DATASHEET SEARCH SITE | WWW.ALLDATASHEET.COM

Document overview

  • Manufacturer or author: Provided By ALLDATASHEET.COM(FREE DATASHEET DOWNLOAD SITE)
  • PDF pages: 4

Technical content

WWW.MKSINST.COM 228A BARATRON® DIFFERENTIAL CAPACITANCE MANOMETER WITH TRIP POINTS The 228A is a differential version of the industry-standard Baratron ® Capacitance Manometer. It is designed to accurately measure differential pressures and vacuum from 1000 to 0.2 Torr (133 to 0.027 kPa) and provides two (2) independently-adjustable trip relays for control of external equipment and components. The patented capacitance sensor is built entirely from Inconel ® nickel alloys on its measurement side, which offers superior corrosion resistance over long periods of time. Because the sensor operates by measuring the capacitance shift between a diaphragm exposed to the process and an electrode disk (rather than measuring the property of the gas), it is not sensitive to gas composition, and thus eliminates the need for gas-specific correction factors. The product can be used to measure either the true differential pressure or vacuum between two locations, or the reference side of the product can be left open to provide a true reference to local atmospheric pressure. Applications include air and gas flow measurements for filters and analytical systems, downstream pressure control in thin film processing systems, and automated leak testing systems. The 228A provides both a high-level analog output signal that is linear with pressure and two (2) trip relays. It can operate on either ±15VDC or +24VDC input voltage, and it offers three (3) different analog output signals for use in nearly any control or data acquisition system. The product can be equipped with any of twelve (12) industrial fittings on either the measurement or reference sides, including common industrial and semiconductor-industry standards like VCR ®, NW-KF , VCO®, and NPT. The sensor and electronics are mounted in a rugged industrial-grade housing that has high immunity and isolation from RF and EM interference. Features & Benefits

  • Fully-welded Inconel diaphr agm sensor off ers high resistance to corrosion for use in man y difficult applications – no mercur y, silicone, or hydrocarbon-based fluids are used Direct pressure measurement is not aff ected by gas composition
  • Differential measurement r anges from 1000 to 0.2 Torr (133 to 0.027 kPa) allows accur ate, repeatable characterization of v ery small pressure drops and flow rates
  • Two (2) UL-appro ved tr ip rela ys independently adjustab le from -100% to +100% of full-scale measurement r ange
  • Input v oltage of either ±15VDC or +24VDC f or use in a wide variety of processing systems Three diff erent analog output signals (0-1V , 0-5V, and 0-10V) in either unidirec- tional or bidirectional calibr ations
  • Rugged, industr ial-grade design suitab le f or use in applications with high levels of RF/EM interf erence Pressure & Vacuum Measurement Solutions

Dimensional Drawings — Unless otherwise specified, dimensions are nominal values in inches (mm ref erenced).

Full Scale Ranges 0.2, 1, 2, 5, 10, 20, 50, 100, 200, and 1000 Torr and equivalents in kPa, mbar, inches H2O, and cm H2O Resolution 0.01% of Full Scale (F .S.) Accuracy1 0.50% of Full Scale unidirectional or bidirectional standard; 0.30% of F .S. unidirectional or bidirectional, and 0.30% of Reading (unidirectional only) optional T emperature Coefficients Zero 0.1% Full Scale/°C f or standard accuracy specification Span 0.04% of Reading/°C Ambient Operating Temperature 0° to 50°C Maxim um Overpressure Measurement Side 120% of Full Scale or 20 psi (140 kP a), whichever is higher Ref erence Side 120% of Full Scale Maxim um Line Pressure 40 psig (275 kP Materials Exposed to Process Measurement Side Inconel Ref erence Side Inconel, cer amic, palladium, stainless steel, glass Sensor Internal Volume Measurement Side 1.4 cm3 Ref erence Side 9.0 cm3 Warmup Time 30 min utes Input Power ±15VDC (±5%) or +16 to +30VDC @ 75 mA, r ipple less than 20 mV Output Signal 0 - 1VDC , 0 - 5VDC, or 0 - 10VDC 1 > 10 k W load Trip Relays T wo (2) process pressure trip relays, independently adjustable from -100% to +100% of F .S. DPDT contacts r ated at 1.0 amps at 30VDC or 0.3 amps at 120VAC. Relays conform to UL-1950 Basic Insulation at 125V . Internally mounted, externally adjustable by customer. Electrical Connector 15-pin high-density D-subminiature Compliance2 CE, SEMI S2-0706 Fittings3 Standard OD (6.4 mm) tubes Optional 3/16” OD (4.8 mm) tubes, 4 male VCR®, 4 female VCR, 4 male VCO®, 4 female VCO, NW16-KF , 1.33” OD (33.8 mm) Conflat®, 1/8” male and female NPT, 1/4” male and female NPT Specifications Notes: 1 0-10VDC bidirectional output signal not available with +24VDC input voltage. 2 When used with an overall metal braided shielded cable, properly grounded at both ends. 3 When equipped with standard 1/4-inch (6.4 mm) O.D. inlet and reference tubes

F 228A 11T CD Ordering Inf ormation 228A - 1/18 © 2010-2018 MKS Instruments, Inc. All rights reserved. Some Baratron® capacitance manometer products may not be exported to many end user countries without both US and local government export licenses under ECCN 2B230. Specifications are subject to change without notice. mksinst ™ is a trademark and Baratron® is a registered trademark of MKS Instruments, Inc., Andover, MA. Conflat ® is a registered trademark of Varian Associates, Lexington, MA. Inconel® is a registered trademark of Inco Alloys International, Inc., Huntington, WV. VCR® and VCO® are registered trademarks of Swagelok Co., Solon, OH. C BB Ordering Code Example: 228AXXXYYZZQSSTVRR Code Configuration 228A Baratr on Differential Capacitance Manometer 228A Rang es (XXX) T orr mbar kP A inH2O cm H2O 0.02 U2K 0.1 .1K .1W 0.2 .2T .2M .2K .2R 0.5 .5K .5W 01T 01M 01K 01W 01R 02T 02M 02K 02W 02R 05T 05M 05K 05W 05R 11T 11M 11K 11W 11R 21T 21M 21K 21W 21R 51T 51M 51W 51R 100 12T 12M 12K 12W 12R 200 22T 22M 22R 500 52W 1000 13T 13M 13R Ref erence Side Fitting (YY) 1/4” OD tube BB 3/16” OD tube BG 4 male VCR CB 4 f emale VCR CD 4 male VCO DC 4 f emale VCO DD 1/4” female NPT F A 1/4” male NPT FB 1/8” male NPT FE 1/8” female NPT FF NW16-KF GA 1.33” OD Conflat HA Measurement Side Fitting (ZZ) 1/4” OD tube BB 3/16” OD tube BG 4 male VCR CB 4 f emale VCR CD 4 male VCO DC 4 f emale VCO DD 1/4” female NPT F A 1/4” male NPT FB 1/8” male NPT FE 1/8” female NPT FF NW16-KF GA 1.33” OD Conflat HA Accurac y (Q) 0.50% Full Scale (standard) F 0.30% Full Scale K 0.30% Reading S Input/Output and Calibration (SS) ±15 VDC input/0 - 1 VDC bidirectional output ±15 VDC input/0 - 10 VDC bidirectional output ±15 VDC input/0 - 5 VDC bidirectional output +24 VDC input/0 - 1 VDC bidirectional output +24 VDC input/0 - 5 VDC bidirectional output ±15 VDC input/0 - 1 VDC unidirectional output ±15 VDC input/0 - 10 VDC unidirectional output ±15 VDC input/0 - 5 VDC unidirectional output +24 VDC input/0 - 1 VDC unidirectional output +24 VDC input/0 - 5 VDC unidirectional output Electrical Connector (T) 15-pin high-density D-subminiature C Mounting (V) No br acket (standard) Mounting br acket, standard 1 Mounting br acket, slotted T rip Relay Settings (RR) T rip A above 50% FS, Trip B above 50% FS* (default setting) AA T rip A above 50% FS, Trip B below 50% FS* AB T rip A below 50% FS, Trip B below 50% FS* BB T rip A below 50% FS, Trip B above 50% FS* BA *Contact factor y for alternate trip relay settings MKS Instruments, Inc. Global Headquar ters

2 Tech Drive, Suite 201

Andover, MA 01810 Tel: 978.645.5500 Web: www.mksinst.com MKS Instruments, Inc. Pr essure & Vacuum Measurement Solutions Six Shattuck Road Andover, MA 01810 Tel: 978.975.2350