages are the preferred choice for integrating linear motion into high- precision industrial and research processes. Key Applications ANT180L stages are ideal for high-precision and high-dynamic positioning applications, including: ‹ Photonics assembly & inspection ‹ Fiber alignment & optimization ‹ Optics manufacturing, testing & inspection ‹ Sensor testing & qualification ‹ Semiconductor processing & inspection ‹ Research & laboratory applications ‹ Delivers NANOMETER-LEVEL PERFORMANCE over travel lengths up to 360 mm ‹ Capable of MINIMUM INCREMENTAL MOTION TO 1 NM ‹ High-precision crossed-roller bearings for EXCELLENT DYNAMIC PERFORMANCE & AMPLE LOAD CAPACITY up to 30 kg ‹ Ironless direct-drive motor MAXIMIZES PROCESS THROUGHPUT & RELIABILITY ‹ INTEGRATES EASILY into multi- axis assemblies with optional cable management system

aerotech.com ANT180L SERIES SPECIFICATIONS Notes: 1. Certified with each stage. 2. Axis orientation for on-axis loading is listed. 3. Specifications are reported for a single axis measured 25 mm above the tabletop. Performance of multi-axis systems depends on the payload and workpoint. Consult factory for multi-axis or non-standard applications. 4. -PLUS requires the use of an Aerotech controller. 5. Specifications are -E1 and -E3 only. Consult factory for other options Drive System Brushless Linear Servomotor Feedback Noncontact Linear Encoder (see options on Order Information page) Maximum Bus Voltage(1) 340 VDC Limit Switches 5 V, Normally Open Home Switch Near Center Mechanical Specifications ANT180L-160 ANT180L-210 ANT180L-260 ANT180L-360 Travel 160 mm 210 mm 260 mm 360 mm Accuracy(1) High-Accuracy Incremental Encoder (-E3) PLUS ±150 n m± 150 n m± 200 nm ±200 nm Base ±2.0 µ m± 2.5 µm ±3.0 µ m± 3.5 µm Incremental Encoder (-E1) PLUS ±300 n m± 300 n m± 350 nm ±350 nm Base ±4.0 µ m± 5.0 µm ±6.0 µ m± 7.0 µm Resolution (Minimum Incremental Motion) High-Accuracy Incremental Encoder (-E3) 1 nm 1 nm 1 nm 1 nm Incremental Encoder (-E1) 3 nm 3 nm 3 nm 3 nm Repeatability (Bi-Directional)(1) High-Accuracy Incremental Encoder (-E3) ±100 n m± 100 n m± 125 nm ±125 nm Incremental Encoder (-E1) ±150 n m± 150 n m± 175 nm ±175 nm Straightness(1) ±1.0 µ m± 1.25 µ m± 1.5 µm ±1.75 µm Flatness(1) ±1.0 µ m± 1.25 µ m± 1.5 µm ±1.75 µm Pitch 14 arc sec 14 arc sec 16 arc se c1 6 arc se c Roll 14 arc sec 14 arc sec 16 arc se c1 6 arc se c Yaw 10 arc sec 10 arc sec 12 arc se c1 2 arc se c Maximum Speed 500 mm/s 500 m m/s 500 mm/s 500 mm/s Maximum Acceleration 2 g - 20 m /s 2 ( No L oad) 2 g - 20 m /s 2 ( No L oad) 2 g - 20 m/ s 2 ( No Load )2 g - 2 0 m/ s 2 ( No L oad) Speed Stability See gr aph for t ypical p erfor manc e Settling Time See gr aph for t ypical p erfor manc e Maximum Force (Continuous) 110.5 N 110.5 N 110.5 N 110.5 N Load Capacity(3) Horizontal 30 kg 30 k g 30 kg 30 kg Side 20 kg 20 kg 20 k g2 0 kg Moving Mass 6.6 kg 7.8 kg 9.2 kg 11.7 kg Stage Mass 12.8 kg 14.9 k g1 7.6 kg 22.4 k g Material Aluminum B ody/Black Hardcoat F inis h MTBF (Mean Time Between Failure) 30,000 Hour s Notes: 1. C er tified with each s ta ge . 2. Axis orient at ion f or o n-axis l oading is l isted. 3. S pecific at ions a re f or s ingle-axis systems m easured 25 mm ab ov e the ta bletop . Pe rf or mance of m ulti-axis systems i s pa yload a nd w or kpoint d ependent. C onsult f acto ry f or m ulti-axi s or n on-standard a pplic at ions . 4. -PL US r equires the use of a n Aerotech c ontroller . 5. S pecific at ions a re - E1 and -E3 only . Consult facto ry f or o ther o ptions . Notes: 1. For optimal performance, Aerotech recommends a bus voltage of 80 VDC or lower.

aerotech.com ANT180L SERIES ORDERING INFORMATION Travel (Required) -160 160 mm travel stage -210 210 mm travel stage -260 260 mm travel stage -360 360 mm travel stage Feedback (Required) -E1 Incremental encoder, 1 Vpp -E2 Incremental encoder, 0.1 µm TTL output -E3 High-accuracy incremental encoder, 1 Vpp Cable Management (Optional) -CMS1 Cable management system for XY assembly - order with lower-axis only -CMS2 Cable management system for XY assembly w/6 mm air line - order with lower-axis only -CMS3 Cable management system for XYZ assembly - order with lower-axis only -CMS4 Cable management system for XYZ assembly w/6 mm air line - order with lower-axis only -CMS5 Cable management system for XY assembly - order with upper-axis only -CMS6 Cable management system for XY assembly w/6 mm air line - order with upper-axis only -CMS7 Cable management system for XYZ assembly - order with upper-axis only -CMS8 Cable management system for XYZ assembly w/6 mm air line - order with upper-axis only Metrology (Required) -PL1 Base performance -PL2 High-accuracy performance, PLUS Integration (Required) Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required, or if you desire custom integration support with your system. -TAS Integration - Test as system Testing, integration, and documentation of a group of components as a complete system that will be used together (ex: drive, controller, and stage). This includes parameter file generation, system tuning, and documentation of the system configuration. -TAC Integration - Test as components Testing and integration of individual items as discrete components that ship together. This is typically used for spare parts, replacement parts, or items that will not be used together. These components may or may not be part of a larger system. Accessories (to be ordered as separate line item) ALIGN-PA10 XY assembly; 10 arc sec orthogonality ALIGN-PA5 XY assembly; 5 arc sec orthogonality

aerotech.com ANT180L SERIES SPECIFICATIONS ANT180L SERIES PERFORMANCE 0 5 10 15 20 25 30 Time (s) Position (nm) ANT180L 5 nm step plot. Best-in-class resolution and exceptional in-position stability for large travel stages. See additional performance graphs on the following pages. 60 40 20 0 20 40 60 99.75 99.8 99.85 99.9 99.95 100 100.05 100.1 100.15 100.2 100.25 Position (mm) Velocity (mm/s) ANT180L-160 velocity performance at 100 mm/s and 1 kg payload. Excellent speed stability is another feature of the ANT Series stages. 0 100 200 300 400 500 600 700 100 100 Move Time (ms) Position Error (nm) ← 187 ms Move and Settle Step Size: 50 mm Speed: 350 mm/s Settle Spec: ±20 nm ANT180L-160 step and settle performance with 1 kg payload. Outstanding settling time enhances throughput of most applications. 80 60 40 20 0 20 40 60 80 500 400 300 200 100 100 200 300 400 500 Position (mm) Position Error (nm) ANT180L-160 accuracy and repeatability, five runs, bi-directional over an extended period of time shows the high level of system accuracy and repeatability.

aerotech.com ANT180L SERIES SPECIFICATIONS ANT180L SERIES PERFORMANCE 80 60 40 20 0 20 40 60 80 1500 1250 1000 750 500 250 250 500 750 1000 1250 1500 Position (mm) Straightness Error (nm) ANT180L-160 straightness error, one run, bi-directional. Exceptional and highly repeatable performance is assured with minimal straightness error. 80 60 40 20 0 20 40 60 80 Position (mm) Yaw (arc sec) ANT180L-160 yaw, five runs, bi-directional. Highly repeatable, minimal yaw error enhances system positioning accuracy. 80 60 40 20 0 20 40 60 80 Position (mm) Pitch (arc sec) ANT180L-160 pitch, five runs, bi-directional. Excellent repeatability/ accuracy contribute to improved processing.

aerotech.com ANT180L DIMENSIONS 100 125 120 150 CL CL (21X) M6X1.0 6 150, 152.4 D A 30.5 90 90 B/2 C/2 B/2 C/2 M6 OR 1/4 INCH STAGE MOUNTING CL (4X) M8 X 1.25 STAGE LIFTING M4 X 0.7 GROUND LOCATION FEEDBACK AND MOTOR POWER CONNECTORS 180 100, 101.6 12.5 CL DIMENSIONS: MILLIMETERS REVISIONS MCN REV. DESCRIPTION DATE APPROVED - A UPDATED STAGE NAME IN MULTIPLE PLACES FOR EPICOR CONSISTENCY 12/13/2016 SMARCKS ECO0004902 B UPDATED TABLETOP HOLE PATTERN CHANGED INCH DIMENSIONS TO METRIC ADDED CMS DIMENSIONS ON SHEET 2 ADDED CUSTOMER GROUND AND LIFTING HOLES 5/13/2024 ZFRIGGLE STAGE MODEL A = STAGE LENGTH B = NOMINAL TRAVEL C = HARDSTOP TRAVEL D = MOUNTING SPACING ANT180L-160 325 160 174 - ANT180L-210 375 210 224 225, 228.6 ANT180L-260 450 260 274 275, 279.4 ANT180L-360 575 360 374 350, 355.6 MODEL BY: MODEL FILENAME: ANT180L-GEN II-CAT B ANT180L-GEN II-CAT PART CODE: AEROTECH LINEAR STAGE ANT180L-GEN II-CAT PART NAME: DWG. NO. REV ANT180L SHEET 1 OF 2 04-DEC-09 DATE BOCONNOR DRAW RCAVAGNARO RCAVAGNARO NAME CHECK APPR. 04-DEC-09 04-DEC-09 PLACE DRAWING VIEWS BELOW

aerotech.com ANT180L DIMENSIONS MAX 180 85.1 A DIMENSIONS: MILLIMETERS -CMS OPTION A = CABLE TRAY WIDTH -CMS1 - -CMS2 35 -CMS3 85.1 -CMS4 85.1 MODEL BY: MODEL FILENAME: ANT180L-GEN II-CAT B ANT180L-GEN II-CAT PART CODE: AEROTECH LINEAR STAGE ANT180L-GEN II-CAT PART NAME: DWG. NO. REV ANT180L SHEET 2 OF 2 04-DEC-09 DATE BOCONNOR DRAW RCAVAGNARO RCAVAGNARO NAME CHECK APPR. 04-DEC-09 04-DEC-09 PLACE DRAWING VIEWS BELOW