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WWW.MKSINST.COM AL 20000 Series InduSTRIAL MICROWAVE GEnERATORS 2450 MHz MKS Alter® AL 20000 Series Microwave Generators are built on experience and designed with rugged and reliable switch mode power supplies for demanding industrial applications. The AL 20000 Series offers compact generators up to 3 kW in a 19 inch standard rack with a remote head and integrated isolator. For 6 and 10 kW microwave generators an isolator is included. All MKS, Alter microwave generators are equipped with reflected power detection. Features & Benefits

  • Proven s witch mode technology Large choice of input line v oltage
  • Configurable remote control Reliable cost-eff ective
  • Extremely compact and light w eight Type MW Power Power Supply Isolauncher Mag Head Isolator Waveguide AL 20020 2 kW SM 845 TI020 — integrated WR340 AL 20030 3 kW SM 1250 TI030 — integrated WR340 AL 20060 6 kW SM 1280 — TM060 external WR340 AL 20100 10 kW SM 1690 — TM100 external WR340 AL 20150 15 kW MPS 24 — TM150 option WR340 Plasma & Reactive Gas Solutions

P ower Output 200-2000 W Frequency 2440-2470 MHz P ower Regulation 10-100% Line Load Regulation Ripple Max ±3% of output po wer Ambient Temperature Up to 40°C maxim um Microwave Connections WR340 w aveguide with PDR26 flange Remote Control Options PLC , RS232, ANYBUS AC Power Input 230 VAC ±10%, 50/60 Hz Compliance CE P ower Supply SM845 Dimensions 88mm (H) x 483mm (W) x 420mm (D) Cooling F orced air, approx 100 m3/h Power Head TI020 Dimensions 280mm (H) x 162mm (W) x 229mm (D) Cooling

1 L/min, max 5 bar (inlet temp:

20-30°C) AL 20030 P ower Output 300-3000W Frequenc y 2440-2470 MHz P ower Regulation 10-100% Line Load Regulation Ripple Max ±3% of output po wer Ambient Temperature Up to 40°C maxim um Microwave Connections WR340 w aveguide with PDR26 flange Remote Control Options PLC , RS232, ANYBUS AC Power Input 3 x 208 V, 50/60 Hz; 3 x 400 V, 50/60 Hz Compliance CE P ower Supply SM1250 Dimensions 130mm (H) x 447mm (W) x 420mm (D) Cooling F orced air, approx 120 m3/h Power Head TI030 Dimensions 280mm (H) x 162mm (W) x 229mm (D) Cooling

2 L/min, max 5 bar (inlet temp:

20-30°C) Power Supply — SM 1250 shown Power Head — TI030 shown

P ower Output 600-6000W Frequenc y 2440 - 2470 MHz P ower Regulation 10-100% Line Load Regulation Ripple Max ± 5% of output po wer Ambient Temperature Up to 40°C maxim um Microwave Connections WR340 w aveguide with PDR26 flange Remote Control Options RS232, ANYB US (optional) AC Power Input 3 x 208 V, 50/60 Hz; 3 x 400 V, 50/60 Hz Compliance CE P ower Supply SM1280 Dimensions 310mm (H) x 444mm (W) x 482mm (D) Cooling F orced air, approx 200 m3/h Power Head TM060 Dimensions 375mm (H) x 235mm (W) x 225mm (D) Cooling

4 L/min, max 5 bar (inlet temp:

20-30°C), Water cooled AL 20100 P ower Output 1-10 kW Frequenc y 2440-2470 MHz P ower Regulation 10-100% Line Load Regulation 10% Ripple Max ± 5% of output po wer Ambient Temperature Up to 40°C maxim um Microwave Connections WR340 w aveguide with PDR26 flange Remote Control Options RS232, ANYB US (optional) AC Power Input 3 x 400 V, 50/60 Hz; 3 x 480 V, 50/60 Hz Compliance CE P ower Supply SM1690 Dimensions 310mm (H) x 444mm (W) x 482mm (D) Cooling F orced air, approx 200 m3/h Power Head TM100 Dimensions 375mm (H) x 235mm (W) x 225mm (D) Cooling

7 L/min, max 5 bar (inlet temp:

20-30°C), Water cooled Power Supply — SM 1280 shown Power Head — TI100 shown

Please contact your local MKS sales office for price and availability information. MKS products provided subject to the US Export Regulations. Diversion or transfer contrary to US law is prohibited. Specifications are subject to change without notice . mksinst™ is a trademark and Alter ® is a registered trademark of MKS Instr uments, Inc., Andover, MA. AL 20000 Series - 1/18 © 2014-2018 MKS Instruments, Inc. All rights reserved. AL 20150 P ower Output 1- 15 kW Frequenc y 2440 - 2470 MHz P ower Regulation 10% Line Load Regulation Ripple Max ± 5% of output po wer Ambient Temperature Up to 40°C maxim um Microwave Connections WR430 w aveguide with PDR22 flange Remote Control Options RS232, ANYB US (optional) AC Power Input 3 x 400 V, 50/60 Hz; 3 x 480 V, 50/60 Hz Compliance CE P ower Supply MPS 24 Option: integrated in cabinet Dimensions 1500mm (H) x 600mm (W) x 800mm (D) Cooling F orced air, approx 800 m3/h; water cooled, 2L/min Power Head TM150 Dimensions 280mm (H) x 162mm (W) x 229mm (D) Cooling 2L/min, max 5 bar (inlet temp: 20-30°C) Ordering Inf ormation MKS Instruments, Inc. Global Headquar ters

2 Tech Drive, Suite 201

Andover, MA 01810 Tel: 978.645.5500 T el: 800.227.8766 (in USA) Web: www.mksinst.com MKS Instruments Italy S.r.l. Plasma & Reactive Gas Solutions Via P . e M. Curie, 8

42122 Reggio Emilia, Italy

Tel: +39 0522 553 820