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WWW.MKSINST.COM 727A & 728A HEATED (45°C OR 100°C) GENERAL PURPOSE ABSOLUTE B ARATRON® CAPACITANCE MANOMETERS Many thin film and industrial applications require accurate, reliable measurement of vacuum in processes where condensation of byproducts could affect the performance of the sensor. To meet these challenging requirements and offer a cost-effective solution, MKS developed the 727A and 728A Baratron ® heated general purpose absolute capacitance manometers. Its b lend of small size, high operating temperatures, rugged corrosion-resistant Inconel ® sensor, and performance make it an ideal solution for new process equipment and retrofits into existing process tools. The 727A Baratron manometer is heated to 45°C, while the 728A Baratron is heated to 100°C. Both models use a robust sensor design that provides high tolerance to overpressure, and its all-Inconel construction gives exceptionally high corrosion resistance to process gases and byproducts found in many applications. The sensor is manufactured using state-of-the-art fabrication and statistical techniques, and typically achieves surface finishes of better than 10 Ra on all wetted surfaces. The electronics are based on sophisticated analog signal processing technology developed by MKS over the last twenty years. Features & Benefits

  • Smallest heated Bar atron manometer a vailable, easily mounts inside process systems and e ven gas cabinets Oper ating temperatures of 45°C or 100°C prevent deposition of process gases and b yproducts that cause drift Full Scale pressure r anges from 1000 to

1 Torr

T ypical accuracy of 0.50% of Reading giv es most accurate measurements at lo w end of pressure range Measurement is independent of gas composition Analog output of 0-10VDC per mits interf acing with most control systems

Applications

  • Semiconductor Precursor Gas Deliv ery Flat P anel Display Manufacturing Equipment Optical and Magnetic Data Stor age Man ufacturing Equipment Biophar maceutical Processing Systems Adv anced Materials Thermal Processing Systems Pressure & Vacuum Measurement Solutions

Pin No. 15-Pin Version 9-Pin Version

1 No Connection Pressure Output

2 Pressure Output No Connection

3 No Connection No Connection

4 No Connection +15V/+24V

5 Power Return -15V

8 No Connection Pressure Return

9 No Connection Power Return

10 No Connection N/A

11 No Connection N/A

12 Pressure Return N/A

13 No Connection N/A

14 No Connection N/A

15 No Connection N/A

Dimensional Drawing — Note: Unless otherwise specified, dimensions are nominal values in inches (mm referenced).

Configuration Absolute measurement, single end Full Scale Rang es 1, 2, 10, 30, 50, 100, 200, 500, and 1000 Torr and metric equivalents Operating Temperatures 727A 45°C 728A 100°C Accurac y (including non-linearity, h ysteresis, and non-repeatability) 727A 0.50% of Reading 728A 0.50% of Reading (10 to 1000 Torr ranges) 1.0% of Reading (< 10 Torr ranges) Response Time < 75 msec T emperature Coefficients Zero 0.004% of Full Scale/°C f or ≥10 Torr; 0.010% of FS/°C for < 10 Torr Span 0.030% of Full Scale/°C f or ≥10 Torr; 0.040% FS/°C for < 10 Torr Ambient Temperature Range 727A to 40°C 728A 15 to 50°C Overpressure Limit 45 psia or 2x Full Scale r ange, whichever is greater Minimum Burst Pressure 10x Full Scale r ange or 90 psi, whichever is greater Materials Exposed to Process Gases Inconel® nickel alloy Electronics Analog Input Power Required 727A ±15VDC or +24VDC ±5% @ 200 mA max 728A ±15VDC ±5% @ 400 mA max Output Signal 0-10 VDC analog into > 10K ohm load Electrical Connectors 15-pin D-subminiature or 9-pin D-subminiature Fittings Standard OD Tube Optional 8 VCR® female, 8 VCO® female, NW16-KF , or 1.33” OD CF Specifications

B 11T CE Ordering Inf ormation 727A_728A - 3/19 © 2009-2019 MKS Instruments, Inc. All rights reserved. Some Baratron® capacitance manometer products may not be exported to many end user countries without both US and local go vernment export licenses under ECCN 2B230. Specifications are subject to change without notice. mksinst™ is a trademark and Baratron® is a registered trademark of MKS Instruments, Andover, MA. Inconel® is a registered trademark of Inco Alloys, Huntington, WV. VCR® and VCO® are registered trademarks of Swagelok Corp., Solon, OH. 728A F Ordering Code Example: 728A11TCE2FB Code Configuration Model 727A - 45°C Oper ating Temperature 727A 728A - 100°C Oper ating Temperature 728A Range (Full Scale) 1 T orr 01T 2 T orr 02T 10 T orr 11T 30 T orr 31T 50 T orr 51T 100 T orr 12T 200 T orr 22T 500 T orr 52T 1000 T orr 13T Fittings Str aight tube, ½” OD BA

8 VCR® female CE

8 VCO® female D A

1.33” OD CF HA I/O Standard input v oltage, 0-10VDC output Accurac y Standard 0.50% Reading F Electrical Connector 9-pin D-subminiature A 15-pin D-subminiature B MKS Instruments, Inc. Global Headquar ters

2 Tech Drive, Suite 201

Andover, MA 01810 Tel: 978.645.5500 Web: www.mksinst.com MKS Instruments, Inc. Pr essure & Vacuum Measurement Solutions Six Shattuck Road Andover, MA 01810 Tel: 978.975.2350