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WWW.MKSINST.COM High Accuracy Systems 690A And 698A SEnSOrS 670B Sign A l CO ndi T i O n E r The High Accuracy Baratron® Pressure Measurement Systems combine advanced capacitance diaphragm sensor technology and solid state electronics with the features demanded by today’s process and metrology engineers to make precision pressure measurement easy – whether on the production line or in the research or metrology laboratory. If your principal concern is accurate pressure measurement, or you need to measure pressure over a very wide range, the High Accuracy Systems are ideal solutions. Long considered standards of pressure measurement in both industry and research, high accuracy Baratron systems are completely modular with a full selection of pressure ranges, levels of accuracy, options, and accessories that ensure there is a system exactly right for your application. Pressure & Vacuum Measurement Solutions 690A/698A F eatures & Benefits

  • Excellent ther mal stability due to e xtremely low temperature coefficients
  • Highest accur acy pressure measurement instr uments available
  • Designed f or use with 670B Signal Conditioner
  • Ideal f or calibr ation T ransfer Standards Six decades of measurement often eliminates several transducers with limited resolution 698A Dif f erential All high-accuracy sensors are single-ended dual-electrode/AC bridge devices that are extremely stable and designed to minimize the effect of temperature changes. They measure pressure from 25,000 mmHg (500 psi) to 10 -5 mmHg, with accuracies ranging from 0.25% to 0.05% of Reading. Models are available in absolute and differential configurations, and bakeable versions are offered for use in ultrahigh vacuum or high temperature applications. They are constructed of Inconel ® and stainless steel, allowing use with many wet, dirty, or corrosive gases. The 690 and 698 are designed for high accuracy pressure measurements in process or metrology environments. By incorporating temperature control into the head, the accuracy is improved to as high as 0.05% of Rdg. The 690 absolute and 698 differential operate at 45°C.

S = Standard accuracy for particular range/calibration. O = Optional accuracy for particular range/calibration. Notes: (1) 0.15% of Reading and 0.25% of Reading accur acies on 698 sensors are for bidirectional calibrations. (2) For differential sensors: overpressure limits specified in above table are only for Px > Pr. For reverse overpressure (Pr > Px) on differential sensors, overpressure limit is 125% of F .S. 690A 11T C 11T R C Pressure r anges (mmHg F.S.) r esolution (of F.S.) Accuracy % of r dg. (± temp. coeff.) Useable Measurement r ange (F.S. to) Temp. Coefficients Volume (cc) Maximum Over- pressure Maximum l ine Pressure Operating Temperature r ange (°C) Materials Exposed to g ases Fittings Px PrZero (F .S.°C) Span (Rdg. °C) Px Pr 0.1 1 x 10 -6 S: 0.12% 2 -3 x 10-5 30 ppm 100 ppm

2.5 N/A 40 psia N/A 15° - 40°C

Inconel, Stainless Steel N/A Swagelok®

4 VCR®

O: 0.08% 1 x 10 -5 30 ppm 100 ppm 100 1000 1 x 10-6 S: 0.12% 2 -3 x 10-5 15 ppm 20 ppm

2.5 N/A 45 psia N/A

at 45°C O: 0.08% 1 x 10 -5 4 ppm 20 ppm O: 0.05% 1 x 10 -5 4 ppm 20 ppm 5000 10000 15000 20000 25000 1 x 10-6 S: 0.12% O: 0.08% 2-3 x 10-5 1 x 10-5 15 ppm 20 ppm 14 N/A 125% F .S. N/A 4 ppm 20 ppm 0.1 1 x 10 -6 S:0.12% 2 -3 x 10-5 30 ppm 100 ppm 3.5 25 40 psid 2) 150 psig 15° - 40°C Inconel, Stainless Steel Inconel, Stainless Steel, Alumina, Palladium Glass Swagelok

4 VCR

O: 0.08% 1 x 10 -5 30 ppm 100 ppm 100 1000 1 x 10-6 S: 0.12% 2 -3 x 10-5 15 ppm 20 ppm O: 0.15%(1) 1 x 10-5 4 ppm 20 ppm 3.5 25 45 psid (2) 150 psig temperature regulated at 45°C S: 0.25% 1 x 10 -5 4 ppm 20 ppm O: 0.08% 1 x 10 -5 4 ppm 20 ppm O: 0.05% 1 x 10 -5 4 ppm 20 ppm 698A Diff erential MKS BArATrOn C l Dimensional Drawing — 690 and 698 Note: Unless otherwise specified, dimensions are nominal values in inches (mm referenced). R 698A 698 d ifferential Pressure Sensor 698A Pressure r ange (mmHg) 0.1 mmHg .1T 1 mmHg 01T 10 mmHg 11T 100 mmHg 12T 1000 mmHg 13T Fittings Sw agelok 4 VCR female R Accurac y Unidirectional Calibr ation ±0.12% of Reading C ±0.08% of Reading B ±0.05% of Reading (1-1000 mmHg r anges only) A Bidirectional Calibr ation ±0.25% of Reading (1-1000 mmHg r anges only) E ±0.15% of Reading (1-1000 mmHg r anges only) D Ordering Inf ormation 690A Pressure r ange (mmHg) 0.1 mmHg (690 only) .1T 1 mmHg 01T 10 mmHg 11T 100 mmHg 12T 1000 mmHg 13T 5000 mmHg 53T 10,000 mmHg 14T 15,000 mmHg RBT 20,000 mmHg 24T 25,000 mmHg RCT Fittings Sw agelok 4 VCR female R Accurac y ±0.12% of Reading C ±0.08% of Reading B ±0.05% of Reading (1-1000 mmHg r anges) A

670B Electronics/Display Unit The 670B Display Unit has a front panel that allows for full control of all the instrument’s features. All functions can be monitored and controlled via the RS-232 or IEEE-488 interface. Range switching may be done manually or automatically with the 670B, selecting the lowest possible on-scale range. A key-lock switch on the front panel determines Local or Remote control. The 670B may be used with any sensor Full Scale and will display pressure in any one of 12 engineering units. Sensor response time may be set for 1, 40, or 400 msec, and a data averaging feature allows the user to average signals from 0.1 to 10 seconds, to optimize the pressure readings for transients or noisy pressures. Compatible Sensors & ranges 690 and 698 from 0.1 to 25,000 mmHg (T orr) F .S. d isplay 2-line LCD , readings updated twice/second Resolution 3½, 4½, or 5½ digits , user-selectable (Note: Useable system resolution depends upon sensor choice and application.) Engineer ing Units T orr, mTorr, mmHg, mbar, Pa, kPa, inHg, inH20, cmH20, psi, % of F .S., ppm of F .S. (All user-selectable) r anges x1, x0.1, x0.01 of sensor F .S., manual or auto-ranging r esponse Time 1, 40, or 400 msec , user-selectable d ata Averaging 0.1 to 10 sec , user-selectable Outputs Analog 0 to ±10 VDC on each range into >10K Ω load Impedance Connectors I/O: 37-pin female Type “D”, Remote signal: 9-pin male Type “D” Digital RS-232 Connector 9-pin male Type “D” IEEE-488 Connector 24-pin f emale IEEE-488. 1 standard pin assignment. Process Trip Point r elays T wo, 24 VAC/DC @ 1 Amp resistive (contact ratings) T wo LEDs on front panel indicate status of each relay Operating Temperature r ange 15° to 40° C P ower r equired 90-132 or 180-264 VAC, 50-60 Hz, 75 VA (max.) IEC-AC power line connector Size 88 mm H x 240 mm W x 234 mm D (3.5” H x 9.5” W x 9.25” D) 670B Specifications 670B Features & Benefits

  • Microprocessor-based electronics unit pro vides po wer, signal conditioning, and displa y for operating all High Accur acy Baratron pressure sensors
  • Analog and digital input/output signals f acilitate interf acing to computers and process control systems
  • Two b uilt-in alar m rela ys pro vide process pressure tr ip points D21 670B Ordering Code Example: 670Bxyz Code Configuration 670B Electr onics/ d isplay Unit 670B i nterface (xyz) RS-232 D21 IEEE-488 D81

© 2009-2018 MKS Instruments, Inc. All rights reserved. Some Baratron® capacitance manometer products may not be exported to many end user countries without both US and local government export licenses under ECCN 2B230. Specifications are subject to change without notice. mksinst™ is a trademark and Baratron® is a registered trademark of MKS Instruments, Inc., Andover, MA. Swagelok® and VCR® are registered trademarks of Swagelok Marketing Co., Solon, OH. Inconel® is a registered trademark of Inco Alloys International, Inc., Huntington, WV. MKS Instruments, Inc. Global Headquar ters

2 Tech Drive, Suite 201

Andover, MA 01810 Tel: 978.645.5500 Web: www.mksinst.com MKS Instruments, Inc. Pr essure & Vacuum Measurement Solutions Six Shattuck Road Andover, MA 01810 Tel: 978.975.2350 Isolation Valves To decrease the frequency of zero adjustment, it is recommended that a simple manual or air-actuated bellows- type isolation valve, such as MKS Part No. 108818 (NC11 Cleaned), be installed between a low range absolute sensor head and the processing system. Bellows Adapters Frequently it is desirable, because of mechanical configuration or system vibration, to attach the Baratron sensor to the processing system using flexible bellows couplings. All flexible tubing is 321 stainless steel, 1/4” diameter, and available in 6” and 12” active bellows lengths. The use of flexible bellows minimizes thermal expansion effects on sensor zero induced by hard plumbing to the system. Rack Mounts The RM-6 Rack Mount Kit is used to adapt any half-rack instrument (3 1/2” x 9 1/2”) to full-rack size (3 1/2” x 19”). 274B Three-channel Sensor Multiplexer The 274B provides operation of one, two, or three high accuracy sensors with a single 670 Electronics Unit. The 274B provides heater power for temperature-controlled sensors (690, 698). All sensors are kept warmed up and ready for reading by the 670. The 670 can sequentially read any one of the sensors, as selected by a switch on the 670’s front panel, or by a remote ground closure. Cable Inf ormation 670B or 274B Sensor RCB270S-2-10 (10ft, shielded) to 690A or 698A Sensors (also w orks for older 390, 398, 590, 690 and 698) RCB270S-2-20 (20ft, shielded) F or cables longer than 20 ft, Consult Factory. 274B Ordering Code Example: 274B Code Configuration 274B 274B Three-Channel Sensor Multiple xer