ESRF-ESF ES

Document overview

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Technical content

v1.6 Datasheet ESRF-ESF

  • State of the art performance due to MEMS resistive technology
  • High accuracy and resolution
  • <±1.25% RD Total Error Band
  • Wide dynamic range
  • Bidirectional Flow Measurement
  • Gas Flow sensor: up to ±300 ln/min
  • Temperature compensation: 0oC to +50oC
  • Calibrated & temperature compensated analog or digital output
  • Excellent long term stability
  • Low temperature drift
  • Compact size Typical Applications Medical Ventilation • Anesthesia • Inspiratory flow sensing • Gas mixing • Respiratory measurements • Drug delivery • Expiratory flow measurement • Metabolic Measurements • Proximal Flow measurement • Proximal flow measurement for infants / neonates • Expiratory flow measurement for infants / neonates • Ventilation & Anesthesia for infants / neonates • Respiratory measurements for infants / neonates • Metabolic Measurements for infants / neonates • Oxygen concentrators and conservers • Respirators and ventilators • Nebulizers • Continuous positive airway pressure (CPAP) • Anesthesia machines • Anesthesia delivery machines, ventilators • ventricular assist devices (heart pumps), spirometers • laparoscopy Industrial Mass flow controllers (Telecommunication systems, Environmental climate controls, Fuel cell controls, Process gas control welding equipment and lasers) • Analytic instrumentation (spectrometry, chromatography) • Air-to-fuel ratio • Fuel cells • Fume hoods • Gas leak detection • Process control gas monitoring • Vacuum pump monitoring • Clogging detection • Flow measurement • Air volume measurement • Process automation • Burner control • Environment monitoring • Laboratory Product Summary ES Systems has developed ESRF -ESF, an inline gas flow sensor, based on the hot -film anemometer principle for mass gas flow measurements. ESRF-ESF is one of the few gas flow sensors featuring bidirectional gas flow sensing of up to ±300 ln/min with a total error band of <±1.25% RD. ESRF -ESF gas flow sensors provide calibrated and temperature compensated output on an SPI, I 2C bus or analog output making them plug & play for direct interfacing to low voltage MCUs and systems. The user is provided with a multitude of interface and output options so that the right sensor configuration can be selected based on the specific requirements for each application. Calibration gas is air but other non-aggressive gases are available upon request. Resistive MEMS Gas Flow Sensor A ll data sheet.com

Total Error Band (TEB) is a single specification that includes all possible sources of error in a gas flow measurement. TEB should not be confused with accuracy, which is actually a component of TEB. TEB is the worst error that the sensor could experience. The TEB specification on a datasheet may be confusing. ES Systems uses the TEB specification in its datasheet because it is the most comprehensive measurement of a sensor ’s true accuracy. ES Systems also provides the accuracy specification in order to provide a common comparison with competitors’ literature that does not use the TEB specification. Offset Full Scale Span Flow Non-Linearity Flow Hysteresis Noise Flow Non-Repeatability Thermal Effect on Offset Thermal Effect on Span Thermal Hysteresis Accuracy TEB All Possible Errors Accuracy Performance Range: 15, 20, 50, 100, 200, 300 ln/min - 0% FS to 10%FS = ±0.125%FS - 10%FS to 100%FS = ±1.0% RD Total Error Band Performance Range: 15, 20, 50, 100, 200, 300 ln/min - 0% FS to 10%FS = ±0.125%FS - 10%FS to 100%FS = ±1.25% RD The figure below, illustrates the accuracy as well as the total error of the flow measurement of ESRF-ESF sensors. 1. Total Error Band A ll data sheet.com

  1. Absolute Maximum Ratings1 Characteristic Min. Max. Unit Supply voltage (Vsupply) 4.8 5.5 Vdc Voltage on any pin -0.3 5.5 V Current on any pin - 2 mA Burst pressure - 2 barg Storage temperature -20[-4] +85[+185] oC[oF] Maximum flow applied -550 550 ln/min 1 Absolute maximum ratings are the extreme limits the device will withstand without damage. The electrical and performance characteristics are not guaranteed as the maximum limits are approached, nor will the device necessarily operate as specified at absolute maximum ratings. Prolonged operation at absolute maximum ratings will degrade the device performance CAUTION IMPROPER USE Do not use these products to sense liquid flow. Failure to comply with the instructions may result in product damage. CAUTION PRODUCT DAMAGE Do not disassemble these products. Failure to comply with the instructions may result in product damage. 3. Operating Specifications Characteristic Min. Typ. Max. Unit Supply voltage (Vsupply)1 4.8 5.0 5.2 V Supply current - - 80 mA Output I2C, SPI, Analog - Start-up time2 - 100 - msec Operating temp. range -20[-4] - +85[+185] oC[oF] Compensated temp range 0[+32] - +50[+122] oC[oF] Relative humidity (non-condensing) 0 - 95 % RH Pneumatic connection type ISO5356-1:2004 - Compatible gases Inert non aggressive gases - Gas conversion factor Air to O2 Air to N2 1.0190 0.9997 Update rate 1.6 - - ms Digital bus frequency - - 100 kHz Analog output loading Sink Source mA 1The sensor is not reverse polarity protected. Incorrect application of supply voltage or ground to the wrong pin may cause electrical failure 2After 95% of Vsupply reached A ll data sheet.com
  1. Flow Sensor Specifications Characteristic Absolute Unit Min. Typ. Max. Flow direction Unidirectional / bidirectional - Full scale ranges Unidirectional Bidirectional 10, 15, 20, 50, 100, 200, 300 ln/min1 Flow cut2 1.0 %FS3 Max measured flow -330 - 330 ln/min Calibration gas Clean, Dry Air4 - Operating temp. range5 -20[-4] - +85[+185] oC[oF] Compensated temp range6 0[+32] - +50[+122] oC[oF] Operating pressure 1.0 - 1.3 bara Proof pressure - - 1.7 bara Effective resolution 12 - - bits Response time - 35 - msec Total error band7,8 (<10%FS) - ±0.125 - %FS Total error band7 (>10%FS) - ±1.25 - %RD9 Accuracy10,11 (<10%FS) - ±0.125 - %FS Accuracy10 (>10%FS) - ±1.0 - %RD Orientation sensitivity12 - 0.001 - %FS/o Long term stability13 - - ±0.1 %FSS14

1 In normal liters per minute at 0oC and 1013 mbar

2 Flow measured below this point will always indicate 0 ln/min

3 % of the full scale

4 Other, non-aggressive, gases available upon request

5 The temperature range over which the sensor will produce an output proportional to flow (Non condensing humidity) 6 The temperature range over which the sensor will produce an output proportional to flow within the specified performance limits. Note that for valid datasheet values, ambient and gas temperatures must be the same 7 The maximum deviation from ideal transfer function over the entire compensated temperature and flow range. Includes all errors due to offset, full scale span, accuracy, thermal effect on offset, thermal effect on span and thermal hysteresis 8 For the 10 ln/min FS flow option only, TEB for flows <10%FS is ±0.5%FS 9 % of the reading value 10 The maximum deviation in output from a Best Fit Straight Line (BFSL) fitted to the output measured over the flow range at 21oC [69.8oF]. Includes all errors due to flow non-linearity, flow hysteresis, non-repeatability and noise 11 For the 10 ln/min FS flow option only, accuracy for flows <10%FS is ±0.5%FS

12 Added measurement error due to orientation deviation from the optimal (calibration) position

13 Accelerated Life Test Profile: 100hours at 90oC

14 Full Scale Span (FSS): The algebraic difference between the output signal measured at the maximum (U max) and the minimum (Umin) limits of the flow range A ll data sheet.com

  1. Flow Range Specifications (ln/min) Flow Range Flow Range Unit Pressure Drop @ FS Unit Umin1 Umax (Digital Output)2 Umax (Analog Output) 010NL 0.1 11 ln/min 0.07 mbar 10 015NL 0.15 16.5 ln/min 0.15 mbar 15 020NL 0.2 22 ln/min 0.17 mbar 20 050NL 0.5 55 ln/min 1 mbar 50 100NL 1 110 ln/min 2.4 mbar 100 200NL 2 220 ln/min 8.6 mbar 200 300NL 3 330 ln/min 18.4 mbar 300 6. Temperature Sensor Specifications Characteristic Absolute Unit Min. Typ. Max. Full Scale range 0 [+32] - +50 [+122] oC[oF] Accuracy - oC 0.5 - Resolution 8 - - bits

1 Flows below Umin will always indicate 0 ln/min

2 In order to improve the quality of the flow measurements, the digital output features an extra 10% flow range from the nominal FS flow. A ll data sheet.com

When performing transaction with the ESRF -ESF sensors the returned data is always MSB first. Flow is represented as a 16 -bit, two’s complement number. The lowest number in the Flow Data Register is 0x8000 ( -32768 in Decimal) and the highest number is 0x7FFF (32767 in Decimal). In unidirectional ESF sensors output data higher than 0x7FFF must be ignored. Calibrated flow (in SLPM) can be calculated using the following formula: An example of unidirectional flow: Flow Register Byte [0] = 0x3F Flow Register Byte [1] = 0xFF Using the formula (Eq 1) and assuming a full scale flow of 200 ln/min, the calculated output should be 109.9932 ln/min Eq. 1 An example of bidirectional flow: Flow Register Byte [0] = 0xFC Flow Register Byte [1] = 0x18 Using the formula (Eq.1) and assuming a full scale flow of 200 ln/min, the calculated output should be –6.7139 ln/min 7. Data & Register Description The ESRF -ESF sensors provide measurement and status data. The measurement data are flow rate and temperature whilst the status data refer to the sensors factory programed serial number . The data are stored in specific data registers as described below. The readout is performed by using multibyte read transactions. ADDRESS REGISTER NAME TYPE DEFAULT VALUE (Hex) MNEMONIC 0x00 Calibrated Flow Byte 1 R Variable CAL_DATA[15:8] Calibrated Flow Byte 2 R Variable CAL_DATA[7:0] Flow Data Register [0x00] A ll data sheet.com

Temperature Data Register [0x01] ADDRESS REGISTER NAME TYPE DEFAULT VALUE MNEMONIC 0x01 Calibrated Temp Byte 1 R Variable CAL_DATA[15:8] Calibrated Temp Byte 2 R Variable CAL_DATA[7:0] Temperature is represented as a 16 -bit, unsigned integer number. The lowest number in the Temperature Data Register is 0x0000 (0 in Decimal) and the highest number is 0xFFFF (65535 in Decimal). The full data representation range of this register in oC is from –20oC to +80 oC. However, the temperature sensor accuracy is defined within the temperature compensation range of the device which is from 0oC to +50oC . Calibrated Temperature (in oC) can be calculated using the following formula: An example of Temperature conversion: Temperature Register Byte [0] = 0x84 Temperature Register Byte [1] = 0x32 Using the formula (Eq. 2) the calculated output should be 31.64oC Serial Number Register [0x03] ADDRESS REGISTER NAME TYPE DEFAULT VALUE (Hex) MNEMONIC 0x03 Serial Number Byte 1 R Fixed ID SER_NO[31:24] Serial Number Byte 2 R Fixed ID SER_NO[23:16] Serial Number Byte 3 R Fixed ID SER_NO[15:8] Serial Number Byte 4 R Fixed ID SER_NO[7:0] Each ESRF -ESF sensor is uniquely identified by a 32 -bit serial number. This number can be read from the Serial Number Register and is 4 bytes long. An example of a serial number conversion: Serial No Register Byte [0] = 0x01 Serial No Register Byte [1] = 0x05 Serial No Register Byte [2] = 0x62 Serial No Register Byte [3] = 0x1F The serial number 0x0105621F corresponds to 17130015 in decimal. Eq. 2 A ll data sheet.com

Software Reset Function [0xFE] The device has an additional option to perform a software reset via the I2C communication interface. This option is useful in specific cases depending on the application. For instance, the user could issue a S/W reset to assure correct initialization after a hot -plug connection. The procedure to reset the device is the same as changing a register, followed by the byte 0xFE. In other words, the user must first send the byte 0x8A (7 bit address plus write bit) and then the byte 0xFE (I 2C Mode) or just 0xFE (SPI Mode). The device will then return its acknowledge bit and immediately reset itself. After 100 milliseconds, the device will be ready to give its first valid sample. 8. I2C Interface At power on reset, the sensor defaults to transmission of the contents of the Flow Data Register. If the master device transmits the selected sensor 7-bit address (0x45) with R/W bit set, the sensor returns the contents of the Flow Data Register after acknowledging (ACK) by holding the SDA line low. The master should then provide at least 18 clock pulses on the SCL line in order to readout the two Flow Data Bytes. An acknowledge bit (ACK) should be provided by the master on each byte received by holding the SDA line low while providing the 9 th clock pulse. The same frame structure also applies to a Temperature Data transaction. An example of such a transaction can be seen below. If in any case the master sends a slave address or a register address that is not recognized a NACK condition will be returned by the sensor. The sensor supports clock stretching functionality Master MCU VDD FLOW SDA SCL S .. . Slave Add+W A R egister Add A S Slave Add+R A Data 0 A Data N N P Start Stop Slave AC K Master AC K SC L SDA Master NAC K A ll data sheet.com

  1. SPI Interface Master MCU CS SCLK MISO MOSI FLOW ESRF-ESF sensors have the option of a serial peripheral interface communication following the memory mapping as described in section 9. The sensor uses MODE 0 SPI with CPOL = 0 and CPHA = 0. The SPI communication requires to send, via the MOSI signal, the address to read and then the following clock pulses will produce the required result on the MISO line. The following examples describe the SPI transactions for reading the flow and the temperature output of the sensor. 0x00 DON T CARE FLOW BYTE [0] FLOW BYTE [1] CS SCLK MOSI MISO 0x01 DON T CARE TEMPERATURE BYTE [0] TEMPERATURE BYTE [1] CS SCLK MOSI MISO A ll data sheet.com
  1. Analog Interface PSU 5.0VDC MULTIMETER or DATA ACQUISITION SYSTEM FLOW ESRF-ESF sensors also feature the option of an analog voltage output (+0.5 to +4.5V), which allows for the readout of flow in an analog way by means of a data acquisition system or a multimeter. In this case the user needs to ensure that the power supply can sustain the power requirements of the sensor at full flow as specified in the electrical specifications table. As this is a voltage output configuration the user must ensure that the cables running from the sensor to the data acquisition system are as short as possible to prevent errors from potential voltage drops. It should be noted that the min analog voltage output is 0.5V and the maximum 4.5V Component Flow Port Ports and covers Glass Reinforced Thermoplastic, Gold, Si, SiN, SiO x, epoxy, silicon rubber, FR4, polyurethane, SS316, Fluoropolymer Housing Glass Reinforced thermoplastic Substrate Gold, FR4 Adhesives Epoxy Weight 50.6g Directives compliance RoHS, WEEE, CE 17. Wetted Matterials1

1 Contact ES Systems Customer Service for detailed material information

Eq. 3 Eq. 4 A ll data sheet.com

Wetted materials degree of protection IEC IP40 (excluding tubing sections) Vibration 15g, 10Hz to 2 kHz Shock 100g, 6ms duration ESD ESD IEC6100-4-2 air discharge up to 8 kV, or direct contact discharge up to 4 kV EMC/EMI level 3 from 80 MHz to 1000 MHz per IEC61000 -4- 3, 1m shielded cable with 3cm exposed leads at connector. Life1 1 million flow cycles minimum 15. Mechanical Specifications (all dimensions in mm) 12. Environmental Specifications

1 Life may vary depending on specific application in which the sensor is used

  1. Pinout Output1 PIN1 PIN2 PIN3 PIN4 PIN5 PIN6 I2C NC NC VCC GND SDA SCL SPI CS MISO VCC GND MOSI SCLK Analog Output + Output –2 VCC GND NC NC

1 Connector P/N: S6B-PH-K-S, manufacturer: JST

2 Analog ground

A ll data sheet.com

  1. Instructions of Use The ESRF -ESF sensors are calibrated in a horizontal position. As depicted in the following graph. Calibration orientation For optimal performance, the sensor requires at least 20x ID of laminarizing pipe length in the flow inlet and another 20x ID in the outlet. ESRF -ESF sensors are calibrated using 20mm ID pipe diameter. The diameter of the inlet and outlet flow pipes should be as close to the calibration diameter as possible. It is also possible to insert O -rings in the grooves and attach tubes with an inner diameter of 23 mm to the ESRF -ESF. The dimensions of the O -ring are illustrated bellow. Temperature compensation The ESRF -ESF sensor features digital temperature compensation. The temperature is measured on the MEMS element by an on -chip temperature sensor. This data is fed to a compensation circuit that is also integrated on the microprocessor. Thus, no external temperature compensation is necessary. Sensor Handling The ESRF-ESF sensor is designed to be robust and shock resistant. Nevertheless, the accuracy of the high -precision ESRF -ESF can be degraded by rough handling. ES Systems does not guarantee proper operation in case of improper handling. A ll data sheet.com
  1. Ordering Information ESRF-ESF-NNNNN-NN-NN-NN-N Flow Range1 FS (ln/min) 010NL 10 015NL 15 020NL 20 050NL 50 100NL 100 200NL 200 300NL 300 Output Type

01 I2C

02 SPI

03 0.5-4.5V Directionality

01 Unidirectional

02 Bidirectional

01 Air

02 Other

1Custom calibration ranges are available upon request A ll data sheet.com

DO NOT USE these products as safety or emergency stop devices, or in any other application where failure of the product could result in personal injury. Failure to comply with these instructions could result in death or serious injury. WARRANTY ES Systems warrants this Product to be free of defects in materials and workmanship for a period of one (1) year from the date of purchase. Upon examination by ES Systems, if the unit is found to be defective it will be repaired or replaced at no charge. ES Systems' WARRANTY does not apply to defects resulting from any action of the purchaser, including but not limited to mishandling, improper interfacing, operation outside of design limits, improper repair, or unauthorized modification. This WARRANTY is VOID if the unit shows evidence of having been tampered with or shows evidence of being damaged as a result of excessive corrosion; or current, heat, moisture or vibration; improper specification; misapplication; misuse or other operating conditions outside of ES Systems' control. Components which wear are not warranted. ES Systems neither assumes responsibility for any omissions or errors nor assumes liability for any damages that result from the use of its Product in accordance with information provided by ES Systems, either verbal or written. ES Systems warrants only that the parts manufactured by it will be as specified and free of defects. ES SYSTEMS MAKES NO OTHER WARRANTIES OR REPRESENTATIONS OF ANY KIND WHATSOEVER, EXPRESSED OR IMPLIED, EXCEPT THAT OF TITLE, AND ALL IMPLIED WARRANTIES INCLUDING ANY WARRANTY OF MERCHANTABILITY AND FITNESS FOR A PARTICULAR PURPOSE ARE HEREBY DISCLAIMED. No representative of ES Systems is authorized to extend this Warranty or to change it in any manner whatsoever. No warranty applies to any party other than the original Customer. The remedies of the Customer set forth herein are exclusive and the total liability of ES Systems with respect to this order, whether based on contract, warranty, negligence, indemnification, strict liability or otherwise, shall not exceed the purchase price of the component upon which liability is based. In no event shall ES Systems be liable for consequential, incidental or special damages. Specifications may change without notice. The information supplied is believed to be accurate and reliable as of this issue; however, ES Systems assumes no responsibility for its use. ES Systems S.A. Head Office: 7, Stratigi St., GR-154 51 Neo Psychico, Greece Tel: (+30) 210 672 8610, Fax (+30) 210 672 8624 Factory: 57, I.Metaxa str., GR-194 41 Koropi, Greece Tel: (+30) 216 2000 500, Fax (+30) 216 2000 555 Important Notes A ll data sheet.com