082821

082821 KEITHLEY | Alldatasheet

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Technical content

The new 2601B-PULSE System SourceMeter 10 µs Pulser/SMU Instrument with PulseMeter™ technology is an industry-leading high current/high speed pulser with measure plus the full functionality of a traditional SMU. This new pulser offers leading 10 A current pulse output at 10 V with a pulse width minimum of 10 µs, perfect for testing vertical cavity surface emitting lasers (VCSEL) used in LIDAR and facial recognition, LEDs for lighting and displays, semiconductor device characterization, surge protection testing, and so much more. The pulser’s built-in dual 1 Megasample/second (MS/s), 18-bit digitizers make it possible to acquire both pulse current and voltage waveforms simultaneously without the need to use a separate instrument. The 2601B-PULSE is a powerful solution that significantly boosts productivity in applications ranging from benchtop characterization through highly automated pulsed I-V production test. For automated system applications, the 2601B-PULSE’s Test Script Processor (TSP ®) runs complete test programs from inside the instrument for industry-best throughput. In larger, multi-channel applications, the Keithley TSP-Link ® technology works together with TSP technology to enable high-speed, pulser/SMU-per-pin parallel testing. Because the 2601B-PULSE offers full isolation that does not require a mainframe, it can be easily reconfigured and re-deployed as your test applications evolve. Key Features

• Industry leading 10 A @ 10 V, 10 microsecond pulse output
• No tuning required; works with inductive loads up to 3 μH
• Dual 1 Megasample/second digitizers for high speed I/V pulse measurements (pulser function only)
• DC capability up to ±40 V @ ±1.0 A, 40 Watt
• TSP technology embeds complete test programs inside the instrument for best-in-class system-level throughput
• TSP-Link expansion technology for multi-channel parallel test without a mainframe
• USB 2.0, LXI Core, GPIB, RS-232, and digital I/O interfaces
• Supported in the Keithley KickStart non-programming software tool 2601B-PULSE System SourceMeter 10 µs Pulser/SMU Instrument Datasheet SMU (I or V Source) Full DC Operation Pulse Operation: Pulse Width >150 µs, typical Dual Integrating ADCs: One each for V and I PULSER (I Source only) DC Bias Pulse Operation: 10 µs ≤ Pulse Width ≤ 500 µs Dual 1 MS/s High-speed ADCs: One each for V and I External Interlock/Connector box included with 2601B-PULSE

TEK.COM Pulsed Testing for Device Characterization Testing real device operation and minimizing the heating effects with on-wafer testing just got easier with the 2601B-PULSE SMU. Thermal management is critical during the testing of many devices, especially those at the semiconductor wafer level, such as VCSELs, laser diodes, and LEDs. Pulsed I-V testing minimizes the heating effects of the current in the device, especially if tested at the wafer level when devices have no temperature control circuitry. Testing with DC would either change their characteristics, or at worst, destroy them. Later on, in production, when they have been assembled into modules with temperature controls, the devices can be DC tested and the results compared to those from the pulsed test. Some devices will pass a DC test and fail a pulsed test due to device characteristic changes resulting from temperature shift. The 10 V / 10 A / 10 µs output of the 2601B-PULSE ensures that you get a proper output pulse into your device and an accurate measurement when it is required. No Tuning Required When outputting current pulses, cabling and inductance can be a problem. Inductance can have a limiting effect and could even be damaging. Quite often, the inductance can be different from device to device, even when testing laser diodes on a wafer. The effect of inductance on a current source is that inductance resists changes in current. This can cause the current source to increase the output voltage. The result is overshoot and ringing as the pulse settles. This may not be acceptable in your test. Some solutions require tuning to compensate for these behaviors, which can be time consuming. The 2601B-PULSE’s control loop system eliminates the need to tune for load changes up to 3 μH so that your pulse has no overshoot and ringing when outputting pulses from 10 μs up to 500 μs at a current up to 10 amps. This ensures a fast rise time, so your devices are sourced with a current pulse to properly characterize the device or circuit. The images on the next page show the performance of the 2601B-PULSE with PulseMeter technology compared to a competitive modular SMU outputting a 5 A, 50 μs pulse on a device with an impedance of 3 µH. Pulse output performance of the 2610B-PULSE SMU.

TEK.COM 2601B-PULSE System SourceMeter 10 µs Pulser/SMU Instrument Unmatched Throughput for Automated Test with TSP Technology For test applications that demand the highest levels of automation and throughput, the 2601B-PULSE’s TSP technology delivers industry-best performance. TSP technology goes far beyond traditional test command sequencers — it fully embeds, then executes, complete test programs from within the SMU instrument itself. This virtually eliminates the time- consuming bus communications to and from the PC controller, and thus dramatically improves overall test times. Typical pulse output from a competitive SMU with overshoot and 6.47 μs rise time. 2601B-PULSE output without overshoot and 1.4 µs rise time.

• Conditional branching
• Advanced calculations and flow control
• Variables
• Pass/Fail test
• Prober/Handler control
• Datalogging/ Formatting Test Script DUT TSP technology executes complete test programs from the non-volatile memory of the 2601B-PULSE. SMU1 <500ns SMU2 SMU3 SMU4 All channels in the TSP-Link system are synchronized to under 500 ns.

TEK.COM SMU-Per-Pin Parallel Testing with TSP-Link Technology TSP-Link is a channel expansion bus that enables multiple 2601B-PULSE SMUs to be inter-connected and function as a single, tightly-synchronized, multi-channel system. The 2601B-PULSE’s TSP-Link technology works together with its TSP technology to enable high-speed, SMU-per- pin parallel testing. Unlike other high-speed solutions, such as large ATE systems, the 2601B-PULSE achieves parallel test performance without the cost or burden of a mainframe. The TSP-Link based system also enables superior flexibility, allowing for quick and easy system re-configuration as test requirements change. TSP-Link uses a standard 100BASE-T ethernet cable, enabling you to connect not only multiple 2601B-PULSE SMUs, but other TSP-based instruments in a master-subordinate configuration that operates as one integrated system. TSP-based instruments include the Keithley Graphical SourceMeter SMUs (2450, 2460, 2461, 2470), other Series 2600B System SourceMeter SMU instruments, the Keithley DMM7510 and DMM6500 Graphical Sampling Multimeters, and the Keithley DMM/Switch instruments, such as the Series 3700A Switch/Multimeter system and DAQ6510. The TSP-Link expansion bus supports up to 32 TSP-Link nodes, making it easy to scale a system to fit an application’s particular requirements. Instrument Control Start-up Software KickStart instrument control/start-up software enables users to start making measurements in minutes without programming. In most cases, users merely need to make some quick measurements, graph the data, and store the data to disk for later analysis in software environments such as Microsoft Excel. KickStart offers:

• Configure and control up to four SMU instruments for DC or Pulsed I-V test in either the same app, same project, or a combination of the two.
• Create tests by mixing any of these SMU instruments: 2400 Graphical Series, 2400 Standard Series (DC only), 2600B Series, 2651A, 2657A, and

6430 SourceMeter® SMU (DC only)

instruments.

• Differentiate SMU instrument channels and their measurement data using labels that are relevant to your device or module.
• Native X-Y graphing, panning, and zooming; screenshot capturing of graphs.
• Spreadsheet/tabular viewing of data; export data for further analysis.
• Annotating of tests; save test setups.
• GPIB, USB 2.0, Ethernet compliance. KickStart start-up software lets users be ready to take measurements in minutes. Test 1 running To Device 1 GPIB, USB, or Ethernet TSP-Link Test 2 running To Device 2 Test 3 running To Device 3 SMU-per-pin parallel testing using TSP and TSP-Link improves test throughput and lowers the cost of test.

TEK.COM 2601B-PULSE System SourceMeter 10 µs Pulser/SMU Instrument Typical Applications I-V functional test and characterization of a wide range of devices, including:

• Optoelectronic devices such as vertical cavity surface- emitting lasers (VCSELs), laser diodes, light emitting diodes (LEDs), high brightness LEDs (HBLEDs), displays
• Discrete and passive components including sensors, disk drive heads, metal oxide varistors (MOVs), diodes, Zener diodes, sensors, capacitors, thermistors
• Simple ICs – Optos, drivers, switches, sensors, converters, regulators
• Integrated devices – small scale integrated (SSI) and large scale integrated (LSI) – Analog ICs – Radio frequency integrated circuits (RFICs) – Application specific integrated circuits (ASICs) – System on a chip (SOC) devices
• Wafer level reliability – NBTI, TDDB, HCI, electromigration
• Batteries
• Failure Analysis
• And more... Comprehensive Built-in Connectivity Rear panel access to rear-input connectors, remote control interfaces (GPIB, USB 2.0, and LXI/ethernet), D-sub 25-pin digital I/O port (for internal/external trigger signals and handler control), and TSP-Link connectors make it simple to configure multiple instrument test solutions and eliminate the need to invest in additional adapter accessories. 2601-PULSE rear panel. The 2601B-P-INT interlock / connector box interconnects both the SMU and Pulser functions and converts both of the Phoenix connectors on the rear panel to standard BNC connectors. The interlock/connector box also provides an optional safety interlock for use when testing LASER devices. 2601B-PULSE Interlock / Connector (front/rear), included with 2601B-PULSE

TEK.COM Specifications Specification Conditions This document contains specifications and supplemental information for the 2601B-PULSE System SourceMeter 10 µs Pulser/SMU Instrument. Specifications are the standards against which the 2601B-PULSE is tested. Upon leaving the factory, the 2601B-PULSE meets these specifications. Supplemental and typical values are non- warranted, apply at 23 °C, and are provided solely as useful information. Accuracy specifications are applicable for both normal and High Capacitance modes. The source and measurement accuracies are specified at the terminals of the Pulser/SMU instrument under the following conditions: 1. 18 °C to 28 °C, <70% relative humidity 2. After 2 hour warm-up 3. Speed normal (1 NPLC) 4. A/D auto-zero enabled 5. Remote sense operation only or properly zeroed local operation 6. Calibration period = 1 year Pulser feature specification accuracies are specified at the terminals of the instrument under these conditions:

• 10 μs aperture minimum.
• Remote sense operation only.
• Total cable and DUT inductance of ≤3 μH, measured at 100 kHz Pulser Feature Specifications Pulser Source Specifications 1, 2 Current Pulse Termination The current pulse will terminate within 3 µs after terminal voltages exceed a bipolar, programmable abort threshold. Separate abort thresholds can be programmed for the sense terminals and the source terminals. The sense threshold can be set from 5% to 200% of the selected Measure Voltage range. The source threshold can be set from 2 V to 40 V, independent of range. The source threshold ignores normal transients during pulse rise and fall time. Programmable threshold uncertainty is ±5 %. Pulser Current Source Specifications Current Programming Accuracy Range Programming Resolution Accuracy (1 Year) ±(% rdg. + amps) Typical Noise (RMS) 10 kHz–1 MHz 1 A 100 µA 0.17% + 2.0 mA 380 µA 5 A 100 µA 0.17% + 2.5 mA 1.4 mA 10 A 100 µA 0.22% + 3.0 mA 3.1 mA3 Temperature Coefficient (0°–18 °C and 28°–50 °C) ± (0.15 × accuracy specification)/°C. Pulsing Limits 4, 5 ±10 A @ ± 10 V pulse, 3% duty cycle ±3 A @ ± 10 V pulse, 10% duty cycle ±1.0 A @ ± 10 V pulse, 30% duty cycle ±500 mA @ ± 10 V pulse, 60% duty cycle 6 ±250 mA @ ± 10 V continuous Current Regulation Line: 0.01% of range. Load: ±100 µA. Overshoot < ±0.5% of step size (typical). NOTES 1. Full power source operation regardless of load to 28 °C ambient. Above 28 °C and/or power sink operation, refer to “Operating Boundaries” in the 2601B-PULSE Reference Manual for additional power derating information. 2. Source valid for steady state output values. See settling time specification defining the steady state output requirement. 3. For pulses longer than 100 μs, there can be a thermal drift of up to 0.004% of source value. This drift is already included in the overall source accuracy specifications. 4. Thermally limited in sink mode (quadrants 2 and 4) and ambient temperatures above 28 °C. See pulse power quadrant diagram for more information. 5. Duty cyles listed can only be achieved if bias current is ≤10 mA. 6. Due to Pulse Width Programming, Minimum t off.

TEK.COM 2601B-PULSE System SourceMeter 10 µs Pulser/SMU Instrument Additional Pulser Source Specifications Rise Time (10% to 90%) <1.7 µs for a full-scale step of current into any load voltage (10 V maximum). Pulse Current and Duty Cycle Maximum duty cycle is given by: 0.3125 – |Ibias| * 100% For Ibias ≤ 10 mA: ±10 A ±5 A ±3 A ±1 A ±500 mA ±250 mA 0 A 3 % Pulse Current Max. Duty Cycle 10 % 30 % 60 % 100 % Current Source Output Settling Time Time required to reach specified accuracy after the start of the pulse. Current Range Settling Time

1 A < 9 µs (Vload ≤ 10 V)

5 A < 9 µs (Vload ≤ 10 V)

10 A < 9 µs (Vload ≤ 10 V)

Output Off Normal State Electrical short (< 1 Ω) between HI and LO. Maximum DC current from external sources during OUTPUT OFF state must be limited to <1 A. Remote Voltage Sense Maximum voltage between HI and SENSE HI = ±30 V. Maximum voltage between LO and SENSE LO = ±30 V. Over Temperature Protection Internally sensed temperature overload puts unit in standby mode. Safety Interlock Hardware interlock (available, optional).

TEK.COM Bias Current Source Specifications Current Programming Accuracy Range Programming Resolution Accuracy (1 Year) ±(% rdg. + amps) Typical Noise (RMS)

0.1 Hz–100 kHz

250 mA 10 µA 0.17% + 1 mA 200 µA Temperature Coefficient (0°–18 °C and 28°–50 °C) ± (0.15 × accuracy specification)/°C. Pulse Width Programming Resolution 1 µs. Pulse Width Programming Maximum 500 µs. Pulse Width Programming Minimum 10 µs. Pulse Width Programming Accuracy ±200 ns. Pulse Width Jitter 110 ns (typical). Pulse Period Jitter 2 µs (typical). Pulse Width Programming, Minimum toff 16 μs. Pulser Feature Measure Specifications Voltage Measurement Specifications Voltage Measurement Accuracy Range Display Resolution Accuracy (1 Year) 23 °C ± 5 °C ± (% rdg. + volts)1 5 V 1 µV 0.05% + 2.5 mV 10 V 10 µV 0.05% + 4 mV Voltage Measurement Time required to reach specified accuracy after a source level command is processed on a fixed range. Settling Time Voltage Range Settling Time (typical)

5 V and 10 V < 9 µs

Temperature Coefficient (0°–18 °C and 28°–50 °C) ± (0.15 × accuracy specification)/C.

TEK.COM 2601B-PULSE System SourceMeter 10 µs Pulser/SMU Instrument Current Measurement Specifications Current Measurement Accuracy Range Display Resolution Accuracy (1 Year) 23 °C ± 5 °C ± (% rdg. + amps)1 1 A 1 µA 0.12% + 0.5 mA 5 A 1 µA 0.12% + 1 mA 10 A 10 µA 0.12% + 1 mA Current Measure Settling Time Time required to reach specified accuracy of after source level command is processed on a fixed range. Current Range: 1 A – 10 A. Settling Time: < 9 µs (typical). Temperature Coefficient (0°–18 °C and 28°–50 °C) ± (0.15 × accuracy specification)/°C. Additional Pulser Characteristics Maximum Load Inductance 3 µH (cable plus device under test (DUT)), measured at 100 kHz. Common Mode Isolation >1 GΩ, <4500 pF. Overrange 100% of bias range, 101% of source range, 102% of measure range. Maximum Source/Sense Lead Resistance 0.5 Ω / 100 Ω per lead. Sense High/Low Input Impedance 2 MΩ (typical). SMU-to-Pulser Transition Time <7 ms. A/D Aperture Characteristics A/D Converter Speed 1 µs 10 µs 100 µs Effective Number of Conversions 1 10 100 Effective Number of Bits (ENOB) Current 12 14 15 Voltage 14 16 18 Additional Measure Current Noise Uncertainty ±1.5 mA 0 A 0 A Additional Measure Voltage Noise Uncertainty ±0.03% of measure voltage range 0% 0% NOTES 1. Accuracies valid for 10 µs aperture, measurement beginning at the end of the settling time. Refer to A/D Aperture Characteristics for other apertures.

TEK.COM SMU Specifications Voltage Source Specifications Voltage Accuracy1 Range Programming Resolution Accuracy (1 Year) ±(% rdg. + volts) Typical Noise (peak-peak)

0.1 Hz–10 Hz

100 mV 5 µV 0.02% + 250 µV 20 µV 1 V 50 µV 0.02% + 400 µV 50 µV 6 V 50 µV 0.02% + 1.8 mV 100 µV 40 V 500 µV 0.02% + 12 mV 500 µV Temperature Coefficient (0°–18 °C and 28°–50 °C) 2 ±(0.15 × accuracy specification)/ °C. Applicable for normal mode only. Not applicable for High Capacitance Mode. Maximum Output Power and Source/Sink Limits 3 NOTES 1. Add 50 µV to source accuracy specifications per volt of HI lead drop. 2. High Capacitance Mode accuracy is applicable at 23 °C ±5 °C only. 3. Full power source operation regardless of load to 28 °C ambient. Above 28 °C and/or power sink operation, refer to “Operating Boundaries” in the 2601B-PULSE Reference Manual for additional power derating information. Current Source Specifications Current Accuracy Range Programming Resolution Accuracy (1 Year) ±(% rdg. + amps) Typical Noise (peak-peak) 0.1Hz–10Hz 100 nA 2 pA 0.1% + 100 pA 5 pA 1 µA 20 pA 0.03% + 800 pA 25 pA 10 µA 200 pA 0.03% + 5 nA 60 pA 100 µA 2 nA 0.03% + 60 nA 3 nA 1 mA 20 nA 0.03% + 300 nA 6 nA 10 mA 200 nA 0.03% + 6 µA 200 nA 100 mA 2 µA 0.03% + 30 µA 600 nA 1 A 20 µA 0.05% + 1.8 mA 70 µA 3 A 20 µA 0.06% + 4 mA 150 µA 10 A 2 200 µA 0.5% + 40 mA N/A Temperature Coefficient (0°–18 °C and 28°–50 °C) 3 ±(0.15 × accuracy specification)/ °C. Maximum Output Power and Source/Sink Limits 1 NOTES 1. Full power source operation regardless of load to 28 °C ambient. Above 28 °C and/or power sink operation, refer to “Operating Boundaries” in the 2601B-PULSE Reference Manual for additional power derating information. 2. 10 A Range is accessible in SMU extended range mode only. Accuracy specifications for 10 A range are typical. 3. High Capacitance Mode accuracy is applicable at 23 °C ±5 °C only.

TEK.COM 2601B-PULSE System SourceMeter 10 µs Pulser/SMU Instrument Additional Source Characteristics Noise, 10 Hz to 20 MHz <20 mV peak-peak, < 3 mVRMS. 6 V range. Transient Response Time < 70 μs for the output to recover to within 0.1% for a 10% to 90% step change in load. Overshoot Voltage <±0.1% + 10 mV. Step size = 10% to 90% of range, resistive load, maximum current limit/compliance. Current <±0.1%. Step size = 10% to 90% of range, resistive load. See Current Source output settling time for additional test conditions. Range Change Overshoot Voltage1 <300 mV + 0.1% of larger range. Overshoot into a 100 kΩ load, 20 MHz bandwidth. Current2 <300 mV/RLOAD + 5% of larger range. Guard Offset Voltage < 4 mV. Current <10 mA. Remote Sense Operating Range 3 Maximum voltage between HI and SENSE HI = 3 V. Maximum voltage between LO and SENSE LO = 3 V. Voltage Output Headroom 40 V Range Maximum output voltage = 42 V – (total voltage drop across source leads). Maximum 1 Ω per source lead. 6 V Range Maximum output voltage = 8 V – (total voltage drop across source leads). Maximum 1 Ω per source lead. Overtemperature Protection Internally sensed overtemperature condition puts the instrument in standby mode. Limit/Compliance Bipolar limit (compliance) set with a single value. Voltage4 Minimum value is 10 mV; accuracy is the same as voltage source. Current5 Minimum value is 10 nA; accuracy is the same as current source. Voltage Source Output Settling Time Time required to reach within 0.1% of final value after source level command is processed on a fixed range. Voltage Range Settling Time 100 mV < 50 μs

1 V < 50 μs

6 V < 110 μs

40 V6 < 150 μs

Current Source Output Settling Time Time required to reach within 0.1% of final value after source level command is processed on a fixed range. Values below for IOUT × RLOAD = 1 V unless noted. Current Range Settling Time 100 nA < 20 ms 1 μA < 2 ms 10 μA < 500 μs 100 μA < 150 μs 1 mA < 100 μs 10 mA to 1 A < 80 μs (RLOAD > 6 Ω) 3 A < 80 μs (Current < 2.5 A, R LOAD > 2 Ω) NOTES 1. Add 200 mV for the 6 V to 40 V change. 2. With source settling set to SETTLE_SMOOTH_100NA. 3. Add 50 μV to source accuracy specifications per volt of HI lead drop. 4. For sink operation (quadrants II and IV) without sink mode enabled, add 10% of compliance range and ±0.02% of limit settling to the corresponding voltage source accuracy specifications. For the 100 mV range, add an additional 60 mV of uncertainty. Specifications apply with sink mode enabled. 5. For sink operation (quadrants II and IV) without sink mode enabled, add 0.06% of limit range to the corresponding current limit accuracy specifications. Specifications apply with sink mode enabled. 6. Add 150 μs when measuring on the 1 A range.

TEK.COM Meter Specifications Voltage Measurement Accuracy 1 Range Default Display Resolution Accuracy (1 Year)2, ±(% rdg. + volts) 100 mV 100 nV 0.015% + 150 µV 1 V 1 µV 0.015% + 200 µV 6 V 10 µV 0.015% + 1 mV 40 V 10 µV 0.015% + 8 mV Temperature Coefficient (0°–18 °C and 28°–50 °C) 3 ±(0.15 × accuracy specification)/ °C. Current Measurement Accuracy Range Default Display Resolution Accuracy (1 Year)2, ±(% rdg. + amps) 100 nA 100 fA 0.08% + 100 pA 1 µA 1 pA 0.025% + 500 pA 10 µA 10 pA 0.025% + 1.5 nA 100 µA 100 pA 0.02% + 25 nA 1 mA 1 nA 0.02% + 200 nA 10 mA 10 nA 0.02% + 2.5 µA 100 mA 100 nA 0.02% + 20 µA 1 A 1 µA 0.03% + 1.5 mA 3 A 1 µA 0.05% + 3.5 mA 10 A 4 10 µA 0.4% + 25 mA Temperature Coefficient (0°–18 °C and 28°–50 °C) 3 ±(0.15 × accuracy specification/ °C. Applicable for normal mode only. Not applicable for High Capacitance Mode. NOTES 1. Add 50 µV to source accuracy specifications per volt of HI lead drop. 2. De-rate accuracy specifications for NPLC setting <1 by increasing error term. Add appropriate typical percent of reading term for resistive loads using the table below. NPLC Setting 100 mV Range 1 V–40 V Ranges 100 nA Range 1 μA–100 mA Ranges 1 A–3 A Ranges 3. High Capacitance Mode accuracy is applicable for 23 °C ±5 °C only. 4. 10 A Range is accessible in SMU extended range mode only. Accuracy specifications for 10 A range are typical. Additional Measurement Characteristics Contact Check Specifications 1 Speed Maximum Measurement Time to Memory for 60 Hz (50 Hz) Accuracy (1 year) ±(% reading + ohms) Fast 1 ms (1 ms) 5% + 10 Ω Medium 4 ms (5 ms) 5% + 1 Ω Slow 35 ms (42 ms) 5% + 0.3 Ω Current Measure Settling Time 2 Time required to reach within 0.1% of final value after source level command is processed on a fixed range. Values below for VOUT = 1 V . Current Range Settling Time 1 mA < 100 μs Input Impedance > 10 GΩ. NOTES 1. Includes measurement of SENSE HI to HI and SENSE LO to LO contact resistances. 2. Compliance equal to 100 mA.

TEK.COM 2601B-PULSE System SourceMeter 10 µs Pulser/SMU Instrument Additional Characteristics Maximum Load Impedance Normal Mode 10 nF. High Capacitance Mode 50 µF. Overrange 101% of source range, 102% of measure range. Maximum Sense Lead Resistance 1 kW for rated accuracy. Sense High Input Impedance >10 GW. High Capacitance Mode 1, 2, 3 Accuracy Specifications Accuracy specifications are applicable in both Normal and High Capacitance Modes. Voltage Source Output Time required to reach 0.1% of final value after source level command is processed on a fixed range. Settling Time Current limit = 1 A. Voltage Source Range Settling Time with C load = 4.7 μF 100 mV <200 μs

1 V <200 μs

6 V <200 μs

40 V <7 ms

Current Measure Settling Time Time required to reach 0.1% of final value after voltage source is stabilized on a fixed range. Values below for Vout = 1V unless noted. Current Range Settling Time 1 μA < 230 ms 10 μA < 230 ms 100 μA < 3 ms 1 mA < 3 ms 10 mA – 100 mA <100 μs

1 A – 3 A <120 μs (Rload > 2 W)

Capacitor Leakage Performance Using the KIHighC Factory Script 4 Load = 5 μF||10 MW. Test: 5 V step and measure. 200 ms (typical) @ 50 nA. NOTES 1. High Capacitance Mode specifications are for DC measurements only. 2. 100 nA range is not available in High Capacitance Mode. 3. High Capacitance Mode uses locked ranges. Auto Range is disabled. 4. Part of KI Factory scripts. See reference manual for details. Mode Change Delay Current Ranges of Delay into High Capacitance Mode: 11 ms. 100 μA and Above Delay out of High Capacitance Mode: 11 ms. Current Ranges Delay into High Capacitance Mode: 250 ms. Below 100 μA Delay out of High Capacitance Mode: 11 ms. Voltmeter Input Impedance 10 GW in parallel with 3300 pF. Noise, 10 Hz–20 MHz (6 V Range) <30 mV peak-peak (typical). Voltage Source Range Change Overshoot <400 mV + 0.1% of larger range. Overshoot into a 100 kW load, 20 MHz bandwidth.

TEK.COM SMU Pulse Characteristics Region Maximum Current Limit Maximum Pulse Width 1 Maximum Duty Cycle 2 1 1 A @ 40 V DC, no limit 100% 1 3 A @ 6 V DC, no limit 100% 2 1.5 A @ 40 V 100 ms 25% 3 5 A @ 35 V 4 ms 4% 4 10 A @ 20 V 1.8 ms 1% 5 5 A @ 6 V 10 ms 10% +1.5A +3A +5A –3A –5A +10A –10A –1A +1A –1.5A +40V+6V–6V +20V–20V 0V +35V–35V–40V DC Pulse Pulse Pulse Pulse Minimum Programmable 100 µs. Note: Minimum pulse width for settled source at a given I/V output and load can be longer Pulse Width 1, 3 than 100 µs. Pulse Width Programming Resolution 1 µs. Pulse Width Programming Accuracy ±5 µs. Pulse Width Jitter 2 µs. NOTES 1. Times measured from the start of pulse to the start off-time; see figure below. Pulse Level Bias Level Start ton Start toff 90% 10% ton toff 10% 2. Thermally limited in sink mode (quadrants II and IV) and ambient temperatures above 28 °C. See power equations in the reference manual for more information. 3. Typical performance for minimum settled pulse widths: Source Value Load Source Settling (% of range) Min. Pulse Width 6 V 2 W 0.2% 150 µs

20 V 2 W 1% 200 µs

35 V 7 W 0.5% 500 µs 40 V 27 W 0.1% 400 µs 1.5 A 27 W 0.1% 1.5 ms 3 A 2 W 0.2% 150 µs 5 A 7 W 0.5% 500 µs 10 A 2 W 0.5% 200 µs

TEK.COM 2601B-PULSE System SourceMeter 10 µs Pulser/SMU Instrument SMU Measurement Speed Characteristics 1 Maximum Sweep Operation Rates (operations per second) for 60 Hz (50 Hz) A/D Converter Speed (NPLC) Trigger Origin Measure To Memory Using User Scripts Measure To USB Using User Scripts Source Measure To Memory Using User Scripts Source Measure To USB Using User Scripts Source Measure To Memory Using Sweep API Source Measure To USB Using Sweep API

0.001 Internal 20000 (20000) 9800 (9600) 6700 (6700) 6600 (6600) 13400 (13400) 6450 (6450)

0.001 Digital I/O 7400 (7400) 7250 (7250) 5500 (5500) 5400 (5400) 13400 (13400) 6500 (6500)

0.01 Internal 5000 (4300) 3900 (3400) 3300 (3000) 3300 (2900) 4400 (3800) 4400 (3800)

0.01 Digital I/O 3400 (3100) 3400 (3000) 2900 (2700) 2900 (2600) 4400 (3800) 4400 (3800)

0.1 Internal 580 (480) 560 (470) 550 (465) 550 (460) 570 (480) 570 (480)

0.1 Digital I/O 550 (460) 550 (460) 520 (450) 540 (450) 570 (480) 570 (480)

1.0 Internal 59 (49) 59 (49) 59 (49) 59 (49) 59 (49) 59 (49)

1.0 Digital I/O 59 (48) 59 (49) 59 (49) 59 (49) 59 (49) 59 (49)

Maximum Single Measurement Rates (operations per second) for 60 Hz (50 Hz) A/D Converter Speed (NPLC) Trigger Origin Measure To USB Source Measure To USB Source Measure Pass/Fail To USB

0.001 Internal 2100 (2100) 1600 (1600) 1600 (1600)

0.01 Internal 1650 (1600) 1400 (1200) 1300 (1150)

0.1 Internal 480 (410) 450 (390) 400 (380)

1.0 Internal 58 (48) 57 (48) 57 (48)

Maximum Measurement Range Change Rate >7000 per second for >10 µA. When changing to or from a range ≥1 A, maximum rate is >2200/second. Maximum Source Range Change Rate >400 per second >10 µA. When changing to or from a range ≥1 A, maximum rate is >190/second. Maximum Source Function Change Rate >1000 per second. Command Processing Time Maximum time required for the output to begin to change following the receipt of the NOTES 1. Exclude current measurement ranges less than 1 mA. Triggering and Synchronization Characteristics Triggering Trigger in to Trigger Out 0.5 μs, typical. Trigger in to Source Change 1 10 μs, typical. Trigger Timer Accuracy ±2 μs, typical. Source Change 1 After LXI Trigger 280 μs, typical. Synchronization Single-Node Synchronized Source Change 1: <0.5 μs, typical. Multi-Node Synchronized Source Change 1: <0.5 μs, typical. NOTES 1. Fixed source range, with no polarity change.

TEK.COM General IEEE-488 IEEE-488.1 compliant. Supports IEEE Std 488.2 common commands and status model topology. USB Control (rear) USB 2.0 device, USB-TMC488 protocol. RS-232 Baud rates from 300 bps to 115200 bps. Ethernet RJ-45 connector, 10/100BaseT, Auto-MDIX. Expansion Interface The TSP-Link expansion interface allows TSP-enabled instruments to trigger and communicate with each other. Cable Type: Category 5e or higher LAN crossover cable. 3 meters (9.84 ft) maximum between each TSP-enabled instrument. A maximum of 32 TSP-Link nodes can be interconnected. Each source-measure instrument uses one TSP-Link node. To Host Computer To Nodes 3–64 Node 1 Node 2 LXI Compliance Version 1.5 LXI Device Specification 2016 compliant. LXI Timing Total Output Trigger Response Time: 245 μs minimum, 280 μs typical, (not specified) maximum. Receive LAN[0-7] Event Delay: Unknown. Generate LAN[0-7] Event Delay: Unknown. Digital I/O Interface +5VDC 5.1kW 100W Solid State Fuse Read by firmware Written by firmware +5V Pins (on DIGITAL I/O connector) Digital I/O Pi n (on DIGITAL I/O connector) GND Pin (on DIGITAL I/O connector) Rear Panel Connector 25-pin female D. Input/Output Pins 14 open drain I/O bits. Absolute Maximum Input Voltage 5.25 V. Absolute Minimum Input Voltage –0.25 V. Maximum Logic Low Input Voltage 0.7 V, +850 µA max. Minimum Logic High Input Voltage 2.1 V, +570 µA. Maximum Source Current (flowing out of Digital I/O bit) +960 µA. Maximum Sink Current @ Maximum Logic Low Voltage (0.7V) –5.0 mA. Absolute Maximum Sink Current (flowing into Digital I/O pin) –11 mA. 5V Power Supply Pins Limited to 250 mA total for all three pins, solid-state fuse protected.

TEK.COM 2601B-PULSE System SourceMeter 10 µs Pulser/SMU Instrument USB File System (Front) USB 2.0 Host: Mass storage class device. Power Supply 100 V to 240 VAC, 50–60 Hz (auto sensing), 240 VA maximum. Cooling Forced air. Side intake and rear exhaust. One side must be unobstructed when rack mounted. EMC Conforms to European Union EMC Directive. Safety NRTL listed to UL61010-1:2008 and CSA C22.2 No. 61010-1. Conforms to European Union Low Voltage Directive. Dimensions 2601B-PULSE with Weight 2601B-PULSE only: 5.9 kg (13 lb). 2601B-PULSE with 2601B-P-INT attached: 6.4 kg (14 lb). Environment For indoor use only. Altitude Maximum 2000 meters above sea level. Operating 0 °C to 35 °C at up to 70% relative humidity; at 35 °C to 50 °C, derate 3% relative humidity per °C. Storage –25 °C to 65 °C. Supplemental Information Front Panel Interface Two-line vacuum fluorescent display (VFD) with keypad and rotary knob. Display Show error messages and user defined messages. Display source and limit settings. Show current and voltage measurements. View measurements stored in dedicated reading buffers. Keypad Operations Change host interface settings. Save and restore instrument setups. Load and run factory and user defined test scripts (i.e. sequences) that prompt for input and send results to the display. Store measurements into dedicated reading buffers. Programming Embedded Test Script Processor (TSP ®) accessible from any host interface; responds to high-speed test scripts comprised of remote commands and statements (for example, branching, looping, and math); able to execute test scripts stored in memory without host intervention. Minimum Memory Available 16 MB (approximately 250,000 lines of TSP code). Reading Buffers Nonvolatile memory uses dedicated storage areas reserved for measurement data. Reading buffers are arrays of measurement elements. Each element can store the following items: Measurement Source setting (at the time the measurement was made) Measurement status Range information Timestamp Reading buffers can be filled using the front panel STORE key and retrieved using the RECALL key or host interface. Buffer Size, with timestamp and source setting: >60,000 samples. Buffer Size, without timestamp and source setting: >140,000 samples. Timer Free running 47-bit counter with 1 MHz clock input. Reset each time instrument powers up. If the instrument is not turned off, the timer is automatically reset to zero (0) every four years. Timestamp TIMER value automatically saved when each measurement is triggered. Resolution 1 µs. Accuracy ±100 ppm.

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Ordering Information

2601B-PULSE 2601B-PULSE System SourceMeter 10 µs Pulser/SMU Instrument Supplied Accessories Operators and Programming Manuals Available at www.tek.com/keithley 2601B-P-INT 2601B-PULSE Rear Panel Interlock and Cable Connector Box 7709-308A Digital I/O Connector 17469460X TSP-Link/Ethernet Cable (two per unit) CS-1616-3 Safety Interlock Mating Connector 2601B-PULSE QuickStart Guide Available Accessories Software KickStart Instrument Control Software LabVIEW and IVI Drivers Available at www.tek.com/keithley Test Script Builder Software Available at www.tek.com/keithley Rack Mount Kits 4299-1 Single Rack Mount Kit with front and rear support 4299-2 Dual Rack Mount Kit with front and rear support Cables and Connectors 2600-BAN Banana Test Leads/Adapter Cable for use with the Channel A: SMU Phoenix Connector ONLY 2600-KIT Extra screw terminal connector, strain relief, and cover for the Channel A: SMU Phoenix Connector ONLY 2601B-P-INT 2601B-PULSE Rear Panel Interlock and Cable Connector Box 2601B-PULSE-CA1 2601B-PULSE 1.2 meter 50 ohm BNC to BNC Cable Kit 2601B-PULSE-CA2 2601B-PULSE (two per unit) independent 3.0 meter 50 ohm BNC to BNC coax cables used for SHI and SLO. Required accessory for the 2601B-PULSE-CA3 cable set. 2601B-PULSE-CA3 2601B-PULSE 3.0 meter 15 ohm BNC to BNC Cable Kit. The 2601B-PULSE-CA2 option is required with this accessory. 7709-308A Digital I/O Connector 8606 High Performance Modular Probe Kit. For use with 2600-BAN. CS-1616-3 Safety Interlock Mating Connector GPIB Interfaces and Cables 7007-1 Double Shielded GPIB Cable, 1 m (3.3 ft.) 7007-2 Double Shielded GPIB Cable, 2 m (6.6 ft.) KPCI-488LPA IEEE-488 Interface/Controller for the PCI Bus KUSB-488B IEEE-488 USB-to-GPIB Interface Adapter

TEK.COM 2601B-PULSE System SourceMeter 10 µs Pulser/SMU Instrument Digital I/O, Trigger Link, and TSP-Link 2600-TLINK Digital I/O to TLINK Adapter Cable, 1 m 17469460X TSP-Link/Ethernet Cable (two per unit) CA-126-1A Digital I/O and Trigger Cable, 1.5 m Test Fixtures and Adapters 7078-TRX-GND 3-slot make triax to female BNC adapter (guard removed). Used with 8101-PIV and 8101-4TRX test fixtures. 8101-4TRX 4 Pin Transistor Fixture 8101-PIV DC, Pulse I-V and C-V Component Test Fixture CS-1252 SMA male to BNC female adapter. Used with 8101-PIV test fixture. Available Services Extended Warranties 26xxB-EW 1 Year Factory Warranty extended to 2 years 26xxB-3Y-EW 1 Year Factory Warranty extended to 3 years 26xxB-5Y-EW 1 Year Factory Warranty extended to 5 years Calibration Contracts C/26xxB-3Y-STD 3 Calibrations within 3 years C/26xxB-5Y-STD 5 Calibrations within 5 years C/26xxB-3Y-DATA 3 Calibrations within 3 years and includes calibration data before and after adjustment C/26xxB-5Y-DATA 5 Calibrations within 5 years and includes calibration data before and after adjustment C/26xxB-3Y-17025 3 IS0-17025 accredited calibrations within 3 years C/26xxB-5Y-17025 5 IS0-17025 accredited calibrations within 5 years Warranty Information Warranty Summary This section summarizes the warranties of the 2601B-PULSE. Any portion of the product that is not manufactured by Keithley is not covered by this warranty and Keithley will have no duty to enforce any other manufacturer’s warranties. Hardware Warranty Keithley Instruments, LLC. warrants the Keithley manufactured portion of the hardware for a period of one year from defects in materials or workmanship; provided that such defect has not been caused by use of the Keithley hardware which is not in accordance with the hardware instructions. The warranty does not apply upon any modification of Keithley hardware made by the customer or operation of the hardware outside the environmental specifications. Software Warranty Keithley warrants for the Keithley produced portion of the software or firmware will conform in all material respects with the published specifications for a period of ninety (90) days; provided the software is used on the product for which it is intended in accordance with the software instructions. Keithley does not warrant that operation of the software will be uninterrupted or error-free, or that the software will be adequate for the customer’s intended application. The warranty does not apply upon any modification of the software made by the customer.

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