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WWW.MKSINST.COM AA01A UnhEATEd ABSOlUTE BARA TRO n® CApA CITA n CE M A n OMETER The AA01A is an advanced high-performance absolute unheated capacitance manometer developed specifically for use in vacuum and pressure measurement applications where accuracy and repeatability are crucial to process success. These capacitance manometers are used in a wide variety of applications including vacuum furnaces, freeze-drying of fruits and vegetables, gas lasers, automotive component testing, bottle coatings, and vacuum distillation, to highlight a few. They use state-of-the-art digital architecture throughout to produce the highest possible long-term performance and reliability. These manometers operate on +15 VDC to +30 VDC input voltage, and have a standard 0 to 10 VDC analog output signal. Full Scale measurement ranges from 1 Torr (133 Pa) to 1000 Torr (133.3 kPa) are available. Features & Benefits

  • All products are specified in percent of Reading f or best accuracy and improved process yield Direct measurement of chamber total pressure independent of gas type or composition, eliminating need f or lookup tab les and conversion factors
  • Best-available long-ter m output stability ensures state-of-the-ar t process repeatability in near ly any application
  • Inconel® and Incoloy® nickel alloy constr uction of basic sensor operates without damage in vir tually any chemical en vironment, including halogens, deioniz ed water and steam, and ozone
  • High o verpressure limit ensures reliability from occasional system mishaps Push b utton z eroing Pressure & Vacuum Measurement Solutions

Dimensional Drawing — Note: Unless otherwise specified, dimensions are nominal values in inches (mm referenced).

Full Scale pressure Ranges 1, 2, 10, 20, 100, 500, 1000 Torr and metric equivalents Accuracy - % of Reading* 0.25% f or 1 to 1000 Torr (0.15% optional) Temperature Coefficients Zero 0.005% Full Scale/°C f or 10 to 1000 Torr ranges, 0.010% Full Scale/°C for 2 Torr range, 0.015% Full Scale/°C f or 1 Torr range Span 0.04% of Reading/°C Resolution 0.002% of Full Scale Ambient Operating Temperature 0 to 50°C Overpressure l imit 45 psia (310 kP Materials Exposed to p rocess Inconel and Incolo y nickel alloys Volume 1/2'' T ube 6.29 cm3 8 VCR 8.605 cm3 Input po wer Required +15 VDC to + 30 VDC @ 35 mA Output Signal 0 - 10 VDC into > 10 kΩ load Electrical Connector 15-pin D-subminiature standard, ter minal block adapter optional Fittings Standard ’ (12.7 mm) OD tube standard Optional 4 VCR® female, 8 VCR female, 8 VCR male, 8 VCO® female, NW16-KF , NW25-KF , 1.33’ ’ (33.8mm) OD Conflat®, 2.75’’ (70 mm) OD Conflat Compliance** CE * Includes h ysteresis, non-linearity, and non-repeatability. F or CE compliance, the mating connector must be properly grounded.

S B AA01A BA Ordering Inf ormation AA01A Unheated Manometer - 12/18 © 2016-2018 MKS Instruments, Inc. All rights reserved. Some Baratron® capacitance manometer products may not be exported to many end user countries without both US and local government export licenses under ECCN 2B230. Specifications are subject to change without notice . mksinst™ is a trademark and Baratron® is a registered trademark of MKS Instr uments, Inc., Andover, MA. Inconel® and Incoloy® are registered trademarks of Inco Alloys, Inc., Huntington, WV. VCR® and VCO® are registered trademarks of Swagelok Corporation, Solon, OH. Conflat ® is a registered trademark of V arian Associates, Inc, Lexington, MA. T AA01A Unheated Absolute Capacitance Manometer AA01A Rang e Full Scale 100 500 1000 Engineering Units T orr/mmHg T mbar M kP a K Fittings (compatib le with) ½'' (12.7 mm) OD tube BA VCR female (V sensor only) CD VCR female CE VCR male CF NW16-KF GA NW25-KF GC 1.33'' (33.8 mm) Conflat, rotatab le HA 2.75'' OD Conflat, rotatable HC VCO female D A Sensor Standard S Shor t Standard (GC or HA fitting only) T ¼'' dia. tube (CD fitting only) V Input/Output V oltage +24 VDC input, 0 to 10 VDC output Electrical Connector

15 POS D-subminiature-M with scre

B

15 POS D-subminiature-M with slide loc

P Reser ved Reser ved Calibration Orientation Ranges ≥ 1 Torr Ranges ≤ 1 Torr, horizontal H Ranges ≤ 1 Torr, vertical V Accurac y Standard Options None 15 pin D ter minal block adapter U MKS Instruments, Inc. Global Headquar ters

2 Tech Drive, Suite 201

Andover, MA 01810 Tel: 978.645.5500 Web: www.mksinst.com MKS Instruments, Inc. Pr essure & Vacuum Measurement Solutions Six Shattuck Road Andover, MA 01810 Tel: 978.975.2350