ANT130-360-R AEROTECH | Alldatasheet

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KEY FEATURES: Miniature rotary stage with unrivaled precision & speed ANT130R direct-drive rotary stages provide unprecedented motion performance, including in-position stability and minimum incremental motion down to 0.01 arc sec and below. Plus, with a height of only 40 mm, ANT130R’s ultra- compact form factor allows for simple integration with other motion axes and systems. This combination of outstanding performance and small size helps to mitigate design tradeoffs without compromise. The direct-drive, ironless motor facilitates ultra-smooth motion with excellent dynamic performance, making ANT130R ideal for processes that require both high throughput and ultra-fine precision. Key Applications ANT130R stages are ideal for high-precision and high- dynamic motion applications, including: ‹ Photonics assembly & inspection ‹ Fiber alignment & optimization ‹ Optics manufacturing, testing & inspection ‹ Sensor testing & qualification ‹ Semiconductor processing & inspection ‹ Research & laboratory applications ‹ Offers BEST-IN-CLASS resolution & in-position stability ‹ Outstanding ERROR MOTION PERFORMANCE ‹ Ironless, direct-drive motor ELIMINATES VELOCITY RIPPLE & COGGING EFFECTS ‹ CONTINUOUS- & LIMITED-ROTATION configurations available ‹ CLEAR APERTURE for cable or hose feedthrough ‹ Easily combine with other Aerotech ANT-series stages & more to ACHIEVE HIGHLY PRECISE, MULTI-AXIS MOTION

aerotech.com ANT130R SERIES SPECIFICATIONS Notes: 1. Certified with each stage. Requires the use of an Aerotech controller. 2. Maximum instantaneous speed reported; contact factory for specific requirements. 3. In-Position Jitter listing is 3 sigma value. 4. Axis orientation for on-axis loading is listed. 5. Specifications are per axis, measured 25 mm above the tabletop. Consult factory for multi-axis or non-standard applications. 6. All error motion specifications are measured at 60 rpm. 7. For high speed operation, customer payload must be balanced to G1.0 per ISO 1940. Mechanical Specifications ANT130-360-R ANT130-180-R ANT130-20-R Rotation Angle ±360° Continuous 180° 20° Accuracy(1) PLUS (-PL2) 3 arc sec 3 arc sec 3 arc sec Resolution 0.01 arc sec 0.01 arc sec 0.01 arc sec Repeatability (Bi-Directional)(1) Basic 1.5 arc sec 1.5 arc sec 1.5 arc sec PLUS 1.5 arc sec 1.5 arc sec 1.5 arc sec Repeatability (Uni-Directional) 0.5 arc sec 0.5 arc sec 0.5 arc sec Tilt Error Motion Synchronous 10 arc sec N/A N/A Asynchronous 3 arc sec N/A N/A Axial Error Motion Synchronous 2 µm N/A N/A Asynchronous 0.5 µm N/A N/A Radial Error Motion Synchronous 3 µm N/A N/A Asynchronous 1 µm N/A N/A Maximum Speed(2) 200 rpm 20 rpm 20 rpm Maximum Acceleration 400 rad/s2 400 rad/s2 400 rad/s2 In-Position Stability(3) 0.005 arc sec 0.005 arc sec 0.005 arc sec Aperture 11 mm 11 mm 11 mm Maximum Torque (Continuous) 0.2 Nm 0.2 Nm 0.2 Nm Load Capacity(4) Axial 3.0 kg 3.0 kg 3.0 kg Radial 2.0 kg 2.0 kg 2.0 kg Moment 3 Nm 3 Nm 3 Nm Rotor Inertia (Unloaded) 0.0016 kg-m2 0.001 kg-m2 0.001 kg-m2 Stage Mass 1.7 kg 1.5 kg 1.5 kg Material Aluminum Body/Black Hardcoat Finish MTBF (Mean Time Between Failure) 30,000 Hours Drive System Slotless, Brushless, Direct-Drive Rotary Motor Feedback Noncontact Linear Encoder Maximum Bus Voltage ±40 VDC Limit Switches 5 V, Normally Closed Home Switch Near Center

aerotech.com ANT130R SERIES ORDERING INFORMATION Travel (Required) -360 Continuous travel -20 Limited travel, ±10 degrees -180 Limited travel, ±90 degrees Mounting Plate (Optional) -MP Mounting plate Performance Grade (Required) -PL2 High-accuracy performance, PLUS Integration (Required) Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required, or if you desire custom integration support with your system. -TAS Integration - Test as system Testing, integration, and documentation of a group of components as a complete system that will be used together (ex: drive, controller, and stage). This includes parameter file generation, system tuning, and documentation of the system configuration. -TAC Integration - Test as components Testing and integration of individual items as discrete components that ship together. This is typically used for spare parts, replacement parts, or items that will not be used together. These components may or may not be part of a larger system.

aerotech.com ANT130R SERIES SPECIFICATIONS ANT130R SERIES PERFORMANCE 0 100 200 300 6.0 4.5 3.0 1.5 1.5 3.0 4.5 6.0 Error (rad) Position (deg) 0 100 200 300 -1.2 -0.9 -0.6 -0.3 0.3 0.6 0.9 1.2 Error (arc sec) µ ANT130R accuracy plot showing excellent accuracy and bi- directional positioning capability. -2 m 180 270 ANT130R axial error plot illustrating outstanding synchronous and asynchronous error motion performance. 0 2 4 6 0.016 0.012 0.008 0.004 0.004 0.008 0.012 0.016 P os ition ( rad) Time (s) 0 2 4 6 -0.003 -0.002 -0.002 -0.001 0.001 0.002 0.002 0.003 Position (arc sec) µ ANT130R plot showing best-in-class in-position stability. -2 m 180 270 ANT130R radial error plot illustrating outstanding synchronous and asynchronous error motion performance. Capable of achieving a step size down to 0.05 µrad, ANT130R offers best-in-class minimum incremental motion. 0 5 10 15 20 25 0.05 0.05 0.1 0.15 0.19 0.24 0.29 0.34 0.39 0.44 0.48 0.53 Position (µrad) Time (sec) 0 5 10 15 20 25 - 0.01 0.01 0.02 0.03 0.04 0.05 0.06 0.07 0.08 0.09 0.1 0.11 Position (arc sec)

aerotech.com ANT130R DIMENSIONS 50 B.C. APERTURE 35.4 TYP

50 TYP

75 TYP

106 B.C. 71 B.C. 45° TYP A 1/2 NOM. TRAVEL B 1/2 LIMIT TRAVEL C 1/2 HARDSTOP TRAVEL CUSTOMER MOUNTING 24X M4X0.7 HELICOIL 4.0 EQUALLY SPACED ON BOLT CIRCLES TYP 130 120

60 TYP

10 TYP

2X 5.8 THRU54 CABLE LENGTH ~925 25PIN MOTOR/FEEDBACK CONNECTOR HEIGHT = 26 125 100 100 2.0073 TYP TYP 2.00 102 4.00 102 4.00145 130

20 THRU

BREADBOARD MOUNTING PATTERN 6x M6 OR 1/4-20 SHCS C'BORE SLOTS DIMENSIONS: MILLIMETERS -MP (MOUNTING PLATE BREADBOARD) REVISIONS MCN REV. DESCRIPTION DATE APPROVED

12534 A ADDED MOUNTING HOLES TO CONNECTOR BOX 05-MAR-10 TBYRNE

12645 B REMOVED "NMT" LOGO FROM CATALOG 4/28/2010 JHAAG

17733 C UPDATED ELECTRICAL LIMIT TRAVELS

CLARIFIED '0' POSITION IN ISO VIEW 09-SEP-16 BHARROLD

17985 D EPICOR MIGRATION UPDATES (ERP-1681) 23-DEC-16 BHARROLD

MODEL BY: MODEL FILENAME: ANT130R-CAT D ANT130R PART CODE: CATALOG MODEL ANT130R-CAT PART NAME: DWG. NO. REV ANT130R SHEET 1 OF 1 15-JUN-09 DATE EGLASER DRAW TBYRNE TBYRNE NAME CHECK APPR. 15-JUN-09 15-JUN-09