ANT130LZS-035 AEROTECH | Alldatasheet
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KEY FEATURES:Superior Vertical Motion, Compact Form Factor ANT130LZS stages represent the pinnacle of vertical motion performance with an ultra-low profile. Featuring dual side-mounted pneumatic counterbalances with extremely low frictional characteristics, they superbly combine accuracy, repeatability, speed and reliability. With their impressive dynamic capabilities and ample load-carrying capacity, ANT130LZS stages are the ideal choice when you need superior vertical motion in a compact form factor. Key Applications ANT130LZS stages are ideal for high-precision and high-dynamic vertical positioning applications with minimal footprint requirements, including: Photonics assembly & inspection Fiber alignment & optimization Optics manufacturing, testing & inspection Sensor testing & qualification Semiconductor processing & inspection Research & laboratory applications Enhanced second-generation design Achieves MINIMUM INCREMENTAL MOTION TO 1 nm - NEW Delivers NANOMETER-LEVEL POSITIONING PERFORMANCE over travel lengths up to 160 mm Provides ULTRA-LOW PROFILE with dual side- mounted counterbalances capable of offsetting up to 14 kg payload for ultra-precise performance in the vertical direction Features high-precision crossed-roller bearings for EXCELLENT DYNAMIC PERFORMANCE & AMPLE LOAD CAPACITY MAXIMIZES PROCESS THROUGHPUT & RELIABILITY with ironless direct-drive linear motor INTEGRATES EASILY into multi-axis motion systems ABSOLUTE and ULTRA-HIGH RESOLUTION incremental encoder options are available
aerotech.com ANT130LZS SERIES SPECIFICATIONS Notes: 1. Certified with each stage. 2. Requires the selection of an appropriate amplifier with sufficient voltage and current. 3. In-position stability is reported as 3-sigma value. Requires a 1 Vpp encoder. 4. Payload specifications assume payload is centered on-axis. 5. Specifications are reported for a single axis measured 25 mm above the tabletop. Performance of multi-axis systems depends on the payload and workpoint. Consult factory for multi-axis or non-standard applications. 6. PLUS performance requires the use of an Aerotech controller. 7. To ensure the achievement and repeatability of specifications over an extended period of time, environmental temperature must be controlled to within 0.25°C per 24 hours. Consult factory for more information. 8. Air supply for pneumatic counterbalance must be clean, dry to 0°F dewpoint, and filtered to 0.25 µm or better. Aerotech recommends using nitrogen at 99.9% purity. Supply pressure is determined by the amount of payload carried by the stage. Mechanical Specifications ANT130LZS-035 ANT130LZS-060 ANT130LZS-110 ANT130LZS-160 Travel 35 mm 60 mm 110 mm 160 mm Accuracy(1) Base Performance (-PL1) ± 2.5 µm ± 3.0 µm ± 4.0 µm Plus Performance (-PL2) ± 275 nm (-E1, -E2, -E3) ± 175 nm (-E4) ± 200 nm (-E4) Repeatability (Bidirectional)(1) ±75 nm Resolution (Minimum Incremental Motion) 2 nm (-E1) 6 nm (-E3) 1 nm (-E4) Straightness(1) ± 1.5 µm ± 2.0 µm Flatness(1) ± 1.5 µm ± 2.0 µm Pitch 10 arc sec Roll 10 arc sec Yaw 5 arc sec Maximum Speed(2) 200 mm/s (-E1, -E3, -E4) 145 mm/s (-E2) Maximum Acceleration (No Load)(2) 1 g In-Position Stability(3) <2 nm (-E1) <6 nm (-E3) <1 nm (-E4) Load Capacity(4) Vertical 14 kg Moving Mass 1.5 kg 1.6 kg 2.1 kg 2.5 kg Stage Mass 3.2 kg 3.6 kg 4.5 kg 5.3 kg Material Anodized Aluminum MTBF (Mean Time Between Failure) 30,000 Hours Drive System Brushless Linear Servomotor Feedback Noncontact Linear Encoder
1 Vpp with 20 µm signal period (-E1)
Digital RS422 (-E2) BiSS-C absolute + incremental 1 Vpp linear dual-track encoder (-E3)
1 Vpp with 4 µm signal period (-E4)
Maximum Bus Voltage -CN1: 80 VDC -CN2: 160 VDC Limit Switches 5 V, Normally Closed Home Switch Near Center
aerotech.com ANT130LZS SERIES ORDERING INFORMATION Travel (Required) -035 35 mm travel -060 60 mm travel -110 110 mm travel -160 160 mm travel Feedback (Required) -E1 Incremental linear encoder, 1 Vpp amplified sine output -E2 Incremental linear encoder, digital RS422 output, 5 nm electrical resolution -E3 Absolute + Incremental 1 Vpp linear dual-track encoder -E4 Incremental linear encoder, 1 Vpp amplified sine output, high-performance Connectors (Required) -CN1 Single 25-pin D connector, 25DU -CN2 Two connectors, 4-pin HPD and 25-pin D, 4DU-25DU Note: The -CN1 option is limited to a maximum bus voltage of 80 V. The -CN2 option is required for higher bus voltages. Mounting Plate (Optional) -MP Mounting plate Performance Grade (Required) -PL1 Base performance -PL2 High-accuracy performance, PLUS Integration (Required) Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required, or if you desire custom integration support with your system. -TAS Integration - Test as system Testing, integration, and documentation of a group of components as a complete system that will be used together (ex: drive, controller, and stage). This includes parameter file generation, system tuning, and documentation of the system configuration. -TAC Integration - Test as components Testing and integration of individual items as discrete components that ship together. This is typically used for spare parts, replacement parts, or items that will not be used together. These components may or may not be part of a larger system.
aerotech.com ANT130LZS SERIES SPECIFICATIONS ANT130LZS SERIES PERFORMANCE 0 2 4 6 8 10 12 14 16 18 20 22 Time (s) 10Displacement (nm) ANT130LZS-060-E4-PL2 step plot showing 1 nm minimum incremental motion. Best-in-class resolution and exceptional in-position stability for large travel stages.
aerotech.com ANT130LZS DIMENSIONS 125 50 90 120 CL CL 21X M6X1.0 6 CENTERED ON CARRIAGE F A E 120 1 200 B/2 D/2 C/2 D/2 G MIN LENGTH 130 130 195 A 12.7 6.8 8 DETAIL A SCALE 2 : 5 MOUNTING HOLES TYP. PUSH-TO-CONNECT FITTING FOR 6MM OD X 4MM ID TUBING. C'BALANCE AIR SUPPLY DIMENSIONS: MILLIMETERS 1. ANT130LZS-110 AND ANT130LZS-160 ONLY REVISIONS MCN REV. DESCRIPTION DATE APPROVED
18100 A CHANGED NAMING CONVENTION FOR PRODUCT AND
ECO0000504 B UPDATED VIEWS TO REFLECT NEW SHIPPING BRACKETS 11/21/2017 SMARCKS ECO1001775 C GEN II UPDATE 12-NOV-21 JSTAHR ECO1010147 D REMOVED MANIFOLDS AND CHANGED PNEUMATIC FITTING ASSEMBLY 6/25/2025 JSCIORILLI TRAVEL OPTION A = STAGE LENGTH B = NOMINAL TRAVEL C = LIMIT TRAVEL D = HARDSTOP TRAVEL E F G -035 155 35 41 50 27 35 373 -060 180 60 66 75 42 42 358 -110 230 110 116 125 67 78 333 -160 280 160 166 175 92 93 308 JSTAHR MODEL BY: MODEL FILENAME: ANT130LZS-CAT D ANT130LZS-CAT PART CODE: ANT130LZS-CAT PART NAME: DWG. NO. REV ANT130LZS CATALOG MODEL SHEET 1 OF 1 02-JUN-14 DATE MSHOUPE DRAW SMARCKS SMARCKS NAME CHECK APPR. 02-JUN-14 02-JUN-14 PLACE DRAWING VIEWS BELOW
aerotech.com ANT130LZS DIMENSIONS B 130 E C F G H I D 120 STAGE MOUNTING M6X1.0 THRU BREADBOARD MOUNTING M6 OR 1/4-20 BOLT C'BORE SLOT A DIMENSIONS: MILLIMETERS REVISIONS MCN REV. DESCRIPTION DATE APPROVED LENGTH MOUNTING TRAVEL OPTION A B C D E F G H I JHAAG MODEL BY: MODEL FILENAME: ANT130-MP-CAT ANT130-MP-CAT PART CODE: ANT130-160 MOUNTING PLATE ANT130-MP-CAT PART NAME: DWG. NO. REV BREADBOARD SHEET 1 OF 1 06-DEC-21 DATE JHAAG DRAW JSTAHR JSTAHR NAME CHECK APPR. 06-DEC-21 06-DEC-21 PLACE DRAWING VIEWS BELOW B 130 E C F G H I D 120 STAGE MOUNTING M6X1.0 THRU BREADBOARD MOUNTING M6 OR 1/4-20 BOLT C'BORE SLOT A DIMENSIONS: MILLIMETERS REVISIONS MCN REV. DESCRIPTION DATE APPROVED LENGTH MOUNTING TRAVEL OPTION A B C D E F G H I JHAAG MODEL BY: MODEL FILENAME: ANT130-MP-CAT ANT130-MP-CAT PART CODE: ANT130-160 MOUNTING PLATE ANT130-MP-CAT PART NAME: DWG. NO. REV BREADBOARD SHEET 1 OF 1 06-DEC-21 DATE JHAAG DRAW JSTAHR JSTAHR NAME CHECK APPR. 06-DEC-21 06-DEC-21 PLACE DRAWING VIEWS BELOW ANT130LZS MOUNTING PLATE