DATASHEET SEARCH SITE | WWW.ALLDATASHEET.COM

Document overview

  • Manufacturer or author: Provided By ALLDATASHEET.COM(FREE DATASHEET DOWNLOAD SITE)
  • PDF pages: 4

Technical content

WWW.MKSINST.COM 41B, 42B, 51B, 52B PRESSURE SwITChES The 41B, 42B, 51B and 52B Vacuum, Atmospheric, and Pressure Switches offer accurate and reliable protection for vacuum equipment, atmospheric switching, and vacuum/pressure processes. Designed for applications where a DC signal output is not required, these switches provide relay outputs that are readily interfaced with alarms, valve actuators, computers, process controllers, load locks and other protection devices. The 41B and 42B models are referenced to atmospheric pressure, while the 51B and 52B products are referenced to vacuum. The 41B/42B switches are often used to ensure a loadlock pressure has equilibrated to local atmospheric pressure before opening the door. The trip point on MKS’ atmospheric switches can be set to trip above, below (reverse calibration), or exactly at current atmospheric pressure. Applications for the 51B/52B switches include soft pumping, gas box switching, and safety interlocks. Features & Benefits

  • Precise control f or a wide v ariety of production applications including semiconductor processing tools , high v acuum pumps, compressors, blowers, medical equipment and machine tools Provides high reliability which reduces do wntime and lowers the cost of ownership
  • Superb set point accur acy and repeat- ability: 0.5% of F .S. increases process control
  • Corrosion-resistant: all-metal, all-w elded constr uction exposes only 316L S.S. and Inconel® to the media
  • Switch rela y can be set to energiz e abo ve or below set point for fail-safe operation
  • Low h ysteresis due to capacitance technology impro ves set point accuracy o ver mechanical switches
  • Factory-set tr ip point from to 100% of Full Scale means no need f or personnel to adjust the set point and elimination of saf ety concerns from an erroneously adjusted set point Fast response s witching: 20 msec Excellent long ter m stability Rugged high o verpressure r ating (2 × F .S. or 45 psia, whichever is greater) f or pressure cycling applications Pressure & Vacuum Measurement Solutions

The design of these switches is based on the well-known MKS Baratron® capacitance manometer principle of operation. MKS has utilized this capacitance technology for more than three decades and it remains the most stable, accurate, and reliable sensor available today. The pressure switches sense the deflection of a diaphragm due to applied pressure, providing a switched output when pressure exceeds or drops below the chosen set point. The dual electrode sensor is an all-metal, all-welded design, thus exposing only corrosion-resistant 316L S.S. and Inconel ® to process gases. The sensor is then mated to sophisticated electronics to further optimize performance. The resulting enhanced accuracy and long- term stability yield a switch with unparalleled repeatability. The relay mode on 41B, 42B, 51B, and 52B switches can be set to either energize above or below the set point. If the unit loses power, the relay switches to the Normally Closed position. The user can indicate whether the Normally Closed position is above or below the set point. Using Energize Above the set point as an example, the relay is in the Normally Open position when the pressure is higher than the trip point and Normally Closed when the pressure is below the trip point. The scenario is reversed for Energize Below the set point option. In vacuum systems, the fail-safe operation is if the system loses power causing the relay to de-energize, the relay is in the same state as the high pressure condition. Therefore, most vacuum systems require the relay energize with pressure decreasing or below the set point. The 41B, 42B, 51B and 52B Vacuum, Atmospheric and Pressure Switches provide increased accuracy over mechanical type switches, thereby providing tighter control and repeatability of process, improving throughput and yield. Dimensional Drawing: Single Ended— Note: Unless otherwise specified, dimensions are nomi- nal values in inches (mm referenced). Output Connections 9-pin Type “D” Fl ying Leads 1. P ower Return (-) Red - P ower Input (+) 2. P ower Input (+) Blac k - Power Return (-) 3. Rela y NO Contact Green - Rela y NO Contact Rela y Common White - Rela y Common Rela y NC Contact Or ange - Relay NC Contact Un used Bare Wire - Chassis Ground Un used Unused Chassis Ground Low Pressure (1000 Torr and lower)

Full Scale Ranges 10 Torr through 500 psi (Consult Applications Engineering on Full Scale ranges in other engineer ing units. Selection of trip point and Full Scale range should be as close as possib le as trip point accuracy is affected by the Full Scale range) Trip Point Range 5% to 100% of F .S. Accuracy ±0.5% of F .S. (±temperature coefficient) Temperature Coefficient* ±0.07% of F .S./°C Ambient Operating Temperature 0° to 50°C T rip Point Dead Band ±3% of F .S.(nominal) Response Time <20 msec Materials Exposed to Pr ocess Gases Inconel and 316L S.S. 10 µRa max. on switches with Swagelok® VCR® fittings (5 µRa max. optional) Internal Volume 3.3 cc f or single-ended, 6.6 cc for flow-through Overpressure 2 × F .S. or 45 psia, whichever is greater Outputs Electromechanical rela y SPDT (isolated) contacts r ated up to 1 Amp @ 30 VDC resistive. Relay is energiz ed either with increasing pressure or decreasing pressure. Input Power Required 10 to 20 VDC @ 35 mA max. or 20 to 30 VDC @ 30 mA max. Fittings 42B/52B

4 VCR® male

4 VCR® male and female, NW 16 KF , 1/8'' male NPT, 1/4'' male NPT

*Example: A 100 Torr sensor with a 2°C change has a trip point temperature-induced error less than or equal to: (0.0007 x 100 Torr x 2) = 0.14 Torr error anywhere within the trip point range Note: Atmospheric switches provide a means by which the trip set point is referenced to current atmospheric conditions. “Reverse Calibration” allows the trip point to be set at or below the current atmospheric pressure. When ordering, a value of 000 in the last three digits of the model code would equate to atmospheric pressure. A value of 002 would equate to 2 Torr or 2 PSIG below atmospheric pressure, depending on the use of the “D” or “C” ordering code for Full Scale range. This method provides an excellent mechanism to achieve switching at current atmospheric conditions, regardless of the location of the installed base or present weather conditions.

Dimensional Drawing: Flow Through- Note: Unless otherwise specified, dimensions are nominal values in inches (mm referenced). 11T A CA MKS Instruments, Inc. Global Headquar ters

2 Tech Drive, Suite 201

Andover, MA 01810 Tel: 978.645.5500 Web: www.mksinst.com 41B_52B - 1/18 © 2009-2018 MKS Instruments, Inc. All rights reserved. MKS products provided subject to the US Export Regulations. Diversion or transfer contrary to US law is prohibited. Specifications are subject to change without notice. mksinst™ is a trademark and Baratron® is a registered trademark of MKS Instruments, Inc., Andover, MA. Inconel® is a registered trademark of Inco Alloys International, Huntington, WV. Swagelok® and VCR® are registered trademarks of Swagelok Marketing Co., Solon, OH. 41B only 41B/42B only 41B/51B only 41B/51B only A 005 41B Ordering Code Example: 41B11TCA1AA005 41B, 42B, 51B, 52B Code Configuration Unheated V acuum/Pressure Switch Single-ended gauge 41B Flo w-through gauge 42B Single-ended absolute 51B Flo w-through absolute 52B Full Scale Rang es Available (Contact Applications Engineering for other engineering units) 10 T orr 11T 30 T orr 31T 100 T orr 12T 500 T orr 52T 1000 T orr 13T 20 psi 21P 50 psi 51P 100 psi 12P 250 psi RDP 500 psi 52P F or Reverse Calibration only1 (trip point below atmospheric pressure): 10 T orr 11D 30 T orr 31D 100 T orr 12D 500 T orr 52D 1000 T orr 13D 20 psi 21C 50 psi 51C 100 psi 12C 250 psi RDC 500 psi 52C Fittings NW 16 KF GA 1/8 NPT male FE 1/4 NPT male FB VCR fixed male CA

4 VCR

VCR fixed male 42B/52B only CH Input V oltage 10-20 VDC 20-30 VDC Rela y Mode Energiz es with pressure above the set point A Energiz es with pressure below the set point B Connector 9-pin T ype “D” male A Flying leads - 2 ft. shielded cable F T rip Point2 Three digit v alue (in same units as F .S. ranges) XXX or reverse calibration, the trip point is given as value below atmosphere.) 1 F or a trip point of 000 (atmospheric pressure), use a reverse calibration Full Scale range code. 2 F or the absolute model, the trip point is the actual pressure at which the relay should trip. For the atmosphere model, the tr ip point is the pressure above or below atmospheric pressure at which the rela y should trip. MKS Instruments, Inc. Pr essure & Vacuum Measurement Solutions Six Shattuck Road Andover, MA 01810 Tel: 978.975.2350