925 MKS | Alldatasheet

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Technical content

MicroPirani™ Transducer The Series 925 MicroPirani™ transducer is a thermal conductivity gauge based on a unique, MEMS-based (Micro-Electro-Mechanical Systems) sensor. The 925 is used for vacuum pressure measurement and offers analog voltage output, digital interface and set point relays for process controlling. The 925 Transducer offers a wide measurement range from 1x10-5 Torr to atmosphere that is based on measurement of thermal conductivity. The MicroPirani sensor consists of a silicon chip with a heated resistive element forming one surface of a cavity. A cover on top of the chip forms the other surface of the cavity. Due to the geometry of the sensor, convection cannot take place within the cavity and consequently, the sensor is insensitive to the mounting position. Gas molecules are passed by diffusion only to the heated element where the heat loss of the gas is measured.

  • Incr eased pressure measurement range from 10 -5 Torr to atmosphere, two decades beyond a standard Pirani Thr ee set point relays for process control (option) Ultra compact design High accuracy for impr oved process control Ease of operation via analog output and digital communication (RS232, RS485, and EtherCA Micr oPirani solid state sensor is resistant to damage from air inrush or vibration Mountable in any orientation for ease of installation; no loss of measur ement accuracy Optional integrated touch-scr een display available for local pressure indication, etc. Alter nate analog output and electrical connectors available to match other vendors’ gauges and facilitate an easy upgrade Product Features

Applications

The 925 can be used in many different vacuum applications within the semiconductor, analytical, and coating industries: General vacuum pr essure measurement

  • For eline and roughing pressure measurement Gas backfilling measur ement and control Mass spectr ometer control Activation of UHV gauges System pr ocess control Contr ol system pressure

Like all thermal conductivity sensors, the 925 is sensitive to gas type. To compensate for gas dependency, the MicroPirani has a number of common gas calibrations that can be selected via the digital interface. This makes it a simple solution for locating medium to fine leaks in vacuum systems. The 925 has RS232, RS485, and EtherCAT digital communication interface for setup of transducer parameters and to provide real time pressure measurement. The 925 also has a analog pressure output of 1 VDC/decade that can be interfaced to external analog equipment for pressure readout or controlling. Other analog outputs and curves can be selected via the digital user interface. The 925 has up to three mechanical relays which can be used for process control, examples are interlocking valves or pumps. The 925 compact design significantly reduces the amount of space occupied by a vacuum gauge. This is particularly appealling to system designers and allows for a more compact vacuum system. Flange A NW 16 KF 1.93 (49.1) NW 16 KF Ext 2.58 (65.6) NW 25 KF 2.00 (50.9)

4 VCR

® 3.20 (81.4) 8 VCR® 3.24 (82.4) EtherCATRS232/RS485/Analog Flange A NW 16 KF 2.84 (73.39) NW 16 KF Ext 3.52 (89.41) NW 25 KF 3.23 (82.04) ® 4.43 (112.52) 8 VCR® 4.47 (113.54) Dimensional Drawing Note: Unless otherwise specified, dimensions are nominal values in inches (mm referenced). Pin RS232/485 9 pin Sub-D RS232/485 15 pin Sub-D EtherCAT 15 pin Sub-D RJ45 EtherCAT IN/OUT

1 Relay Normally Open RS485 (-)/RS232 transmit NC TX+

2 Relay Normally Closed RS485 (+)/RS232 receive NC TX-

3 Power (+) (9-30 VDC) Power (+) Input Power (+) 9 to 24 VDC RX+

4 Power Return (-) Power (-) Power Return - NC

5 Analog Output (+) Analog Output (+) abs. Signal Output + NC

6 Relay Common Analog Output (-) Signal Common RX-

7 RS485 (-)/RS232 Transmit Relay #1 NO NC NC

8 Analog Output Relay #1 Common NC NC

9 RS485 (+)/RS232 Receive Relay #1 NC NC

10 Relay #2 NC NC

11 Relay #2 Common NC

12 Relay #2 NO NC

13 Relay #3 NC (or analog output diff) NC

14 Relay #3 Common NC

15 Relay #3 NO Chassis Ground

Three (3) set point relays and dual Aout, 15 pin D Subminiature and RJ45 EtherCAT IN/OUT Connectors

Sensor Type Micr oPirani (MEMS Thermal Conductivity) Measuring Range 1.0 x 10-5 Torr to Atmosphere Set Point Range 5.0 x 10-4 Torr to 500 Torr Calibration Gas Air , Argon, Helium, Nitrogen, Hydrogen, H2O vapor, CO2, Xenon, Neon Operating Temperature Range 0° to 40°C (32° to 104°F) Maximum Bakeout T emperature 80°C (176°F), non-operating Communication RS485 / RS232 (4800 to 230400 Baud) Contr ols Zer o adjust, atmosphere adjust, pressure units, baud rate, address, factory default, gas type; set point functions: value, hyster esis, direction, enable analog output transducer status, switch, LED test Status Pr essure reading and units, set point, operating time, transducer temperature, user tag, model, device type, serial number , firmware and hardware versions part number, manufacturer Analog Output 1 to 9 VDC, 100 W maximum output impedance, 1 volt/decade Analog Output Resolution 16 bit Relays (Optional) 925 - 3 r elays SPDT Relay Contact Rating

1 A @ 30V

AC/DC, resistive Relay Response <100 msec maximum Power Requirements 9 to 30 VDC, < 1.5 watts max Accuracy (T ypical)1 5 x 10-4 to 10-3 Torr ±10% of Reading 10-3 to 100 Torr ±5% of Reading 100 T orr to atm ±25% of Reading Repeatability (Typical)1 10-3 to 100 Torr ±2% of Reading Overpressure Limit 3000 T orr absolute Installation Orientation Any Inter nal Volume (KF16) 2.80 cm3 Materials Exposed to Vacuum 304 stainless steel, Silicon, SiO2, Si3N4, Gold, Viton®, Low out gassing epoxy r esin Electronic Casing and Flange 304 stainless steel W eight (KF 16) 170 g Compliance CE, ETG.5003.2080 V acuum Pressure Gauge 1 Accuracy and repeatability are typical values measured with Nitrogen gas at ambient temperature after zero adjustment.

Ordering Information

Ordering Code Example: 925-11030 Code Configuration

925 MicroPirani

1/8'' NPT-M VCR4 VCR8 CF1.33 KF16 Extended Interface RS232/Analog RS485/Analog EtherCAT/Analog Analog Out Standard MKS 0 0 Connector Relays D-Sub 9 pin male/One relay set point D-Sub 15 pin HD male/No Relay D-Sub 15 pin HD male/Three Relays D-Sub 15 pin HD male/Three Relays/Dual Aout 1 (not available wth EtherCAT) 3 (not available wth EtherCAT) 5 (not available wth EtherCAT) Enclosure Standard/Viton Sealing Standar d/Viton Sealing/Display 4 (not available wth EtherCAT) 0 925 with Display The optional integrated touch-screen display is user configurable; the user can change pressure units, orientation and has access to set point parameters as well as gas type. The display also indicates the status of the available set point relays. Displayed reading can be seen from >5 meters away on the high contrast display. PDR900 Power Supply and Display The PDR900 power supply and readout unit is a stand alone, single channel controller for use with the Series 900 digital vacuum transducers. It can be used as a stand-alone power supply readout unit or as a tool for configuration, calibration and diagnostics of system integrated transducers in OEM applications. www.MKSINST.com +1-978-645-5500 I +1-800-227-8766 MKS products provided subject to the US Export Regulations. Export, re-export, diversion or transfer contrary to US law (and local country law) is prohibited. mksinst ™ and MicroPirani™ are trademarks of MKS Instruments, Inc., VCR® is a registered trademark of Swagelok Co. Viton® is a registered trademark of E.I Dupont Co., 925_01/20 ©2020 MKS Instruments, Inc. Specifications are subject to change without notice.