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WWW.MKSINST.COM Series 943 cold cathode vacuum gauge system The Series 943 Cold Cathode vacuum gauge system includes the Series 943 digital controller and two cold cathode sensors: the Series 421 sensor for UHV use, or a lower cost Series 423 I-Mag® sensor for OEM or industrial use. The Series 943 Cold Cathode vacuum gauge system is designed to be user-friendly and to provide fast, reliable pressure measurement from 10-10 to 10-2 Torr. The 943 digital controller features two standard independent relay set points, which allows you to confidently control your process. Adjust the set points from the front panel while viewing the display. Red LEDs indicate set point activation status. The Series 943 displays pressure from 10 -10 to 10-2 Torr using a high visibility LED display. Two types of analog output are standard, for remote monitoring of pressure. An internal converter provides output that allows a simple log conversion from voltage to pressure over the entire operating range. A fast responding, buffered analog output is also provided through the 15 pin accessory connector on the rear panel. Front panel functions allow the user to disable the high voltage, as well as set a pressure at which the cold cathode will automatically turn off. This prevents the controller from displaying incorrect readings when the pressure goes above the operating range of the sensor. Features and Benefits

  • Wide pressure measurement r ange 10-10 to 10-2 Torr
  • Digital LED displa y with set point status indicators
  • Choice of tw o cold cathode sensors; Ser ies 421 or Ser ies 423 I-Mag®
  • Fast system control with tw o set points
  • Sensor tubes ma y be mounted in an y position without aff ecting reading
  • No filaments to b urn out No need to degas the gauge
  • No adjustment in emission current or filament v oltage required
  • Cleaning of sensor is easy with a demountab le tube
  • Sensor tube less susceptib le to contamination due to isolated collector

Applications

The 943 Cold Cathode vacuum gauge system is well-suited for industrial, process and analytical applications including pressure measurement of high vacuum chambers and control of high vacuum systems. Areas of applications may include high energy physics, analytical instruments, laser production, ion implantation, mass spectrometry, or PVD. Pressure & Vacuum Measurement Solutions

Using an inverted magnetron design, the 423 I-Mag® and 421 sensor can operate at pressures much lower than a traditional Penning cold cathode sensor — as low as 10-11 Torr with the proper controller. This increased pressure range makes the Cold Cathode sensors ideal for UHV use. A unique design feature of the Cold Cathode sensors is a second feedthrough for ion collection. In an ordinary single feedthrough design, any current leakage between the anode and ground would result in pressure measurement errors. Only the ion current from the cathode contributes to a measurement reading in a dual feedthrough design, making it ideal for process monitoring. With no filament to burn out, both the 423 I-Mag ® and 421 sensors are not ruined by sudden inrushes of air and are resistant to vibration damage. Additionally, there is no need to adjust the emission current or to degas the gauge, reducing response time to pressure changes. The 421 sensor should be selected when you want to bake the sensor to 250°C with the magnet in place. The sensor connectors need to be removed. The 423 I-Mag sensor was created to provide a lower cost alternative to the 421. The sensor is more compact, less expensive and easier to maintain. If bakeout is required, the magnets and sensor connectors can be removed and the sensor can be baked to 400°C. In addition, MKS provides a variety of customized gauges to suit specific customer needs. This includes special sensors for many semiconductor processes as well as high energy physics facilities. We have special versions of the 421 that will operate at 200°C or others that can be used in high radiation environments. Series 943 Controller Specifications measurement Range 1.0 x 10-10 to 1.0 x 10-2 Torr 1.3 x 10-10 to 1.3 x 10-2 mbar 1.3 x 10-8 to 1.3 Pa s et Point Range 2.0 x 10-9 to 9.0 to 10-3 Torr 2.7 x 10-9 to 1.2 x 10-2 mbar 2.7 x 10-7 to 1.2 Pa o perating t emperature 5° to 40°C (41° to 104°F) s torage t emperature Relative h umidity 80% maximum for temperatures less than 31°C, decreasing linearly to 50% maximum at 40°C a ltitude 2000 m maximum Power Requirements 100 to 120 VAC, 50/60 Hz, 9 W 220 to 240 VAC, 50/60 Hz, 9 W Resolution 1% of indicated decade s et Points 2 independently set, SPDT contacts, resistive load; A VAC or VDC s et Point Response 50 msec for pressures >10-8 Torr o utput v oltage Analog: 0 to 9 VDC Logarithmic Analog: 1 to 9 VDC, 1 V per decade Front Panel c ontrols Power on/off; set point and protect view buttons, LED set point indicators, set point and protect adjust potentiometers, high voltage on/off/remote toggle switch d isplay Red LED, 7 segments digits 14 mm in height, ±60° viewing angle, 2 digits (1 leading) with 1½ digit signed exponent, Units shown in either Torr, mbar or Pascal, update rate: 250 msec Weight 2.5 lbs. (1.1 kg) c ompliance CE Dimensional Drawing — Series 943 Cold Cathode Controller Note: Unless otherwise specified, dimensions are nominal values in inches (mm referenced).

Dimensional Drawing — Series 421 Sensor Note: Unless otherwise specified, dimensions are nominal values in inches (mm referenced). Dimensional Drawing — Series 423 I-Mag® Sensor Note: Unless otherwise specified, dimensions are nominal values in inches (mm referenced). Specifications

421 Sensor Specifications

measurement Range 1.0 x 10-11 to 1.0 x 10-2 Torr 1.0 x 10-11 to 1.0 x 10-2 mbar 1.0 x 10-9 to 1.0 Pa m aterials e xposed to v acuum Stainless steel, silver-copper brazing alloy, alumina ceramics, aluminum AL 6061, Elgiloy®, OFHC® copper Reproducibility 5% of reading at constant temperature c ables and c onnectors Cables connected via bayonet and threaded type coaxial connectors Bakeout t emperature 250°C connectors off 125°C connectors on o perating t emperature 0° to 125°C (32° to 257°F) c alibration g as Air/nitrogen Installation o rientation Any Internal v olume 1.8 in.3 (30 cm3) maximum Weight with c F 2.8 lbs. (1.3 kg) w/ CF

423 I-Mag® Sensor Specifications

measurement Range 1.0 x 10-11 to 1.0 x 10-2 Torr 1.0 x 10-11 to 1.0 x 10-2 mbar 1.0 x 10-9 to 1.0 Pa m aterials e xposed to v acuum Stainless steel, 6061 aluminum, Inconel®, glass and alumina ceramic Reproducibility 5% of reading at constant temperature c ables and c onnectors Tube Side: molded connector with a positive locking bolt Controller Side: bayonet connector and threaded coaxial connector Bakeout t emperature to 400°C (752°F) with CF flanges, with magnet and cable removed o perating t emperature 0° to 70°C (32° to 158°F) c alibration g as Air/nitrogen Installation o rientation Any Internal v olume 0.9 in.3 (15 cm3) maximum Weight with c F 2.0 lbs (0.8 kg) w/ CF t ype a NW 25 KF 6.72 (171) NW 40 KF 6.32 (161) 23/4” CF, nonrotatable 6.27 (159) 1” Tube 6.22 (158) t ype a NW 25 KF 3.41 (87) NW 40 KF 3.41 (87) 23/4” CF, rotatable 3.47 (88) 1” Tube 3.26 (83)

Series 943 Controller 1, 2 943-A-120V50-TR-PC Series 943 Controller, Torr readout, 50 Hz, 100-120 volts 943-A-120V60-TR-PC Series 943 Controller, Torr readout, 60 Hz, 100-120 volts 943-A-220V50-TR-PC Series 943 Controller, Torr readout, 50 Hz, 220-240 volts 943-A-220V60-TR-PC Series 943 Controller, Torr readout, 60 Hz, 220-240 volts 943-A-120V50-MB-PC Series 943 Controller, mbar readout, 50 Hz, 100-120 volts 943-A-120V60-MB-PC Series 943 Controller, mbar readout, 60 Hz, 100-120 volts 943-A-220V50-MB-PC Series 943 Controller, mbar readout, 50 Hz, 220-240 volts 943-A-220V60-MB-PC Series 943 Controller, mbar readout, 60 Hz, 220-240 volts 943-A-120V50-PA-PC Series 943 Controller, Pascal readout, 50 Hz, 100-120 volts 943-A-120V60-PA-PC Series 943 Controller, Pascal readout, 60 Hz, 100-120 volts 943-A-220V50-PA-PC Series 943 Controller, Pascal readout, 50 Hz, 220-240 volts 943-A-220V60-PA-PC Series 943 Controller, Pascal readout, 60 Hz, 220-240 volts

423 I-Mag® Cold Cathode Sensor

423 I-Mag Cold Cathode Sensor, NW 25 KF

423 I-Mag Cold Cathode Sensor, NW 40 KF

423 I-Mag Cold Cathode Sensor, 2 3/4” CF

423 I-Mag Cold Cathode Sensor, 1” Tube

421 Cold Cathode Sensor

421 Cold Cathode Sensor, NW 25 KF

421 Cold Cathode Sensor, NW 40 KF

421 Cold Cathode Sensor, 23/4” CF

421 Cold Cathode Sensor, 1” Tube

421 Cold Cathode Sensor, 8 VCR ®-F

423 I-Mag® Cold Cathode Cables

2 ft. (0.6 m) 100007873 10 ft. (3.0 m) 100007874 25 ft. (7.6 m) 100002395 50 ft. (15 m) 100008759 Custom Cable

421 Cold Cathode Cables

100006171 10 ft. (3.0 m) 100006172 25 ft. (7.6 m) 100006173 50 ft. (15.2 m) 100006174 100 ft. (30.5 m) 100006175 Custom Cable A ccessories

103150001 Power Cord, 115 VAC

Series 943 Output Connector Kit 100005021 Mounting Hardware 100006734 Rebuild Kit for Series 421 Cold Cathode Sensor (6 bolt, 1/4-28) 100002353 Rebuild Kit for Series 423 I-Mag Sensor 100005279 Wrench for Series 421 Sensor Rebuild Kit 100009887 Series 943 Cold Cathode Manual Series 943 Cold Cathode - 3/18 © 2008-2018 MKS Instr uments, Inc. All rights reserved. MKS products provided subject to the US Export Regulations. Diversion or transfer contrary to US law is prohibited. mksinst™ is a trademark and I-Mag® is a registered trademarks of MKS Instruments, Inc. Viton ® is a registered registered trademark of AMAX, Inc. 1 Includes controller, power cord, manual and output connector. 2 Controller also available without power cords. NA is inserted into the part number instead of PC 3 VCR®-compatible parts may be used. MKS Instruments, Inc. Pr essure & Vacuum Measurement Solutions

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Longmont, CO 80503 Tel: 303.652.4400 MKS Instruments, Inc. Global Headquarters

2 Tech Drive, Suite 201

Andover, MA 01810 Tel: 978.645.5500 T el: 800.227.8766 (in USA) Web: www.mksinst.com