ADRT100-85 AEROTECH | Alldatasheet

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The World’s Most Versatile High- Precision Direct Drive Rotary Stages With dual large-diameter bearings and slotless, brushless torque motors, our ADRT series easily delivers ultra-smooth, high-speed motion for applications that require very precise rotary motion plus high torque, speed and payload-carrying capacity. ADRT seamlessly integrates into multi-axis motion systems, subsystems and machines thanks to a range of features and options including continuous 360° travel, limited-travel and fail- safe holding brakes to mitigate against crash conditions and provide additional payload security. Key Applications ADRT stages are ideal for applications that require fine precision, smooth motion, rapid accelerations, high speeds, large payloads or any combination of these, including: ‹ Testing of sensors, MEMS and other devices ‹ Electro-optics testing and calibration ‹ Indexing and alignment ‹ Laser micromachining ‹ Angular tracking ‹ High-precision inspection of semiconductors, medical devices and other components KEY FEATURES: Mechanical-Bearing Direct-Drive Rotary Stages ADRT ‹ Features NINE MODELS to meet any load capacity, torque and dimensional requirements ‹ Delivers HIGH TORQUE OUTPUT and smooth, stable motion with direct-drive, cog-free servo motor ‹ Achieves EXCELLENT ACCURACY and repeatability with high-resolution position feedback ‹ Supports HIGH PAYLOADS and provides exceptional stiffness ‹ Offers INTEGRATION AND PROCESS FLEXIBILITY with large-diameter clear aperture

aerotech.com ADRT SPECIFICATIONS ADRT Series ADRT100-85 ADRT100-135 ADRT150-115 ADRT150-135 ADRT150-180 Bus Voltage (1) Up to 340 VDC Accuracy (2,3) Uncalibrated 60 arc sec Calibrated 5 arc sec Repeatability (3) 3 arc sec Axial Error Motion 5 µm Radial Error Motion (4) 5 µm Tilt Error Motion 10 arc sec Aperture 13 mm 50 mm Radial Load (5) 10 kg 25 kg Axial Load 15 kg 30 kg Rated Speed 1500 rpm 600 rpm Inertia 0.000243 kg·m 0.000483 kg·m 0.002795 kg·m 0.005108 kg·m 0.006671 kg·m Finish Table Hardcoat Stage Black Anodize Notes: 1. Bus voltage for ADRT100 with -25D connector is limited to 160 V. 2. Calibrated accuracy requires -PL2 option and Aerotech controls. 3. Repeatability and accuracy are dependent on encoder resolution. To achieve the listed specifications, encoder resolution must be 0.36 arc sec or less 4. Specifications are for single-axis systems. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications. 5. Moment load based on 5 year continuous rotation at 250 rpm with maximum axial load applied. Larger moment loads possible for low speed and/or low duty cycle applications. Consult Aerotech for additional information. ADRT Series ADRT200-155 ADRT200-185 ADRT260-160 ADRT260-180 Maximum Torque (Continuous) 11.12 N·m 15.93 N·m 19.71 N·m 29.09 N·m Bus Voltage Up to 340 VDC Accuracy (1,2) Uncalibrated 60 arc sec Calibrated 5 arc sec Repeatability (2) 3 arc sec Axial Error Motion 5 µm Radial Error Motion (3) 5 µm Tilt Error Motion 10 arc sec Aperture 75 mm 100 mm Radial Load (4) 80 kg 110 kg Axial Load 140 kg 170 kg Rated Speed 600 rpm 375 rpm Inertia 0.018899 kg·m 0.025062 kg·m 0.065934 kg·m 0.084950 kg·m Mass 16.2 kg 20.3 kg 27.3 kg 33 kg Finish Table Hardcoat Stage Black Anodize Notes: 1. Calibrated accuracy requires -PL2 option and Aerotech controls. 2. Repeatability and accuracy are dependent on encoder resolution. To achieve the listed specifications, encoder resolution must be 0.36 arc sec or less 3. Specifications are for single-axis systems. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications. 4. Moment load based on 5 year continuous rotation at 250 rpm with maximum axial load applied. Larger moment loads possible for low speed and/or low duty cycle applications. Consult Aerotech for additional information.

aerotech.com ADRT ORDERING INFORMATION ADRT Mechanical-Bearing Direct-Drive Rotary Stage ADRT100 ADRT100 mechanical-bearing direct-drive rotary stage ADRT150 ADRT150 mechanical-bearing direct-drive rotary stage ADRT200 ADRT200 mechanical-bearing direct-drive rotary stage ADRT260 ADRT260 mechanical-bearing direct-drive rotary stage Stage Height (Required) -85 85 mm stage height - Only available for ADRT100 -115 115 mm stage height - Only available for ADRT150 -135 135 mm stage height - Only available for ADRT100 and ADRT150 -155 155 mm stage height - Only available for ADRT200 -160 160 mm stage height - Only available for ADRT260 -180 180 mm stage height - Only available for ADRT150 and ADRT 260 -185 185 mm stage height - Only available for ADRT200 Motor (Required) -M1 Low current, -A winding Feedback (Required) -E6 Incremental encoder, 1 Vpp -E7 Incremental encoder, digital RS422, electrical resolution 6.48 arc sec (ADRT100), 4.48 arc sec (ADRT150), or 2.91 arc sec (ADRT200, ADRT260) -E8 Incremental encoder, digital RS422, electrical resolution 3.24 arc sec (ADRT100), 2.24 arc sec (ADRT150), or 1.45 arc sec (ADRT200, ADRT260) -E9 Incremental encoder, digital RS422, electrical resolution 1.62 arc sec (ADRT100), 1.12 arc sec (ADRT150), or 0.73 arc sec (ADRT200, ADRT260) -E10 Incremental encoder, digital RS422, electrical resolution 1.30 arc sec (ADRT100), 0.90 arc sec (ADRT150), or 0.58 arc sec (ADRT200, ADRT260) Connector (Required) -CN1 4-pin HPD motor and 25-pin D Fbk connectors -CN2 25-pin D motor and 25-pin D Fbk connectors Note: Only available for ADRT100. The -CN1 option is the default. The -CN2 option should be used when the stage is part of a multi-axis assembly with cable management. Rear Seal (Optional) -SL Rear seal Note: Only available for ADRT100. Air Purge (Optional) -PR Air-purge fitting Note: Only available for ADRT100. Brake (Optional) -BK Holding brake Note: Only available for the ADRT150 and the ADRT200. Not available with limited travel option.

aerotech.com ADRT ORDERING INFORMATION Limited Travel (Optional) -TR010 Limited travel, +/- 5 degrees -TR020 Limited travel, +/- 10 degrees -TR040 Limited travel, +/- 20 degrees -TR060 Limited travel, +/- 30 degrees -TR080 Limited travel, +/- 40 degrees -TR090 Limited travel, +/- 45 degrees -TR100 Limited travel, +/- 50 degrees -TR120 Limited travel, +/- 60 degrees -TR140 Limited travel, +/- 70 degrees -TR160 Limited travel, +/- 80 degrees -TR180 Limited travel, +/- 90 degrees -TR200 Limited travel, +/- 100 degrees -TR220 Limited travel, +/- 110 degrees -TR240 Limited travel, +/- 120 degrees -TR260 Limited travel, +/- 130 degrees -TR270 Limited travel, +/- 135 degrees - Only available on ADRT200 and ADRT260 -TR280 Limited travel, +/- 140 degrees - Only available on ADRT200 and ADRT260 -TR300 Limited travel, +/- 150 degrees - Only available on ADRT200 and ADRT260 Note: Not available with ADRT100. Not available with brake option. -TRxxx options include electrical limits and mechanical hardstops. There are an extra 1.5 degrees per side between the nominal travel and the electrical limits, and an extra 5 degrees per side between the nominal travel and mechanical hardstops. (Ex: TR90 has +/- 45 degrees of nominal travel, with +/- 46.5 degrees of travel between electrical limits and +/- 50 degrees of travel between mechanical hardstops.) Metrology (Required) -PL0 No metrology performance plots -PL1 Metrology, uncalibrated with performance plots -PL2 Metrology, calibrated (HALAR) with performance plots Integration (Required) Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required, or if you desire custom integration support with your system. -TAS Integration - Test as system Testing, integration, and documentation of a group of components as a complete system that will be used together (ex: drive, controller, and stage). This includes parameter file generation, system tuning, and documentation of the system configuration. -TAC Integration - Test as components Testing and integration of individual items as discrete components that ship together. This is typically used for spare parts, replacement parts, or items that will not be used together. These components may or may not be part of a larger system.

aerotech.com ADRT SPECIFICATIONS Axial and Radial Cantilevered Load Capability (ADRT150-115) Axial and Radial Cantilevered Load Capability (ADRT150-135) Axial and Radial Cantilevered Load Capability (ADRT150-180) Axial and Radial Cantilevered Load Capability (ADRT100-135) Axial and Radial Cantilevered Load Capability (ADRT100-85)

aerotech.com     Axial and Radial Cantilevered Load Capability (ADRT200-155)     Axial and Radial Cantilevered Load Capability (ADRT200-185)      Axial and Radial Cantilevered Load Capability (ADRT260-160)      Axial and Radial Cantilevered Load Capability (ADRT260-180) ADRT SPECIFICATIONS ADRT Series SPECIFICATIONS

aerotech.com ADRT DIMENSIONS ADRT100 A 13.5 4X M5X0.8 6 EACH SIDE AIR PURGE OPTION MOTOR CONNECTOR FEEDBACK CONNECTOR

50 TYP

B

12 TYP

80 TYP SQ

8X M5X0.8 6 EQUALLY SPACED ON 35 B.C. M5 STAGE MOUNTING 4X 5.8 THRU ALL 10 5 8X M5X0.8 6

13 APERTURE THRU

50 PILOT

3.5 HEIGHT

DIMENSIONS: MILLIMETERS DIMENSIONS (MM) BASIC MODEL A B ADRT100-85 82 35 ADRT100-135 132 85

aerotech.com ADRT DIMENSIONS ADRT150

aerotech.com ADRT DIMENSIONS ADRT150 LIMITS/HARDSTOPS

aerotech.com ADRT DIMENSIONS ADRT200 67.5 A 4X M6X1.0 7 EACH SIDE 39.8 BRAKE OPTION (-BK) MOTOR CONNECTOR FEEDBACK CONNECTOR 195.7 100 232.7 170 SQ

160 TYP

115 TYP

8X M6X1.0 10 EQUALLY SPACED ON 100 B.C.

139.5 PILOT

8X M6X1.0 7

75 APERTURE THRU

A 17.5 B 6.5 9.5 DETAIL A T-SLOT, TYPICAL 8 PLACES 22.5° 170 8X M6X1.0 7 EQUALLY SPACED ON 100 B.C. 3.5 15.5 DIMENSIONS: MILLIMETERS REVISIONS MCN REV. DESCRIPTION DATE APPROVED 18060 A CHANGED DRAWING NAME TO ADRT200_CAT. DRAWING RECREATED TO UPDATE TEMPLATE AND SEVERAL INCORRECT DIMENSIONS. 23-DEC-16 MSHOUPE ECO1000032 B BRAKE HEIGHT 39.8 WAS 33.8 29-JUL-20 BHARROLD DIMENSIONS BASIC MODEL A B ADRT200-155 154.8 80 ADRT200-185 179.8 100 ADRT200 LIMITED TRAVEL OPTIONS, UNITS: DEGREES OPTION NOMINAL TRAVEL HARDSTOP TRAVEL MODEL BY: MODEL FILENAME: ADRT200_CAT B ADRT200 PART CODE: ROTARY STAGE BEARING DIRECT-DRIVE ADRT200_CAT PART NAME: DWG. NO. REV ADRT200 MECHANICAL- SHEET 1 OF 1 23-DEC-16 DATE MSHOUPE DRAW MSHOUPE MSHOUPE NAME CHECK APPR. 23-DEC-16 23-DEC-16

aerotech.com ADRT DIMENSIONS ADRT200 LIMITS/HARDSTOPS

aerotech.com ADRT DIMENSIONS ADRT260

aerotech.com ADRT DIMENSIONS ADRT260 LIMITS/HARDSTOPS