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6430 KEITHLEY | Alldatasheet

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www.keithley.com 1.888.KEITHLEY (U.S. only) A Greater Measure of Confidence The Model 6430 Sub-Femtoamp Remote SourceMeter SMU Instrument combines the voltage and current sourcing and measurement functions of Keithley’s popular SourceMeter SMU instruments with sensitivity, noise, and input resistance specifications superior to electrometers This unique combination of broad functionality and exceptional measurement integrity is made possible by the Model 6430’s Remote PreAmp, which offers a very sensitive bi-directional amplifier with sensitive feedback elements for measuring or sourcing currents at the device being tested The high level signals output by the Remote PreAmp are sent to the controlling mainframe via a two-meter cable T his allows the user to make a direct or very short connection to the signal, minimizing the effects of cable noise T he Model 6430 makes voltage, current, and resistance measurements at speeds no electrom- eter can match . It can read up to 2000 source/ measure readings per second into internal memory . Currents can be measured in as little as 5ms on the 100nA range, decreasing to just a few hundred microseconds on the higher ranges . T he Model 6430’s distinguishing features include its excellent low current sensitivity and the Remote PreAmp, which makes this sensitivity useful by eliminating long input cables . The Remote PreAmp is an integral part of the Model 6430’s feedback measuring system that cannot be operated indepen - dently from the measurement mainframe, although it can be separated from the mainframe by up to two meters of connection cable carrying high level signals app lications The Model 6430’s capabilities make it equally useful for research work and for evaluating sophisticated components in test labs for low- current, high-resistance, or sensitive semicon- ductor me asurements . The low noise and drift performance of the Model 6430 also makes it well suited for research studies in single electron devices, highly resistive nanowires and nano - tubes, polymers, highly resistive nanomaterials, and electrochemical amperometry applications H igh sp eed Data Handling The Model 6430 can read more than 2000 read - ings per second into its internal memory buffer . T he IEEE-488 bus output can transmit up to 75 source/measure readings per second to an external computer controller, including pass/fail indication

• 0 .4f a p-p (4E–16a) n oise (typical)
• re mote Pream p can be located at the signal source to minimize cable noise
• > 1016W input resistance on voltage measurements
• H igh speed — up to 2000 readings/second
• up t o 6½-digit resolution
• fa st characterization of components with programmable digital I/ o and interfaces +100mA –100mA +10mA +20V–20V +200V–200V –10mA The Model 6430 provides four-quadrant s ourcing of up to 2.2W, as well as measure - ment s ensitivity down to sub-femtoamp and microvolt levels. It can measure currents from the 1pa range (with just 0.4fa p-p noise typical) up to the 100m a range at up to 20V. Voltage ranges from 200mV to 200V are available. Current and voltage range settings define the maximum source or sink voltage or current.

6430 Sub-femtoamp Remote

Combines broad functionality with exceptional measurement integrity Combines broad functionality with exceptional measurement integrity

A Greater Measure of Confidence www.keithley.com 1.888.KEITHLEY (U.S. only) or dering Information 6430 s ub-femtoamp rem ote so urceMeter s Mu In strument a ccessories s upplied 6430-322-1b lo w Noise Triax Cable, 3-slot triax to alligator clips, 20cm (8 in) 8607 s a fety High Voltage Dual Test le ads Ca -176-1E P re a mp Cable, 2m (6.6 ft) Ca- 186-1b ba nana le ad to sc rew Terminal a dapter CaP -31 -lug Protective Cap (2) Instruction Manual 2x10–15A 1x10–15A –1x10–15A –2x10–15A 01234 5 Hours 1 fA 1x10–15A –1x10–15A 1 fA 01 02 03 04 05 06 07 08 09 01 00 Seconds Typical applications: Semiconductor measurements Gate leakage or channel leakage in FET-based com- ponents can generate errors in MOSFETs, JFETs, a nalog switches, and many other c ircuits . By allowing research- ers to measure extremely low-level c urrents and voltag- es, the Model 6430 can help them understand the design limitations of these components and investigate alternative device structures or materials SET research The Model 6430’s superior low current measurement ability (0 .4 fA p-p noise typical) makes it extremely useful for single electron transistor (SET) and quantum-dot research . Using a technique similar to a lock-in, the 6430 can measure currents with 1aA sensitivity (10 –18A = 6 electrons/second) . T he Measurement Industry’s l owest Noise and Drift This data illustrates the Model 6430’s impressive s tability over a five-hour period, as well as its low short-term noise performance . This signal trace was acquired using the instrument’s AUTOFILTER with a 5- s econd rise time on the 1pA range . The inset close-up is a snapshot of the filtered signal, showing the Model 6430’s low noise during the first 100-second period The data was taken in a laboratory environment where temperature varied about 1°C, with the instrument’s IN/OUT HI and SENSE leads capped Measuring fE T Gate l eakage and Channel Currents Model 6430 Model 6430 D GG A IG VGS VDS ID A S S D 7007-1 S hielded GPIB Cable, 1m (3 .3 f t) 7007-2 S hielded GPIB Cable, 2m (6 .6 f 7007-4 S hielded GPIB Cable, 4m (13 .1 f 7007-05 S hielded GPIB Cable, 0 m (1 .6 f 7078-TRX-6IN -slot, Low Noise, 0 5m (0 .5 f t) Guarded Triax Cable 8501-1 T rigger Link Cable, 1m (3 .3 f t .) 501-2 T rigger Link Cable, 2m (6 .6 f t .) 502 T rigger Link Adapter Box 8503 T rigger Link DIN-to-BNC Trigger Cable KPCI-488LPA I EEE-488 Interface/Controller for the PCI B us KUSB-488B I EEE-488 USB-to-GPIB I nterface Adapter sEr VICEs aVaIl ablE TRN-2400-1-C C ourse: Unleashing the Power of Your SourceMeter SMU Instrument 6430-3Y-EW -year factory warranty extended to 3 years from date of shipment C/6430-3Y-ISO 3 ( ISO-17025 accredited) calibrations within 3 years of purchase* *Not available in all countries Combines broad functionality with exceptional measurement integrity Combines broad functionality with exceptional measurement integrity

www.keithley.com 1.888.KEITHLEY (U.S. only) A Greater Measure of Confidence VolTaG E MEa surE MENT aCCu raC Y (4-W IrE sE NsE)3 ran ge Max. re solution Input2 re sistance ac curacy (23°C ± 5°C)

1 Year, ±(%rdg + v olts)

200 .000 m V 1 µV >1016W 0 .0 12% + 3 50 µ V 2 .00000 V 1 µV >1016W 0 .0 12% + 3 50 µ V 20 .0000 V 1 µV >1016W 0 .0 15% + 1 .5 m V 200 .000 V 1 mV >1016W 0 .0 15% + 1 0 m V TEMPERATURE COEFFICIENT (0°–18°C and 28°–40°C): ±(0 .15 × accuracy specification)/ °C . aDDITIoNa l MEa surE sPECIfI CaT IoNs OUTPUT SETTLING T I ME (typical to 10% o f final value) : <2s, 1pA a nd 10pA ranges; <50ms, 100pA through 10nA ranges; <5ms, 100nA through 100mA r anges . CU RRENT NO ISE: When observed over 1 minute intervals, peak to peak noise will be within 400aA (typical) during 90% of the intervals using Autofilter (5s 10% to 90% rise time), with triax connectors capped, Autozero OFF, Source Delay = 0, on the 1pA range for at least 3 minutes . CurrE NT MEa surE MENT aCCu raC Y (2- or 4-W IrE sE NsE)4 ran ge Max. r esolution Voltage bu rden5 acc uracy (23°C ± 5°C)

1 Year

±(%rdg + amps) 1 .00000 p A 10 a A < 1mV 1 .0 % + 7 f A 10 .0000 p A 100 a A < 1mV 0 .5 0 % + 7 fA 100 .000 p A 1 fA < 1mV 0 .15 % + 3 0 fA 1 .00000 nA 10 fA < 1mV 0 . 050 % + 200 fA 10 .0000 nA 10 0 fA < 1mV 0 . 050 % + 2 pA 100 .000 nA 1 p A < 1mV 0 . 050 % + 20 pA 1 .00000 µA 10 pA < 1mV 0 . 050 % + 300 pA 10 .0000 µA 10 0 pA < 1mV 0 . 050 % + 2 nA 100 .000 µA 1 n A < 1mV 0 .0 25 % + 6 nA 1 .00000 mA 10 nA < 1mV 0 . 027 % + 60 nA 10 .0000 mA 10 0 nA < 1mV 0 .0 35 % + 600 nA 100 .000 mA 1 µ A < 1mV 0 .0 55 % + 6 µA TEMPERATURE COEFFICIENT (0°–18°C and 28°–40°C): ±[(0 .1 5 × accuracy specification) + 1fA]/°C . INP UT C U RRENT : < 3fA at 23°C, <40% RH; typically ±0 .5 fA/°C around 23°C, <40% RH . CoNDENs ED MEa surE sPECIfI CaT Io Ns 1 rEsIsTaN CE MEa surE MENT aCCu raC Y (4-W IrE sE NsE WITH rE MoT E PrEaM P) Source I Mode, Auto Ohms N ormal a ccuracy E nhanced a ccuracy M ax. D efault 23°C ± 5°C) 23°C ± 5°C) 7 ra nge re solution T est Current 1 Y ear, ±(%rdg + o hms) 1 Y ear, ±(%rdg + o hms) <2 .00000 W 6 1 µW — S ource I ACC + Measure V ACC Measure I ACC + Measure V ACC 200 .000 W mW mA 0 .0 77% 0 .0 W 0 .0 48% + 0 .0 W 2 .00000 kW mW mA 0 .0 66% 0 .3 W 0 .0 40% + 0 .1 W 0 .0000 kW mW µ A 0 .0 63% W 0 .0 38% + W 00 .000 kW W µ A 0 .0 82% W 0 .0 64% + W 2 .00000 MW 10 W µ A 0 .0 82% W 0 .0 64% + W 0 .0000 MW 100 W µ A 0 .0 85% kW 0 .0 67% + W 00 .000 MW kW n A 0 .0 85% kW 0 .0 68% + kW 2 .00000 GW kW n A 0 .0 85% kW 0 .0 70% + kW 0 .0000 GW kW n A 0 .0 85% MW 0 .0 70% + kW 00 .000 GW MW p A 0 .2 05% MW 0 .1 85% + MW 2 .00000 TW MW p A 0 .8 22% MW 0 .6 19% + MW 0 .0000 TW MW p A 2 .0 GW 1 .5 4% + MW 20 .0000 TW 6 — — S ource I ACC + Measure V ACC Measure I ACC + Measure V ACC TEMPERATURE COEFFICIENT (0°–18°C and 28°–40°C): ±(0 .15 × accuracy specification)/ °C . SOU RCE I MO DE, MA NUAL OH MS: Total uncertainty = I source a ccuracy + V m easure accuracy (4-wire sense) . SOU RCE V MO DE: Total uncertainty = V source accuracy + I measure accuracy (4-wire sense) . IRE OH MS M ODE: A vailable using active ohms guard and guard sense (mainframe rear panel O NLY) . M ax. Guard Output Current: 50 mA . Accuracy is load dependent . Refer to manual for calculation formula . MA INFRAME GU ARD O UTPUT RE SISTANCE: 0 .1W in ohms mode . NoT E s 1 . S peed = 10 PLC, Autofilter ON, properly zeroed and settled . 2 . S ource I m ode, I = 0 . 3 . V oltage measurement accuracy is not affected by the remote preamp . 4 . C urrent measurement accuracy is not affected by the remote preamp; however, the 1pA through 100nA r anges are available only when using a preamp . 5 . 4 -wire mode . 6 . M anual ohms mode only . 7 . S ource readback enabled, offset compensation ON . Source delay must be pro g rammed such that the source is fully settled for each reading .

A Greater Measure of Confidence www.keithley.com 1.888.KEITHLEY (U.S. only) CoNDENs ED so urC E sPECIfI CaT Io Ns4 VolTaG E P roGr aMM ING aCCu raC Y (4 -W I rE sE NsE)5 ac curacy (1 Year) N oise P rogramming 2 3°C ±5°C ( peak-peak) ra nge r e solution (% rdg. + volts) .1Hz – 10Hz 2 00 .0 00 m V 5 µ V 0 .0 2% + 6 00 µ V 5 µ V 2 .0 0000 V µ V 0 .0 2% + µ V µ V 0 .0 000 V µ V 0 .0 2% + 2 .4 m V µ V 00 .0 V m V 0 .0 2% + m V m V TEMPERATURE COEFFICIENT (0°–18°C and 28°–40°C): ±(0 .15 × accuracy specification)/ °C . MA O UTPUT P OWER: 2 .2 W (four quadrant source or sink operation) . SOU RCE/ SINK LI MITS: mA . VO LTAGE RE GULATION: L ine: 0 .0 1% of range . Load: 0 .0 1% of range + 100µV . N OISE 10Hz–1MHz (p-p): 10mV OV ER VO LTAGE PR OTECTION: User selectable values, 5% tolerance . Factory default = None . CU RRENT LI MIT: B ipolar current limit (compliance) set with single value . Min . 0 .1 % of range . C urrE NT ProGr aM MING aCCu raC Y ITH rE MoT E PrEaM ac curacy (1 Year) 4 Noise P rogramming 2 3°C ±5°C ( peak-peak) ra nge r e solution (% rdg. + amps) .1Hz – 10Hz 1 .0 0000 p A 5 0 aA 1 .0 % + 1 0 fA 5 f A 0 .0 000 p A 00 aA 0 .5 % + 0 fA 0 fA 00 .0 p A 5 f A 0 .1 % + 0 fA 0 fA 1 .0 0000 n A 0 fA 0 .0 % + 00 f A 0 fA 0 .0 000 n A 00 fA 0 .0 % + 2 p A 00 fA 00 .0 n A 5 p A 0 .0 % + 0 pA 3 p A 1 .0 0000 µ A 0 pA 0 .0 % + 00 pA 0 pA 0 .0 000 µ A 00 pA 0 .0 % + 2 n A 00 pA 00 .0 µ A 5 n A 0 .0 % + 0 nA 00 pA 1 .0 0000 m A 0 nA 0 .0 % + 00 nA 5 n A 0 .0 000 m A 00 nA 0 .0 % + 2 µ A 0 nA 00 .0 m A 5 µ A 0 .0 % + 0 µA 00 nA TEMPERATURE COEFFICIENT (0°–18°C and 28°–40°C): ±(0 .15 × accuracy specification)/ °C . MA X. OU TPUT P OWER: 2 .2 W (four quadrant source or sink operation) . SOU RCE/ SI NK LI MITS: ±10 .5 mA @ ± 210V, ±105mA @ ±21V . C URRENT R E GULATION: L ine: 0 .0 1% of range . Load: 0 .0 1% of range + 1fA . V OLTAGE LI MIT: Bipolar voltage limit (compliance) set with single value . Min . 0 .1 % of range . CoN DEN sE D sYsT EM sPEEDs NoT E s 1 . R eading rates applicable for voltage or current measurements . Auto zero off, autorange off, filter off, display off, trigger delay = 0, source auto clear off, and b inary reading format . 2 . P ass/Fail test performed using one high limit and one low math limit . 3 . I ncludes time to re-program source to a new level before making m easurement . 4 . F or sink mode, 1pA to 100mA range, accuracy is ±(0 .1 5% + o ffset*4) . 5 . V oltage source accuracies are not affected by the remote preamp . GENEral Noise re jection: NPl C NM rr C M rr Fast 0 .01 — 8 0 dB Medium 0 .1 — 8 0 dB Normal 1 60 dB 90 dB LOAD I M PEDANCE : S table into 20,000pF on the 100mA through 100µA r anges, 470pF on the 10µA and 1µA ranges, and 100pF o n the nA a nd pA ranges . Refer to the User’s Manual for details on measuring large capacitive loads . COMMON M ODE V OLTAGE: ±4 2VDC maximum . C OMMON MO DE ISOL ATION: > 109W, <1000pF . OV ERRANGE : 1 05% of range, source and measure . MA X . V O LTAGE DR OP BE TWEEN IN PUT/ O UTPUT A ND S ENSE T ERMINALS : 5V . ( To meet specified accuracy with 4-wire sense, refer to the User’s Manual .) MA X . S E NSE LE AD RE SISTANCE: 10W for rated accuracy . S ENSE INPUT R E SIST ANCE: 1M W . MA INFRAME GU ARD OF FSET VO LTAGE: 300µV, typical PR EAMP GU ARD OF FSET VO LTAGE: 1mV, typical PR EAMP GU ARD O UTPUT RE SISTANCE: 110kW . SOU RCE O UTPUT M ODES: Fixed DC level, Memory List (mixed function), Stair (linear and log) . SOU RCE ME MORy LI ST: 100 points max . ME MORy BU FFER : 5 ,000 readings @ 5½ digits (two 2,500 point buffers) . Includes selected measured value(s) and time stamp . Lithium battery backup (3 yr+ battery life) . DI GITAL IN TERFACE: Sa fety Interlock: Active low input . H andler Interface: Start of test, end of test, 3 category bits . +5V @ 3 00mA supply . Di gital I/O: 1 trigger input, 4 TTL/Relay Drive outputs (33V @ 500mA sink, diode clamped) . PR OGRAMMABILIT y : IEEE-488 (SCPI-1995 .0 ), RS-232, 5 user-definable power-up states plus factory default and *RST . PO WER SU PPLy : 100V–240V rms, 50–60Hz (automatically detected at power up), 100VA max . E MC: Conforms with European Union Directive 89/336/EEC EN 55011, EN 50082-1, EN 61000- 3-2 and 61000-3-3, FCC part 15 class B . SA FETy: Conforms with European Union Directive 73/23/EEC EN 61010-1 . VI BRATION: M IL-PRF-28800F, Class 3 . W ARM-UP: 1 hour to rated accuracies . D IMENSIONS: 89mm high × 213mm wide × 370mm deep (3½ in × 8 3⁄8 in × 14 9⁄16 in) . Bench Configuration (with handle and f eet): 04mm high × 238mm wide × 370mm deep (4 1 ⁄8 in × 93⁄8 in × 149⁄16 in) . Amplifier: 20mm high × 57mm wide × 97mm deep (0 83 in × 2 .2 25 in × 3 . 75 in) . W EIGHT: 5 .9 kg (13 lbs) . EN VIRONMENT: Operating: 0°–40°C, 60% R .H . (non-condensing) up to 35°C . Derate 5% R .H ./ °C, 35°–40°C . Storage: –25°C to 65°C . N on-condensing humidity . MEa sur E MENT 1 MA XIMUM RA NGE CH ANGE RA TE: 75/second . SI NGLE RE ADING O PERATION R EADING R ATES (rdg/second) F OR 60Hz (50Hz): sp eed NPl Trigger or igin Measure To GPIb sou rce- Measure 3 To GPIb so urce-Measure Pass/fa il Test2, 3 To GPIb Fast 0 .0 1 / internal 256 (256) 83 (83) 83 (83) Medium 0 .1 0 / internal 181 (166) 73 (70) 73 (70) Normal 1 .0 0 / internal 49 (42) 35 (31) 34 (30)