8700

8700 BURKERT | Alldatasheet

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Visit product website  DATA SHEET Type 0330  Direct-acting 2/2 or 3/2 way pivoted arma- ture valve Type 8611  eCONTROL - Universal controller Type 8619  multiCELL - Multi-chan- nel and multi-function transmitter/controller Type 6027  Direct-acting 2/2 way plunger valve 1000095930 | Standard | EU | en | 202103 | 09 Mass Flow Meter for Gases (MFM)

• Nominal flow r anges from 0.005 lN/min to 15 lN/min High accur acy Applicable for aggr essive gases Optional: Fieldbus int erface The mass flow meter (MFM) Type 8700 is especially suited for measuring the mass flow of aggressive gases, which need a sensor which is not in direct contact with the gas. The thermal capillary sensor reaches fast response times. Type 8700 can optionally be calibrated for two different gases; the user can switch between these two gases. As electrical interfaces both, analog stand- ard signals and fieldbuses are available. Product variants described in the data sheet may differ from the product presentation and description. Type descriptionCan be combined with Type 8700 © Christian Bürkert GmbH & Co. KG, Subject to alteration

2 | 12Visit product website  Table of contents 1. Gener al technical data 3 Materials 3. Dimensions 5 3.2. Sub-base version 4. Device/P rocess connections 7 5. Performance specifications 8 6. P roduct operation 8 6.2. Flow char acteristic Nominal flow range of typical gases 7. Or dering information 9 7.2. Recommendation r egarding product selection 7.3. Bürk ert product filter 7.4. Or dering chart accessories 7.5. Adapt er sketch

3 | 12Visit product website  1. Gener al technical data Product properties Material Block Stainless steel Body PC (Polycarbonate) or metal Seal FKM, EPDM or FFKM Dimensions Detailed information can be found in chapter “3. Dimensions” on page 5. Total weight Approx. 850 g (stainless steel) LED display Indication for power, limit (with analogue signals) / communication (with fieldbus) and error Performance data Nominal flow range (QNom)1.) 5 mlN/min…15000 mlN/min (N2)2.) Measuring range 1:50 Max. operating pressure 10 bar (145 psi) Measuring accuracy ± 1.5 % o. R ± 0.3 % F . S. (after 30 min. warm-up time) Repeatability ± 0.1 % F . S. Response time (t95 %) < 3 sec. Electrical data Oper ating voltage 24 V DC Power consumption1.) 2.5 W / 5 W (with fieldbus) Voltage tolerance ± Residual ripple ± Electrical connection D-Sub plug 15 pin with PROFIBUS-DP: Socket M12 5 pin with CANopen: Socket M12 5 pin Medium data Operating medium Neutral, or aggressive gases Calibration medium Operating gas or air with conversion factor Medium temperature - °C…+ °C…+ °C for o xygen) Process/Port connection & communication Port connection NPT ¼, G ¼, screw-in fitting or sub-base, others on request Fieldbus option PROFIBUS-DP, CANopen Digital outputs One relay-output for: 1. Limit (process value close to Q Nom) Current output: 25 V, 1 A, 25 VA Digital inputs Two 1. Not assigned 2. Not assigned Digital (communication) interface RS232, Modbus RTU (via RS-Adapter) RS485, RS422 or USB (see “7.4. Ordering chart accessories” on page 10) Analogue interfaces 4…20 mA, 0…20 mA, 0…10 V or 0…5 V Input impedance > 20 kΩ (V oltage) resp. < 300 Ω (Curr ent) Max. load: 10 mA (Voltage output); max. load: 600 Ω (Current output) Environment and installation Installation position Horizontal or vertical Ambient temperature - °C…+ Degr ee of protection IP40 Accessories Software-Tool Mass Flow Communicator 1.) The nominal flow value is the max. flow value calibr ated which can be measured. The nominal flow range defines the range of nominal flow rates (full scale values) possible. 2.) Inde x N: Flow rates referred to 1.013 bar and 0 °C. Alt ernatively there is an Index S available which refers to 1.013 bar and 20 °C.

4 | 12Visit product website  2. Mat erials 2.1. Chemical Resistance Char t – Bürkert resistApp Bürkert resistApp – Chemical Resistance Chart You want to ensure the reliability and durability of the materials in your individual application case? V erify your combination of media and materials on our website or in our resistApp. Start Chemical Resistance Check

5 | 12Visit product website  3. Dimensions 3.1. S tandard version Note: Dimensions in mm approx. 4.5 only with Fieldbus CA. DN = 18 DP = 16.5 Plastic housing with analog or Fieldbus version 2x M4 6 107 Setting of bus address only with Fieldbus G1/4 o. NPT1/4 12.5 42.5 only with Fieldbus 114.5 approx. 3.5 Metal housing with analog version 12.5 113

6 | 12Visit product website  3.2. Sub-base version Note: Dimensions in mm 58.5 35.5 4x 4.5 35.5 2x 8.8 2x 6 17.75 17.75 58.5 107 DP = 16.5 only with Fieldbus CA. DN = 18 approx. 4.5 114.5 42.5 only with Fieldbus Plastic housing with analog or Fieldbus version Setting of bus address only with Fieldbus approx. 3.5 113 Metal housing with analog version

7 | 12Visit product website  4. Device/P rocess connections 4.1. Analogue version/Fieldbus version Note: Optional P in 7 and 8 with bus version as transmitter input possible. The cable length for RS232/actual value signal is limit ed to 30 meters. Analogue version Plug D-Sub, 15 pin Pin Assignment Analogue control unit Bus actuation

1 Relay – normally closed

2 Relay – normally open

3 Relay – middle contact

4 GND for 24 V-supply and binary inputs

6 Only for internal company use

7 Not connected Not connected

8 Not connected Not connected

9 Actual value output

10 Actual value output + Not connected

11 DGND (for RS232)1.)

12 Binary input 1

13 Binary input 2

14 RS232 RxD (without driver)1.) 15 RS232 TxD (without driver)1.) 1.) Driving RS232 interface only by RS232 adapter including an adaption of TTL levels Fieldbus version PROFIBUS DP – socket B-coded M12 (DPV1 max. 12 MBaud) Pin Assignment 4 3

1 VDD (only for termination resistor)

2 RxD/TxD – N (A-Line)

3 DGND

4 RxD/TxD – P (B-Line)

5 Not connected

CANopen – Plug M12 Pin Assignment

1 Shield

2 Not connected

4 CAN_H

5 CAN_L

8 | 12Visit product website  5. P erformance specifications 5.1. P ressure loss diagram of MFM The diagram shows exemplarily the pressure loss characteristics when air flows through a flowmeter with ¼" pipe connection. To determine the pressure loss of another gas, it must first be converted to the corresponding air flow. ∆p [mbar] 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 QlN/min] 6. P roduct operation 6.1. Measuring principle The measurement is based on the bypass principle. A laminar flow element in the main channel generates a small pressure drop. This drives a small flow, proportional to the main flow, through the bypass (sensor tube). Two heating resistors, which are connected in a measuring bridge, are wounded on this stainless steel tube. In the zero-flow state, the bridge is balanced, but with flow, heat is transported in the flow direction and the bridge becomes unbalanced. The dynamics of the measurement is limited by the tube walls, which act as a thermal barrier. With contaminated gases we recommend to install filter elements upstream. This avoids changes in the division ratio between main flow and sensor tube, as well as changes in the heat transmission caused by deposits on the walls of the sensor tube. With these sensors even aggressive gases can be measured, because all essential parts in contact with the gas are fabricated in stainless steel. With this sensor principle it is also possible to convert between different gases.

9 | 12Visit product website  6.2. Flow char acteristic Nominal flow range of typical gases Not Q(Gas) = f x Q(N2) By using the gas fact ors it is possible that the accuracy is not within the datasheet specification. For applications which need high accuracy it is recommended to calibrate under application conditions. The compatibility of the sealing mat erials of the MFMs should be checked before use with another gas. Gas Factor f [lN/min] N2 1.00 Air 1.00 O2 0.98 H2 1.01 Ar 1.4 He 1.42 CO2 0.77 7. Or dering information 7.1. Bürk ert eShop – Easy ordering and quick delivery Bürkert eShop – Easy ordering and fast delivery You want to find your desired Bürkert product or spare part quickly and order dir ectly? Our online shop is available for you 24/7. Sign up and enjoy all the benefits. Order online now 7.2. Recommendation r egarding product selection Note: The „Product Enquiry Form“ at the end of this document contains the relevant fluid specification. Using the experience of Bürkert engineers already in the design phase provide us with a copy of the request containing the necessary data together with your inquiry or order. For the proper choice of the actuator orifice within the MFM, not only the required maximum flow rate Q Nom, but also the pressure val- ues directly before and after the MFM (p1, p2) at this flow rate QNom should be known. In general, these pressures are not the same as the overall inlet and outlet pressures of the whole plant, because usually there are additional flow resistors (tubing, additional shut-off valves, nozzles etc.) present both before and after the controller. Please use the „Product Enquiry Form“ at the end of this document to indicate the pressures directly before and after the MFM. If these are unknown or not accessible to a measurement, estimates are to be made by taking into account the approximate pressure drops over the flow resistors before and after the MFM, respectively, at a flow rate of Q Nom. In addition, please quote the maximum in- let pressure p1 max. to be encountered. This data is needed to make sure the actuator is able to provide a close-tight function within all the specified modes of operation.

10 | 12Visit product website  7.3. Bürk ert product filter Bürkert product filter – Get quickly to the right product Y ou want to select products comfortably based on your technical requirements? Use the Bürkert product filter and find suitable articles for your application quickly and easily. Try out our product filter 7.4. Or dering chart accessories Note: The adapters serve mainly for initial operation or diagnosis. Those are not obligatory for continuous operation. Description Article no. Connections/Cables Socket D-Sub 15 pin solder connection 918274  Hood for D-Sub socket, with screw locking 918408  Socket D-Sub 15 pin with 5 m cable 787737  Socket D-Sub 15 pin with 10 m cable 787738  Adapters1.) RS232 adapter 654748  PC extension cable for RS232 9 pin socket/plug 2 m 917039  RS422 adapter (RS485 compatible) 666371  USB adapter (Version 1.1, USB socket type B) 670639  USB connection cable 2 m 772299  Communication software Mass Flow Communicator LINK Accessories for Fieldbus PROFIBUS-DP (B-coded) Plug M12 2.) 918198  Socket M12 (coupling)2.) 918447  Y-junction2.) 902098  Termination resistor 902553  GSD-File (PROFIBUS), EDS-File (CANopen) LINK C ANopen (A-coded) Plug M122.) 917115  Socket M12 (coupling)2.) 917116  Y-junction2.) 788643  Termination resistor On request GSD-File (PROFIBUS), EDS-File (CANopen) LINK 1.) The adapt ers serve mainly for initial operation or diagnosis. Those are not obligatory for continuous operation. 2.) The M12 single connect ors as listed here are not suitable for their simultaneous use with the Y-piece for reasons of space. Please always use at least one commercially available overmoulded cable whose connector is usually smaller.

11 | 12Visit product website  7.5. Adapt er sketch Shut-off resistor P-DP: 902 553 (male) DCN/CAN: on request Male M12 with cable Female M12 with cable M12 P- DP: 918 447 DVN/CAN: 917 116 M12 P-DP: 918 198 DVN/CAN: 917 115 Y junction P-DP: 902 098 DVN/CAN: 788 643 M12 P-DP: 918 198 DVN/CAN: 917 116 RS232 adapter 654 748 RS422 adapter 666 371 USB adapter 670 639 OR

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Mass Flow Controller for gases 1 | 2Visit this product area on the website  © Christian Bürkert GmbH & Co. KG, subject to change Product Enquiry Form - Mass Flow Controller For Gases Thank you for your interest in our products! In order to provide you with optimum advice, please fill out the following form and send it to your Bürkert representative or e-mail address: info@burkert.com. All information submitted will of course be kept strictly confidential. Please fill in the required fields! * *Note: The interactive functions of this PDF may be restricted depending on the PDF reader used. Personal Information Company Contact person Customer no. Department Street Postcode / Town Telephone no. Email Delivery Quantity Requir ed delivery date Medium data Type of gas or gas mixture Medium temperature ºC ºF Ambient t emperature ºC ºF Fluidic data Flow range QNom Min. M a x . unit Ref. N1.) Ref. S1.) Inlet pressure at QNom 2.) p1 = bar g3.) Outlet pressure at QNom p2 = bar g3.) Max. inlet pressure p1max = bar g3.) Port connection Compr ession fitting Subbase Vacuum fitting Thr ead: G (DIN ISO 228/1) NPT (ANSI B1.2) Installation horizontal, valve upright ver tical, upward flow horizontal, valve horizontal ver tical, downward flow4.) 1.) Reference conditions: Ref. N: T=0°C, P=1,013 bar(a); Ref. S: T=20°C, P=1,013 bar(a) 2.) Corresponds to the calibration pressure 3.) Please indicate all pressure values as overpressure to atmospheric pressure [barg] (g = relative pressure) 4.) Possible reduction of the setting range to 1:10 for a vertical downwards flow Material specifications Body Aluminium S tainless steel Seals F K M EPDM Electrical data IP protection Y es (IP65) No (IP20 or bett er) Control / Communication Note: Please choose one of the following op- tions! Normsignal CANopen/büS PROFIBUS DP Industrial Ethernet 0 … 5 V C ANopen PROFINET 0 … 10 V büS E thernet IP 0 … 20 mA Modbus T CP 4 … 20 mA E therCAT Connection Note: Please choose one of the following op- tions! D Sub sock et M12 sock et D Sub sock et (RJ45 always standard) T erminal block T erminal block M12 sock et

Mass Flow Controller for gases 2 | 2Visit this product area on the website  © Christian Bürkert GmbH & Co. KG, subject to change Approvals / Conformities UL A TEX II Cat. 3 G/D, IECEx USP Class VI conformity FD A conformity EG 1935/2004 conformity Additional Requirements / Comment