100937685

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WWW.MKSINST.COM ISO-UnIverSal fIttIngS S I ze S n W 63 tO n W 630 (2½'' tO 25'') Series 76 Integrated Process Solutions

Series 76 ISO-Universal components are a vacuum flanging system for 63 mm to 1000 mm fittings. The dimension criteria are based on requirements established by the International Standards Organization (ISO). There are two flange styles in the ISO-Universal system: Multi- Fastener (MF) and Bolted. The flange family is also called: ISO-MF , ISO-PF or ISO-K. Figure 1 illustrates the components of this flange system. This catalog features a large variety of components such as elbows, tees, crosses, reducers and adapters having ISO-MF flanges. Currently there is no ISO standard for the flange face to centerline distance in this system. There is however, an industry standard followed by several manufacturers. MKS Instruments follows these standards in designing the Series 76 ISO-Universal components. There are several advantages in the use of ISO components. One advantage is that the flange is “sexless.” The seal is on a symmetrical centering ring that interfaces with two identical flanges. In addition, ISO- Universal flanges are more compact than ASA flanges, which were designed for pressure and are unnecessarily massive for vacuum use. Since these flanges are an ISO standard, they can be used with components from other manufacturers. Figure 1 — Component Nomenclature for the ISO Universal Flange System

Applications

The Series 76 ISO-Universal component system is used in a variety of industries from process manufacturing to semiconductor fabrication to thin film deposition. Some uses in vacuum systems are: Roughing and f oreline plumbing for large vacuum systems 2. High v acuum, high conductance, interconnections 3. Modular systems which will be modified frequently 4. Exper imental systems in research laboratories ISO-Universal flange components using elastomer seals are primarily designed for use at subatmospheric pressure. When elastomer seals are used without baking, typical limiting pressures may be around 10 -6 Torr. Baked systems using Viton can be used to 10-8 Torr. Standard components can be used to a slight over pressure. MF flanges may be used at a maximum pressure of 30 psig if the metal spacer ring is used and the flange clamps are firmly retained.

nominal* f lange Size (mm) H Suggested t able/Pipe Dims: ** O.D. x Wall (inches) ISO Multi- f astener f lange (ISO-M f ) ISO Bolted f lange (ISO-B f ) a (O.D.) B t hickness) Clamps r equired C (O.D.) D (thickness) e (Bolt Circle) f (Bolt Holes) n (# Holes) Wrench (mm) NW 63 2.5 x .065 3.74 (95) .47 (12) 3-4 5.12 (130) .47 (12) 4.33 (110) .35 (9) 4 13 NW 80 3.0 x .065 4.33 (110) .47 (12) 4-8 5.71 (145) .47 (12) 4.92 (125) .35 (9) 8 13 NW 100 4.0 x .065 5.12 (130) .47 (12) 4-8 6.50 (165) .47 (12) 5.71 (145) .35 (9) 8 13 NW 160 6.0 x .083 7.09 (180) .47 (12) 4-8 8.86 (225) .63 (16) 7.87 (200) .43 (11) 8 17 NW 200 8.0 x .120 9.45 (240) .47 (12) 6-12 11.22 (285) .63 (16) 10.24 (260) .43 (11) 12 17 NW 250 10.0 x .125 11.42 (290) .47 (12) 6-12 13.19 (335) .63 (16) 12.20 (310) .43 (11) 12 17 NW 320 12.75 x .165 14.57 (370) .67 (17) 8-12 16.73 (425) .79 (20) 15.55 (395) .55 (14) 12 19 NW 400 16.0 x .188 17.72 (450) .67 (17) 8-16 20.08 (510) .79 (20) 18.90 (480) .55 (14) 16 19 NW 500 20.0 x .188 21.65 (550) .67 (17) 12-16 24.02 (610) .79 (20) 22.83 (580) .55 (14) 16 19 (750) .94 (24) 28.35 (720) .55 (14) 20 19 * NW is retained here by convention. It does not specify the flange type but is from the German “Nennweite,” meaning nominal diameter. ** Schedule 5 pipe is for sizes 320 and above. elastomer Comparison Buna-n v iton® Compound N674-70 V747-75 Color Black Black Bakeout 80°C 150°C Benefits Seals easier, lower cost High temperature, lasts longer Specifications Maximum Pressure (with spacer ring) 30 psig Minimum Pressure 10-8 Torr Leak Check >10-9 std-cc/s Torque Rating (clamps and bolts) 7-10 lbs/foot Materials Fittings Retaining Rings Clamps Rotatable Bolt Rings Seal Assembly 304 stainless steel Steel Aluminum alloy Aluminum alloy Aluminum spacer ring, choice of aluminum or stainless steel centering ring, choice of Viton or Buna-N elastomer seal

flange, Bored in./(mm) Flange Size (ISO) Nominal Bore A B C Part Number NW 63 NW 80 NW 100 NW 160 NW 200 NW 250 NW 320 NW 400 NW 500 2½'' 3'' 4'' 6'' 8'' 10'' 3/4'' 16'' 20'' 2.37 (60) 2.87 (73) 3.87 (98) 5.83 (148) 7.76 (197) 9.75 (248) 12.42 (315) 15.62 (397) 19.62 (498) 2.50 (64) 3.00 (76) 4.00 (102) 6.00 (152) 8.00 (203) 10.00 (254) 12.75 (324) 16.00 (406) 20.00 (508) 0.22 (6) 0.22 (6) 0.22 (6) 0.22 (6) 0.22 (6) 0.22 (6) 0.30 (8) 0.30 (8) 0.30 (8) 100760206 100760208 100760210 100760216 100760220 100760225 100760232 100760240 100760250

• Stainless steel type 304
• For inter nal w eld
• Infinitely rotatab le
• Made f or inch tube and pipe diameters
• Use with clamps or rotatab le bolt r ing B * A C l a e S e d i S * Given as ID of suggested tubing flange, long Weld Stub in./(mm) Flange Size (ISO) Nominal Bore A B C Part Number NW 63 NW 80 NW 100 NW 100 NW 160 NW 200 NW 250 NW 320 NW 400 NW 500 2½'' 3'' 4'' (.065” wall) 4'' (.083” wall) 6'' 8'' 10'' 3/4'' 16'' 20'' 2.37 (60) 2.87 (73) 3.87 (98) 3.87 (98) 5.83 (148) 7.76 (197) 9.75 (248) 12.42 (315) 15.62 (397) 19.62 (498) 2.50 (64) 3.00 (76) 4.00 (102) 4.00 (102) 6.00 (152) 8.00 (203) 10.00 (254) 12.75 (324) 16.00 (406) 20.00 (508) 3.94 (100) 3.94 (100) 3.94 (100) 3.94 (100) 3.94 (100) 3.94 (100) 3.94 (100) 3.94 (100) 3.94 (100) 3.94 (100) 100760406 100760408 100760410 100760411 100760416 100760420 100760425 100760432 100760440 100760450 C AB
• Stainless steel type 304
• For b uttweld
• Standard inch diameters
• Use with clamps or rotatab le bolt r ing flange, Blank-Off in./(mm) Flange Size (ISO) Part Number NW 63 NW 80 NW 100 NW 160 NW 200 NW 250 NW 320 NW 400 NW 500 100760106 100760108 100760110 100760116 100760120 100760125 100760132 100760140 100760150
• Stainless steel type 304
• Infinitely rotatab le
• To close off un used por ts
• Use with clamps or rotatab le bolt r ing Seal Side

flange, Bolted, Bored in./(mm) Flange Size (ISO) Nominal Bore A B C Part Number NW 63 NW 80 NW 100 NW 160 NW 200 NW 250 NW 320 NW 400 NW 500 NW 630 2½'' 3'' 4'' 6'' 8'' 10'' 3/4'' 16'' 20'' 24'' 2.37 (60) 2.87 (73) 3.87 (98) 5.83 (148) 7.76 (197) 9.75 (248) 12.42 (315) 15.62 (397) 19.62 (498) 23.50 (597) 2.50 (64) 3.00 (76) 4.00 (102) 6.00 (152) 8.00 (203) 10.00 (254) 12.75 (324) 16.00 (406) 20.00 (508) 24.00 (610) 0.22 (6) 0.22 (6) 0.22 (6) 0.37 (10) 0.37 (10) 0.41 (11) 0.41 (11) 0.41 (11) 0.41 (11) 0.57 (15) 100762406 100762408 100762410 100762416 100762420 100762425 100762432 100762440 100762450 100762463

• Stainless steel type 304
• For use with bolts only
• For inter nal w eld
• Made f or inch tube and pipe diameters
• Tapped bolt holes on special order flange, Bolted, Weld Stub in./(mm) Flange Size (ISO) Nominal Bore A B C Part Number NW 63 NW 80 NW 100 NW 160 NW 200 NW 250 NW 320 NW 400 NW 500 NW 630 2½'' 3'' 4'' (.065'' wall) 6'' 8'' 10'' 3/4'' 16'' 20'' 24'' 2.37 (60) 2.87 (73) 3.87 (98) 5.83 (148) 7.76 (197) 9.75 (248) 12.42 (315) 15.62 (397) 19.62 (498) 23.50 (597) 2.50 (64) 3.00 (76) 4.00 (102) 6.00 (152) 8.00 (203) 10.00 (254) 12.75 (324) 16.00 (406) 20.00 (508) 24.00 (610) 3.94 (100) 3.94 (100) 3.94 (100) 3.94 (100) 3.94 (100) 3.94 (100) 3.94 (100) 3.94 (100) 3.94 (100) 3.94 (100) 100762706 100762708 100762710 100762716 100762720 100762725 100762732 100762740 100762750 100762763
• Stainless steel type 304
• For b uttweld
• For use with bolts only
• Made f or inch tube and pipe diameters flange, Bolted, Blank in./(mm) Flange Size (ISO) Part Number NW 63 NW 80 NW 100 NW 160 NW 200 NW 250 NW 320 NW 400 NW 500 NW 630 100760306 100760308 100760310 100760316 100760320 100760325 100760332 100760340 100760350 100760363
• Stainless steel type 304
• To close off un used por ts or f or special bor ing
• For use with bolts only
• Tapped bolt holes on special order A* B C Seal Side * Given as ID of suggested tubing C AB Seal Side

Seal, Centering ring assembly, Stainless Steel/viton® in./(mm) Flange Size (ISO) A B Part Number NW 63 NW 80 NW 100 NW 160 NW 200 NW 250 NW 320 NW 400 NW 500 NW 630 2.63 (67) 3.14 (80) 3.89 (99) 5.90 (150) 8.26 (210) 10.14 (258) 12.30 (312) 15.53 (395) 19.51 (496) 25.41 (645) 0.15 (4) 0.15 (4) 0.15 (4) 0.15 (4) 0.15 (4) 0.15 (4) 0.22 (6) 0.22 (6) 0.22 (6) 0.22 (6) 100760506 100760508 100760510 100760516 100760520 100760525 100760532 100760540 100760550 100760563

• Stainless steel center ing r ing
• Replaceable Viton O-Ring
• Aluminum spacer r ing
• Rated to 150°C max A B Seal, Centering ring assembly, aluminum/Buna-n in./(mm) Flange Size (ISO) A B Part Number NW 63 NW 80 NW 100 NW 160 NW 200 NW 250 NW 320 NW 400 NW 500 NW 630 2.63 (67) 3.14 (80) 3.89 (99) 5.90 (150) 8.26 (210) 10.14 (258) 12.30 (312) 15.53 (395) 19.51 (496) 25.41 (645) 0.15 (4) 0.15 (4) 0.15 (4) 0.15 (4) 0.15 (4) 0.15 (4) 0.22 (6) 0.22 (6) 0.22 (6) 0.22 (6) 100760706 100760708 100760710 100760716 100760720 100760725 100760732 100760740 100760750 100760763
• Aluminum center ing r ing
• Replaceable Buna-N O-Ring
• Aluminum spacer r ing
• Rated to 80°C max. A B Seal, Centering ring assembly, aluminum/viton® in./(mm) Flange Size (ISO) A B Part Number NW 63 NW 80 NW 100 NW 160 NW 200 NW 250 NW 320 NW 400 NW 500 NW 630 2.63 (67) 3.14 (80) 3.89 (99) 5.90 (150) 8.26 (210) 10.14 (258) 12.30 (312) 15.53 (395) 19.51 (496) 25.41 (645) 0.15 (4) 0.15 (4) 0.15 (4) 0.15 (4) 0.15 (4) 0.15 (4) 0.22 (6) 0.22 (6) 0.22 (6) 0.22 (6) 100760606 100760608 100760610 100760616 100760620 100760625 100760632 100760640 100760650 100760663
• Aluminum center ing r ing
• Replaceable Viton O-Ring
• Aluminum spacer r ing
• Rated to 150°C max A B

Seal, Overpressure assembly in./(mm) Flange Size (ISO) A B Part Number NW 80 NW 100 NW 160 3.14 (80) 3.89 (99) 5.90 (150) 0.15 (4) 0.15 (4) 0.15 (4) 100938657 100938658 100937685

• Stainless steel center ing r ing
• Replaceable Viton O-Ring
• Includes alumin um o verpressure r ing A B Seal, replacement O-ring, viton® in./(mm) Flange Size (ISO) Standard Number A B Part Number NW 63 NW 80 NW 100 NW 160 NW 200 NW 250 NW 320 NW 400 NW 500 NW 630 2-336 2-340 2-346 2-361 2-371 2-378 2-454 2-460 2-468 2-474 2.85 (72) 3.35 (85) 4.10 (104) 5.98 (152) 8.48 (215) 10.48 (266) 12.48 (317) 15.48 (393) 19.46 (494) 24.94 (634) 0.21 (5) 0.21 (5) 0.21 (5) 0.21 (5) 0.21 (5) 0.21 (5) 0.28 (7) 0.28 (7) 0.28 (7) 0.28 (7) 100762006 100762008 100762010 100762016 100762020 100762025 100762032 100762040 100762050 100762063
• Viton
• Standard US O-Ring siz es
• Bakeable to 150°C
• Replaceable seal f or center ing r ing assemb ly B A Seal, replacement O-ring, Buna-n in./(mm) Flange Size (ISO) Standard Number A B Part Number NW 63 NW 80 NW 100 NW 160 NW 200 NW 250 NW 320 NW 400 NW 500 NW 630 2-336 2-340 2-346 2-361 2-371 2-378 2-454 2-460 2-468 2-474 2.85 (72) 3.35 (85) 4.10 (104) 5.98 (152) 8.48 (215) 10.48 (266) 12.48 (317) 15.48 (393) 19.46 (494) 24.94 (634) 0.21 (5) 0.21 (5) 0.21 (5) 0.21 (5) 0.21 (5) 0.21 (5) 0.28 (7) 0.28 (7) 0.28 (7) 0.28 (7) 100761906 100761908 100761910 100761916 100761920 100761925 100761932 100761940 100761950 100761963
• Buna-N
• Standard US O-Ring siz es
• Bakeable to 80°C
• Replaceable seal f or center ing r ing assemb ly B A

Clamp, Single Claw n./(mm) Flange Size (ISO) Bolt Size A B C Part Number NW 63 NW 80 NW 100 NW 160 NW 200 NW 250 NW 320 NW 400 NW 500 M 8 M 8 M 8 M 10 M 10 M 10 M 12 M 12 M 12 1.20 (30) 1.20 (30) 1.20 (30) 1.25 (32) 1.25 (32) 1.25 (32) 1.57 (40) 1.57 (40) 1.57 (40) 0.39 (10) 0.39 (10) 0.39 (10) 0.39 (10) 0.39 (10) 0.39 (10) 0.72 (18) 0.72 (18) 0.72 (18) 0.62 (16) 0.62 (16) 0.62 (16) 0.80 (20) 0.80 (20) 0.80 (20) 1.04 (26) 1.04 (26) 1.04 (26) 100761006 100761006 100761006 100761016 100761016 100761016 100761032 100761040 100761040

• Aluminum clamp
• Stainless steel bolt
• Stainless steel w asher
• To join an MF flange to a tapped bolted flange A B C Clamp, Double Claw in./(mm) Flange Size (ISO) A B C Part Number NW 63 NW 80 NW 100 NW 160 NW 200 NW 250 NW 320 NW 400 NW 500 0.95 (24) 0.95 (24) 0.95 (24) 1.10 (28) 1.10 (28) 1.10 (28) 1.34 (34) 1.34 (34) 1.34 (34) 1.98 (50) 1.98 (50) 1.98 (50) 2.05 (52) 2.05 (52) 2.05 (52) 2.56 (65) 2.56 (65) 2.56 (65) 0.63 (16) 0.63 (16) 0.63 (16) 0.80 (20) 0.80 (20) 0.80 (20) 1.04 (26) 1.04 (26) 1.04 (26) 100761106 100761106 100761106 100761116 100761116 100761116 100761132 100761140 100761140
• Aluminum clamp
• Stainless steel bolt
• Stainless steel w asher
• To join a pair of MF flanges B A C Bolt and nut Set in./(mm) Flange Size (ISO) Bolt Size No. in Set Pitch (mm) Part Number NW 63 NW 80 NW 100 NW 160 NW 200 NW 250 NW 320 NW 400 NW 500 NW 630 M 8 x 40 M 8 x 40 M 8 x 40 M 10 x 50 M 10 x 50 M 10 x 50 M 12 x 60 M 12 x 60 M 12 x 60 M 12 x 65 1.25 1.25 1.25 1.50 1.50 1.50 1.75 1.75 1.75 1.75 100761206 100761208 100761208 100761216 100761220 100761220 100761232 100761240 100761240 100761263
• Stainless steel
• To join tw o bolted flanges
• Nuts and w ashers included

ring, rotatable Bolt in./(mm) Flange Size (ISO) Part Number NW 63 NW 80 NW 100 NW 160 NW 200 NW 250 NW 320 NW 400 NW 500 100762806 100762808 100762810 100762816 100762820 100762825 100762832 100762840 100762850

• Aluminum
• Use with MF flange
• Steel retaining r ing included
• O.D. and bolt patter n same as bolted flange Bolt Set in./(mm) Flange Size (ISO) Bolt Size No. in Set Pitch (mm) Part Number NW 63 NW 80 NW 100 NW 160 NW 200 NW 250 NW 320 NW 400 NW 500 NW 630 M 8 x 30 M 8 x 30 M 8 x 30 M 10 x 35 M 10 x 35 M 10 x 35 M 12 x 45 M 12 x 45 M 12 x 45 M 12 x 55 1.25 1.25 1.25 1.50 1.50 1.50 1.75 1.75 1.75 1.75 100761306 100761308 100761308 100761316 100761320 100761320 100761332 100761340 100761340 100761363
• Stainless steel
• Bolted flange to tapped flange
• Includes w asher ring, retaining in./(mm) Flange Size (ISO) Part Number NW 63 NW 80 NW 100 NW 160 NW 200 NW 250 NW 320 NW 400 NW 500 100762906 100762908 100762910 100762916 100762920 100762925 100762932 100762940 100762950
• Stainless steel
• Retains bolt r ing

Conic reducer in./(mm) Flange Size (ISO) A B C Part Number NW 63 to NW 80 NW 63 to NW 100 NW 80 to NW 100 NW 80 to NW 160 NW 100 to NW 160 4.14 (105) 4.14 (105) 4.14 (105) 9.52 (242) 9.52 (242) 2.87 (73) 3.83 (97) 3.83 (97) 5.78 (147) 5.78 (147) 2.37 (60) 2.37 (60) 2.87 (73) 2.87 (73) 3.83 (97) 100764906 100764917 100764908 100764927 100764910

• Stainless steel type 304
• Other combinations a vailable on request
• High conductance adapter A B C Step reducer in./(mm) Flange Size (ISO) A B Part Number NW 63 to NW 80 NW 63 to NW 100 NW 63 to NW 160 NW 80 to NW 100 NW 100 to NW 160 2.95 (75) 2.95 (75) 2.95 (75) 2.95 (75) 2.95 (75) 2.31 (59) 2.31 (59) 2.31 (59) 2.87 (73) 3.87 (98) 100762506 100762517 100762527 100762508 100762510
• Stainless steel type 304
• Short o verall length B A

Conic adapter, ISO-Mf flange to ISO-Kf flange in./(mm) Flange Size (ISO) A B C Part Number NW 63 to NW 40 NW 63 to NW 50 NW 80 to NW 40 NW 80 to NW 50 NW 100 to NW 50 3.39 (86) 3.39 (86) 4.64 (118) 4.64 (118) 4.64 (118) 2.37 (60) 2.37 (60) 2.87 (73) 2.87 (73) 3.83 (97) 1.37 (35) 1.87 (47) 1.37 (35) 1.87 (47) 1.87 (47) 100765006 100765017 100765016 100765008 100765018

• Stainless steel type 304 Special adapters available upon request High conductance adapter A CB Step adapter, ISO-Mf flange to ISO-Kf flange in./(mm) Flange Size (ISO) A B Part Number NW 63 to NW 40 NW 63 to NW 50 NW 80 to NW 40 NW 80 to NW 50 NW 100 to NW 40 NW 100 to NW 50 1.77 (45) 1.77 (45) 1.77 (45) 1.77 (45) 1.77 (45) 1.77 (45) 1.37 (35) 1.87 (47) 1.37 (35) 1.87 (47) 1.37 (35) 1.87 (47) 100762606 100762617 100762616 100762608 100762620 100762618
• Stainless steel type 304
• With O-r ing g roove
• Special adapters a vailable upon request
• Short o verall length A B

90° elbow, Smooth radius in./(mm) Flange Size (ISO) A Part Number NW 63 NW 80 NW 100 NW 160 4.00 (102) 4.74 (120) 6.24 (158) 9.24 (235) 100764606 100764608 100764610 100764616

• Stainless steel type 304
• ISO-MF flanges same siz e both por ts A A 45° elbow, Smooth radius in./(mm) Flange Size (ISO) A Part Number NW 63 NW 80 NW 100 NW 160 3.25 (83) 3.93 (100) 5.03 (128) 5.49 (139) 100764406 100764408 100764410 100764416
• Stainless steel type 304
• ISO-MF flanges same siz e both por ts A

tee in./(mm) Flange Size (ISO) A B Part Number NW 63 NW 80 NW 100 NW 160 NW 200 NW 250 NW 320 3.46 (88) 3.86 (98) 4.25 (108) 5.43 (138) 6.61 (168) 8.19 (208) 12.60 (320) 6.92 (176) 7.72 (196) 8.50 (216) 10.86 (276) 13.22 (336) 16.38 (416) 25.20 (640) 100761406 100761408 100761410 100761416 100761420 100761425 100761432

• Stainless steel type 304
• ISO-MF flanges same siz e all por ts
• Standard flange f ace to center line dimensions
• Larger siz es a vailable on request B A A Cross in./(mm) Flange Size (ISO) A B Part Number NW 63 NW 80 NW 100 NW 160 NW 200 NW 250 NW 320 3.46 (88) 3.86 (98) 4.25 (108) 5.43 (138) 6.61 (168) 8.19 (208) 12.60 (320) 6.92 (176) 7.72 (196) 8.50 (216) 10.86 (276) 13.22 (336) 16.38 (416) 25.20 (640) 100761506 100761508 100761510 100761516 100761520 100761525 100761532 A B
• Stainless steel type 304
• ISO-MF flanges same siz e all por ts
• Standard flange f ace to center line dimensions
• Larger siz es a vailable on request

Straight Section in./(mm) Flange Size (ISO) A Part Number NW 63 NW 63 NW 80 NW 80 NW 100 NW 100 NW 160 NW 160 NW 200 NW 200 NW 250 NW 250 6.92 (176) 4.18 (106) 7.72 (196) 4.18 (106) 8.50 (216) 4.18 (106) 10.86 (276) 4.18 (106) 13.22 (336) 4.18 (106) 16.38 (416) 4.18 (106) 100761706 100761707 100761708 100761709 100761710 100761711 100761716 100761717 100761720 100761721 100761725 100761726

• Stainless steel type 304
• Special lengths to order
• MF type flanges A tubing in./(mm) Flange Size (ISO) A B Part Number NW 63 NW 80 NW 100 NW 100 NW 160 NW 200 NW 250 2½'' 3'' 4'' 4'' 6'' 8'' 10'' .065'' .065'' .065'' .083'' .083'' .120'' .125'' 100764506 100764508 100764510 100764511 100764516 100764520 100764525
• Stainless steel type 304
• Tube ends deb urred, cleaned and capped
• Price per f oot length of tube

Braided Metal Hose in./(mm) Flange Size (ISO) A Static Bend Radius Part Number NW 63 NW 63 NW 63 NW 80 NW 80 NW 80 NW 100 NW 100 NW 100 10.74 (273) 20.74 (527) 40.74 (1035) 10.74 (273) 20.74 (527) 40.74 (1035) 10.74 (273) 20.74 (527) 40.74 (1035) 7.50 (191) 7.50 (191) 7.50 (191) 8.75 (222) 8.75 (222) 8.75 (222) 10.00 (254) 10.00 (254) 10.00 (254) 100766006 100766106 100766206 100766008 100766108 100766208 100766010 100766110 100766210

• Ideal for rough pumping line Stainless steel Flexible, yet resistant to contraction A Bellows, Section in./(mm) Flange Size (ISO) A B Part Number NW 63 NW 80 NW 100 NW 160 NW 200 NW 250 5.90 (150) 5.90 (150) 5.90 (150) 7.90 (200) 9.80 (250) 11.80 (300) 4.50 (115) 4.50 (115) 4.50 (115) 5.70 (145) 6.90 (175) 8.10 (205) 100763506 100763508 100763510 100763516 100763520 100763525
• CAUTION: Flanges must be supported to prevent collapsing when subjected to vacuum Stainless steel Formed bellows Bellows buttwelded Thin wall Flexible A B Free Length Maximum Compression

Metal Hose, thin Wall in./(mm) Flange Size (ISO) A Part Number NW 63 NW 63 NW 63 NW 80 NW 80 NW 80 NW 100 NW 100 9.84 (250) 19.69 (500) 39.40 (1000) 9.84 (250) 19.69 (500) 39.40 (1000) 9.84 (250) 19.69 (500) 100763806 100763906 100764006 100763808 100763908 100764008 100763810 100763910

• CAUTION: Flanges m ust be supported to prevent collapsing when subjected to v acuum
• Unsheathed Stainless steel
• Formed metal
• Flexible
• Hose b uttwelded A flange Protector Cap in./(mm) Flange Size (ISO) Part Number NW 63 NW NW 100 NW 160 100760006 100760008 100760010 100005788
• Protects flange f aces
• Plastic Metal Hose, thick Wall in./(mm) Flange Size (ISO) Static Bend Radius A Part Number NW 63 NW 63 NW 80 NW 80 NW 100 NW 100 NW 160 NW 160 NW 200 NW 200 NW 250 NW 250 6½'' 6½'' 7'' 7'' 11'' 11'' 17'' 17'' 18'' 18'' 24'' 24'' 19.69 (500) 39.40 (1000) 19.69 (500) 39.40 (1000) 19.69 (500) 39.40 (1000) 19.69 (500) 39.40 (1000) 19.69 (500) 39.40 (1000) 19.69 (500) 39.40 (1000) 100763606 100763706 100763608 100763708 100763610 100763710 100763616 100763716 100763620 100763720 100763625 100763725 A CAUTION: Flanges m ust be supported to prevent collapsing when subjected to v acuum
• Unsheathed
• Stainless steel
• Formed metal
• Special lengths on request
• Hose b uttwelded

100005788 Flange Protector Cap, NW 160

Flange Protector Cap, NW 63 100760008 Flange Protector Cap, NW 80 100760010 Flange Protector Cap, NW 100 100760106 Flange, Blank-Off, NW 63 100760108 Flange, Blank-Off, NW 80 100760110 Flange, Blank-Off, NW 100 100760116 Flange, Blank-Off, NW 160 100760120 Flange, Blank-Off, NW 200 100760125 Flange, Blank-Off, NW 250 100760132 Flange, Blank-Off, NW 320 100760140 Flange, Blank-Off, NW 400 100760150 Flange, Blank-Off, NW 500 100760206 Flange, Bored, NW 63 100760208 Flange, Bored, NW 80 100760210 Flange, Bored, NW 100 100760216 Flange, Bored, NW 160 100760220 Flange, Bored, NW 200 100760225 Flange, Bored, NW 250 100760232 Flange, Bored, NW 320 100760240 Flange, Bored, NW 400 100760250 Flange, Bored, NW 500 100760306 Flange, Bolted, Blank, NW 63 100760308 Flange, Bolted, Blank, NW 80 100760310 Flange, Bolted, Blank, NW 100 100760316 Flange, Bolted, Blank, NW 160 100760320 Flange, Bolted, Blank, NW 200 100760325 Flange, Bolted, Blank, NW 250 100760332 Flange, Bolted, Blank, NW 320 100760340 Flange, Bolted, Blank, NW 400 100760350 Flange, Bolted, Blank, NW 500 100760363 Flange, Bolted, Blank, NW 630 100760406 Flange, Long Weld Stub, NW 63 100760408 Flange, Long Weld Stub, NW 80 100760410 Flange, Long Weld Stub, NW 100, .065'' wall 100760411 Flange, Long Weld Stub, NW 100, .083'' wall 100760416 Flange, Long Weld Stub, NW 160 100760420 Flange, Long Weld Stub, NW 200 100760425 Flange, Long Weld Stub, NW 250 100760432 Flange, Long Weld Stub, NW 320 100760440 Flange, Long Weld Stub, NW 400 100760450 Flange, Long Weld Stub, NW 500 100760506 Seal, Centering Ring Assy, NW 63, SS/Viton 100760508 Seal, Centering Ring Assy, NW 80, SS/Viton 100760510 Seal, Centering Ring Assy, NW 100, SS/Viton 100760516 Seal, Centering Ring Assy, NW 160, SS/Viton 100760520 Seal, Centering Ring Assy, NW 200, SS/Viton 100760525 Seal, Centering Ring Assy, NW 250, SS/Viton 100760532 Seal, Centering Ring Assy, NW 320, SS/Viton 100760540 Seal, Centering Ring Assy, NW 400, SS/Viton 100760550 Seal, Centering Ring Assy, NW 500, SS/Viton 100760563 Seal, Centering Ring Assy, NW 630, SS/Viton 100760606 Seal, Centering Ring Assy, NW 63, Aluminum/Viton 100760608 Seal, Centering Ring Assy, NW 80, Aluminum/Viton 100760610 Seal, Centering Ring Assy, NW 100, Aluminum/Viton

100760616 Seal, Centering Ring Assy, NW 160, Aluminum/Viton

Seal, Centering Ring Assy, NW 200, Aluminum/Viton 100760625 Seal, Centering Ring Assy, NW 250, Aluminum/Viton 100760632 Seal, Centering Ring Assy, NW 320, Aluminum/Viton 100760640 Seal, Centering Ring Assy, NW 400, Aluminum/Viton 100760650 Seal, Centering Ring Assy, NW 500, Aluminum/Viton 100760663 Seal, Centering Ring Assy, NW 630, Aluminum/Viton 100760706 Seal, Centering Ring Assy, NW 63, Aluminum/Buna-N 100760708 Seal, Centering Ring Assy, NW 80, Aluminum/Buna-N

100760710 Seal, Centering Ring Assy, NW 100, Aluminum/Buna-N

100760716 Seal, Centering Ring Assy, NW 160, Aluminum /Buna-N

Seal, Centering Ring Assy, NW 200, Aluminum/Buna-N 100760725 Seal, Centering Ring Assy, NW 250, Aluminum/Buna-N 100760732 Seal, Centering Ring Assy, NW 320, Aluminum/Buna-N

100760740 Seal, Centering Ring Assy, NW 400, Aluminum/Buna-N

100760750 Seal, Centering Ring Assy, NW 500, Aluminum/Buna-N

100760763 Seal, Centering Ring Assy, NW 630, Aluminum/Buna-N

Single Claw Clamp, NW 63, Aluminum 100761006 Single Claw Clamp, NW 80, Aluminum 100761006 Single Claw Clamp, NW 100, Aluminum 100761016 Single Claw Clamp, NW 160, Aluminum 100761016 Single Claw Clamp, NW 200, Aluminum 100761016 Single Claw Clamp, NW 250, Aluminum 100761032 Single Claw Clamp, NW 320, Aluminum 100761040 Single Claw Clamp, NW 400, Aluminum 100761040 Single Claw Clamp, NW 500, Aluminum 100761106 Double Claw Clamp, NW 63, Aluminum 100761106 Double Claw Clamp, NW 80, Aluminum 100761106 Double Claw Clamp, NW 100, Aluminum 100761116 Double Claw Clamp, NW 160, Aluminum 100761116 Double Claw Clamp, NW 200, Aluminum 100761116 Double Claw Clamp, NW 250, Aluminum 100761132 Double Claw Clamp, NW 320, Aluminum 100761140 Double Claw Clamp, NW 400, Aluminum 100761140 Double Claw Clamp, NW 500, Aluminum 100761206 Bolt and Nut Set, NW 63, Stainless Steel 100761208 Bolt and Nut Set, NW 80, Stainless Steel 100761208 Bolt and Nut Set, NW 100, Stainless Steel 100761216 Bolt and Nut Set, NW 160, Stainless Steel 100761220 Bolt and Nut Set, NW 200, Stainless Steel 100761220 Bolt and Nut Set, NW 250, Stainless Steel 100761232 Bolt and Nut Set, NW 320, Stainless Steel 100761240 Bolt and Nut Set, NW 400, Stainless Steel 100761240 Bolt and Nut Set, NW 500, Stainless Steel 100761263 Bolt and Nut Set, NW 630, Stainless Steel 100761306 Bolt Set, for tapped bolted flanges, NW 63 100761308 Bolt Set, for tapped bolted flanges, NW 80 100761308 Bolt Set, for tapped bolted flanges, NW 100 100761316 Bolt Set, for tapped bolted flanges, NW 160 100761320 Bolt Set, for tapped bolted flanges, NW 200 100761320 Bolt Set, for tapped bolted flanges, NW 250 100761332 Bolt Set, for tapped bolted flanges, NW 320 100761340 Bolt Set, for tapped bolted flanges, NW 400 100761340 Bolt Set, for tapped bolted flanges, NW 500 100761363 Bolt Set, for tapped bolted flanges, NW 630 100761406 Tee, NW 63, Stainless Steel 100761408 Tee, NW 80, Stainless Steel 100761410 Tee, NW 100, Stainless Steel 100761416 Tee, NW 160, Stainless Steel 100761420 Tee, NW 200, Stainless Steel 100761425 Tee, NW 250, Stainless Steel 100761432 Tee, NW 320, Stainless Steel 100761506 Cross, NW 63, Stainless Steel

100761508 Cross, NW 80, Stainless Steel

Cross, NW 100, Stainless Steel 100761516 Cross, NW 160, Stainless Steel 100761520 Cross, NW 200, Stainless Steel 100761525 Cross, NW 250, Stainless Steel 100761532 Cross, NW 320, Stainless Steel 100761706 Straight Section, NW 63, 6.92'' length 100761707 Straight Section, NW 63, 4.18'' length 100761708 Straight Section, NW 80, 7.72'' length 100761709 Straight Section, NW 80, 4.18'' length 100761710 Straight Section, NW 100, 8.5'' length 100761711 Straight Section, NW 100, 4.18'' length 100761716 Straight Section, NW 160, 10.86'' length 100761717 Straight Section, NW 160, 4.18'' length 100761720 Straight Section, NW 200, 13.22'' length 100761721 Straight Section, NW 200, 4.18'' length 100761725 Straight Section, NW 250, 16.38'' length 100761726 Straight Section, NW 250, 4.18'' length

MKS Instruments, Inc. Global Headquar ters

2 Tech Drive, Suite 201

Andover, MA 01810 Tel: 978.645.5500 T el: 800.227.8766 (in USA) Web: www.mksinst.com MKS Instruments, Inc. Integrated Pr ocess Solutions

5330 Sterling Drive

Boulder, CO 80301 Tel: 303.449.9861 T el: 800.345.1967 (in USA) Series 76 ISO-Universal Flanges - 12/16 © 2008 MKS Instruments, Inc. All rights reserved. MKS products provided subject to the US Export Regulations. Diversion or transfer contrary to US law is prohibited. Specifications are subject to change without notice. mksinst™ is a trademark of MKS Instruments, Inc., Viton ® is a registered trademark of E.I. DuPont de Nemours & Co., Inc.

100761906 Seal, Replacement O-Ring, NW 63, Buna-N

Seal, Replacement O-Ring, NW 80, Buna-N 100761910 Seal, Replacement O-Ring, NW 100, Buna-N 100761916 Seal, Replacement O-Ring, NW 160, Buna-N 100761920 Seal, Replacement O-Ring, NW 200, Buna-N 100761925 Seal, Replacement O-Ring, NW 250, Buna-N 100761932 Seal, Replacement O-Ring, NW 320, Buna-N 100761940 Seal, Replacement O-Ring, NW 400, Buna-N 100761950 Seal, Replacement O-Ring, NW 500, Buna-N 100761963 Seal, Replacement O-Ring, NW 630, Buna-N 100762006 Seal, Replacement O-Ring, NW 63, Viton 100762008 Seal, Replacement O-Ring, NW 80, Viton 100762010 Seal, Replacement O-Ring, NW 100, Viton 100762016 Seal, Replacement O-Ring, NW 160, Viton 100762020 Seal, Replacement O-Ring, NW 200, Viton 100762025 Seal, Replacement O-Ring, NW 250, Viton 100762032 Seal, Replacement O-Ring, NW 320, Viton 100762040 Seal, Replacement O-Ring, NW 400, Viton 100762050 Seal, Replacement O-Ring, NW 500, Viton 100762063 Seal, Replacement O-Ring, NW 630, Viton 100762406 Flange, Bolted, Bored, NW 63 100762408 Flange, Bolted, Bored, NW 80 100762410 Flange, Bolted, Bored, NW 100 100762416 Flange, Bolted, Bored, NW 160 100762420 Flange, Bolted, Bored, NW 200 100762425 Flange, Bolted, Bored, NW 250 100762432 Flange, Bolted, Bored, NW 320 100762440 Flange, Bolted, Bored, NW 400 100762450 Flange, Bolted, Bored, NW 500 100762463 Flange, Bolted, Bored, NW 630 100762506 Step Reducer, NW 63 to NW 80 100762508 Step Reducer, NW 80 to NW 100 100762510 Step Reducer, NW 100 to NW 160 100762517 Step Reducer, NW 63 to NW 100 100762527 Step Reducer, NW 63 to NW 160 100762606 Step Adapter, NW 63 to NW 40, w/Groove 100762608 Step Adapter, NW 80 to NW 50, w/Groove 100762616 Step Adapter, NW 80 to NW 40, w/Groove 100762617 Step Adapter, NW 63 to NW 50, w/Groove 100762618 Step Adapter, NW 100 to NW 50, w/Groove 100762620 Step Adapter, NW 100 to NW 40, w/Groove 100762706 Flange, Bolted, Weld Stub, NW 63 100762708 Flange, Bolted, Weld Stub, NW 80 100762710 Flange, Bolted, Weld Stub, NW 100 100762716 Flange, Bolted, Weld Stub, NW 160 100762720 Flange, Bolted, Weld Stub, NW 200 100762725 Flange, Bolted, Weld Stub, NW 250 100762732 Flange, Bolted, Weld Stub, NW 320 100762740 Flange, Bolted, Weld Stub, NW 400 100762750 Flange, Bolted, Weld Stub, NW 500 100762763 Flange, Bolted, Weld Stub, NW 630 100762806 Rotatable, Bolted Ring Assy, NW 63 100762808 Rotatable, Bolted Ring Assy, NW 80 100762810 Rotatable, Bolted Ring Assy, NW 100 100762816 Rotatable, Bolted Ring Assy, NW 160 100762820 Rotatable, Bolted Ring Assy, NW 200 100762825 Rotatable, Bolted Ring Assy, NW 250 100762832 Rotatable, Bolted Ring Assy, NW 320 100762840 Rotatable, Bolted Ring Assy, NW 400 100762850 Rotatable, Bolted Ring Assy, NW 500 100762906 Retaining Ring, NW 63 100762908 Retaining Ring, NW 80 100762910 Retaining Ring, NW 100 100762916 Retaining Ring, NW 160 100762920 Retaining Ring, NW 200 100762925 Retaining Ring, NW 250 100762932 Retaining Ring, NW 320

100762940 Retaining Ring, NW 400

Retaining Ring, NW 500 100763506 Bellows, NW 63, 5.9'' length 100763508 Bellows, NW 80, 5.9'' length 100763510 Bellows, NW 100, 5.9'' length 100763516 Bellows, NW 160, 7.9'' length 100763520 Bellows, NW 200, 9.8'' length 100763525 Bellows, NW 250, 11.8'' length 100763606 Thick Wall Metal Hose, NW 63, 19.69'' length 100763608 Thick Wall Metal Hose, NW 80, 19.69'' length 100763610 Thick Wall Metal Hose, NW 100, 19.69'' length 100763616 Thick Wall Metal Hose, NW 160, 19.69'' length 100763620 Thick Wall Metal Hose, NW 200, 19.69'' length 100763625 Thick Wall Metal Hose, NW 250, 19.69'' length 100763706 Thick Wall Metal Hose, NW 63, 39.40'' length 100763708 Thick Wall Metal Hose, NW 80, 39.40'' length 100763710 Thick Wall Metal Hose, NW 100, 39.40'' length 100763716 Thick Wall Metal Hose, NW 160, 39.40'' length 100763720 Thick Wall Metal Hose, NW 200, 39.40'' length 100763725 Thick Wall Metal Hose, NW 250, 39.40'' length 100763806 Thin Wall Metal Hose, NW 63, 9.84'' length 100763808 Thin Wall Metal Hose, NW 80, 9.84'' length 100763810 Thin Wall Metal Hose, NW 100, 9.84'' length 100763906 Thin Wall Metal Hose, NW 63, 19.69'' length 100763908 Thin Wall Metal Hose, NW 80, 19.69'' length 100763910 Thin Wall Metal Hose, NW 100, 19.69'' length 100764006 Thin Wall Metal Hose, NW 63, 39.40'' length 100764008 Thin Wall Metal Hose, NW 80, 39.40'' length 100764406 45° Elbow, Smooth Radius, NW 63 100764408 45° Elbow, Smooth Radius, NW 80 100764410 45° Elbow, Smooth Radius, NW 100 100764416 45° Elbow, Smooth Radius, NW 160 100764506 Tubing (price per 10 foot), NW 63, 0.065 wall, Stainless Steel 100764508 Tubing, (price per 10 foot) NW 80, 0.065 wall, Stainless Steel 100764510 Tubing, (price per 10 foot) NW 100, 0.065 wall, Stainless Steel 100764511 Tubing, (price per 10 foot) NW 100, 0.083 wall, Stainless Steel 100764516 Tubing, (price per 10 foot) NW 160, 0.083 wall, Stainless Steel 100764520 Tubing, (price per 10 foot) NW 200, 0.120 wall Stainless Steel 100764525 Tubing, (price per 10 foot) NW 250, 0.125 wall, Stainless Steel 100764606 90° Elbow, Smooth Radius, NW 63 100764608 90° Elbow, Smooth Radius, NW 80 100764610 90° Elbow, Smooth Radius, NW 100 100764616 90° Elbow, Smooth Radius, NW 160 100764906 Conic Reducer, NW 63 to NW 80 100764908 Conic Reducer, NW 80 to NW 100 100764910 Conic Reducer, NW 100 to NW 160 100764917 Conic Reducer, NW 63 to NW 100 100764927 Conic Reducer, NW 80 to NW 160 100765006 Conic Adapter, NW 63 to NW 40 100765008 Conic Adapter, NW 80 to NW 50 100765016 Conic Adapter, NW 80 to NW 40 100765017 Conic Adapter, NW 63 to NW 50 100765018 Conic Adapter, NW 100 to NW 50 100766006 Braided Metal Hose, NW 63, 10.74'' length 100766008 Braided Metal Hose, NW 80, 10.74'' length 100766010 Braided Metal Hose, NW 100, 10.74'' length 100766106 Braided Metal Hose, NW 63, 20.74'' length 100766108 Braided Metal Hose, NW 80, 20.74'' length 100766110 Braided Metal Hose, NW 100, 20.74'' length 100766206 Braided Metal Hose, NW 63, 40.74'' length 100766208 Braided Metal Hose, NW 80, 40.74'' length 100766210 Braided Metal Hose, NW 100, 40.74'' length 100937685 Seal, Overpressure Assembly, NW 160 100938657 Seal, Overpressure Assembly, NW 80 100938658 Seal, Overpressure Assembly, NW 100