625F

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ABSOLUTE BARATRON® CAPACITANCE MANOMETERS WWW.MKSINST.COM Pressure & Vacuum Measurement Solutions

• Full Scale pressure/v acuum ranges as low as 0.02 T orr (mm Hg) allow for accurate measurement of v acuum as low as 2 x 10 -4 Torr (1.5 x 10-4 mbar) All products are specified in percent of reading f or best accur acy and improved process yield Complete line of absolute manometers including products oper ating at internal temperatures of up to 200°C . Widest product range and applications e xperience available anywhere Direct measurement of chamber total pressure independent of gas type or composition, eliminating need f or lookup tables and conversion factors Best-a vailable long-term output stability ensures state-of-the-ar t process repeatability in nearly any application Inconel® and Incoloy® nickel alloy construction of basic sensor oper ates without damage in virtually an y chemical environment, including halogens, deioniz ed water and steam, and ozone High o verpressure limit ensures reliability from occasional system mishaps

600 Series Analog

The MKS 600 Series absolute analog Baratron ® capacitance manometers are designed for accurate, repeatable pressure and vacuum measurements in demanding production or research process environments. The proven sensor, electronics, and packaging designs combine to provide the most stable and reliable low- pressure measurement instrument available. Product Description The MKS 600 Series Baratron capacitance manometers are analog capacitance-based pressure and vacuum gauges that require ±15VDC input power and provide a high-level 0-10VDC output signal linear with pressure. This analog output can be interfaced with an MKS pressure controller, an MKS power supply/display instrument, or any instrument that meets these requirements. Changes in pressure/vacuum are determined by measuring the change in capacitance between the sensor’s diaphragm and an adjacent electrode disk. This capacitance change is converted to a useable output by patented signal- conditioning electronic circuits. The radially-tensioned Inconel diaphragm in the sensor provides very fast response (<20 msec in many cases), low hysteresis, excellent repeatability, very high resolution (to 0.001% of Full Scale), exceptionally high corrosion resistance, and double-walled welded construction for operator safety. The sensor itself can withstand repeated exposures to 45 psia (3.1 bar) without permanent degradation or shifting, allowing it to operate in virtually any process system. Features and Benefits

Baratron® Capacitance Manome ter Chart A very partial list of applications for the 600 series of products include: All semiconductor thin-film processes such as etching and ashing, chemical v apor deposition, physical vapor deposition, o xidation, diffusion, and implantation. Production of electronic displa ys such as LCDs, plasma displays, and CRTs. Man ufacturing of advanced ceramics and metals for aerospace and transportation. A utomated leak test systems for industrial and scientific use. Ster ilization and freeze-drying of biopharmaceuticals, foods, medical implants, and surgical instruments. Analytical and metrology instr uments such as mass spectrometers, high-precision balances, calibration standards , and other analytical tools. Production of data stor age components such as laser diodes, magnetic read/write heads, and storage platters. MKS offers many products within the 600-series family with different attributes, capabilities, and performance. A quick summary of these models is below, followed by individual descriptions of each product and its major applications. Notes: *Other units of measurement available; contact factory. **0.02 Torr range available only on 45°C models. Product Family Sensor Output Operating Temperature Primary Full Scale Ranges - Torr* Secondary Full Scale Range - Torr* Electrical Connector Relay Switches 622C Standard 0-10VDC analog Unheated 1 to 1,000 Not available Terminal Block No 623F Standard 0-10VDC analog Unheated 10 to 1,000 Not available Terminal Block Ye s 624F Standard 0-10VDC analog 45°C 1 to 20,000 Not available 15-pin D-subminiature Ye s 625F Standard 0-10VDC analog 100°C 1 to 20,000 Not available 15-pin D-subminiature Ye s 626C Standard 0-10VDC analog Unheated 0.1 to 1000 Not available 15-pin D-subminiature No 627F Standard 0-10VDC analog 45°C 0.02 to 20,000 Not available 15-pin D-subminiature No 628F Standard 0-10VDC analog 100°C 0.05 to 20,000 Not available 15-pin D-subminiature No 629F Standard 0-10VDC analog 45°C or 100°C 0.02 to 1,000 Not available 9-pin D-subminiature No 631D Standard 0-10VDC analog 150°C or 200°C 1 to 1,000 Not available 15-pin D-subminiature Optional D24F Standard 0-10VDC analog 45°C 10 to 1,000 2x, 5x, or 10x lower than primary range 15-pin D-subminiature Ye s D25F Standard 0-10VDC analog 100°C 10 to 1,000 2x, 5x, or 10x lower than primary range 15-pin D-subminiature Ye s D27F Standard 0-10VDC analog 45°C 10 to 1,000 2x, 5x, or 10x lower than primary range 15-pin D-subminiature No D28F Standard 0-10VDC analog 100°C 10 to 1,000 2x, 5x, or 10x lower than primary range 15-pin D-subminiature No E27F Etch Baffle 0-10VDC analog 45°C 0.02 to 100 Not available 15-pin D-subminiature No E28F Etch Baffle 0-10VDC analog 100°C 0.05 to 100 Not available 15-pin D-subminiature No E29F Etch Baffle 0-10VDC analog 45°C or 100°C 0.02 to 100 Not available 9-pin D-subminiature No

622C, 623F and 626C Unheated Absolute Baratron® Capacit ance Manometers The 622C, 623F and 626C Baratron capacitance manometers are unheated, and thus are the most economical of all of the 600 series family of products. They are available in Full Scale pressure/vacuum ranges from 0.1 to 1000 Torr (and metric equivalents) and are suited for many industrial, electronic, and research applications. The 622C has a terminal block electrical connector without relays, the 626C uses a 15-pin D-subminiature electrical connector without relays, and the 623F product adds two (2) independently-adjustable trip relays to control external equipment. The 627F , 628F , and 629F are heated capacitance manometers that are much less affected by ambient temperature changes than unheated Baratron capacitance manometers. Heating the sensor also reduces or eliminates the possibility of process byproducts depositing inside the manometer to cause drift, which can have a significant effect on system availability and repeatability. They are available in lower Full Scale pressure ranges than unheated products, which permits their use in more demanding processes. All of the models are internally regulated to their specified operating temperature; no external controllers, cables, or sensors are needed. The 627F and 628F operate at 45°C and 100°C respectively, and have a 15-pin D-subminiature electrical connector. They also have an option for “Heater Status” and “At Temperature” LED indicators and relay contact. The 629F can be configured to operate at either temperature, and uses a 9-pin D-subminiature electrical connector for “drop-in” compatibility with many competitive products. The 629F also offers an optional external zero set capability, allowing its zero to be set remotely – a major advantage in many process tools that do not permit easy access to the capacitance manometer. The 45°C 627F offers Full Scale pressure/ vacuum ranges from 0.02 to 20,000 Torr (0.026 mbar to 26.3 bar), and the 100°C 628F has pressure/vacuum ranges from 0.05 to 20,000 Torr (0.066 mbar to 26.3 bar). 627F, 628F, and 629F Heated Absolute Baratron® Capacit ance Manometers These heated capacitance manometers are identical to the 627F and 628F Baratron capacitance manometers except that they add two (2) internally-mounted, independently- adjusted electromechanical relays that can be set to open or close at any pressure from 0.1% to 100% of the product’s Full Scale measurement range. These relays can be used to control external equipment, such as isolation valves, other high vacuum gauges (such as hot-filament ionization gauges), drive motors, etc. They are available in Full Scale measurement ranges from 10 to 1000 Torr (13 to 1333 mbar). 624F and 625F Heated Absolute Baratron® Capacit ance Manometers with Integral Process Control R elays

631D Heated (150°C or 200°C) Absolute Baratron® Capacit ance Manometer The 631D is a heated capacitance manometer , operating at either 150°C or 200°C. It was specifically designed for the most difficult semiconductor and biopharmaceutical applications known today, such as nitride CVD and DI-steam sterilization. It is completely self-contained, requiring only ±15VDC input power and providing a 0-10VDC analog output signal that is linear with pressure. It is about 40% smaller in its physical size and draws 40% less electrical power than earlier products, making it an ideal choice to upgrade existing systems with 100°C or higher temperature capacitance manometers. In standard form, it includes LED indicators for “At Temperature” and “Heater Failure”. The product is also offers the option of two (2) internally-mounted, independently- adjustable electromechanical trip relays that can be set to open or close at any pressure between 0.1% and 100% of the manometer’s measurement range. Full Scale measurement ranges from 1 to 1000 Torr (1.33 to 1333 mbar) are available. E27F, E28F, and E29F Heated Absolute Baratron® Capacit ance Manometers with E tch Sensor For certain semiconductor and industrial manufacturing processes, heating the Baratron capacitance manometer to 100°C is sometimes not enough to prevent deposition of process byproducts that cause drift in the manometer’s output and undesirable process excursions. For these difficult processes, MKS offers a heated capacitance manometer with a patented etch baffle in its sensor, which forces condensable process byproducts to deposit on a baffle before reaching the sensor’s diaphragm measurement element. This greatly reduces the amount of zero drift in the Baratron capacitance manometer, which in turn improves the overall Cost of Ownership and process accuracy. These products are available in Full Scale measurement ranges as low as 0.02 Torr (0.27 mbar), and with either 15-pin D-subminiature (E27F and E28F) or 9-pin D-subminiature (E29F) electrical connectors. D24F, D25F, D27F, and D28F Heated Dual-Range Absolute Baratron® Capacitance Manometers These products are designed for processes where the customer wishes to measure and control the process over a very wide pressure range. Standard single-range Baratron capacitance manometers can be used in pressure control systems down to at least 0.1% of their Full Scale range, but at pressures below 0.05% of Full Scale, the analog output of the manometer is low enough that some pressure controllers may not be able to resolve the signal correctly. The dual-range Baratron capacitance manometers solve that problem by adding a second output signal that is 2x, 5x, or 10x higher in gain than the primary range, which increases the analog output signal by that same amount. These Baratron capacitance manometers are heated to either 45°C or 100°C, are available with or without internally-mounted process relays, and have a single 15-pin D-subminiature electrical connector. Primary pressure ranges from 10 to 1000 Torr (13 to 1333 mbar) are a vailable, and the secondary pressure range is 2x, 5x, or 10x less than the primary range.

*24VDC input power available for some models; contact MKS Applications for assistance. **Not all fittings a vailable for all pressure ranges; contact MKS Applications for assistance. Baratron® 600-Series Capacitance Manometers 622C 623F 626C 627F 628F 629F 624F Unheated, Terminal Block Connector Unheated, Terminal Block Connector, Relays Unheated, 15-pin D-connector Heated to 45°C, 15-pin D-connector Heated to 100°C, 15-pin D-connector Heated to 45°C or 100°C, 9-pin D-connector Heated to 45°C, 15-pin D-connector, Relays Full Scale Pressure Ranges - Torr (mbar) 1, 2, 10, 20, 100, 500 and 1000 (1.33 to 1333) 10, 20, 100, 500 and 1000 (13.3 to 1333) 100, 500 and 1000 (0.13 to 1333) 2, 10, 20, 100, 1000, 2000, 5000, 10000, 15000, and 20000 (0.026 to 26315) 20, 100, 1000, 2000, 5000, 10000, 15000, and 20000 (0.066 to 26315) 2, 10, 20, 100, 1000, 2000, 5000, 10000, 15000, and 20000 (0.026 to 26315) 1, 10, 20, 100, 500, 1000, 2000, 5000, 10000, 15000, and 20000 (1.33 to 26315) Accuracy - % of Reading 0.25% 0.25% 0.25% 0.12% for 1 Torr and above; 0.15% for 0.25, 0.1, and 0.05 Torr; 0.25% for 0.02 Torr 0.25% for 1 Torr and above; 0.50% for below

1 Torr

For 45°C models: 0.12% for 1 Torr and above; 0.15% for 0.25, 0.1, and 0.05 Torr. For 100°C models: 0.25% for 1 Torr and above; 0.50% for below 1 Torr. 0.12% and higher; 0.002% for <0.10 Torr. 0.001% for 0.10 Torr and higher; 0.002% for <0.10 Torr. 0.001% for 0.10 Torr and higher; 0.002% for <0.10 Torr. 0.001% Zero Temperature Coefficient - % FS/°C 0.005% for 10 Torr and higher; 0.010% for 2 Torr; and 0.015% for 1 Torr 0.005% 0.005% for 10 Torr and higher; 0.010% for 2 Torr; and 0.015% for 1 Torr 0.002% for 1 Torr and higher; 0.005% for 0.1 and 0.25 Torr; 0.015% for 0.05 Torr; 0.030% for 0.02 Torr 0.002% for 1 Torr and higher; 0.010% for 0.1 and 0.25 Torr; 0.015% for 0.05 Torr Same as 627F and 628F specifications for 45°C and 100°C temperatures 0.002% Span Temperature Coefficient - % Reading/°C Ambient Operating Temperature 0 to 50°C 0 to 50°C 0 to 50°C 15 to 40°C 15 to 50°C 45°C models: 15 to 40°C 100°C models: 15 to 50°C. 15 to 40°C Warmup Time 30 minutes 30 minutes 30 minutes 2 hours for 1 Torr and higher; 4 hours for <1 Torr 2 hours for 1 Torr and higher; 4 hours for <1 Torr 2 hours for 1 Torr and higher; 4 hours for <1 Torr 2 hours for 1 Torr and higher; 4 hours for <1 Torr Overpressure Limit 45 psia 45 psia 45 psia 45 psia 45 psia 45 psia 45 psia Materials Exposed to Process Gases (excluding optional fittings) Inconel and Incoloy alloys Inconel and Incoloy alloys Inconel and Incoloy alloys Inconel and Incoloy alloys Inconel and Incoloy alloys Inconel and Incoloy alloys Inconel and Incoloy alloys Exposed Volume - cm Input Power Requirements* ±15VDC (±5%) @ 35 mA ±15VDC (±5%) @ 75 mA ±15VDC (±5%) @ 35 mA ±15VDC (±5%) @ 250 mA max ±15VDC (±5%) @ 500 mA max Same as 627F and 628F specifications for 45°C and 100°C temperatures ±15VDC (± 5%) @ 400 mA max Output Signal 0-10VDC into > 10 k-ohms 0-10VDC into > 10 k-ohms 0-10VDC into > 10 k-ohms 0-10VDC into > 10 k-ohms 0-10VDC into > 10 k-ohms 0-10VDC into > 10 k-ohms 0-10VDC into > 10 k-ohms Trip Relay Specifications Not Applicable (2) independent relays, SPDT contacts rated at 1 amp @ 30VDC or 0.5 amp @ 30 VAC resistive. Each relay adjustable from 0.1% to 100% of FS range. 12.5 k ohm max source impedance. Not Applicable Not Applicable Not Applicable Not Applicable (2) independent relays, SPDT contacts rated at 1 amp @ 30VDC or 0.5 amp @ 30 VAC resistive. Each relay adjustable from 0.1% to 100% of FS range. 12.5 k ohm max source impedance. Electrical Connector(s) 5-post terminal strip (2) terminal strips, (1) 5-post and (1) 8-post" 15-pin D-subminiature with thread locks 15-pin D-subminiature with thread locks 15-pin D-subminiature with thread locks 9-pin D-subminiature with thread locks 15-pin D-subminiature with thread locks, 15-pin D-subminiature with slide locks, terminal block adapter, 15-pin D-subminiature, filtered Connection Fitting - Standard 1/2" OD (12.7 mm) tubulation 1/2" OD (12.7 mm) tubulation 1/2" OD (12.7 mm) tubulation 1/2" OD (12.7 mm) tubulation 1/2" OD (12.7 mm) tubulation 1/2" OD (12.7 mm) tubulation 1/2" OD (12.7 mm) tubulation Connection Fittings - Optional** 8 Female VCR, 1.33" OD Conflat, NW16-KF, 8 Female VCO, 2.75" OD Conflat, NW25-KF 8 Female VCR, 1.33” OD Conflat, NW16-KF, 8 Female VCO, 2.75” OD Conflat, NW25-KF 8 Female VCR, 1.33" OD Conflat, NW16-KF, 8 Female VCO, 2.75" OD Conflat, NW25-KF 8 Female VCR, 1.33" OD Conflat, NW16-KF, 8 Female VCO, 2.75" OD Conflat, NW25-KF 8 Female VCR, 1.33" OD Conflat, NW16-KF, 8 Female VCO, 2.75" OD Conflat, NW25-KF 8 Female VCR, 1.33" OD Conflat, NW16-KF, 8 Female VCO, 2.75" OD Conflat, NW25-KF 8 Female VCR, 1.33" OD Conflat, NW16-KF Compliance CE CE CE CE CE CE CE Catalog Options None None None Temperature/Heater Status LEDs; 15-pin D-connector with slide locks Temperature/Heater Status LEDs; 15-pin D-connector with slide locks Heater Status Indication; External Zero Adjust (not available on 0.02 Torr/45°C or

0.05 Torr/100°C

with slide locks; Terminal Block Adaptor

625F 631D E27F E28F E29F D24F D25F D27F D28F Heated to 100°C, 15-pin D-connector, Relays Heated to 150°C or 200°C, 15-pin D-connector, Relays Optional Etch Sensor, Heated to 45°C, 15-pin D-connector Etch Sensor, Heated to 100°C, 15-pin D-connector Etch Sensor, Heated to 45°C or 100°C, 9-pin D-connector Dual Range, Heated to 45°C, 15-pin D-connector, Relays Dual Range, Heated to 100°C, 15-pin D-connector, Relays Dual Range, Heated to 45°C, 15-pin D-connector Dual Range, Heated to 100°C, 15-pin D-connector 1, 10, 20, 100, 500, 1000, 2000, 5000, 10000, 15000, and 20000 (1.33 to 26315) 1, 2, 10, 100, and 1000 (1.33 to 1333) 1, 2, 10, 20, and 100 (0.026 to 133) 10, 20, and 100 (0.026 to 133) 2, 10, 20, and 100 (0.026 to 133) 10, 100, and 1000 (13.3 to 1333) 10, 100, and 1000 (13.3 to 1333) 1, 10, 100, and 1000 (1.33 to 1333) 1, 10, 100, and 1000 (1.33 to 1333) 0.25% 0.50% 0.12% for 1 Torr and above; 0.15% for 0.25, 0.1, and 0.05 Torr; 0.25% for 0.02 Torr 0.25% for 1 Torr and above; 0.50% for below For 45°C models: 0.12% for 1 Torr and above; 0.15% for 0.25, 0.1, and 0.05 Torr. For 100°C models: 0.25% for 1 Torr and above; 0.50% for below 1 Torr. 0.001% 0.001% 0.001% for 0.10 Torr and higher; 0.002% for <0.10 Torr. 0.001% for 0.10 Torr and higher; 0.002% for <0.10 Torr. 0.001% for 0.10 Torr and higher; 0.002% for <0.10 Torr. 0.002% 150°C models: 0.004% for 10 Torr and higher; 0.006% for 1 and 2 Torr. 200°C models: 0.008% for 10 Torr and higher; 0.016% for 1 and 2 Torr. 0.002% for 1 Torr and higher; 0.005% for 0.1 and 0.25 Torr; 0.015% for 0.05 Torr; 0.030% for 0.02 Torr 0.002% for 1 Torr and higher; 0.010% for 0.1 and 0.25 Torr; 0.015% for 0.05 Torr Same as E27F and E28F specifications for 45°C and 100°C temperatures. 15 to 50°C 15 to 50°C 15 to 40°C 15 to 50°C 45°C models: 15 to 40°C. 100°C models: 15 to 50°C. 15 to 40°C 15 to 50°C 15 to 40°C 15 to 50°C 2 hours for 1 Torr and higher; 4 hours for <1 Torr 4 hours 2 hours for 1 Torr and higher; 4 hours for <1 Torr 2 hours for 1 Torr and higher; 4 hours for <1 Torr 2 hours for 1 Torr and higher; 4 hours for <1 Torr 2 hours 2 hours 2 hours 2 hours 45 psia 45 psia 45 psia 45 psia 45 psia 45 psia 45 psia 45 psia 45 psia Inconel and Incoloy alloys Inconel and Incoloy alloys Inconel and Incoloy alloys Inconel and Incoloy alloys Inconel and Incoloy alloys Inconel and Incoloy alloys Inconel and Incoloy alloys Inconel and Incoloy alloys Inconel and Incoloy alloys ±15VDC (±5%) @ 600 mA max A max ±15VDC (±5%) @ 250 mA max ±15VDC (±5%) @ 500 mA max Same as E27F and E28F specifications for 45°C and 100°C temperatures. ±15VDC (±5%) @ 400 mA max ±15VDC (±5%) @ 600 mA max ±15VDC (±5%) @ 250 mA max ±15VDC (±5%) @ 500 mA max 0-10VDC into > 10 k-ohms 0-10VDC into > 10 k-ohms 0-10VDC into > 10 k-ohms 0-10VDC into > 10 k-ohms 0-10VDC into > 10 k-ohms 0-10VDC into > 10 k-ohms 0-10VDC into > 10 k-ohms 0-10VDC into > 10 k-ohms 0-10VDC into > 10 k-ohms (2) independent relays, SPDT contacts rated at 1 amp @ 30VDC or 0.5 amp @ 30 VAC resistive. Each relay adjustable from 0.1% to 100% of FS range. 12.5 k ohm max source impedance. (2) process pressure & (1) heater failure trip relay mounted inter- nally. Pressure relays independently adjust- able from 0-100% FS, DPDT contacts rated at 1 amp @ 30VDC or 0.5 amps @ 30VAC. Relays conform to UL-

1950 Basic Insulation

at 125V. Not Applicable Not Applicable Not Applicable (2) independent relays, SPDT contacts rated at 1 amp @ 30VDC or 0.5 amp @ 30 VAC resistive. Each relay adjustable from 0.1% to 100% of FS range. 12.5 k ohm max source impedance. (2) independent relays, SPDT contacts rated at 1 amp @ 30VDC or 0.5 amp @ 30 VAC resistive. Each relay adjustable from 0.1% to 100% of FS range. 12.5 k ohm max source impedance. Not Applicable Not Applicable 15-pin D-subminiature with thread locks, 15- pin D-subminiature with slide locks, terminal block adapter, 15-pin D- subminiature, filtered 15-pin D-subminiature with thread locks 15-pin D-subminiature with thread locks 15-pin D-subminiature with thread locks 9-pin D-subminiature with thread locks 15-pin D-subminiature with thread locks 15-pin D-subminiature with thread locks 15-pin D-subminiature with thread locks 15-pin D-subminiature with thread locks 1/2" OD (12.7 mm) tubulation 1/2" OD (12.7 mm) tubulation 1/2" OD (12.7 mm) tubulation 1/2" OD (12.7 mm) tubulation 1/2" OD (12.7 mm) tubulation 1/2" OD (12.7 mm) tubulation 1/2" OD (12.7 mm) tubulation 1/2" OD (12.7 mm) tubulation 1/2" OD (12.7 mm) tubulation 8 Female VCR, 1.33" OD Conflat, NW16-KF, NW 16 KF (right angle), NW25-KF

8 Female VCR, NW16-

, 1.5" OD TriClover, 2" OD TriClover 8 Female VCR, 1.33" OD Conflat, NW16-KF 8 Female VCR, 1.33" OD Conflat, NW16-KF 8 Female VCR, 1.33" OD Conflat, NW16-KF 8 Female VCR, 1.33" OD Conflat, NW16-KF, NW25-KF 8 Female VCR, 1.33" OD Conflat, NW16-KF, NW25-KF 8 Female VCR, 1.33" OD Conflat, NW16-KF, NW25-KF 8 Female VCR, 1.33" OD Conflat, NW16-KF, NW25-KF CE CE CE CE CE CE CE CE CE 15-pin D-connector with slide locks; Terminal Block Adaptor Relay Settings Heater Status Indication; Horizontal Calibration Heater Status Indication; Horizontal Calibration Heater Status Indication; External Zero Adjust (not available on 0.02 Torr/45°C or 0.05 Torr/100°C configurations; Horizontal calibration 15-pin D-subminiature with slide locks 15-pin D-subminiature with slide locks 15-pin D-subminiature with slide locks 15-pin D-subminiature with slide locks

PR4000 Display/Power Supply The PR4000 display can operate one or two of any current 600-series Baratron capacitance manometers, including the high-temperature 631D. Its LCD display screen is easy to read, and it also offers two (2) independently-adjustable trip relays for external device control. Its standard outputs are high-resolution (16-bit) analog output and RS232C digital, and it can be equipped with RS485 digital communications. It can also remotely zero the 629F manometer equipped with that option. For customers who do not wish to arrange for their own delivery of electrical power to their Baratron capacitance manometer(s), MKS offers four (4) different displays and power supplies that can be used with most of the products described above. The descriptions below give a basic idea of the different models and their attributes. 660C Single-Channel Displa y/Power Supply The 660C is a microprocessor-controller single-channel po wer supply and display that is designed for use with all unheated and 45°C heated Baratron capacitance manometers. It offers a 4.5-place digital display of the Baratron capacitance manometer’s measured pressure, and has a single-menu structure for easy setup and configuration. It also offers four (4) open collector alarm trip points for control of external devices. It can be equipped with an RS232C digital interface, and it mounts in a compact 1/8 DIN package. PDR2000 Dual-Channel P ower Supply/Display The PDR2000 is a low-cost two-channel power supply/display capable of supporting most 600-series Baratron capacitance manometers. It offers a very compact size (1/8 DIN package), two (2) independently-adjustable relay trip points for external device operation, and selectable engineering units. It also can be ordered with an optional RS232C digital interface, and has the ability to scale to non-standard pressure ranges. CV7600 Isolation Systems The MKS CV7600 Isolation System is designed to auto- matically maintain a heated 600 series Baratron capacitance manometer at vacuum throughout a process cycle. The Isolation System consists of either a 627F or 628F heated process Baratron capacitance manometer, an MKS Pneumatic Isolation Valve, and an R750B mini-Baratron capacitance manometer and Relay Module. The R750B Relay Module monitors the process pressure, and provides a contact closure that is used to open or close a (customer- supplied) isolation valve in the pneumatic line to the MKS Pneumatic Isolation Valve. This solenoid closes the MKS valve whenever the process pressure exceeds the Full Scale range of the 600-series Baratron capacitance manometer, maintaining it in its optimum working range. Many different Baratron capacitance manometer configurations and trip point options are available; please contact the MKS Applications group or your MKS Account Manager for more information. Displays, Power Supplies, and Isolation Systems

600-Series Baratron® Capacit ance Manometer Displa ys and Power Supplies Power Supplies/ Digital Readouts *Subject to total power consumption of connected instrument(s) and PR4000 options PR4000 PDR2000 660C One or two channels, multiple relays, high power Economical single/dual channel readout Standard-series two-channel readout Display Type Digital, 4½-place LCD Digital, 4-place Red LED Digital, 4½-place LED Number of Channels 1 4000B 2 4000B 2 1 Input Power Required 115/230 VAC, 50/60 Hz Universal input; 110-240 VAC; 47-63 Hz,

40 VA, IEC 320 instrument power input

Standard: 120 VAC ±10, 50/60 Hz Optional: 240, 100, or 220 VAC Input Signal 0 to ±10 VDC 0 to ±5 VDC Other, scalable 0 to +10 VDC 0 to ±10 VDC Power Supply Output ±15 VDC @ 0.8 Amps ±15 VDC @ 1.5 Amps

24 VDC @ 1 Amp

±15 VDC @ 750 mA ±15 VDC ±5% @ 0.25 Amps max. Signal Output (analog) 1 analog output per channel with 16 bit resolution Linear, 4 VDC for F.S. output, (0.5 VDC per decade), 0-10 VDC each transducer 0 to ±VDC capacitance manometer passed through, not zeroed Signal Output (digital) Optional RS-232, RS-485 Linear, 4 VDC for F.S. output, (0.5 VDC per decade), 0-10 VDC each transducer Optional: RS232 interface outputs pressure and alarm status, and provides setup input of alarm trip points, hysteresis, and display zero Trip Points 2, fully programmable Two relays, contacts rated at 2 Amps @

30 VDC

4 open collector transistors (2 high, 2 low) with adjustable hysteresis and status LEDs; adjustable from 1 to 100% Trip Point Relay Ratings 2 5PDT, 2 Amps @ 30 VDC,

1 Amp @ 230 VAC

Two relays, contacts rated at 2 Amps @ Open collector transistors rated for 50 Volts/100mA max. Operating Temperature Range 15° - 40°C 2° - 50°C 0° - 55°C Compatible Instruments 622, 623, 624, 625, 626, 627, 628*; Other MKS products: 120*, 220, 223, 230*, 430, 852, 870, 872 capacitance manometers; 640 pressure controller; 358, 558, 179 mass flow meters, 1179, 1559 mass flow controllers 628 (one only); Other MKS products: 622, 623, 624, 627, 722, 750, 850, 852, 870, 872, 223 (unidirectional only) 622, 623, 624, 626, 627; Other MKS products: 223, 722, 740, 750, 850, 852, 870, 872 capacitance manometers; Display only for 120, 220, 619, 621, 631 capacitance manometers; 358, 558, 179 mass flow meters Mounting Half 19-inch rack mount 1/8” DIN enclosure; 94 mm x 47 mm x 165 mm 1/8” DIN enclosure; 96 mm x 48 mm x 140 mm, case mounts in 92 mm x 45 mm panel cutout Channel Selection Dual display User selected by front panel push button N/A Compliance CE CE CE Additional Information Wide array of standard features. Options for digital communicators and high power output for temperature-controlled manometers RS-232 (9600 baud, 8 data bits, no parity, 1 stop bit) Low cost, compact enclosure for two manometers For use with both capacitance manometers and mass flow meters; input scaler provides direct reading for any sensor range; display can be remotely zeroed.

Dimensional Drawing — Note: Unless otherwise specified, dimensions are nominal values in inches (mm referenced). 623F 624F and 625F D24F and D25F 622C 626C

Dimensional Drawing — Note: Unless otherwise specified, dimensions are nominal values in inches (mm referenced). CV7627 627F and 628F E27F and E28F D27F and D28F 629F E29F 631D

Dimensional Drawing — Note: Unless otherwise specified, dimensions are nominal values in inches (mm referenced).

622C, 623F, 626C, 627F, 628F, E27F, and E28F 627F B B 11T C Configuration Or dering Code Example: 627F11TBC1B Code Example Absolute Capacitance Manometer s Unheated; terminal block connector; standard sensor 622C Unheated; relays; terminal block; standard sensor 623F Unheated; 15-pin D-connector; standard sensor 626C 45°C sensor temp; 15-pin D-connector; standard sensor 627F 100°C sensor temp; 15-pin D-connector; standard sensor 628F 45°C sensor temp; 15-pin D-connector; etch sensor E27F 100°C sensor temp; 15-pin D-connector; etch sensor E28F Pressure Rang es Full Scale (Torr) 0.02 (a vailable on 627F and E27F) U2T 0.05 (a vailable on 627F , E27F , 628F , E28F) U5T 0.10 (not a vailable on 622C, 623F) .1T 0.25 (not a vailable on 622C, 623F) RET 1 (not a vailable on 623F) 01T 2 (not a vailable on 623F) 02T 11T 21T 100 12T 200 (a vailable on 623F , 627F , 628F) 22T 500 (not a vailable on E27F , E28F) 52T 1000 (not a vailable on E27F , E28F) 13T 2000 (a vailable on 627F , 628F) 23T 5000 (a vailable on 627F , 628F) 53T 10,000 (a vailable on 627F , 628F) 14T 15,000 (a vailable on 627F , 628F) RBT 20,000 (a vailable on 627F , 628F) 24T 25,000 (a vailable on 627F , 628F) RCT Fittings 1/2” OD (12.7 mm) tubulation A Sw agelok 8 VCR, female B 1.33” OD Conflat, rotatable1 C NW16-KF2 D NW25-KF2 Q Sw agelok 8 VCO, female E 2.75” OD Conflat, rotatable1 L Accurac y (% of Reading) 0.12% (627F and E27F 1 Torr range and higher) C 0.15% (627F and E27F in 0.25, 0.10, 0.05 Torr ranges) D 0.25% (622C , 623F , 626C, 628F , E28F , and 0.02 Torr 627F and E27F) E 0.50% (628F and E28F in 0.25, 0.10, 0.05 Torr ranges) F Options (not a vailable on 622C, 623F, 626C) Standard configur ation, vertical calibration (627F , E27F , 628F , E28F only; 1 Torr and higher) T emperature/Heater status, vertical calibration (627F , E27F , 628F , E28F only; 1 Torr and higher) Standard configur ation, horizontal calibration (E27F , E28F only; < 1 Torr) T emperature/Heater status, horizontal calibration (E27F , E28F only; < 1 Torr) Connector (not a vailable on 622C, 623F, 626C) 15-pin D-connector , thread locks (627F , E27F , 628F , E28F only) B 15-pin D-connector , slide locks (627F , E27F , 628F , E28F only) P 1Available only on ranges of 1000 Torr and less. 2Available only on ranges of 5000 Torr and less, and 2000 and 5000 Torr ranges require use of an MKS overpressure ring. 3Other relay settings and logic available; contact MKS Applications for assistance.

B CE 11T C Configuration Or dering Code Example: 624F11TCECB Code Example Absolute Capacitance Manometer s 45oC sensor temperature, relays 624F 100oC sensor temperature, relays 625F Pressure Rang es Full Scale (Torr) 01T 02T 11T 21T 100 12T 500 52T 1000 13T 2000 23T 5000 53T 10000 14T 15000 RBT 20000 24T Fittings 1/2” OD (12.7 mm) tubulation BA Sw agelok 8 VCR, female CE 1.33” OD Conflat, rotatable1 HA NW16-KF2 GA NW 16 KF , right angle GE NW25-KF2 GC Accuracy (% of Reading) 0.12% (624D only) C 0.25% (625D only) E Electrical Connector 15-pin D-connector, thread locks B 15-pin D-connector , slide locks P T erminal block adaptor U 15-pin D-connector , filtered V 631D 631D H BA B 11T F Configuration Or dering Code Example: 631D11TBFHBA Code Example Absolute Capacitance Manometer s 15-pin D-connector 631D Pressure Rang es Full Scale (Torr) 01T 02T 11T 31T 100 12T 1000 13T Fittings 1/2” OD (12.7 mm) tubulation A Sw agelok 8 VCR, female B NW16-KF D 1.5” OD Sanitary M 2.0” OD Sanitary N Accurac y (% of Reading) 0.50% F Sensor T emperature 150oC H 200oC P Rela y Configurations3 No relays None TP-A activ ates above 50% FS; TP-B activates above 50% FS AA TP-A activ ates above 50% FS; TP-B activates below 50% FS AB TP-A activ ates below 50% FS; TP-B activates below 50% FS BB TP-A activ ates below 50% FS; TP-B activates above 50% FS BA

J B 11T C B Configuration Or dering Code Example: 629F11TBCJ4B Code Example Absolute Capacitance Manometer s 9-pin D-connector , standard sensor 629F 9-pin D-connector , etch sensor E29F Pressure Rang es Full Scale (Torr) 0.02 (a vailable on 45oC models only) U2T 0.05 U5T 0.10 .1T 0.25 RET 01T 02T 11T 21T 100 12T 1000 (a vailable on 629D only) 13T Fittings 1/2” OD (12.7 mm) tubulation A Sw agelok 8 VCR, female B 1.33” OD Conflat, rotatable1 C NW16-KF2 D Sw agelok 8 VCO, female (629D only) E Accurac y (% of Reading) 0.12% (45oC products in 1 Torr range and higher) C 0.15% (45oC products in 0.25, 0.10, 0.05 Torr ranges) D 0.25% (100oC products 1 Torr range or higher, and 0.02 Torr 45oC products) E 0.50% (100oC products in 0.25, 0.10, 0.05 Torr ranges) F Sensor T emperature 45oC J 100oC L Options Standard configuration, vertical calibration Heater status indication, v ertical calibration Exter nal zero, vertical cal (N/A for 0.02 Torr or 100oC/0.05 Torr products 3 Heater status , external zero, vertical cal (N/A f or 0.02 Torr or 100oC/0.05 Torr products) Standard configur ation, horizontal calibration (< 1 Torr only) Heater status indication, hor izontal calibration (< 1 Torr only) Exter nal zero, horizontal cal (45oC products with 0.05, 0.10, 0.25 Torr ranges; 7 100oC products with 0.10 and 0.25 Torr ranges) Heater status , external zero, horizontal cal (45oC products with 0.05, 0.10, 0.25 Torr ranges; 100oC products with 0.10 and 0.25 Torr ranges) Connector 9-pin D-connector , thread locks B 9-pin D-connector , slide locks P Ordering Inf ormation

600 Series - 2/19

© 2009-2019 MKS Instr uments, Inc. All rights reserved. MKS products provided subject to the US Export Regulations. Diversion or transfer contrary to US law is prohibited. Some Baratron® capacitance manometer products may not be exported to many end user countries without both US and local government export licenses under ECCN 2B230. Specifications are subject to change without notice. mksinst ™ is a trademark and Baratron® is a registered trademark of MKS Instruments, Inc., Andover, MA. Inconel ® and Incoloy® are registered trademarks of Inco Alloys International, Inc., Huntington, WV. Swagelok®, VCR® and VCO® are registered trademarks of Swagelok Corp., Solon, OH. Conflat® is a registered trademark of Varian Associates, Inc., Lexington, MA. D24F B B 11T C D24F and D25F Configuration Or dering Code Example: D24F11TBCB0 Code Example Absolute Capacitance Manometer s Dual r ange, 45oC sensor temperature, relays D24F Dual r ange, 100oC sensor temperature, relays D25F Pressure Rang es Full Scale (Torr) 11T 100 12T 1000 13T Fittings 1/2” OD (12.7 mm) tubulation A Sw agelok 8 VCR, female B 1.33” OD Conflat, rotatable C NW16-KF D Accuracy (% of Reading) 0.12% (D24D only) C 0.25% (D25D only) E Electrical Connector 15-pin D-connector, thread locks B 15-pin D-connector , slide locks P Secondar y Range Gain Ratio to 1 to 1 10 to 1 D27F B CE 11T C D27F and D28F Configuration Or dering Code Example: D27F11TCEC1B0 Code Example Absolute Capacitance Manometer s Dual r ange, sensor temperature 45oC D27F Dual r ange, sensor temperature 100oC D28F Pressure Rang es Full Scale (Torr) 01T 11T 100 12T 1000 13T Fittings 1/2” OD (12.7 mm) tubulation BA Sw agelok 8 VCR, female CE Sw agelok 8 VCO, female D A NW16-KF GA 1.33” OD Conflat, rotatable HA Accurac y (% of Reading) 0.12% (1 to 1000 Torr only, D27D) C 0.25% (1 to 1000 Torr only, D28D) E Orientation/Calibration V ertical calibration (standard for 1 to 1000 Torr) Hor izontal calibration (< 1 Torr only) Electrical Connector 15-pin D-connector, thread locks B 15-pin D-connector , slide locks P Secondar y Range Gain Ratio to 1 to 1 10 to 1 MKS Instruments, Inc. Global Headquar ters

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Andover, MA 01810 Tel: 978.645.5500 Web: www.mksinst.com MKS Instruments, Inc. Pr essure & Vacuum Measurement Solutions Six Shattuck Road Andover, MA 01810 Tel: 978.975.2350