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WWW.MKSINST.COM Series 902B ABSOlutE PIEzO tRANSDuCER The Series 902B Piezo transducer combines the pressure measurement technology of a MEMS-based Piezo sensor with a metal sealed stainless steel 316 diaphragm and integrated electronics. The 902B provides economical, absolute pressure measurement that is independent of gas type. With a measurement range of 0.1 to 1000 Torr Full Scale, the sensor is ideal for a wide range of applications including semiconductor manufacturing, thin film coatings, freeze- drying, analytical instruments, medical devices, automotive and aerospace. Features & Benefits

  • Measurement r ange of 0.1 to 1000 T orr Full Scale Low cost tr ansducer alter native to more e xpensive conventional transducers
  • Gas independent pressure measurement f or accurate, total pressure measurement
  • Sensor is suitab le f or harsh processes due to rob ust design and stainless steel construction
  • Solid state Piez o sensor resistant to damage from air inr ush and vibrations
  • Compact system design with integ rated electronics and sensor in one unit Mountable in an y or ientation f or ease of installation
  • Reduced process cycle time due to sensor’ s fast, accurate and repeatable pressure measurements Ease of oper ation with both analog output and digital comm unication
  • Multiple analog output em ulations available
  • Process control from up to three set point rela ys with fast response time
  • Optional integ rated touch-screen displa y a vailable for local pressure indication, etc.

Applications

The 902B is well suited for sterilized environments because the only material exposed to the vacuum is stainless steel 316. This includes freeze drying processes and plasma sterilization of medical equipment. The 902B has an attractive price- performance ratio making it an excellent alternative to more expensive conventional transducers, especially in applications where the highest measurement accuracy is not needed. This includes vacuum packaging in the food industry and vacuum furnaces. The 902B is robust and can withstand harsh environments, g-forces and mechanical vibrations. This makes it a good candidate for general foreline vacuum measurement applications. The digital communication interface, analog output emulation, three set point option and compact design makes the 902B a versatile transducer that is easy to integrate in most vacuum systems. Pressure & Vacuum Measurement Solutions

Description

The Series 902B Piezo transducer is based on a silicon piezo resistive pressure sensor that measures absolute vacuum pressure with an accuracy of ±1% of Reading (from 10-1000 Torr). The sensor is robust and resistant to mechanical vibration and g-forces. Furthermore, the sensor technology makes the transducer gas type independent. With only stainless steel 316 exposed to the process gas, the transducer can be used in many demanding applications. The 902B is available with an RS232 or RS485 digital communication interface for setup of transducer parameters and to provide real time pressure measurement. In addition, the 902B has a 16 bit analog pressure output that can be interfaced to external analog equipment for pressure readout or close loop control. The standard output is linear from 0-10 VDC, but other outputs are also available. The 902B has up to three mechanical relays which can be used for process control, for example interlocking isolation valves and vacuum pumps. The SPDT relays include both normally open and close contacts and can be set to energize above or below a set point trip value. Many applications require continuous surveillance of system pressure and warning of atypical pressure levels. The flexible relay options of the 902B can provide warning to external safety logic in cases of abnormal pressure and loss of power. The display option offers real time readout of measured pressure, view of transducer settings and set point status. The compact design of the 902B significantly reduces the amount of space occupied by the transducer. This is particularly appealing to system designers and allows design of compact systems or equipment. The 902B is also available in a 9 pin version, offering backward compatibility with the first generation 902. The 902B can be used as a standalone device or together with the PDR900 controller. Dimensional Drawing — Note: Unless otherwise specified, dimensions are nominal values in millimeters (inches ref erenced). PinOuts — D-Sub 15 pin HD and D-Sub 9 pin versions Pin Description RS485 - / RS232 Transmit RS485 + / RS232 Receive Power + (9-30 VDC) Power Return - Analog Output + Analog Output - Relay 1 Normally Open Relay 1 Common Relay 1 Normally Closed Relay 2 Normally Closed Relay 2 Common Relay 2 Normally Open Relay 3 Normally Closed or Analog Output 2 + Relay 3 Common Relay 3 Normally Open Pin Description Relay Normally Open Relay Normally Closed Power + (9-30 VDC) Power Return - Analog Output + Relay Common RS485 - / RS232 Transmit Analog Output RS485 + / RS232 Receive Standard Analog Output— Pressure vs. Voltage Flange A NW 16 KF 49.1 (1.93) 1/8'' NPT-F 89.0 (3.50)

1 VCR®-compatible parts may be used

Sensor type Stainless steel enclosed Piez o (Absolute Pressure) Measuring Range 0.1 to 1000 Torr Over Pressure l imit 1500 T orr Set Point Range 1 to 1000 Torr AccuracySee Note (1) (10-1000 Torr) ±1% of Reading RepeatabilitySee Note (1) ±0.3% of Reading Operating temperature Range 0 to 40°C (32 to 104°F) Maxim um Bakeout temperature 100°C (non-oper ating) Digital Communication RS485 / RS232 (4,800 to 230,400 Baud) Contr ols Zero adjust, span adjust, analog output, pressure units , baud rate, address, f actory default, set point functions: value, hysteresis, direction, enable Status Pressure reading, units , set point, operating time, transducer temperature, user tag, model, de vice type, serial number, firmware and hardware versions, part number, man ufacturer Analog OutputSee Note (2) (Absolute Pressure) 0 to 10 VDC, 100 Ω maximum output impedance, linear or logarithmic Analog Output Resolution 16 bit (Pr imary) 12 bit (Secondary) See Note (3) Digital Output Resolution 0.1 T orr Relays (Optional) Three rela ys SPDT Relay Contact Rating

1 A @ 30

VDC < 1.2 watt maximum temperature Coefficients Zero 0.01% of Full Scale/°C Span 0.02% of Reading/°C Installation Orientation A ny Internal Volume (KF16) 1.023 cm3 Materials Exposed to Vacuum 316 Stainless Steel Electr onics Casing

304 Stainless steel

W eight (with KF16 flange) 0.37 lb (170 g) Compliance CE Specifications Notes: (1) Accuracy and repeatability are typical values measured at ambient temperature after zero adjustment. (2) Other analog outputs available (extensive output emulation options). (3) Hardware option

© 2014-2018 MKS Instruments, Inc. All rights reserved. MKS products provided subject to the US Export Regulations. Diversion or transfer contrary to US law is prohibited. Specifications are subject to change without notice. mksinst™ and MicroPirani™ are trademarks of MKS Instruments, Inc., VCR® is a registered trademark of Swagelok Co. 902B The PDR900 power supply and readout unit is a stand alone, single channel controller f or use with the Series 900 digital vacuum transducers. It can be used as a stand-alone power supply readout unit or as a tool for configuration, calibration and diagnostics of system integ rated transducers in OEM applications. The optional integ rated touch-screen display is user configurable; the user can change pressure units, orientation and has access to set point parameters as well as gas type. The display also indicates the status of the available set point relays. Displayed reading can be seen from >5 meters away on the high contrast display. PDR900 Power Supply & Display 901P with Display Note: (1) Backward compatible with 1st generation 902 Piezo Transducer Ordering Code Example: 902B-11032 Code Configuration T ype 902B Piezo Transducer 902B- Flang e KF16 1/8'' NPT VCR

8 VCR

VDC (Linear 10 mV/Torr) 0-5 VDC (Linear 5 mV/Torr) 2-10 VDC (LOG10) 1-5 VDC (LOG5) VDC/Decade 0-10 VDC (100 mV/Torr) 1-9.8 VDC Connector/Rela ys D-Sub 9 pin male/One Rela ySee Note (1) 1 D-Sub 15 pin HD male/No Rela y D-Sub 15 pin HD male/Three Rela ys D-Sub 15 pin HD male/Three Rela ys/Dual Analog Out RJ45/FCC68 8 pin (Edw ards/Oerlikon Type)/No Relay Hirschmann 6 pin (Pf eiffer/Inficon Type)/No Relay Enc losure/Display IP40/No Displa y IP54/No Displa y IP40/Display IP40/Displa y (SI Units) MKS Instruments, Inc. Pr essure & Vacuum Measurement Solutions

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