AGV-XPO

AGV-XPO AEROTECH | Alldatasheet

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Technical content

AGV-XPO, our premier two-axis laser scan head, helps to minimize the tradeoff between speed and precision. Its low-inertia, high-efficiency motors enable rapid acceleration profiles, while ultra-high resolution position feedback and optimized structural dynamics provide excellent part-profile tracking with minimal following error. Pair AGV-XPO with an Aerotech controller to enhance your process through advanced motion capabilities and coordination with other axes of motion. Key Applications AGV-XPO is ideal for high-throughput applications that require superior dynamic precision, minimal following error and rapid move-and-settle performance, including: ‹ Display processing ‹ High-speed drilling & cutting ‹ Electronics manufacturing ‹ Large-field & long focal length scanning ‹ Femtosecond laser processing High-Dynamic Laser Scan Heads AGV-XPO ‹ INCREASES PROCESS THROUGHPUT with innovative, dynamically optimized design ‹ Provides superior dynamic accuracy & IMPROVES PROCESS YIELD with high- resolution feedback ‹ ENHANCES THERMAL STABILITY with optional air & water cooling ‹ OFFERS SYSTEM DESIGN FLEXIBILITY with a multitude of optical configurations ‹ Synchronizes easily with other motion axes, offering SEAMLESS INTEGRATION & EASE OF USE KEY FEATURES:

aerotech.com AGV-XPO SPECIFICATIONS Notes: 1. All angles are optical unless otherwise specified. 2. Without -AC air cooling option. 3. After initial 3 hour warm-up, ambient temperature variation < ±0.5 °C. 4. Typical performance with f = 160mm F-Theta objective. 5. Based on maximum rated current of the motor. 6. Based on rated rms current of the motor with -WC water cooling option; maximum continuous acceleration is 70% of this value without water cooling. 7. Settled to within 1% of move distance. 8. All specifications are per axis unless otherwise noted. Specifications AGV10XPO AGV14XPO AGV20XPO Optical Performance Beam Aperture 10 mm 14 mm 20 mm Maximum Scan Angle ±20° Beam Displacement 12.6 mm 16.5 mm 23.2 mm Feedback Resolution 0.012 µrad (25 bit) (-E1) 0.00016 µrad (32 bit) (-E2) Dither (Min. Incremental Motion)(2) 0.4 µrad RMS (-E1) 0.02 µrad RMS (-E2) Accuracy 50 µrad pk-pk Repeatability(3) 0.4 µrad RMS Gain Error 0.05 mrad Non-Linearity 0.005% Dynamic Performance Tracking Error 0 µsec Peak Acceleration(4)(5) 355,000 m/s2 (-E1) 300,000 m/s2 (-E2) 262,000 m/s2 (-E1) 231,000 m/s2 (-E2) 95,000 m/s2 (-E1) 88,000 m/s2 (-E2) Continuous Acceleration(4)(6) 95,000 m/s2 (-E1) 80,000 m/s2 (-E2) 66,000 m/s2 (-E1) 58,000 m/s2 (-E2) 25,000 m/s2 (-E1) 23,000 m/s2 (-E2) Positioning Speed(4) 84 m/s (-E1) 48 m/s (-E2) 81 m/s (-E1) 48 m/s (-E2) 55 m/s (-E1) 48 m/s (-E2) Jump & Settle Time, 1 mm Move(4)(7) 210 µs (-E1) 250 µs (-E2) 225 µs (-E1) 260 µs (-E2) 280 µs (-E1) 340 µs (-E2) Stability Long-Term Drift-Offset(3) 10 µrad/12 hrs 15 µrad/24 hrs Long-Term Drift-Gain(3) 10 ppm/24 hrs Thermal Drift-Offset 10 µrad/°C Therman Drift-Gain 1 ppm/°C Mechanical Specifications Mass 2.5 kg (-E1) 3.1 kg (-E2) 2.6 kg (-E1) 3.2 kg (-E2) 2.9 kg (-E1) 3.5 kg (-E2) Material Aluminum (Black Anodize and Blue Paint) MTBF (Mean Time Between Failure) 20,000 Hours

aerotech.com AGV-XPO ORDERING OPTIONS AGV-XPO Series High-Dynamic Laser Scan Head AGV10XPO 2-axis galvanometer scanner with 10 mm diameter beam aperture AGV14XPO 2-axis galvanometer scanner with 14 mm diameter beam aperture AGV20XPO 2-axis galvanometer scanner with 20 mm diameter beam aperture Contact factory for additional aperture options. Feedback (Required) -E1 High-resolution encoder feedback -E2 Ultra high-resolution encoder feedback Beam Entry (Required) -BE1 Right-side laser beam entry (standard) -BE2 Left-side laser beam entry Wavelength of Mirror Coating (Required) -W001 10.6 µm -W002 Durable Silver (450 nm - 10.6 µm) -W003 1552 nm -W004 1064 nm -W005 1030 nm -W006 532 nm -W007 515 nm -W008 355 nm -W009 343 nm -W012 9.3 µm Custom coatings available. Contact factory for details. F-Theta Lens (Optional) -Lxx A variety of F-theta lenses with different focal length and wavelength combinations are available; inquire with factory Air Cooling (Optional) -AC Air Cooling Water Cooling (Optional) -WC Water Cooling Performance Grade (Required) -PL0 Standard performance grade Integration (Required) Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required or if you desire custom integration support with your system. -TAS Integration - Test as system Testing, integration and documentation of a group of components as a complete system that will be used together (ex: drive, controller and stage). This includes parameter file generation, system tuning and documentation of the system configuration.

aerotech.com AGV-XPO SPECIFICATIONS AGV-XPO is capable of extremely high accelerations and processing speeds with minimal trajectory error, resulting in the highest throughput and the best part quality. As demonstrated in this vector position error plot, the AGV-XPO provides superior part-path accuracy at high processing speeds. Comparison data is based on a semi-rectangular trajectory with a processing speed of 5 m/s and effective focal length of 250 mm. 0 5 10 15 20 25 Position Error (µm) Time (ms) AGV20HP - Max. Vector Error 29.7 µm AGV20XPO - Max. Vector Error 7.1 µm Ultra-high resolution feedback (-E2 option) provides the lowest noise levels for applications that require extremely fine trajectory accuracy or utilize long effective focal lengths. AGV-XPO is capable of extremely high accelerations and processing speeds with minimal trajectory error, resulting in the highest throughput and the best part quality. As demonstrated in this vector position error plot, the AGV-XPO provides superior part-path accuracy at high processing speeds. Comparison data is based on a semi-rectangular trajectory with a processing speed of 5 m/s and effective focal length of 250 mm. 0 5 10 15 20 25 Position Error (µm) Time (ms) Ultra-high resolution feedback (-E2 option) provides the lowest noise levels for applications that require extremely fine trajectory accuracy or utilize long effective focal lengths. -1.0 -0.8 -0.6 -0.4 -0.2 0.0 0.2 0.4 0.6 0.8 1.0 In-Position Jitter (µrad) Time (s) AGV-HP, Standard Encoder AGV-XPO, Ultra-High Resolution Encoder

aerotech.com 63.5

150 APPROX

18.5 MAXIMUM LENS IMMERSION DEPTH 54 18.5 56 16

59.4 X 90

63.5 6.8

66 X 90

0.08 0 4.8 126 APPROX 28.5 22 33 49 37.4 105

116 APPROX

M6X1.0 9 (4) PLACES M5X0.8 7.5 (4) PLACES

11 FOR

10 BEAM

28.7 28.7 12.6 BEAM DISPLACEMENT M5X0.8 7.5 (4) PLACES CL BEAM IN 4 7 DOWEL PIN HOLE AND SLOT 14.5 28.5 4 7 DOWEL PIN HOLE AND SLOT M6X1.0 9 (4) PLACES AIR COOLING INLETS (-AC) AIR COOLING OPTION (-WC) WATER COOLING OPTION X MOTOR OUTLET INLET Y MOTOR INLET OUTLET OUTLET AGV HOUSING INLET INLET TUBES = BLUE OUTLET TUBES = BLACK 300 APPROX CABLE LENGTH DIMENSIONS: MILLIMETERS FEEDBACK AND MOTOR POWER CONNECTORS REVISIONS ECO REV. DESCRIPTION DATE APPROVED APARKER MODEL BY: MODEL FILENAME: AGV10XPO-BE1 AGV10XPO-E1-BE1 PART CODE: GALVANOMETER SCANNER EXTREME-PERFORMANCE AGV10XPO-E1-BE1-CAT PART NAME: DWG. NO. REV AGV10XPO-E1-BE1 SHEET 1 OF 1 01-NOV-21 DATE EMOSIER DRAW APARKER APARKER NAME CHECK APPR. 01-NOV-21 01-NOV-21 PLACE DRAWING VIEWS BELOW 63.5 18.5 MAXIMUM LENS IMMERSION DEPTH 54 18.5 56 16 63.5 6.8 0.08 0 4.8 126 APPROX 28.5 22 33 49 37.4 105 M6X1.0 9 (4) PLACES M5X0.8 7.5 (4) PLACES 28.7 28.7 12.6 BEAM DISPLACEMENT M5X0.8 7.5 (4) PLACES CL BEAM IN 4 7 DOWEL PIN HOLE AND SLOT 14.5 28.5 4 7 DOWEL PIN HOLE AND SLOT M6X1.0 9 (4) PLACES AIR COOLING INLETS (-AC) AIR COOLING OPTION (-WC) WATER COOLING OPTION X MOTOR OUTLET INLET Y MOTOR INLET OUTLET OUTLET AGV HOUSING INLET INLET TUBES = BLUE OUTLET TUBES = BLACK 300 APPROX CABLE LENGTH DIMENSIONS: MILLIMETERS FEEDBACK AND MOTOR POWER CONNECTORS REVISIONS ECO REV. DESCRIPTION DATE APPROVED APARKER MODEL BY: MODEL FILENAME: AGV10XPO-BE1 AGV10XPO-E1-BE1 PART CODE: GALVANOMETER SCANNER EXTREME-PERFORMANCE AGV10XPO-E1-BE1-CAT PART NAME: DWG. NO. REV AGV10XPO-E1-BE1 SHEET 1 OF 1 01-NOV-21 DATE EMOSIER DRAW APARKER APARKER NAME CHECK APPR. 01-NOV-21 01-NOV-21 PLACE DRAWING VIEWS BELOW AGV-XPO DIMENSIONS AGV10XPO-E1-BE1

aerotech.com 63.5 18.5 MAXIMUM LENS IMMERSION DEPTH 300 APPROX CABLE LENGTH 54 18.5 56 16 63.5 6.8 0.08 0 4.8 126 APPROX 28.5 14 7 33 49 37.4 105 M6X1.0 9 (4) PLACES M5X0.8 7.5 (4) PLACES 6 8 DOWEL PIN HOLE AND SLOT 4 7 DOWEL PIN HOLE AND SLOT 28.7 28.7 12.6 BEAM DISPLACEMENT M5X0.8 7.5 (4) PLACES 4 7 DOWEL PIN HOLE AND SLOT CL BEAM IN 60 28.5 14.5 M6X1.0 9 (4) PLACES 4 7 DOWEL PIN HOLE AND SLOT (-AC) AIR COOLING OPTION AIR COOLING INLETS (-WC) WATER COOLING OPTION X MOTOR OUTLET INLET Y MOTOR INLET OUTLET AGV HOUSING INLET OUTLET INLET TUBES = BLUE OUTLET TUBES = BLACK DIMENSIONS: MILLIMETERS FEEDBACK AND MOTOR POWER CONNECTORS REVISIONS ECO REV. DESCRIPTION DATE APPROVED APARKER MODEL BY: MODEL FILENAME: AGV10XPO-BE2 AGV10XPO-E1-BE2 PART CODE: GALVANOMETER SCANNER EXTREME-PERFORMANCE AGV10XPO-E1-BE2-CAT PART NAME: DWG. NO. REV AGV10XPO-E1-BE2 SHEET 1 OF 1 17-JAN-22 DATE EMOSIER DRAW APARKER APARKER NAME CHECK APPR. 18-JAN-22 15-JAN-22 PLACE DRAWING VIEWS BELOW 63.5 18.5 MAXIMUM LENS IMMERSION DEPTH 300 APPROX CABLE LENGTH 54 18.5 56 16 63.5 6.8 0.08 0 4.8 126 APPROX 28.5 14 7 33 49 37.4 105 M6X1.0 9 (4) PLACES M5X0.8 7.5 (4) PLACES 6 8 DOWEL PIN HOLE AND SLOT 4 7 DOWEL PIN HOLE AND SLOT 28.7 28.7 12.6 BEAM DISPLACEMENT M5X0.8 7.5 (4) PLACES 4 7 DOWEL PIN HOLE AND SLOT CL BEAM IN 60 28.5 14.5 M6X1.0 9 (4) PLACES 4 7 DOWEL PIN HOLE AND SLOT (-AC) AIR COOLING OPTION AIR COOLING INLETS (-WC) WATER COOLING OPTION X MOTOR OUTLET INLET Y MOTOR INLET OUTLET AGV HOUSING INLET OUTLET INLET TUBES = BLUE OUTLET TUBES = BLACK DIMENSIONS: MILLIMETERS FEEDBACK AND MOTOR POWER CONNECTORS REVISIONS ECO REV. DESCRIPTION DATE APPROVED APARKER MODEL BY: MODEL FILENAME: AGV10XPO-BE2 AGV10XPO-E1-BE2 PART CODE: GALVANOMETER SCANNER EXTREME-PERFORMANCE AGV10XPO-E1-BE2-CAT PART NAME: DWG. NO. REV AGV10XPO-E1-BE2 SHEET 1 OF 1 17-JAN-22 DATE EMOSIER DRAW APARKER APARKER NAME CHECK APPR. 18-JAN-22 15-JAN-22 PLACE DRAWING VIEWS BELOW AGV-XPO DIMENSIONS AGV10XPO-E1-BE2

aerotech.com 90 (2) PLACES 63.5 95 34.1

177 APPROX

12.3 18.5 MAXIMUM LENS IMMERSION DEPTH 1000 APPROX CABLE LENGTH 54 18.5 56 16 63.5 6.8 0.08 0 4.8 160 183

6.6 THRU ALL

(4) PLACES 28.5 121 APPROX 105 154 APPROX 49 33 37.4

133 APPROX

M5X0.8 7.5 (4) PLACES M6X1.0 9 (4) PLACES 6 8 DOWEL PIN HOLE AND SLOT 4 7 DOWEL PIN HOLE AND SLOT 16.7 (4) PLACES SIGNAL PROCESSING BOX FEEDBACK AND MOTOR POWER CONNECTORS 28.7 28.7 50 12.6 BEAM DISPLACEMENT M5X0.8 7.5 (4) PLACES 4 7 DOWEL PIN HOLE AND SLOT 14.5 28.5 M6X1.0 9 (4) PLACES4 7 DOWEL PIN HOLE AND SLOT AIR COOLING INLETS (-AC) AIR COOLING OPTION CL BEAM IN (-WC) WATER COOLING OPTION X MOTOR OUTLET INLET Y MOTOR INLET OUTLET AGV HOUSING INLET OUTLET INLET TUBES = BLUE OUTLET TUBES = BLACK DIMENSIONS: MILLIMETERS REVISIONS ECO REV. DESCRIPTION DATE APPROVED ECO1006800 A INCREASE LENGTH, WIDTH, AND HEIGHT OF MOTOR COVERS BY 4MM 03-JUN-24 SPOEPOE APARKER MODEL BY: MODEL FILENAME: AGV10XPO-BE1 A AGV10XPO-E2-BE1 PART CODE: GALVANOMETER SCANNER EXTREME-PERFORMANCE AGV10XPO-E2-BE1-CAT PART NAME: DWG. NO. REV AGV10XPO-E2-BE1 SHEET 1 OF 1 01-NOV-21 DATE EMOSIER DRAW APARKER APARKER NAME CHECK APPR. 01-NOV-21 01-NOV-21 PLACE DRAWING VIEWS BELOW AGV-XPO DIMENSIONS AGV10XPO-E2-BE1

aerotech.com 63.5 12.3 34.1 90 (2) PLACES 18.5 MAXIMUM LENS IMMERSION DEPTH 54 18.5 56 16 63.5 6.8 0.08 0 4.8 28.5 14 7 33 49 37.4 105 140 APPROX M6X1.0 9 (4) PLACES M5X0.8 7.5 (4) PLACES 6 8 DOWEL PIN HOLE AND SLOT 4 7 DOWEL PIN HOLE AND SLOT 28.7 28.7 12.6 BEAM DISPLACEMENT M5X0.8 7.5 (4) PLACES 4 7 DOWEL PIN HOLE AND SLOT CL BEAM IN 28.5 14.5 M6X1.0 9 (4) PLACES 4 7 DOWEL PIN HOLE AND SLOT (-AC) AIR COOLING OPTION AIR COOLING INLETS (-WC) WATER COOLING OPTION X MOTOR OUTLET INLET Y MOTOR INLET OUTLET AGV HOUSING INLET OUTLET INLET TUBES = BLUE OUTLET TUBES = BLACK 160 183 (4) PLACES 16.7 (4) PLACES 1000 APPROX CABLE LENGTH FEEDBACK AND MOTOR POWER CONNECTORS SIGNAL PROCESSING BOX DIMENSIONS: MILLIMETERS REVISIONS ECO REV. DESCRIPTION DATE APPROVED ECO1006800 A INCREASE LENGTH, WIDTH, AND HEIGHT OF MOTOR COVERS BY 4MM 03-JUN-24 SPOEPOE APARKER MODEL BY: MODEL FILENAME: AGV10XPO-BE2 A AGV10XPO-E2-BE2 PART CODE: GALVANOMETER SCANNER EXTREME-PERFORMANCE AGV10XPO-E2-BE2-CAT PART NAME: DWG. NO. REV AGV10XPO-E2-BE2 SHEET 1 OF 1 17-JAN-22 DATE EMOSIER DRAW APARKER APARKER NAME CHECK APPR. 18-JAN-22 15-JAN-22 PLACE DRAWING VIEWS BELOW AGV-XPO DIMENSIONS AGV10XPO-E2-BE2

aerotech.com 63.5

155 APPROX

16.9 MAXIMUM LENS IMMERSION DEPTH 300 APPROX CABLE LENGTH 53 16.9 60 15

68.5 X 90

0.08 0 5.5 127 APPROX 15 21 7 14 33 49 38.5 110

121 APPROX

15 FOR

14 BEAM

M6X1.0 9 (4) PLACES M5X0.8 7.5 (4) PLACES 28.7 28.7 16.5 BEAM DISPLACEMENT CL BEAM IN 4 7 DOWEL PIN HOLE AND SLOT M5X0.8 7.5 (4) PLACES 60 27 M6X1.0 9 (4) PLACES4 7 DOWEL PIN HOLE AND SLOT (-AC) AIR COOLING OPTION AIR COOLING INLETS (-WC) WATER COOLING OPTION INLET TUBES = BLUE OUTLET TUBES = BLACK X MOTOR OUTLET INLET Y MOTOR INLET OUTLET AGV HOUSING INLET OUTLET DIMENSIONS: MILLIMETERS FEEDBACK AND MOTOR POWER CONNECTORS REVISIONS ECO REV. DESCRIPTION DATE APPROVED APARKER MODEL BY: MODEL FILENAME: AGV14XPO-BE1 AGV14XPO-E1-BE1 PART CODE: GALVANOMETER SCANNER EXTREME-PERFORMANCE AGV14XPO-E1-BE1-CAT PART NAME: DWG. NO. REV AGV14XPO-E1-BE1 SHEET 1 OF 1 04-FEB-21 DATE EMOSIER DRAW APARKER APARKER NAME CHECK APPR. 04-FEB-21 29-JAN-21 PLACE DRAWING VIEWS BELOW 63.5 16.9 MAXIMUM LENS IMMERSION DEPTH 300 APPROX CABLE LENGTH 53 16.9 60 15 0.08 0 5.5 127 APPROX 15 21 7 14 33 49 38.5 110 M6X1.0 9 (4) PLACES M5X0.8 7.5 (4) PLACES 28.7 28.7 16.5 BEAM DISPLACEMENT CL BEAM IN 4 7 DOWEL PIN HOLE AND SLOT M5X0.8 7.5 (4) PLACES 60 27 M6X1.0 9 (4) PLACES4 7 DOWEL PIN HOLE AND SLOT (-AC) AIR COOLING OPTION AIR COOLING INLETS (-WC) WATER COOLING OPTION INLET TUBES = BLUE OUTLET TUBES = BLACK X MOTOR OUTLET INLET Y MOTOR INLET OUTLET AGV HOUSING INLET OUTLET DIMENSIONS: MILLIMETERS FEEDBACK AND MOTOR POWER CONNECTORS REVISIONS ECO REV. DESCRIPTION DATE APPROVED APARKER MODEL BY: MODEL FILENAME: AGV14XPO-BE1 AGV14XPO-E1-BE1 PART CODE: GALVANOMETER SCANNER EXTREME-PERFORMANCE AGV14XPO-E1-BE1-CAT PART NAME: DWG. NO. REV AGV14XPO-E1-BE1 SHEET 1 OF 1 04-FEB-21 DATE EMOSIER DRAW APARKER APARKER NAME CHECK APPR. 04-FEB-21 29-JAN-21 PLACE DRAWING VIEWS BELOW AGV-XPO DIMENSIONS AGV14XPO-E1-BE1

aerotech.com AGV-XPO DIMENSIONS AGV14XPO-E1-BE2 63.5 16.9 MAXIMUM LENS IMMSERSION DEPTH 300 APPROX CABLE LENGTH 53 16.9 60 15 0.08 0 5.5 127 APPROX 33 49 38.5 110 M6X1.0 9 (4) PLACES M5X0.8 7.5 (4) PLACES 6 8 DOWEL PIN HOLE AND SLOT 4 7 DOWEL PIN HOLE AND SLOT 28.7 28.7 16.5 BEAM DISPLACEMENT CL BEAM IN 4 7 DOWEL PIN HOLE AND SLOT M5X0.8 7.5 (4) PLACES (-AC) AIR COOLING OPTION AIR COOLING INLETS (-WC) WATER COOLING OPTION INLET TUBES = BLUE OUTLET TUBES = BLACK X MOTOR OUTLET Y MOTOR INLET INLET OUTLET AGV HOUSING INLET OUTLET 27 13 M6X1.0 9 (4) PLACES 4 7 DOWEL PIN HOLE AND SLOT DIMENSIONS: MILLIMETERS FEEDBACK AND MOTOR POWER CONNECTORS REVISIONS ECO REV. DESCRIPTION DATE APPROVED APARKER MODEL BY: MODEL FILENAME: AGV14XPO-BE2 AGV14XPO-E1-BE2 PART CODE: GALVANOMETER SCANNER EXTREME-PERFORMANCE AGV14XPO-E1-BE2 PART NAME: DWG. NO. REV AGV14XPO-E1-BE2 SHEET 1 OF 1 17-JAN-22 DATE EMOSIER DRAW APARKER APARKER NAME CHECK APPR. 18-JAN-22 15-JAN-22 PLACE DRAWING VIEWS BELOW

aerotech.com AGV-XPO DIMENSIONS AGV14XPO-E2-BE1 63.5

180 APPROX

37.2 90 (2) PLACES 12.4 16.9 MAXIMUM LENS IMMERSION DEPTH 53 16.9 60 15 0.08 0 5.5 1000 APPROX CABLE LENGTH 15 21 7 14 33 49 38.5 110 155 APPROX 122 APPROX

138 APPROX

M6X1.0 9 (4) PLACES M5X0.8 7.5 (4) PLACES 28.7 28.7 16.5 BEAM DISPLACEMENT 4 7 DOWEL PIN HOLE AND SLOT M5X0.8 7.5 (4) PLACES CL BEAM IN M6X1.0 9 (4) PLACES 4 7 DOWEL PIN HOLE AND SLOT (-AC) AIR COOLING OPTION AIR COOLING INLETS (-WC) WATER COOLING OPTION INLET TUBES = BLUE OUTLET TUBES = BLACK X MOTOR OUTLET INLET Y MOTOR INLET OUTLET AGV HOUSING INLET OUTLET 16.7 (4) PLACES 160 183 (4) PLACES SIGNAL PROCESSING BOX FEEDBACK AND MOTOR POWER CONNECTORS DIMENSIONS: MILLIMETERS REVISIONS ECO REV. DESCRIPTION DATE APPROVED ECO1006800 A INCREASE LENGTH, WIDTH, AND HEIGHT OF MOTOR COVERS BY 4MM 03-JUN-24 SPOEPOE APARKER MODEL BY: MODEL FILENAME: AGV14XPO-BE1 A AGV14XPO-E2-BE1 PART CODE: GALVANOMETER SCANNER EXTREME-PERFORMANCE AGV14XPO-E2-BE1-CAT PART NAME: DWG. NO. REV AGV14XPO-E2-BE1 SHEET 1 OF 1 04-FEB-21 DATE EMOSIER DRAW APARKER APARKER NAME CHECK APPR. 04-FEB-21 29-JAN-21 PLACE DRAWING VIEWS BELOW

aerotech.com AGV-XPO DIMENSIONS AGV14XPO-E2-BE2 63.5 95 37.2 12.4 90 (2) PLACES 16.9 MAXIMUM LENS IMMSERSION DEPTH 1000 APPROX CABLE LENGTH 53 16.9 60 15 0.08 0 5.5 27 22 33 49 38.5 110 15 21 141 APPROX

137 APPROX

M6X1.0 9 (4) PLACES M5X0.8 7.5 (4) PLACES 6 8 DOWEL PIN HOLE AND SLOT 4 7 DOWEL PIN HOLE AND SLOT 28.7 28.7 16.5 BEAM DISPLACEMENT CL BEAM IN 4 7 DOWEL PIN HOLE AND SLOT M5X0.8 7.5 (4) PLACES (-AC) AIR COOLING OPTION AIR COOLING INLETS (-WC) WATER COOLING OPTION INLET TUBES = BLUE OUTLET TUBES = BLACK X MOTOR OUTLET Y MOTOR INLET INLET OUTLET AGV HOUSING INLET OUTLET 27 13 M6X1.0 9 (4) PLACES 4 7 DOWEL PIN HOLE AND SLOT 160 183 (4) PLACES 16.7 (4) PLACES FEEDBACK AND MOTOR POWER CONNECTORS SIGNAL PROCESSING BOX DIMENSIONS: MILLIMETERS REVISIONS ECO REV. DESCRIPTION DATE APPROVED ECO1006800 A INCREASE LENGTH, WIDTH, AND HEIGHT OF MOTOR COVERS BY 4MM 03-JUN-24 SPOEPOE APARKER MODEL BY: MODEL FILENAME: AGV14XPO-BE2 A AGV14XPO-E2-BE2 PART CODE: GALVANOMETER SCANNER EXTREME-PERFORMANCE AGV14XPO-E2-BE2-CAT PART NAME: DWG. NO. REV AGV14XPO-E2-BE2 SHEET 1 OF 1 17-JAN-22 DATE EMOSIER DRAW APARKER APARKER NAME CHECK APPR. 18-JAN-22 15-JAN-22 PLACE DRAWING VIEWS BELOW

aerotech.com AGV-XPO DIMENSIONS AGV20XPO-E1-BE1 115

172 APPROX

75.5 12

81.5 X 90

0.08 0 5.5 129 APPROX

128 APPROX

41.8 100 120 M6X1.0 9 (4) PLACES 6 8 DOWEL PIN HOLE AND SLOT

21 FOR

20 BEAM

50.6 26.3 23.2 BEAM DISPLACEMENT 26.3 50.6 4 7 DOWEL PIN HOLE AND SLOT M6X1.0 9 (4) PLACES (-AC) AIR COOLING OPTION AIR COOLING INLETS 80 25 7.5 M6X1.0 9 (4) PLACES 6 8 DOWEL PIN HOLE AND SLOT (-WC) WATER COOLING OPTION Y MOTOR INLET OUTLET OUTLET AGV HOUSING INLET INLET X MOTOR OUTLET INLET TUBES = BLUE OUTLET TUBES = BLACK DIMENSIONS: MILLIMETERS 300 APPROX CABLE LENGTH FEEDBACK AND MOTOR POWER CONNECTORS CL BEAM IN REVISIONS ECO REV. DESCRIPTION DATE APPROVED APARKER MODEL BY: MODEL FILENAME: AGV20XPO-BE1 AGV20XPO-E1-BE1 PART CODE: GALVANOMETER SCANNER EXTREME-PERFORMANCE AGV20XPO-E1-BE1 PART NAME: DWG. NO. REV AGV20XPO-E1-BE1 SHEET 1 OF 1 04-FEB-21 DATE EMOSIER DRAW APARKER APARKER NAME CHECK APPR. 04-FEB-21 29-JAN-21 PLACE DRAWING VIEWS BELOW

aerotech.com AGV-XPO DIMENSIONS AGV20XPO-E1-BE2 115 75.5 12 0.08 0 5.5 129 APPROX 33 49 41.8 100 120 M6X1.0 9 (4) PLACES (-AC) AIR COOLING OPTION AIR COOLING INLETS (-WC) WATER COOLING OPTION INLET TUBES = BLUE OUTLET TUBES = BLACK X MOTOR OUTLET INLET Y MOTOR INLET OUTLET AGV HOUSING INLET OUTLET 26.3 50.6 23.2 BEAM DISPLACEMENT 50.6 26.3 CL BEAM IN M6X1.0 9 (4) PLACES 4 7 DOWEL PIN HOLE AND SLOT 25 7.5 M6X1.0 9 (4) PLACES 6 8 DOWEL PIN HOLE AND SLOT DIMENSIONS: MILLIMETERS FEEDBACK AND MOTOR POWER CONNECTORS REVISIONS ECO REV. DESCRIPTION DATE APPROVED APARKER MODEL BY: MODEL FILENAME: AGV20XPO-BE2 AGV20XPO-E1-BE2 PART CODE: GALVANOMETER SCANNER EXTREME-PERFORMANCE AGV20XPO-E1-BE2-CAT PART NAME: DWG. NO. REV AGV20XPO-E1-BE2 SHEET 1 OF 1 17-JAN-22 DATE EMOSIER DRAW APARKER APARKER NAME CHECK APPR. 18-JAN-22 15-JAN-22 PLACE DRAWING VIEWS BELOW

aerotech.com AGV-XPO DIMENSIONS AGV20XPO-E2-BE1 115

198 APPROX

90 (2) PLACES 34.2 12.6 12 MAXIMUM LENS IMMERSION DEPTH 75.5 12 0.08 0 5.5 1000 APPROX CABLE LENGTH 49 33 41.8 100 120 124 APPROX 157 APPROX

146 APPROX

M6X1.0 9 (4) PLACES 6 8 DOWEL PIN HOLE AND SLOT 50.6 26.3 23.2 BEAM DISPLACEMENT 26.3 50.6 4 7 DOWEL PIN HOLE AND SLOT M6X1.0 9 (4) PLACES CL BEAM IN (-AC) AIR COOLING OPTION AIR COOLING INLETS 25 20 7.5 M6X1.0 9 (4) PLACES 6 8 DOWEL PIN HOLE AND SLOT (-WC) WATER COOLING OPTION Y MOTOR INLET OUTLET OUTLET AGV HOUSING INLET INLET X MOTOR OUTLET INLET TUBES = BLUE OUTLET TUBES = BLACK SIGNAL PROCESSING BOX FEEDBACK AND MOTOR POWER CONNECTORS 16.7 (4) PLACES 160 183 (4) PLACES DIMENSIONS: MILLIMETERS REVISIONS ECO REV. DESCRIPTION DATE APPROVED ECO1006800 A INCREASE LENGTH, WIDTH, AND HEIGHT OF MOTOR COVERS BY 4MM 03-JUN-24 SPOEPOE APARKER MODEL BY: MODEL FILENAME: AGV20XPO-BE1 A AGV20XPO-E2-BE1 PART CODE: GALVANOMETER SCANNER EXTREME-PERFORMANCE AGV20XPO-E2-BE1-CAT PART NAME: DWG. NO. REV AGV20XPO-E2-BE1 SHEET 1 OF 1 04-FEB-21 DATE EMOSIER DRAW APARKER APARKER NAME CHECK APPR. 04-FEB-21 29-JAN-21 PLACE DRAWING VIEWS BELOW

aerotech.com AGV-XPO DIMENSIONS AGV20XPO-E2-BE2 115 34.2 12.6 90 (2) PLACES MAXIMUM LENS IMMERSION DEPTH 1000 APPROX CABLE LENGTH 75.5 12 0.08 0 5.5 33 49 41.8 100 120 M6X1.0 9 (4) PLACES (-AC) AIR COOLING OPTION AIR COOLING INLETS (-WC) WATER COOLING OPTION INLET TUBES = BLUE OUTLET TUBES = BLACK X MOTOR OUTLET INLET Y MOTOR INLET OUTLET AGV HOUSING INLET OUTLET 26.3 50.6 23.2 BEAM DISPLACEMENT 50.6 26.3 CL BEAM IN M6X1.0 9 (4) PLACES 4 7 DOWEL PIN HOLE AND SLOT 20 25 7.5 M6X1.0 9 (4) PLACES 6 8 DOWEL PIN HOLE AND SLOT 160 183 (4) PLACES 16.7 (4) PLACES FEEDBACK AND MOTOR POWER CONNECTORS SIGNAL PROCESSING BOX DIMENSIONS: MILLIMETERS REVISIONS ECO REV. DESCRIPTION DATE APPROVED ECO10068

00 A INCREASE LENGTH, WIDTH, AND HEIGHT OF MOTOR

COVERS BY 4MM 03-JUN-24 SPOEPOE APARKER MODEL BY: MODEL FILENAME: AGV20XPO-BE2 A AGV20XPO-E2-BE2 PART CODE: GALVANOMETER SCANNER EXTREME-PERFORMANCE AGV20XPO-E2-BE2-CAT PART NAME: DWG. NO. REV AGV20XPO-E2-BE2 SHEET 1 OF 1 17-JAN-22 DATE EMOSIER DRAW APARKER APARKER NAME CHECK APPR. 18-JAN-22 15-JAN-22 PLACE DRAWING VIEWS BELOW