AGV-CPO

AGV-CPO AEROTECH | Alldatasheet

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CORE Precision & Dynamics The AGV-CPO laser scan head perfectly balances performance and value for the widest range of laser applications. As the entry point for our high-performance two-axis laser scan heads, the AGV-CPO includes all the CORE performance capabilities of our AGV-HPO and AGV-XPO scanners—plus 22-bit resolution, excellent dynamics and ultra-low thermal drift. Key Applications AGV-CPO provides dynamics, precision and superior optical performance to a broad range of laser applications, including: ‹ Laser process development & research ‹ Ultrafast laser processing ‹ High-speed drilling & cutting ‹ Micromachining ‹ Surface texturing CORE Performance Two-Axis Laser Scan Heads AGV-CPO ‹ 100 kHz trajectory planning & 200 kHz servo rates ensure perfect motion tracking & minimal jump-and-settle times ‹ POSITION SYNCHRONIZED OUTPUT (PSO) enables accurate laser triggering regardless of process speed or acceleration ‹ INFINITE FIELD OF VIEW (IFOV) enables seamless synchronization with linear & rotary servo motion to extend the scanner's field of view to large processing areas ‹ Optional DIRECT MOTOR STATOR WATER COOLING & AIR-COOLED MIRRORS minimizes process stabilization time & thermal drift ‹ Dual digital encoder feedback eliminates velocity error & enables SINGLE-DIGIT MICROMETER-LEVEL ACCURACY throughout the scanner's field of view ‹ Available in 10 mm, 14 mm & 20 mm input apertures CORE FEATURES:

aerotech.com AGV-CPO SPECIFICATIONS Note: All specifications are per axis unless noted. All angles are optical unless otherwise noted. 1. Without mark and measure calibration. 2. Without -AC air cooling option. 3. At constant ambient environment and motor temperature. 4. Typical performance with f = 160 mm F-Theta objective. 5. Based on the maximum rated current of the motor. 6. Based on the rated rms current of the motor with -WC water cooling option; maximum continuous acceleration is 70% of this value without water cooling. 7. Settled to within 1% of move distance. 8. With Enhanced Scanner Control (ESC) enabled. 9. Achievable with <1% velocity error over continuous velocity portion of move. Specifications AGV10CPO AGV14CPO AGV20CPO Optical Performance Beam Aperture 10 mm 14 mm 20 mm Maximum Scan Angle ±20° Precision Feedback Resolution 0.15 µrad (22 bit) Accuracy(1) 100 µrad pk-pk Repeatability(2) 0.6 µradRMS Gain Error <0.1 mrad Non-Linearity 0.015% Dither(2) 0.6 µradRMS Dynamic Performance Tracking Error 0 µsec Peak Acceleration(3)(4) 260,000 m/s2 150,000 m/s2 60,000 m/s2 Continuous Acceleration(3)(5) 52,000 m/s2 30,000 m/s2 12,000 m/s2 Positioning Speed(4) 75 m/s 70 m/s 45 m/s Marking Speed(9) 5 m/s Jump & Settle Time (1 mm Move)(3)(6)(7) Standard 540 µs 1100 µs 2100 µs with ESC(8) 310 µs 285 µs 720 µs Stability Long-Term Drift(2) Offset 10 µrad/12 hrs 15 µrad/24 hrs Gain 10 ppm/24 hrs Thermal Drift Offset 10 µrad/°C Gain 2 ppm/°C Mechanical Specifications Mass 2.5 kg 2.6 kg 2.9 kg Operating Temperature < 60°C Material Aluminum (Black Anodize), Stainless Steel Mean Time Before Failure 20,000 Hours

aerotech.com AGV-CPO ORDERING OPTIONS AGV-CPO CORE Performance Series Laser Scan Head AGV10CPO 2-axis galvanometer scanner with 10 mm diameter beam aperture AGV14CPO 2-axis galvanometer scanner with 14 mm diameter beam aperture AGV20CPO 2-axis galvanometer scanner with 20 mm diameter beam aperture Contact factory for additional aperture options. Beam Entry (Required) -BE1 Right-side laser beam entry (standard) -BE2 Left-side laser beam entry Wavelength of Mirror Coating (Required) -W011S 1030/515/343 nm Tri-Band -W013S 9.3-10.6 µm CO2 Custom coatings available. Contact factory for details. Air Cooling (Optional) -AC Air Cooling Water Cooling (Optional) -WC Water Cooling Integration (Required) Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required or if you desire custom integration support with your system. -TAS Integration - Test as system Testing, integration and documentation of a group of components as a complete system that will be used together (ex: drive, controller and stage). This includes parameter file generation, system tuning and documentation of the system configuration.

aerotech.com 63.5

152 APPROX

18.5 MAXIMUM LENS IMMERSION DEPTH 54 18.5 56 16

59.4 X 90

63.5 6.8

66 X 90

0.08 0 4.8 127 APPROX 28.5 22 33 49 37.4 105

116 APPROX

M6X1.0 9 (4) PLACES M5X0.8 7.5 (4) PLACES

11 FOR

10 BEAM

28.7 28.7 12.6 BEAM DISPLACEMENT M5X0.8 7.5 (4) PLACES CL BEAM IN 4 7 DOWEL PIN HOLE AND SLOT 14.5 28.5 4 7 DOWEL PIN HOLE AND SLOT M6X1.0 9 (4) PLACES AIR COOLING INLETS (-AC) AIR COOLING OPTION (-WC) WATER COOLING OPTION X MOTOR OUTLET INLET Y MOTOR INLET OUTLET OUTLET AGV HOUSING INLET INLET TUBES = BLUE OUTLET TUBES = BLACK DIMENSIONS: MILLIMETERS INTEGRATED MOTOR POWER/FEEDBACK CONNECTORS REVISIONS ECO REV. DESCRIPTION DATE APPROVED SPOEPOE MODEL BY: MODEL FILENAME: AGV10CPO AGV10CPO-BE1 PART CODE: RIGHT SIDE BEAM ENTRY AGV10CPO-BE1-CAT PART NAME: DWG. NO. REV AGV10CPO SHEET 1 OF 1 06-MAY-25 DATE JDUMM DRAW SPOEPOE SPOEPOE NAME CHECK APPR. 17-JUN-25 06-MAY-25 PLACE DRAWING VIEWS BELOWAGV-CPO DIMENSIONS AGV10CPO-BE1 63.5 18.5 MAXIMUM LENS IMMERSION DEPTH 54 18.5 56 16 63.5 6.8 0.08 0 4.8 127 APPROX 28.5 22 33 49 37.4 105 M6X1.0 9 (4) PLACES M5X0.8 7.5 (4) PLACES 28.7 28.7 12.6 BEAM DISPLACEMENT M5X0.8 7.5 (4) PLACES CL BEAM IN 4 7 DOWEL PIN HOLE AND SLOT 14.5 28.5 4 7 DOWEL PIN HOLE AND SLOT M6X1.0 9 (4) PLACES AIR COOLING INLETS (-AC) AIR COOLING OPTION (-WC) WATER COOLING OPTION X MOTOR OUTLET INLET Y MOTOR INLET OUTLET OUTLET AGV HOUSING INLET INLET TUBES = BLUE OUTLET TUBES = BLACK DIMENSIONS: MILLIMETERS INTEGRATED MOTOR POWER/FEEDBACK CONNECTORS REVISIONS ECO REV. DESCRIPTION DATE APPROVED SPOEPOE MODEL BY: MODEL FILENAME: AGV10CPO AGV10CPO-BE1 PART CODE: RIGHT SIDE BEAM ENTRY AGV10CPO-BE1-CAT PART NAME: DWG. NO. REV AGV10CPO SHEET 1 OF 1 06-MAY-25 DATE JDUMM DRAW SPOEPOE SPOEPOE NAME CHECK APPR. 17-JUN-25 06-MAY-25 PLACE DRAWING VIEWS BELOW

aerotech.com 63.5 18.5 MAXIMUM LENS IMMERSION DEPTH 54 18.5 56 16 63.5 6.8 0.08 0 4.8 INTEGRATED MOTOR POWER/FEEDBACK CONNECTORS 127 APPROX 28.5 14 7 33 49 37.4 105 M6X1.0 9 (4) PLACES M5X0.8 7.5 (4) PLACES 6 8 DOWEL PIN HOLE AND SLOT 4 7 DOWEL PIN HOLE AND SLOT 28.7 28.7 12.6 BEAM DISPLACEMENT M5X0.8 7.5 (4) PLACES 4 7 DOWEL PIN HOLE AND SLOT CL BEAM IN 60 28.5 14.5 M6X1.0 9 (4) PLACES 4 7 DOWEL PIN HOLE AND SLOT (-AC) AIR COOLING OPTION AIR COOLING INLETS (-WC) WATER COOLING OPTION X MOTOR OUTLET INLET Y MOTOR INLET OUTLET AGV HOUSING INLET OUTLET INLET TUBES = BLUE OUTLET TUBES = BLACK DIMENSIONS: MILLIMETERS REVISIONS ECO REV. DESCRIPTION DATE APPROVED SPOEPOE MODEL BY: MODEL FILENAME: AGV10CPO AGV10CPO-BE2 PART CODE: LEFT SIDE BEAM ENTRY AGV10CPO-BE2-CAT PART NAME: DWG. NO. REV AGV10CPO SHEET 1 OF 1 06-MAY-25 DATE JDUMM DRAW SPOEPOE SPOEPOE NAME CHECK APPR. 17-JUN-25 06-MAY-25 PLACE DRAWING VIEWS BELOW AGV-CPO DIMENSIONS AGV10CPO-BE2 63.5 18.5 MAXIMUM LENS IMMERSION DEPTH 54 18.5 56 16 63.5 6.8 0.08 0 4.8 INTEGRATED MOTOR POWER/FEEDBACK CONNECTORS 127 APPROX 28.5 14 7 33 49 37.4 105 M6X1.0 9 (4) PLACES M5X0.8 7.5 (4) PLACES 6 8 DOWEL PIN HOLE AND SLOT 4 7 DOWEL PIN HOLE AND SLOT 28.7 28.7 12.6 BEAM DISPLACEMENT M5X0.8 7.5 (4) PLACES 4 7 DOWEL PIN HOLE AND SLOT CL BEAM IN 60 28.5 14.5 M6X1.0 9 (4) PLACES 4 7 DOWEL PIN HOLE AND SLOT (-AC) AIR COOLING OPTION AIR COOLING INLETS (-WC) WATER COOLING OPTION X MOTOR OUTLET INLET Y MOTOR INLET OUTLET AGV HOUSING INLET OUTLET INLET TUBES = BLUE OUTLET TUBES = BLACK DIMENSIONS: MILLIMETERS REVISIONS ECO REV. DESCRIPTION DATE APPROVED SPOEPOE MODEL BY: MODEL FILENAME: AGV10CPO AGV10CPO-BE2 PART CODE: LEFT SIDE BEAM ENTRY AGV10CPO-BE2-CAT PART NAME: DWG. NO. REV AGV10CPO SHEET 1 OF 1 06-MAY-25 DATE JDUMM DRAW SPOEPOE SPOEPOE NAME CHECK APPR. 17-JUN-25 06-MAY-25 PLACE DRAWING VIEWS BELOW

aerotech.com 63.5

156 APPROX

16.9 MAXIMUM LENS IMMERSION DEPTH 53 16.9 60 15

68.5 X 90

0.08 0 5.5 INTEGRATED MOTOR POWER/FEEDBACK CONNECTORS 128 APPROX 15 21 7 14 33 49 38.5 110

121 APPROX

15 FOR

14 BEAM

M6X1.0 9 (4) PLACES M5X0.8 7.5 (4) PLACES 28.7 28.7 16.5 BEAM DISPLACEMENT CL BEAM IN 4 7 DOWEL PIN HOLE AND SLOT M5X0.8 7.5 (4) PLACES 60 27 M6X1.0 9 (4) PLACES4 7 DOWEL PIN HOLE AND SLOT (-AC) AIR COOLING OPTION AIR COOLING INLETS (-WC) WATER COOLING OPTION INLET TUBES = BLUE OUTLET TUBES = BLACK X MOTOR OUTLET INLET Y MOTOR INLET OUTLET AGV HOUSING INLET OUTLET DIMENSIONS: MILLIMETERS REVISIONS ECO REV. DESCRIPTION DATE APPROVED SPOEPOE MODEL BY: MODEL FILENAME: AGV14CPO AGV14CPO-BE1 PART CODE: AGV14CPO-BE1-CAT PART NAME: DWG. NO. REV AGV14CPO SHEET 1 OF 1 06-MAY-25 DATE JDUMM DRAW SPOEPOE SPOEPOE NAME CHECK APPR. 17-JUN-25 06-MAY-25 PLACE DRAWING VIEWS BELOW RIGHT SIDE BEAM ENTRY AGV-CPO DIMENSIONS AGV14CPO-BE1

aerotech.com 63.5 16.9 MAXIMUM LENS IMMERSION DEPTH 53 16.9 60 15 0.08 0 5.5 INTEGRATED MOTOR POWER/FEEDBACK CONNECTORS 128 APPROX 33 49 38.5 110 M6X1.0 9 (4) PLACES M5X0.8 7.5 (4) PLACES 6 8 DOWEL PIN HOLE AND SLOT 4 7 DOWEL PIN HOLE AND SLOT 28.7 28.7 16.5 BEAM DISPLACEMENT CL BEAM IN 4 7 DOWEL PIN HOLE AND SLOT M5X0.8 7.5 (4) PLACES (-AC) AIR COOLING OPTION AIR COOLING INLETS (-WC) WATER COOLING OPTION INLET TUBES = BLUE OUTLET TUBES = BLACK X MOTOR OUTLET Y MOTOR INLET INLET OUTLET AGV HOUSING INLET OUTLET 27 13 M6X1.0 9 (4) PLACES 4 7 DOWEL PIN HOLE AND SLOT DIMENSIONS: MILLIMETERS REVISIONS ECO REV. DESCRIPTION DATE APPROVED SPOEPOE MODEL BY: MODEL FILENAME: AGV14CPO AGV14CPO-BE2 PART CODE: LEFT SIDE BEAM ENTRY AGV14CPO-BE2-CAT PART NAME: DWG. NO. REV AGV14CPO SHEET 1 OF 1 06-MAY-25 DATE JDUMM DRAW SPOEPOE SPOEPOE NAME CHECK APPR. 17-JUN-25 06-MAY-25 PLACE DRAWING VIEWS BELOW AGV-CPO DIMENSIONS AGV14CPO-BE2

aerotech.com 115

173 APPROX

75.5 12

81.5 X 90

0.08 0 5.5 INTEGRATED MOTOR POWER/FEEDBACK CONNECTORS 130 APPROX

129 APPROX

41.8 100 120 M6X1.0 9 (4) PLACES 6 8 DOWEL PIN HOLE AND SLOT

21 FOR

20 BEAM

50.6 26.3 23.2 BEAM DISPLACEMENT 26.3 50.6 4 7 DOWEL PIN HOLE AND SLOT M6X1.0 9 (4) PLACES (-AC) AIR COOLING OPTION AIR COOLING INLETS 80 25 7.5 M6X1.0 9 (4) PLACES 6 8 DOWEL PIN HOLE AND SLOT (-WC) WATER COOLING OPTION Y MOTOR INLET OUTLET OUTLET AGV HOUSING INLET INLET X MOTOR OUTLET INLET TUBES = BLUE OUTLET TUBES = BLACK DIMENSIONS: MILLIMETERS CL BEAM IN REVISIONS ECO REV. DESCRIPTION DATE APPROVED SPOEPOE MODEL BY: MODEL FILENAME: AGV20CPO AGV20CPO-BE1 PART CODE: AGV20CPO-BE1-CAT PART NAME: DWG. NO. REV AGV20CPO SHEET 1 OF 1 06-MAY-25 DATE JDUMM DRAW SPOEPOE SPOEPOE NAME CHECK APPR. 17-JUN-25 06-MAY-25 PLACE DRAWING VIEWS BELOW RIGHT SIDE BEAM ENTRY AGV-CPO DIMENSIONS AGV20CPO-BE1 115 75.5 12 0.08 0 5.5 INTEGRATED MOTOR POWER/FEEDBACK CONNECTORS 130 APPROX 41.8 100 120 M6X1.0 9 (4) PLACES 6 8 DOWEL PIN HOLE AND SLOT 50.6 26.3 23.2 BEAM DISPLACEMENT 26.3 50.6 4 7 DOWEL PIN HOLE AND SLOT M6X1.0 9 (4) PLACES (-AC) AIR COOLING OPTION AIR COOLING INLETS 80 25 7.5 M6X1.0 9 (4) PLACES 6 8 DOWEL PIN HOLE AND SLOT (-WC) WATER COOLING OPTION Y MOTOR INLET OUTLET OUTLET AGV HOUSING INLET INLET X MOTOR OUTLET INLET TUBES = BLUE OUTLET TUBES = BLACK DIMENSIONS: MILLIMETERS CL BEAM IN REVISIONS ECO REV. DESCRIPTION DATE APPROVED SPOEPOE MODEL BY: MODEL FILENAME: AGV20CPO AGV20CPO-BE1 PART CODE: AGV20CPO-BE1-CAT PART NAME: DWG. NO. REV AGV20CPO SHEET 1 OF 1 06-MAY-25 DATE JDUMM DRAW SPOEPOE SPOEPOE NAME CHECK APPR. 17-JUN-25 06-MAY-25 PLACE DRAWING VIEWS BELOW RIGHT SIDE BEAM ENTRY

aerotech.com 115

172 APPROX

75.5 12 0.08 0 5.5 INTEGRATED MOTOR POWER/FEEDBACK CONNECTORS 130 APPROX 33 49 41.8 100 120 M6X1.0 9 (4) PLACES (-AC) AIR COOLING OPTION AIR COOLING INLETS (-WC) WATER COOLING OPTION INLET TUBES = BLUE OUTLET TUBES = BLACK X MOTOR OUTLET INLET Y MOTOR INLET OUTLET AGV HOUSING INLET OUTLET 26.3 50.6 23.2 BEAM DISPLACEMENT 50.6 26.3 CL BEAM IN M6X1.0 9 (4) PLACES 4 7 DOWEL PIN HOLE AND SLOT 25 7.5 M6X1.0 9 (4) PLACES 6 8 DOWEL PIN HOLE AND SLOT DIMENSIONS: MILLIMETERS REVISIONS ECO REV. DESCRIPTION DATE APPROVED SPOEPOE MODEL BY: MODEL FILENAME: AGV20CPO AGV20CPO-BE2 PART CODE: LEFT SIDE BEAM ENTRY AGV20CPO-BE2-CAT PART NAME: DWG. NO. REV AGV20CPO SHEET 1 OF 1 06-MAY-25 DATE JDUMM DRAW SPOEPOE SPOEPOE NAME CHECK APPR. 17-JUN-25 06-MAY-25 PLACE DRAWING VIEWS BELOWAGV-CPO DIMENSIONS AGV20CPO-BE2 115 75.5 12 0.08 0 5.5 INTEGRATED MOTOR POWER/FEEDBACK CONNECTORS 130 APPROX 33 49 41.8 100 120 M6X1.0 9 (4) PLACES (-AC) AIR COOLING OPTION AIR COOLING INLETS (-WC) WATER COOLING OPTION INLET TUBES = BLUE OUTLET TUBES = BLACK X MOTOR OUTLET INLET Y MOTOR INLET OUTLET AGV HOUSING INLET OUTLET 26.3 50.6 23.2 BEAM DISPLACEMENT 50.6 26.3 CL BEAM IN M6X1.0 9 (4) PLACES 4 7 DOWEL PIN HOLE AND SLOT 25 7.5 M6X1.0 9 (4) PLACES 6 8 DOWEL PIN HOLE AND SLOT DIMENSIONS: MILLIMETERS REVISIONS ECO REV. DESCRIPTION DATE APPROVED SPOEPOE MODEL BY: MODEL FILENAME: AGV20CPO AGV20CPO-BE2 PART CODE: LEFT SIDE BEAM ENTRY AGV20CPO-BE2-CAT PART NAME: DWG. NO. REV AGV20CPO SHEET 1 OF 1 06-MAY-25 DATE JDUMM DRAW SPOEPOE SPOEPOE NAME CHECK APPR. 17-JUN-25 06-MAY-25 PLACE DRAWING VIEWS BELOW