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WWW.MKSINST.COM Series 946 VACUUM SYSTEM CONTROLLER The Series 946 is a versatile half-rack vacuum gauge measurement and control system. The Series 946 provides power and simultaneous readout for up to six different vacuum gauges and/or mass flow controllers, with options for controlling pressure. This highly flexible vacuum system controller supports a wide range of sensor technologies, including Baratron ® capacitance manometers, cold cathode, hot cathode, standard Pirani and convection Pirani sensors for a measurement range from ultra-high vacuum to above atmospheric pressure. In addition, the Series 946 Controller will also monitor and control MKS mass flow controller Types I, G, or P Series and legacy mass flow controllers along with MKS pressure control valves. Internal communication between sensor cards, provides a combined output across as many as three sensors for one continuous pressure reading. The internal control feature provides automatic control of ion gauges, protecting them from accidental power on at high pressures. The Series 946 also provides set point relays for external signals and control and may be configured to provide upstream or downstream system pressure control. Serial communications and individual analog outputs are also furnished as standard features. Features & Benefits
- Simultaneous control and readout for up to six vacuum gauges and/or six mass flow controllers for ultimate versatility
- Pressure readings from 10,000 Torr down to 10-11 Torr, eliminating the need for individual electronics for each sensor
- Closed-loop pressure control option for use with MKS valves eliminates the need for separate pressure control electronics
- RS232/485 computer control standard in all configurations for ease of system interfacing
- Flow ratio control using multiple mass flow controllers
- Intelligent communication between gauges enables a reference sensor to span or zero another gauge allowing for accurate and continuous measurement over wide pressure ranges
- 12 set point relays are included in the base unit for system control flexibility Pressure & Vacuum Measurement Solutions
8.87(225) 9.47(241) 3.00(76) 3.47(88) V a l v e P o s CM CM FC FC FC FC 82.5% Manual SLM SCCM SCCM SCCM 10.03 2103 10.05 9.982 100.7 2.506
946 VACUUM SYSTEM CONTROLLER
The Series 946 provides twelve user programmable set point relays with adjustable hysteresis, four assigned to each of the three card slots. The analog outputs can be programmed as linearly scaled, logarithmically scaled, or as set points, and can be assigned to any of the six sensor channels. With the installation of a valve drive card, fast and accurate closed-loop digital PID pressure control is achieved with an MKS gas proportioning valve or exhaust throttle valve. Additionally, upstream pressure control can be accomplished with a mass flow controller and an MFC card operating in ratio mode. Dimensional Drawing — Note: Unless otherwise specified, dimensions are nominal values in inches (mm referenced). Series 946 Back Panel Commands are activated through the front panel or via an RS232/485 interface, and all entry parameters are stored in nonvolatile memory in case of power loss. The Series 946 has the versatility to be re-configured as your needs change. With the reassignment of channels and the addition of cards, the Series 946 affords the flexibility needed for future upgrades.
Display 320x240 color QVGA TFT LCD with back lighting. Up to 6 pressure or flow displays. Display indicators for unit of measure, calibration functions, user calibration, set points, PID control status and valve position. Compatible Sensors/Transducers MKS Baratron® capacitance manometers providing 0 to 10 VDC output* MKS Differential Baratron capacitance manometer, 226A MKS Pirani sensors MKS Convectron/Convection Series 275/317 MKS cold cathode ionization sensors - Series 423, 431 and 422 MKS hot cathode ionization sensors (Nude and Mini-Ion gauge types) Compatible Mass Flow Controllers MKS Mass-Flo® mass flow controller Types G, I, P Series and legacy products** Compatible Pressure Control Valves MKS 248A, 148J, 154A (solenoid control valve), 153D and T3Bi (exhaust throttle valves) Pressure Measurement Range 10,000 Torr to 10-11 Torr (Dependent upon sensor type) Measurement Range 1.0 x 10-11 to 10,000 Torr 1.0 x 10-11 to 2.7 x 10+4 mbar 1.0 x 10-9 to 2.7 x 10 +6 Pascal 1.0 x 10-8 to 2.0 x 10 +7 microns Pressure Units Torr, mbar, Pascal Flow Units sccm and slm Operating Temperature 5° to 40° C (41° to 104°F) Storage Temperature 10° to 55°C (50° to 131°F) Relative Humidity 80% max for temperatures less than 31°C, decreasing linearly to 50% maximum at 40°C Size ½ rack, 2U High, 13'' Deep Power Requirement and Consumption 150 watts maximum 100 - 240 VAC 50/60 Hz Set Point Relays Twelve pressure dependent set points (4 per card slot); SPST relays, contact rating 2 amps @ 30 VAC Output Buffered, log linear and linear output for each channel and log linear for combined channels Front Panel Controls Power on-off switch, setup and operational commands can be accessed via the keypad Insulation Coordination Over voltage Category II, Pollution Degree 2 Dimensions Half 19'' Rack, 2U, 3.47'' x 9.47'' x 13.00'' Controller Weight 8 lbs. (3.6 kg) Compliance CE Specifications * Limited to power requirements of ≤ 1 amp, cable connections and Full Scale ranges. ** Any MFC requiring ±15 VDC or +15 to +24 VDC, 0 - 5 VDC set point and standard 15 pin or 9 pin D-sub cable connection.
© 2015-2018 MKS Instruments, Inc. All rights reserved. MKS products provided subject to the US Export Regulations. Diversion or transfer contrary to US law is prohibited. Some Baratron® capacitance manometer products may not be exported to many end user countries without both US and local government export licenses under ECCN 2B230. Specifications are subject to change without notice. mksinst™ is a trademark and Baratron® and Mass-Flo® are registered trademarks of MKS Instruments, Inc., Andover, MA. Profibus® is a registered trademark of Profibus International. Base Controller Country Code Card Slot "A" Card Slot "B" Card Slot "C" Comm/Pressure Control Slot Part Code Part Code Part Code Part Code Part Code Part Code 946 US EU JP UK CA (Canada) CC/CL Cold Cathode CT Dual Convection Pirani/ Standard Pirani CM Dual Baratron®/Piezo HC Hot Cathode LPN/ Mini-Ion Gauge FC Dual Mass Flow Controller NA Blank CC/CL Cold Cathode CT Dual Convection Pirani/ Standard Pirani CM Dual Baratron®/Piezo HC Hot Cathode LPN/ Mini-Ion Gauge FC Dual Mass Flow Controller NA Blank CC/CL Cold Cathode CT Dual Convection Pirani/ Standard Pirani CM Dual Baratron®/Piezo HC Hot Cathode LPN/ Mini-Ion Gauge FC Dual Mass Flow Controller NA Blank NA Blank PC Pressure Control Sample Part Number: 946-US-CMFCNA-PC 946 with Dual Capacitance Manometer and Dual Mass Flow Controller gauge cards and Pressure Control card in the comm port. Standard controller includes power cord for country selected and accessory connectors. Plug-in Controller Modules and Accessories
100015267 Plug-in Controller Board for Dual Capacitance Manometer/Piezo (CM)
100015132 Plug-in Controller Board for Dual Convection Pirani Sensor (CT)
100018446 Plug-in Controller Board for Cold Cathode Sensor (CC)
100018448 Plug-in Controller Board for Cold Cathode Sensor, TTL (CL)
100015641 Plug-in Controller Board for Hot Cathode (Nude/Mini-Ion Gauge) (HG)
20000712 Plug-in Controller Board for Dual Mass Flow Controllers (FC)
100016609 Plug-in Controller Board for Pressure Control (PC)
RM-13 946 Half-Rack Controller Installation Kit
100007700 Full Rack Mounting Kit (2 Controllers)
Pirani and Convection Pirani Cables 103170006SH 10 ft cable to connect 317/345 103170007SH 25 ft cable to connect 317/345
275 Convectron Cables
100016980 10 ft cable to connect 946 to 275 Convectron 100016981 25 ft cable to connect 946 to 275 Convectron MKS Baratron® Capacitance Manometer Cables 100007555 10 ft cable to connect 946 to 626 and 627 Baratrons with 15 pin connector 100007556 25 ft cable to connect 946 to 626 and 627 Baratrons with15 pin connector 100016951 10 ft cable to connect 946 to 722 and 226A Baratrons with 9 pin connector 100016952 25 ft cable to connect 946 to 722 and 226A Baratrons with 9 pin connector MKS Cold Cathode Cables 100016217 10 ft cable to connect 431 cold cathode 100016218 25 ft cable to connect 431 cold cathode 100016295 10 ft cable to connect 423 I-Mag cold cathode 100016296 25 ft cable to connect 423 I-Mag cold cathode MKS Hot Cathode Cables 100010909 10 ft cable to connect Nude Tube Hot Cathode Sensor 100010910 25 ft cable to connect Nude Tube Hot Cathode Sensor 100011106 10 ft cable to connect Mini-Ion Gauge Sensor 100011107 25 ft cable to connect Mini-Ion Gauge Sensor MKS Mass Flow Controller Cables 100016744 10 ft cable to connect MKS MFC, with ±15V or +15-24V and 15 pin std Dsub 100016745 25 ft cable to connect MKS MFC, with ±15V or +15-24V and 15 pin std Dsub MKS Pressure Control Valve Cables 100018192 10 ft cable to connect 148/248/154 Pressure Control Valve 100018191 10 ft cable to connect 153 Throttle Valve For T3Bi cabling, please contact MKS Applications Engineering. For any additional cabling, please contact MKS Applications Engineering. MKS Instruments, Inc. Pressure & Vacuum Measurement Solutions
6450 Dry Creek Parkway
Longmont, CO 80503 Tel: 303.652.4400 MKS Instruments, Inc. Global Headquarters
2 Tech Drive, Suite 201
Andover, MA 01810 Tel: 978.645.5500 Tel: 800.227.8766 (in USA) Web: www.mksinst.com