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WWW.MKSINST.COM Series 970B COLD CATHODE TRANSDUCER FAMILY The Series 970B is a family of compact, low cost, general-purpose transducers that utilize from one to four sensors - cold cathode, MicroPirani ™, and Piezo technologies. Combining these sensing technologies enables a wide measurement range from atmosphere to 10 -8 Torr. In addition to its small size, broad range and lower cost, the Series 970B can be operated via digital communication or as an autonomous analog unit. Features & Benefits

  • Small f ootprint design pro vides a compact tr ansducer solution saving tool real estate
  • Single tr ansducer pro vides a wide measurement r ange of 10-8 Torr to atmos phere (972B and 974B models), eliminating the need f or multiple gauges
  • The MEMS based MicroPir ani sensor in the 972B and 974B allo ws low auto cold cathode tur n-on pressure (user prog rammable from 2x10-4 to 1x10-3 Torr) f or enhanced reliability
  • The cold cathode anode module design is user ser viceable to decrease downtime and sa ve external repair costs Ease of oper ation via analog output, RS232, RS485, and EtherCA
  • MicroPirani is automatically z eroed dur ing pump down cycle for improved accur acy (972B and 974B models)
  • Mountable in an y or ientation f or ease of use and fle xibility of design
  • Simplified interf ace via a single smoothed analog output that combines the individual sensor measurements Three user configur able rela ys f or process control
  • Alternate analog output and electr ical connectors a vailable to match other v endors’ gauges and facilitate an easy upgrade
  • Can be used with the PDR900 controller f or easy set up
  • Optional integ rated touch-screen displa y a vailable for local pressure indication, etc.

Applications

The Series 970B Transducers are compact, low cost measurement solutions for vacuum users operating within the pressure range of atmosphere to 10 -8 Torr. The small size of the Series 970B transducers makes them ideal for system integrators looking to reduce footprint and enable miniaturization. Applications include: Pressure & Vacuum Measurement Solutions

  • Analytical equipment (mass spectrometer control) Scanning electron microscopes Coating systems
  • Semiconductor loadloc k pressure control General v acuum base pressure measurement

Description

The Series 970B family consists of 3 models, the 971B, 972B and the 974B. 971B UniMag The 971B UniMag tr ansducer offers a measurement range from 1x10-8 Torr to 5x10-3 Torr and is based on cold cathode inverted magnetron sensor technology. The 971B is a cost effective solution for base pressure measurement and control. 972B DualMag The 972B DualMag transducer offers a measurement range from 1x10-8 Torr to atmospheric pressure and it combines cold cathode inverted magnetron and MicroPirani thermal conductivity MEMS sensor technologies. The MicroPirani automatically controls the cold cathode sensor to ensure optimal ignition pressure. The MicroPirani offers 1-2 decades lower measuring range than a tr aditional pir ani gauge subsequently b y lo wering the cold cathode activ ation pressure gauge, reliability is improved and the service interval extended. 974B QuadMag The 974B QuadMag offers a measurement range from 1x10-8 to 1500 Torr and combines cold cathode inverted magnetron, MicroPirani and Piezo differential sensor technologies . The 974B has been specifically designed f or pressure measurement within a vacuum loadlock. It has the capability to replace multiple pressure measurement devices on a loadlock with its absolute pressure measurement from atmosphere to 10 -8 Torr and atmospheric s witching capabilities . Subsequently OEM’ s can reduce costs with a simplified loadloc k design. The 974B can be used on loadlocks or any vacuum chamber requiring both absolute pressure measurement and atmospher ic switching capabilities. Interf ace The Series 970B has RS232, RS485, and EtherCAT digital communications interface for setup of transducer parameters and to provide real time pressure measurement. All Series 970B transducers have an analog pressure output of 0.5VDC/decade that can be interfaced to external analog equipment f or pressure readout or control. Other analog outputs and cur ves can be selected via the digital user interface. The Series 970B has up to three mechanical relays which can be used for process control, examples are interlocking valves or pumps. The Series 970B have standard 15 pin HD SUBD connector and an analog output voltage pressure signal of 0.5VDC/decade. It can also emulate analog voltage outputs from a variety of other vacuum transducers. The emulation feature can be used to upgrade and replace other vendors’ gauges in OEM applications without changing system software. Contact MKS technical support for details. The optional integrated touch-screen display is user configurable; the user can change pressure units, orientation and has access to set point parameters as well as gas type. The display also indicates the status of the available set point relays. Displayed pressure reading from individual sensors or combined reading can be seen from >5 meters away on the high contrast display. Sensor and transducer measurement ranges 971B 972B 974B The transducers are available with an optional IP54 (NEMA 3) rated enclosure. The user changeable cold cathode anode module and screen offers easy serviceability without disassembling of transducer electronics. Pin RS232/485 15 pin Sub-D EtherCAT 15 pin Sub-D RJ45 EtherCAT IN/OUT

1 RS485 (-)/RS232 transmit NC TX+

2 RS485 (+)/RS232 receive NC TX-

3 Power (+) Input Power (+) 9 to 24 VDC RX+

4 Power (-) Power Return - NC

5 Analog Output (+) abs. Signal Output + NC

6 Analog Output (-) Signal Common RX-

7 Relay #1 NO NC NC

8 Relay #1 Common NC NC

9 Relay #1 NC NC

10 Relay #2 NC NC

11 Relay #2 Common NC

12 Relay #2 NO NC

13 Relay #3 NC

(971B only - cold cathode enable) NC

14 Relay #3 Common NC

15 Relay #3 NO Chassis Ground

PinOuts — Three (3) set point relays and dual Aout, 15 pin D Subminiature and RJ45 EtherCAT IN/OUT Connectors

Series 971B Series 972B Series 974B Sensor Type Cold Cathode Cold Cathode / MicroPirani (MEMS Thermal Conductivity) Cold Cathode / MicroPirani (MEMS Thermal Conductivity) / Piezo Differential (MEMS Diaphragm) Measuring Range Absolute 1 x 10 -8 Torr to 5 x 10-3 Torr 1 x 10-8 Torr to Atmosphere 1 x 10-8 Torr to 1500 Torr Measuring Range Differential not available not available -760 to +760 Torr Set Point Range Absolute 1 x 10-8 Torr to 5 x 10-3 Torr 1 x 10-8 Torr to Atmosphere 1 x 10-8 Torr to 1000 Torr Set Point Range Differential not available not available -760 to +100 Torr Calibration Gas Nitrogen Nitrogen Nitrogen Operating Temperature Range 0° to 40°C (32° to 104°F) 0° to 40°C (32° to 104°F) 0° to 40°C (32° to 104°F) Maximum Bakeout Temperature 80°C (176°F), non-operating 80°C (176°F), non-operating 80°C (176°F), non-operating Digital Communications RS485 or RS232 RS485, RS232 or EtherCAT RS485 or RS232 Electrical Connectors RS232/RS485/Analog EtherCAT (972B only) 15-pin D-subminiature male 15-pin D-subminiature male 15-pin D-subminiature male Two (2) RJ45 female 15-pin D-subminiature male Controls Pressure units, baud rate, address, factory default, user tag, RS485 test, gas correction; set point functions: value, hysteresis, direction, HV enable, protect, control set point, gas type Pressure units, baud rate, address, factory default, user tag, RS485 test, gas correction; set point functions: value, hysteresis, direction, HV enable, protect, control set point, gas type Pressure units, baud rate, address, factory default, user tag, RS485 test, gas correction; set point functions: value, hysteresis, direction, HV enable, protect, control set point, gas type Status Pressure reading and units, set point, transducer temperature, user tag, model, device type, serial number, firmware and hardware versions Pressure reading and units, set point, transducer temperature, user tag, model, device type, serial number, firmware and hardware versions Pressure reading and units, set point, transducer temperature, user tag, model, device type, serial number, firmware and hardware versions Analog Output (Absolute Pressure) 0.5 VDC / decade 0.5 VDC / decade 0.5 VDC / decade Relays, Optional RS232/RS485 3 relays, SPST 3 relays, SPST 3 relays, SPST Relay Contact Rating 1 A @ 30VAC/DC, resistive 1 A @ 30VAC/DC, resistive 1 A @ 30VAC/DC, resistive Power Requirements 9-30 VDC, 2 W 9-30 VDC, 2 W 9-30 VDC, 2 W Accuracy (Typical) Combined Absolute 5 x 10 -8 Torr to 10-3 ± 30% of reading 5 x 10 -8 Torr to 10-3 ± 30% of reading 10-3 to 100 ±5% of reading 5 x 10-8 Torr to 10-3 ± 30% of reading 10-3 to 50 Torr ±5% of reading 50 to 1000 Torr ± 1% of reading Repeatability (Typical) Combined Absolute 5 x 10 -8 Torr to 10-3 ± 30% of reading 5 x 10 -8 Torr to 10-3 ± 30% of reading 10-3 to 100 ±2% of reading 5 x 10-8 Torr to 10-3 ± 30% of reading 10-3 to 50 ±2% of reading 50 to 1000 Torr ± 1% of reading Accuracy (Typical) 1 Differential not available not available -10 to +10 Torr ±10% of reading -100 to -10 Torr ±8% of reading -760 to -100 Torr ±1% of reading +10 to 100 T orr ±5% of reading Repeatability (Typical) 1 Differential not available not available -760 to +10 Torr ±1% of reading Zero Stability (Typical) 1 Differential not available not available ±0.1% of Full Scale (F .S. = 760 Torr) Overpressure Limit 1500 Torr 1500 Torr 1500 Torr Installation Orientation Any Any Any Internal Volume 21 cm3 21 cm3 21 cm3 Materials Exposed to Vacuum 304 and 403 stainless steel, Viton®, Cu-Ni and Ag-Cu alloy, ceramic, titanium 304 and 403 stainless steel, silicon, SiO2, SiN4, gold, Viton®, epoxy resin, ceramic, titanium 304 and 403 stainless steel, silicon, SiO2, SiN4, gold, Viton®, epoxy resin, ceramic, titanium Electronic Casing 304 stainless steel 304 stainless steel 304 stainless steel Weight (with NW25 KF Flange) 12.7 oz (360 g) 12.7 oz (360 g) 12.7 oz (360 g) Compliance CE CE, ETG.5003.2080 Vacuum Pressure Gauge CE 1 Note: Accuracy and repeatability are typical values measured with Nitrogen gas at ambient temperature after zero adjustment.

© 2009-2018 MKS Instruments, Inc. All rights reserved. MKS products provided subject to the US Export Regulations. Diversion or transfer contrary to US law is prohibited. Specifications are subject to change without notice. mksinst™ and MicroPirani™ are trademarks of MKS Instruments, Inc., Ando patented technology, licensed by Beckhoff Automation GmbH, Germany. * Recommended on inlet flange of 972B/974B to protect sensors from particulates when used in harsh environments. Other filter siz es available upon request. MKS Instruments, Inc. Pr essure & Vacuum Measurement Solutions

6450 Dry Creek Parkway

Longmont, CO 80503 Tel: 303.652.4400 MKS Instruments, Inc. Global Headquarters

2 Tech Drive, Suite 201

Andover, MA 01810 Tel: 978.645.5500 T el: 800.227.8766 (in USA) Web: www.mksinst.com 972B Ordering Code Example: 972B-21034 Code Configuration 971B UniMag 971B- 972B DualMag 972B- 974B QuadMag 974B- Flang e NW25 KF 2 ¾” CF NW40 KF Interface RS232 RS485 EtherCA T/Analog 7 (972B only) Analog Out Standard MKS Connector Rela ys SubD 15pin HD male/no rela y SubD 15pin HD male/3 rela ys 3 (not a vailable with EtherCAT) SubD 15pin HD male/3 rela ys/Dual Aout (piezo differential) - 974B only 4 (not a vailable with EtherCAT) SubD 15pin HD male/3 rela ys/Dual Aout (Absolute) - 972B/974B only 5 (not a vailable with EtherCAT) Enc losure Sealing Standard/Viton® sealing 0 IP54/Viton Standard/Viton sealing/displa y 4 (not a vailable with EtherCAT) Accessories PDR900 Single Channel Controller , RS232/485, US Power Cord PDR900-12-US Cab le, PDR900 to 970B, 10 ft (3M), RS232 100013620 Cab le, PDR900 to 970B, 10 ft (3M), RS485 100013671 Replacement Cold Cathode Anode Module 970BNT -KIT NW25KF Center ing Ring with 4µm Filter and Viton O-ring* 100014515 NW40KF Center ing Ring with 4µm Filter and Viton O-ring* 100014520 Dimensional Drawings — Note: Unless specified, dimensions are nominal values in inches (millimeters referenced). Flange A NW 25 KF 3.70 (94) NW 40 KF 3.86 (98) Flange A NW 25 KF 4.90 (124) NW 40 KF 4.77 (121) RS232/RS485 Version EtherCAT Version