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WWW.MKSINST.COM AA07A Single-Ended AA08A Flow-Through MICRO-BARATRON® PRESSURE TRANSDUCERS Today’s process tools and equipment require reliable transducer and display performance in small geometrics with multiple fitting options. MKS addresses these issues with a building block design approach, allowing for custom configuration to meet your exact needs. For more than three decades, MKS Baratron ® capacitance manometer technology yields the most stable, accurate, and reliable sensors available today. Sensor construction is intrinsically durable with well-matched materials to provide extremely low thermal coefficient for wide temperature range performance. This highly accurate and stable sensor technology is combined with sophisticated electronics to further optimize performance in an EMI/RFI insensitive high-level output. Enhanced accuracy, long-term stability, and low temperature coefficients produce the repeatability critical to today’s gas measurement applications. As a result, the AA07A and AA08A pressure transducers offer higher accuracy, superior value, and reliable performance. Features & Benefits

  • Pro ven capacitance technology at a competitiv e price Incoloy® wetted surface provides super ior corrosiv e gas and liquid compatibility A vailable models include 4 to 20mA output Highest o verpressure ratio tolerances on the mar ket assure no degradation in z ero repeatability or performance Accur acy specified in % of Reading for super ior results in lower pressure ranges
  • Optional integ rated display gives local reading of line pressure (1000 Torr, 100 and 250 psia r anges) Replaceab le electronics Pressure & Vacuum Measurement Solutions

Accuracy is specified as a percent of Reading, not Full Scale, as seen in some of the lower performance devices. Percent of Reading accuracy provides you with an even more accurate output signal in the lower scale of the pressure range — where it is needed most. (Figure 1). The AA07A/AA08A transducers are ideally suited for use in delivery systems that feed ultrapure gases to critical process systems. Their wetted surfaces exposed to the gas stream have a finish of better than 5 µin Ra. These transducers exhibit superior dry-down character- istics, and contribute no particles above background. After manufacture and assembly, they are purged with ultraclean nitrogen prior to double bagging in a class 100 environment. The all-Incolo y® construction of the sensors in the AA07A/ AA08A allows for high overpressure tolerances that reduce errors due to line pressure spikes. High burst pressure ratings contribute to overall system safety. On existing gas cabinets and process systems, field replacement of common dial gauges or lower performance transducers is made easy due to the small size, industry standard end- to-end lengths, and electrical interface choices of these transducers. A v ariety of fittings are available in different styles and sizes. A selection of power supply inputs (+12 to +32 VDC), output signals (0-5 or 0-10 VDC, or 4-20 mA two- wire), and connectors (9-pin or 15-pin Type “D”, Bendix Figure 1 — Comparison of MKS repeatability expressed as percent of Reading transducer versus other percent of Full Scale transducers. Indicated Pressure True Pressure Full Scale Full Scale % Reading Error Band Indicated Pressure True Pressure Full Scale Full Scale % Full Scale Error Band Most critical readings are in this range Specifications Configuration AA07A Ultraclean, single-ended AA08A Ultraclean, flow-through Full Scale Rang es AA07A

1000 Torr to 3000 psia

Accuracy (including non-linearity, h ysteresis, and non-repeatability) 1.0% of Reading T emperature Coefficients Zero 0.02% of Full Scale/°C , 50 psia to 3000 psia; 0.04% of Full Scale/°C, 1000 Torr Span 0.04% of Reading/°C , 50 psia to 3000 psia; 0.08% of Reading/°C, 1000 Torr Ambient Operating Temperature 0° to 50°C (32° to 122°F) Overpressure Limit1 1.5× Full Scale f or ranges from 1000 Torr to 500 psi 1.2× Full Scale f or ranges from 501 to 3000 psi Burst Pressure 10× Full Scale f or ranges from 1000 Torr to 500 psi 5x Full Scale f or ranges from 501 to 3000 psi Materials Exposed to Gases Incoloy® W etted Surfaces 10µin Ra max. Input Power Required 0 to 10 Volt output +13 VDC to +32 VDC @ 10 mA max. 0 to 5 Volt output +12 VDC to +32 VDC (regulated if below 13 VDC) @ 10 mA max. 2-wire 4-20 mA output +13 to +32 VDC excitation Output 0 to 10 VDC into > 10K Ω load 0 to 5 VDC into > 10K Ω load 2-wire 4-20 mA output with T ypically into 0 to 900 W load (depending upon excitation) +13 to +32 VDC at transducer terminals Electrical Connector s Male 9-pin at end of 9” flying lead, male 15-pin high density D type connector at end of 9” flying lead, Bendix® at end of 9” flying lead, or 6’ or 10’ flying leads Fittings AA07A (single-ended) weld stub, ¼” weld stub, ¼” butt-weld “T”, 4 VCR® male, 4 VCR® female AA08A (flo w-through) weld stub, 4 VCR® male, 4 VCR® female, surface mount Compliance2 CE 1The pressure at which the transducer can be subjected without degradation of performance when returned to a normal operation pressure range. 2For CE compliance, the mating connection must be properly grounded. or flying leads) enable the equipment or manufacturing engineer to easily interface the AA07A/AA08A pressure transducers with virtually any control system. The optional local integrated display provides a digital readout of the line pressure at the transducer. The display, which is available on the 1000 Torr, 100 and 250 psia ranges with the 0-10VDC output signal, provides a highly- visible red LED display of the pressure and the units of measurement. The display can also be switched to show any of four different units (psia, Torr, bar, and kPa) without requiring recalibration or re-ranging of the transducer itself. It takes its power from the incoming transducer voltage, so no additional cables are required.

Dimensional Drawing — Note: Unless otherwise specified, dimensions are nominal values in inches (mm referenced).

G A AA07A CB 33P Ordering Inf ormation AA07A_AA08A - 12/18 © 2017-2018 MKS Instruments, Inc. All rights reserved. Some Baratron® capacitance manometer products may not be exported to many end user countries without both US and local go vernment export licenses under ECCN 2B230. Specifications are subject to change without notice. mksinst™ is a trademark and Baratron® is a registered trademark of MKS Instruments, Inc., Andover, MA. Incoloy® is a registered trademark of Inco Alloys International, Inc. Huntington, WV. VCR® is a registered trademark of Swagelok® Co., Solon, OH. Bendix® is a registered trademark of Amphenol Corp., Bendix Connector Operations, Sidney, NY . * Other engineering units available (i.e. KPa). Consult Applications Engineering for additional information. MKS Instruments, Inc. Global Headquar ters

2 Tech Drive, Suite 201

Andover, MA 01810 Tel: 978.645.5500 Web: www.mksinst.com MKS Instruments, Inc. Pr essure & Vacuum Measurement Solutions Six Shattuck Road Andover, MA 01810 Tel: 978.975.2350 Model AA07A Single-ended AA07A AA08A Flo w-through AA08A Pressure Rang e Full Scale* 1000 T orr 13T 100 psia 12P 250 psia RDP 1000 psia 13P 3000 psia 33P Fittings AA07A only: weld stub BA weld stub BB Butt-welded “T” BD VCR male, rotatable CB

4 VCR

AA08A only: weld stub (2.045” face-to-face) BB weld stub (1.85” face-to-face) BE VCR male, nonrotatable (2.78” face-to-face) CA VCR male, nonrotatable (2.24” face-to-face) CH VCR female (2.95” face-to-face) CJ VCR male, nonrotatable / ¼” weld stub CL VCR female (3.045” face-to-face) CM 1.5” C-seal surface mount MA 1.5” W-seal surface mount MC 1 1/8” C-seal surface mount MD 1 1/8” W-seal surface mount MF Input/Output +13 to +32 VDC/0-10 VDC +12 to +32 VDC/0-5 VDC 4-20 mA with +13 to +32 VDC at terminals Accurac y 1% of Reading G Connector s 9-pin type D at end of 9” flying lead A 15-pin high density type D at end of 9” flying lead C Bendix 4-pin at end of 9” flying lead D flying leads F 10’ flying leads L Bendix 4-pin 4-20 mA on pins A&B H LDM-C (Red LED), 0-5 VDC and 0-10 VDC with high density D connector T LDM-C (with Blank Co ver), 0-5 VDC and 0-10 VDC with high density D connector W En vironmental Standard enclosure (indoor use) Optional NEMA 4 enclosure f or water, ice and dust (not a vailable with connector codes A, C, T or W)