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WWW.MKSINST.COM 1579 DIGITAL MASS FLOw C ONTROLLER FOR H IGH F LOw R ATES The 1579 is a digital Mass Flow Controller of the latest generation that was developed for many different applications in research and industry. The 1579 is based on proven MKS technology that offers fast controller settling time along with high accuracy over the entire control range. This makes it possible to integrate the 1579 into processes that require the minimum time for stabilization of the process conditions as well as excellent reproducibility. Because of its compact design, the 1579 may be used in space saving gas panel systems. The electrical connections are made with D-Sub connectors for both Analog and Profibus versions, in conformance with all CE regulations. While MFC applications in research and development typically use local analog power supply/readouts, many industrial applications are moving to digital bus-compatible communications and power distribution. The 1579 meets both of these requirements. Features & Benefits

  • Full Scale Flo w Ranges from 50 slm to 300 slm Dual V oltage P ower Input; +24 VDC or ±15 VDC Controller Settling Time less than second
  • Analog or Analog and Profib us DP Communications
  • Diagnostics/Setup Kit a vailable f or Analog Comm unications version MultiGas/MultiRange Capability f or up to 15 gases FS accur acy with reading optional Plug compatib le with ear lier MKS MFCs Compact Design WWW.MKSINST.COM Flow Solutions

In 1997, MKS Instruments was the first manufacturer to develop a Profibus standard for Mass Flow Controllers with the 1179A. The 1579 follows this standard with respect to both the interface and the communications. Further advances in digital electronics and flow design have allowed the development of a coordinated product line using digital processing with both analog and digital interfaces ranging from a minimum of flow rate of 0.2 sccm in the 1179B to a maximum of 300 slm in the 1579. Both analog and Profibus versions incorporate a flexible power system that allo ws either ±15 VDC or +24 VDC po wer supplies to be used. This allows the user to choose the most effective method of powering the unit for his application. Additionally, the analog variant of the 1579 is equipped with a digital interface that provides access to setup functions and diagnostics through the use of proprietary software. Continuing development of both electronics and flow design have enabled MKS Instruments to develop and produce a compact, robust device with excellent accuracy and settling time. Controller Settling Time — The above graph shows the settling time of the 1579 Pinout Analog — Connector side and pinout of 1579 analog version Pinout Profibus — Connector side and pinout of 1579 Profibus version ± 15 VDC Supply 24VDC Suppl y Reserved Reser ved Flo w Signal Flo w Signal V alve Close* V alve Close* V alve Open* V alve Open* Supply Common Reser ved - 15 V Supply 24V Common +15 V Supply +24 V Supply Set point Input* Set point Input* NC NC NC NC Signal Common Signal Common Signal Common Signal Common NC NC NC NC Chassis Ground Chassis Ground *Not applicab le with mass flow meter 579 Analog Connector Pr ofibus Connector 15VDC 24VDC V alve Open/Valve Close* V alve Open/Valve Close* NC Flo w Signal Flo w Signal NC +15 V Supply +24 V Supply RXD/TXD P Supply Common Reser ved CNTR - P - 15 V Supply 24 V Common DGND Set point Input* Set point Input* VP Signal Common Signal Common NC Signal Common Signal Common RXD/TXP - N Reserved Reser ved NC *Not applicab le with mass flow meter 579 Time (seconds) % of Full Scale

Flow Range Full Scale (N2 in slm) 50, 100, 200, 300 slm Max. Inlet Pressure 100 psig Normal Operating Pressure Diff erential (with atmospher ic pressure at the MFC outlet) 50, 100 slm 17 to 40 psid 200 slm 27 to 40 psid 300 slm 40 to 49 psid Contr ol Range 2 to 100% of F .S. Accuracy (including non-linearity, hysteresis and non-repeatability; ±1% of F .S. ref erenced to 760 mmHg and 0°C) Repeatability 0.2% of F .S. Resolution

16 Bit

T emperature Coefficients Zero < 0.05% of F .S. /°C Span < 0.10% of F .S. /°C warm-Up Time < 30 min Contr oller Settling Time < 1 s typical Pressure Coefficient 0.02% of Rdg/psi Normal Operating Temperature Range 15°C to 40°C (59°F to 104°F) Input V oltage Required 20.5 to 30 VDC Max. Current 300 mA Set P oint Command Signal 0 to 5 VDC from < 20 kOhm Output Signal 0 to 5 VDC into > 10 kOhm Connector Types Analog 15-pin T ype “D” male Profib us 2 x 9-pin Type “D” male (analog) and female (Profibus) wetted Materials Standard 316L S .S.T, Nickel, Viton® Optional (Seals and v alve seat) Buna-N, Neoprene®, Kalrez® Leak Integrity Exter nal < 1 x 10-9 scc/sec He Through closed v alve < 0.1% of F .S. Fittings (compatible with) Standard 8 VCR® male Optional

8 VCO® male, DN 16 KF

1/2” Swagelok®, 12 mm Swagelok®

4 VCR® male (for 50 slm only)

Dimensional Drawing — Note: Unless otherwise specified, dimensions are nominal values in inches (mm referenced). 1579 - 1/18 © 2006-2018 MKS Instruments, Inc. All rights reserved. MKS products provided subject to the US Export Regulations. Diversion or transfer contrary to US law is prohibited. Specifications are subject to change without notice. mksinst™ is a trademark of MKS Instruments, Inc., Andover, MA. Viton®, registered trademarks of Swagelok Marketing Co., Solon, OH. 013 32L B V XX R SEMI Gas Codes * Max. 300 slm N2 equivalent 1579A Ordering Code Example: 1579A01332LR1BVXX Code Configuration 1579A Mass-Flo Controller 1579A 579A Mass Flo w Meter 0579A Gas To Be Calibrated For: (SEMI Gas Code) See table for additional options Helium 001 Argon 004 Hydrogen 007 Nitrogen 013 Oxygen 015 Full Scale Rang e of Calibrated Gas* slm 51L 100 slm 12L 200 slm 22L 300 slm 32L Fittings (compatible with) Swagelok® 8 VCR® male R Sw agelok 8 VCO® male G Swagelok S 12mm Swagelok M DN 16KF D Sw agelok 4 VCR (for variant 51L only) V Valve Nor mally closed F or 579A (MFM) Connector Analog 15-pin Type D B Digital Profib us® DP 4 Seal Materials Buna-N B Kalrez® K Neoprene® N Viton® V Firmware (Profibus only) Unless otherwise specified, MKS will ship XX fir mware revision current to date of order Optional Accessories Diagnostics Adapter Kit (to use the propr ietary Diagnostics Port) DMC-Suppor t Mounting Plate Y -5150166 4-Channel P ower Supply and Readout Unit with RS-232 647C4R0N 8-Channel P ower Supply and Readout Unit with RS-232 647C8R0N 1-Channel P ower Supply and Readout Unit with RS-232 PR4000S 2-Channel P ower Supply and Readout Unit with RS-232 PR4000F Cab ling for 1579A: CB147-12-10 to connect 1579 9-pin Type “D” to PR4000, 186, 246, 167, 647 CB259-5-3M to connect 1579 15-pin Type “D” to 246, PR4000, 186, 167, 647 MASS-FLO CONTROLLER FLOW L (150 mm) 1.00 (25.4 mm) M3 8-32 10-24 ZERO SETUP RESET AUTOZERO 5.91 (155 mm) 6.10 4.45 (113 mm) 3.09 (78.5 mm) 1.5 (38 mm) 0.86 (21.85 mm) 0.31 (8 mm) 0.47 (12 mm) 1.57 (40 mm) Dimension - L inc hes mm Sw agelok 8 VCR 7.20±0.06 183±1.52 12 mm Sw agelok 6.77±0.06 172±1.52 Swagelok 6.77±0.06 172±1.52 Sw agelok 4 VCR 6.87±0.06 174.5±1.52 Sw agelok 8 VCO 6.85±0.06 174±1.52 DN16KF 6.37±0.06 162±1.52 SEMI Gas Code Name Symbol Maximum FS, slm Flow Rate

001 Helium He 300 32L

004 Argon Ar 300 32L

007 Hydrogen H 2 300 32L

008 Air -- 300 32L

013 Nitrogen N 2 300 32L

015 Oxygen O 2 300 32L

019 Chlorine Cl 2 200 22L

025 Carbon Dioxide CO 2 200 22L

028 Methane CH 4 200 22L

029 Ammonia NH 3 200 22L

039 Silane SiH 4 100 12L

042 Acetylene C 2H2 100 12L

110 Sulfur Hexafluoride SF 6 50 51L

MKS Instruments, Inc. Global Headquarters

2 Tech Drive, Suite 201

Andover, MA 01810 Tel: 978.645.5500 T el: 800.227.8766 (in U .S.A.) Web: www.mksinst.com MKS Instruments, Inc. Flow Solutions Six Shattuck Road Andover, MA 01810 Tel: 978.975.2350