AA09A MKS | Alldatasheet
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Technical content
on® Capacitance Manometer The AA09A Baratron® capacitance manometer employs a high temperature sensor which can operate at up to 150°C (bakeable to 200°C) for critical processing applications. Based on the well established Baratron capacitance manometer technology, the sensors wetted surfaces are Inconel ® for excellent resistance to corrosive gases. The sensor and electronics of the AA09A are separated by an eight foot cable, which allows the electronics to be mounted away from sources of heat. The AA09A can be used with MKS power supplies, display units, and pressure controllers, or the user’s compatible power supply/readout devices.
- All-metal sensor eliminates handling pr oblems associated with glass, mercury, and liquid gauges Useable r esolution of 1 part in 10,000 — Minimizes the number of transducers r equired to cover a wide range of pressures Remote electr onics allow sensor to operate at temperatures up to 150°C (bakeable to 200°C with cable removed) Sensor is capable of handling any corr osive gas compatible with Inconel and stainless steel Product Features Dimensional Drawing Note: Unless otherwise specified, dimensions are nominal values in inches (mm referenced).
www.MKSINST.com I sales@mksinst.com +1-978-645-5500 I +1-800-227-8766 AA09A_01/19 ©2019 MKS Instruments, Inc. Some Baratron® capacitance manometer products may not be exported to many end-user countries without both US and local government export licenses under ECCN 2B230. Specifications are subject to change without notice. mksinst™ is a trademark and Baratron® is a registered trademark of MKS Instruments, Inc., Andover, MA. VCR® is a registered trademark of Swagelok Marketing Co., Solon OH. Inconel® is a registered trademark of Inco Alloys International, Inc., Huntington, WV. Conflat® is a registered trademark of Varian Associates, Lexington, MA. Specifications & Ordering Information Full Scale Range 1, 2, 10, 100, 1000, 5000, 10000, 15000, 20000, and 25000 T orr (mmHg) Resolution 0.01% of Full Scale Accuracy 0.5% of Reading (± temperature coefficients) Temperature Coefficients Zero 0.02% Full Scale/°C Span 0.04% of Reading Ambient Operating T emperature Sensor 0° to 150°C (bakeable to 200°C with cable r emoved) PreAmp 0° to 50°C Overpressure Limit 120% of sensor F .S. or 35 psia whichever is greater Materials Exposed to Gases Inconel and 316 SST V olume 7.0 cc Input Power Required ±15 VDC @ 35mA r egulated to ±5% Output 0 to 10 VDC into >10k Electrical Connector 14-pin micr o Fittings Conflat®, and NW16-KF Compliance* CE *When used with an overall metal braided shielded cable, properly grounded at both ends. Basic Model AA09A AA09A Ranges - Torr 100 1000 5000 10000 15000 20000 25000 RB RC Units of Measurement Torr/mmHg mbar KPa Pa T M K L M Fittings Straight tube, 0.5’’ OD (≤1000 Torr)
8 VCR female
Mini Conflat, Rotatable NW16-KF (≤1000 Torr) BA CE HA GA CE Accuracy Standard 0.5% of Reading 0 0