ADRS100 AEROTECH | Alldatasheet
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Technical content
High Throughput, Low Maintenance Rotary Motion ADRS stages combine direct-drive brushless technology with a low profile to increase throughput and minimize “stack-up” errors at your work point. Because they achieve quicker acceleration and higher top speeds than gear- or belt-driven mechanisms, ADRS stages yield higher overall throughput. Plus, with no brushes to replace and no gear trains or belts to maintain, they’re optimized for 24/7 production environments and result in lower total cost of ownership. Key Applications ADRS is ideal for 24/7 production environments that required precise, low-maintenance components, including: Rotary indexing and alignment Precision testing, measurement and inspection Sensor testing Semiconductor wafer processing Precision manufacturing and automation Laser microprocessing KEY FEATURES: Mechanical-Bearing Direct-Drive Rotary Stage ADRS MAXIMIZES POSITIONING PERFORMANCE with direct-drive brushless motor technology Delivers HIGH-TORQUE OUTPUT Offers OUTSTANDING VELOCITY STABILITY due to cog-free slotless motor design Uses direct coupled, HIGH-ACCURACY ROTARY ENCODER Yields HIGH THROUGHPUT & LOW TOTAL COST of ownership Provides a CLEAR APERTURE that can be used for product feed-through or laser beam delivery MINIMIZES working height
aerotech.com ADRS SERIES SPECIFICATIONS Specifications ADRS100 ADRS150 ADRS200 Tabletop Diameter 95 mm 140 mm 190 mm Aperture 6 mm 15 mm 26 mm Maximum Bus Voltage 340 VDC Maximum Torque (Continuous) 0.48 N·m 2.36 N·m 5.99 N·m Max Speed (1) 1500 rpm(6) 600 rpm 600 rpm Accuracy(2) 388 µrad (80 arc sec) Calibrated(3) 29.1 µrad (6 arc sec) Repeatability(2) 14.6 µrad (3 arc sec) Max Load(4) Axial 7 kg 20 kg 40 kg Radial 3 kg 10 kg 20 kg Axial Error Motion(5) 2 µm 5 µm 5 µm Radial Error Motion(5) 3 µm 5 µm 5 µm Tilt Error Motion 48.5 µrad (10 arc sec) Inertia Unloaded 0.00038 kg-m2 0.00264 kg-m2 0.01069 kg-m2 Total Mass 2.0 kg 4.5 kg 8.4 kg Finish Tabletop Hardcoat Stage Black Anodize Notes: 1. Maximum speed is based on stage capability. Actual speed may depend on encoder resolution, load, amplifier bus voltage and motor. 2. Repeatability and accuracy are dependent on encoder resolution. To achieve the listed specifications, encoder resolution must be 0.36 arc sec or finer. 3. With -PL2 option. 4. Maximum loads are mutually exclusive. 5. For the ADRS100, error motion specifications are below 700 rpm. Above 700 rpm the max radial error is 5 microns. Errors measured 25 mm above the tabletop. 6. Max speed is limited to 1400 rpm with the -E10 feedback option.
aerotech.com ADRS SERIES ORDERING OPTIONS ADRS Series Direct-Drive Rotary Stage ADRS100 ADRS100 mechanical-bearing direct-drive rotary stage ADRS150 ADRS150 mechanical-bearing direct-drive rotary stage ADRS200 ADRS200 mechanical-bearing direct-drive rotary stage Feedback (Required) -E6 Incremental Encoder, 1 Vpp -E10 Incremental Encoder, digital RS422, electrical resolution 1.02 arc sec (ADRS100) or 0.65 arc sec (ADRS150, ADRS200) Other feedback options are available upon request. Contact Aerotech for more information. Motor (Required) -M1 Low current, -A winding Other motor options are available upon request. Contact Aerotech for more information. Tabletop (Required) -TT1 Metric tabletop Other tabletop options are available upon request. Contact Aerotech for more information. Lower Seal (Optional)* -SL Lower Seal *Note: Lower seal not available for ADRS100 Metrology (Required) -PL1 Metrology, uncalibrated with performance plots -PL2 Metrology, calibrated (HALAR) with performance plots Integration (Required) Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required, or if you desire custom integration support with your system. -TAS Integration - Test as system Testing, integration, and documentation of a group of components as a complete system that will be used together (ex: drive, controller and stage). This includes parameter file generation, system tuning and documentation of the system configuration. -TAC Integration - Test as components Testing and integration of individual items as discrete components. This is typically used for spare parts, replacement parts or items that will not be used or shipped together (ex: stage only). These components may or may not be part of a larger system.
aerotech.com ADRS SERIES LOAD CAPABILITIES Axial and Radial Cantilevered Load Capability (ADRS200) Axial and Radial Cantilevered Load Capability (ADRS100) Axial and Radial Cantilevered Load Capability (ADRS150)
aerotech.com ADRS SERIES DIMENSIONS ADRS100
6 APERTURE
76.2 SQ 4X 7.1 SLOT THRU STAGE MOUNTING HOLES 37.5 4X M4X0.7 4.6 100 130 4X M5X0.8 5.8 BOTH SIDES
8 PLACES
62.2 100
19 TYP
DIMENSIONS: MILLIMETERS TABLETOP MOUNTING PATTERN -TT1 REVISIONS MCN REV. DESCRIPTION DATE APPROVED MCN7947 A SLOT WAS 5.8 THRU 18-MAY-04 BPO MCN15617 B CHANGED CALLOUT TO (4) PLACES 21-MAR-14 GM MCN18137 C UPDATED DRAWING NAME FROM ADRS-100 TO ADRS100. REMOVE DUAL DIMENSIONS, GENERAL UPDATES TO LATEST FORMATTING STANDARDS. 19-JAN-17 MSHOUPE MODEL BY: MODEL FILENAME: ADRS-100 C ADRS-100 PART CODE: ROTARY STAGE LOW PROFILE ADRS100-CAT PART NAME: DWG. NO. REV ADRS-100 SHEET 1 OF 1 19-JAN-17 DATE MSHOUPE DRAW MSHOUPE MSHOUPE NAME CHECK APPR. 19-JAN-17 19-JAN-17 PLACE DRAWING VIEWS BELOW
aerotech.com ADRS SERIES DIMENSIONS ADRS150 22.5° 45° 75 B.C. 50 B.C. 25 B.C.
15 APERTURE
62.5 125 127 4X 7.1 SLOT THRU STAGE MOUNTING HOLES 100 101.6 16X M5X0.8 5.8 AS SHOWN 140 75 37.5 150 180 8X M5X0.8 7.6 BOTH SIDES 150 62.2
19.1 TYP
DIMENSIONS: MILLIMETERS TABLETOP MOUNTING PATTERN -TT1 REVISIONS MCN REV. DESCRIPTION DATE APPROVED MCN16122 A ADDED TT OD OF 140 07-OCT-14 BDH MCN18136 B UPDATED DRAWING NAME FROM ADRS-150 TO ADRS150. REMOVE DUAL DIMENSIONS, GENERAL UPDATES TO LATEST FORMATTING STANDARDS. 19-JAN-17 MSHOUPE MODEL BY: MODEL FILENAME: ADRS-150 B ADRS-150 PART CODE: ROTARY STAGE LOW PROFILE ADRS150-CAT PART NAME: DWG. NO. REV ADRS-150 SHEET 1 OF 1 19-JAN-17 DATE MSHOUPE DRAW MSHOUPE MSHOUPE NAME CHECK APPR. 19-JAN-17 19-JAN-17 PLACE DRAWING VIEWS BELOW
aerotech.com ADRS SERIES DIMENSIONS ADRS200 150 SQ 152.4 SQ
26 APERTURE 45°
4X 7.1 SLOT THRU STAGE MOUNTING HOLES 125 B.C. 100 B.C. 75 B.C. 50 B.C. 100 16X M5X0.8 5.8 AS SHOWN 190 50 100 230 200 8X M5X0.8 7.6 BOTH SIDES 62.2 200 19 TYP DIMENSIONS: MILLIMETERS TABLETOP MOUNTING PATTERN -TT1 REVISIONS MCN REV. DESCRIPTION DATE APPROVED
16395 A TT HOLE PATTERN ORIENTATION UPDATED 29-JAN-15 BHARROLD
UPDATED DRAWING NAME FROM ADRS-200 TO ADRS200. REMOVE DUAL DIMENSIONS, GENERAL UPDATES TO LATEST FORMATTING STANDARDS. 13-JAN-16 MSHOUPE MODEL BY: MODEL FILENAME: ADRS-200 B ADRS-200 PART CODE: ROTARY STAGE LOW PROFILE ADRS200-CAT PART NAME: DWG. NO. REV ADRS-200 SHEET 1 OF 1 19-AUG-14 DATE MSHOUPE DRAW SMARCKS SMARCKS NAME CHECK APPR. 19-AUG-14 19-AUG-14 PLACE DRAWING VIEWS BELOW