8703

8703 BURKERT | Alldatasheet

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Technical content

Visit product website  DATA SHEET Type 6013  Plunger valve 2/2 way direct-acting Type 0330  Direct-acting 2/2 or 3/2-way pivoted arma- ture valve Type 8611  eCONTROL - Universal controller Type 8619  multiCELL - Multi-chan- nel and multi-function transmitter/controller Type 6027  Direct-acting 2/2 way plunger valve 1000085464 | Standard | EU | en | 202109 | 10 Mass Flow Meter (MFM) for Gases

• Nominal flow r anges from 0.010 l/min to 80 l/min High accur acy V ery fast response times Digital communication via RS485 Compact version The mass flow meter (MFM) type 8703 is suited for measuring the mass flow of gases over a big flow range. The thermal MEMS sensor is located direct- ly in the gas stream and therefore reaches very fast response times. Type 8703 can optionally be calibrated for two different gases; the user can switch between these two gases. The communication with master devices is fully digital, therefore no further analog/digital conversions are needed. Product variants described in the data sheet may differ from the product presentation and description. Type descriptionCan be combined with Type 8703 © Christian Bürkert GmbH & Co. KG, Subject to alteration

2 | 10 Visit product website  Table of contents 1. Gener al Technical Data 3 Materials 3. Dimensions 4 3.2. Sub-base version 4. Device/P rocess connections 6 5. Performance specifications 6 6. P roduct operation 7 6.2. Flow char acteristic Nominal flow range of typical gases 6.3. Softwar e Bürkert Communicator 6.4. Networking 7. Or dering information 9 7.2. Recommendation r egarding product selection 7.3. Bürk ert product filter 7.4. Or dering chart accessories

3 | 10 Visit product website  1. Gener al Technical Data Product properties Material Block Aluminium or stainless steel Body Metal Seal FKM, EPDM Dimensions Detailed information can be found in chapter “3. Dimensions” on page 4. Total weight approx. 500 g (Aluminium) LED display Indication for power, limit and error Performance data Nominal flow range (Q Nom) 10 mlN/min…80 lN/min (N2) Detailed information can be found in chapter “6.2. Flow characteristic” on page 7. Measuring range 1:50 (2…100 %), higher measuring r ange on request Max. operating pressure 10 bar (145 psi) Measuring accuracy ± 0.8 % o. R. ± 0.3 % F . S. (after 1 min. warm-up time) Repeatability ± 0.1 % F . S. Response time (t95 %) < 300 ms Electrical data Oper ating voltage 24 V DC Power consumption 5 W Voltage tolerance ± Residual ripple < Electrical connection Plug D-Sub 9 pin Medium data Operating medium Neutral, non-contaminated gases, others on request Calibration medium Operating gas or air (with conversion factor) Medium temperature - °C…+ °C…+ °C for o xygen) Process/Port connection & communication Port connection NPT ¼, G ¼, screw-in fitting or sub-base, others on request Fieldbus option PROFIBUS DP, CANopen Digitale Outputs Relay outputs 1. Limit (Q Nom almost reached) Load capacity: 25 V, 1 A, 25 VA Digital inputs Not connected Digital (communication) interface Digital via RS485 (Half-duplex or full duplex), RS422 Environment and installation Installation position Horizontal or vertical Ambient temperature - °C…+ Degr ee of protection IP40 Accessories Software-Tool Mass Flow Communicator 1.) The nominal flow value is the max. flow value calibr ated which can be measured. The nominal flow range defines the range of nominal flow rates (full scale values) possible. 2.) Inde x N: Flow rates referred to 1.013 bar and 0 °C. Alt ernatively there is an Index S available which refers to 1.013 bar and 20 °C.

4 | 10 Visit product website  2. Mat erials 2.1. Chemical Resistance Char t – Bürkert resistApp Bürkert resistApp – Chemical Resistance Chart You want to ensure the reliability and durability of the materials in your individual application case? V erify your combination of media and materials on our website or in our resistApp. Start Chemical Resistance Check 3. Dimensions 3.1. Thr eaded version Note: Dimensions in mm approx. 3.5 2x M 4 6 107 G1/4 or NPT1/4 1.7 12.5 61.5 80.5

5 | 10 Visit product website  3.2. Sub-base version Note: Dimensions in mm approx 3.5 35.5 2x 8.8 4x 4.5 35.5 58.5 2x 6 17.75 17.75 58.5 107 2 x M 4 1.7 61.5 80.5

6 | 10 Visit product website  4. Device/P rocess connections 4.1. Analogue version Note: Optionally pin 7 and pin 8 with bus version as tr ansmitter input possible. The cable length for RS232/actual value signal is limit ed to 30 m. Plug D-Sub, 15 pin P in Assignment Analogue control unit

1 Binary input (related to GND Pin2)

2 GND

3 Power supply +

24 V DC

4 Relay, normally opened

5 Relay, normally closed

6 TX+ (RS485-

Y) – bridge with pin 9 at half duplex

7 TX- (RS485-Z) – bridge with pin 8 at half duplex

8 RX- (RS485-B)

9 RX+ (RS485-A)

1.) RS232 interface only to be operated via RS232 adapter with integrated level adjustment 5. P erformance specifications 5.1. P ressure loss diagram of MFMs The diagram shows exemplary the pressure loss characteristics when air flowing through. To determine the pressure loss of another gas, it must first be converted to the corresponding air flow. 100 110 120 G1/4 Sub-base 0 5 10 15 20 25 30 35 40 45 50 55 60 65 70 75 80 ∆p [mbar] QlN/min]

7 | 10 Visit product website  6. P roduct operation 6.1. Measuring principle The mass flow sensor operates according to a thermal principle which has the advantage of providing the mass flow which is inde- pendent on pressure and temperature. A small part of the total gas stream is diverted into a small, specifically designed bypassing channel which ensures laminar flow conditions. The sensor element is a chip immersed into the wall of this flow channel. The chip, produced in MEMS technology, contains a heating resistor and two temperature sensors (thermopiles) which are arranged symmetrically upstream and downstream of the heater. The differential voltage of the thermopiles is a measure of the mass flow rate passing the flow sensor. The calibration procedure effectuates a unique assignment of the sensor signal to the total flow rate through the device. 6.2. Flow char acteristic Nominal flow range of typical gases Not Q(Gas) = f x Q(N2) When using the gas fact ors, measurement errors may occur that are outside the data sheet specification. For applications requiring high accuracy, calibration under field conditions is recommended. F urthermore, the media compatibility of the sealing materials of the MFM should be checked before use with another gas. Gas Min. QNom Max. QNom [lN/min] [lN/min] Argon 0.01 80 Helium 0.01 500 Carbon dioxide 0.02 40 Air 0.01 80 Methane 0.01 80 Oxygen 0.01 80 Nitrogen 0.01 80 Hydrogen 0.01 500

8 | 10 Visit product website  6.3. Softwar e Bürkert Communicator Note: To install the software, click here The communication software allows the user to program additionally various functions. For that purpose the MFC or MFM has to be connected to the computer by a RS232 adapter. 6.4. Networking Note: To install the software, click here Slaves (max. 32) Mass Flow Controller/ Meter Master: i.e. PLC with RS485 Interface Pin 9, RS485 A Pin 8, RS485 B Pin 9, RS485 A Pin 8, RS485 B Pin 9, RS485 A Pin 8, RS485 B

9 | 10 Visit product website  7. Or dering information 7.1. Bürk ert eShop – Easy ordering and quick delivery Bürkert eShop – Easy ordering and fast delivery You want to find your desired Bürkert product or spare part quickly and order dir ectly? Our online shop is available for you 24/7. Sign up and enjoy all the benefits. Order online now 7.2. Recommendation r egarding product selection Note: The „Product Enquiry Form“ at the end of this document contains the relevant fluid specification. Using the experience of Bürkert engineers already in the design phase provide us with a copy of the request containing the necessary data together with your inquiry or order. For the proper choice of the actuator orifice within the MFM, not only the required maximum flow rate Q Nom, but also the pressure val- ues directly before and after the MFM (p1, p2) at this flow rate QNom should be known. In general, these pressures are not the same as the overall inlet and outlet pressures of the whole plant, because usually there are additional flow resistors (tubing, additional shut-off valves, nozzles etc.) present both before and after the controller. Please use the „Product Enquiry Form“ at the end of this document to indicate the pressures directly before and after the MFM. If these are unknown or not accessible to a measurement, estimates are to be made by taking into account the approximate pressure drops over the flow resistors before and after the MFM, respectively, at a flow rate of Q Nom. In addition, please quote the maximum in- let pressure p1 max. to be encountered. This data is needed to make sure the actuator is able to provide a close-tight function within all the specified modes of operation. 7.3. Bürk ert product filter Bürkert product filter – Get quickly to the right product Y ou want to select products comfortably based on your technical requirements? Use the Bürkert product filter and find suitable articles for your application quickly and easily. Try out our product filter 7.4. Or dering chart accessories Note: The adapters serve mainly for initial operation or diagnosis. Those are not obligatory for continuous operation. Description Article no. Connections/Cables Socket D-Sub 9 pin solder connection 917623  Adapter accessories USB adapter (Version 1.1, USB socket type B) 670693  USB connection cable 2 m 772299  Communication software Mass Flow Communicator LINK

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74653 Künzelsau

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Mass Flow Controller for gases 1 | 2Visit this product area on the website  © Christian Bürkert GmbH & Co. KG, subject to change Product Enquiry Form - Mass Flow Controller For Gases Thank you for your interest in our products! In order to provide you with optimum advice, please fill out the following form and send it to your Bürkert representative or e-mail address: info@burkert.com. All information submitted will of course be kept strictly confidential. Please fill in the required fields! * *Note: The interactive functions of this PDF may be restricted depending on the PDF reader used. Personal Information Company Contact person Customer no. Department Street Postcode / Town Telephone no. Email Delivery Quantity Requir ed delivery date Medium data Type of gas or gas mixture Medium temperature ºC ºF Ambient t emperature ºC ºF Fluidic data Flow range QNom Min. M a x . unit Ref. N1.) Ref. S1.) Inlet pressure at QNom 2.) p1 = bar g3.) Outlet pressure at QNom p2 = bar g3.) Max. inlet pressure p1max = bar g3.) Port connection Compr ession fitting Subbase Vacuum fitting Thr ead: G (DIN ISO 228/1) NPT (ANSI B1.2) Installation horizontal, valve upright ver tical, upward flow horizontal, valve horizontal ver tical, downward flow4.) 1.) Reference conditions: Ref. N: T=0°C, P=1,013 bar(a); Ref. S: T=20°C, P=1,013 bar(a) 2.) Corresponds to the calibration pressure 3.) Please indicate all pressure values as overpressure to atmospheric pressure [barg] (g = relative pressure) 4.) Possible reduction of the setting range to 1:10 for a vertical downwards flow Material specifications Body Aluminium S tainless steel Seals F K M EPDM Electrical data IP protection Y es (IP65) No (IP20 or bett er) Control / Communication Note: Please choose one of the following op- tions! Normsignal CANopen/büS PROFIBUS DP Industrial Ethernet 0 … 5 V C ANopen PROFINET 0 … 10 V büS E thernet IP 0 … 20 mA Modbus T CP 4 … 20 mA E therCAT Connection Note: Please choose one of the following op- tions! D Sub sock et M12 sock et D Sub sock et (RJ45 always standard) T erminal block T erminal block M12 sock et

Mass Flow Controller for gases 2 | 2Visit this product area on the website  © Christian Bürkert GmbH & Co. KG, subject to change Approvals / Conformities UL A TEX II Cat. 3 G/D, IECEx USP Class VI conformity FD A conformity EG 1935/2004 conformity Additional Requirements / Comment