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for Mks Mass flow controllers/Meters MKS Mass-Flow controllers/meters can be used with several MKS electronics modules. These modules provide power and a set point signal to the mass flow controller. In addition, the electronics modules provide a readout of gas flow, a gas correction potentiometer , and external input/output signals for remote indicating, recording, and controlling purposes. www.MKSInST.coM Flow Solutions 246 & 247 Single & Four Channel Power Supply/Readout The 246 and 247 Power Supplies/Readouts are designed to control and display any flow transducer. The flow rate set point can be adjusted either through front panel controls or remotely through the rear panel analog interface. The 246 is a single channel/single-readout unit and the 247 is a four channel/sequentially selectable single readout.
© 2004-2018 MKS Instr uments, Inc. All rights reserved. Power supply/ r eadouts 246 247 s ingle- c hannel, Power supply/readout f our- c hannel Power supply/readout Displa y type 3 1/2 digit 0.56" red LED continuous display 3 1/2 digit 0.56" red LED display is 1 of 4 sequentially selectable n umber of c hannels 1 4 s ignal Inputs from M fc f M 1 x 0-5 VD c 4 x 0-5 VD c Gas c orrection factor ( s caling) 0.1 - 4.0 (rear panel) 0.1 - 4.0 (rear panel) e xternal s et Point (by-passes on-board set point controls) 0-5 VD c 0-5 VD c e xternal on off TTL-compatib le TTL-compatible rs -232 n/a n/a M fc f M s ignal o utput Minimum load impedance: 10 k ohm/channel Minim um load impedance: 10 k ohm/channel s ignal o utputs Unscaled 1 x 0-5 VD c = 0-100% of F .S. 4 x 0-5 VD c = 0-100% of F .S. s ignal o utputs s caled 0-2 VD c (max.) 0-2 VD c (max.) trip P oints n/a n/a c ontrol o utputs n/a n/a Power s upply o utputs ±15 VD c at 0.5 Amp, max. ripple < 10 mV ±15 VD c at 1.0 Amp, max. ripple < 10 mV P ower Input 117/234 VAc ±15%, 50-60 Hz 117/234 VA c ±15%, 50-60 Hz c ompatible M fc s/M f Ms Mass Flow c ontrollers 179, 180, 579, 1179, 1479, 1480, 1559, 1579, 2179, M10M, M100 Mass Flow c ontrollers 179, 180, 579, 1179, 1479, 1480, 1559, 1579, 2179, M10M, M100 o perating temperature 15° c to 40° c 15° c to 40° c MKS products provided subject to the US Export Regulations. Diversion or transfer contrary to US law is prohibited. Specifications are subject to change without notice. mksinst™ is a trademark of MKS Instruments, Inc., Andover, MA. MKS Instruments, Inc. Global Headquarters
2 Tech Drive, Suite 201
Andover, MA 01810 Tel: 978.645.5500 web: www.mksinst.com MKS Instruments, Inc. Flow Solutions Six Shattuck Road Andover, MA 01810 Tel: 978.975.2350