ZX2 OMRON | Alldatasheet

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Features

For the most recent information on models that have been certified for safety standards, refer to your OMRON website.Be sure to read Safety Precautions on page 11 Stability Measurements to a Precision in the Order of 10 µm for any Workpiece PAT.P The use of a unique OMRON HSDR-CMOS (high-speed and dynamic range) image sensor and a step-less laser power adjustment algorithm enable stable measurements for any color or surface conditions, from metals to substrates, rubber, and transparent objects. Linearity of 0.05% F.S.* achieves a measurement precision in the order of 10 µm. Shinny metals Black rubber Light intake amount The light intake amount remains the same even if the workpiece changes. Two-element automatic adjustment Stable measurements on objects with changing color/material CMOS shutter time Laser emission power Small Large Weak Strong Shinny metals Black rubber mount remains orkpiece changes me nt justment color/material ter tim on power Large Strong Black rubb me L The light int the same even g T auto m e measurements on objects with cha CMO Laser e Weak Shinny metals Small Measurements for Bright Workpieces Measurements for Dark Workpieces Linearity characteristic of the ZX2 according to material 0-2 -4 -6 -8 -10-1 -0.6 -0.6 -0.4 -0.2 0.2 0.4 0.6 0.8 2468 1 0 Distance (mm) Linearity (%FS) Linearity characteristic of existing product according to material 0-2 -4 -6 -8 -10-1 -0.6 -0.6 -0.4 -0.2 0.2 0.4 0.6 0.8 2468 1 0 Distance (mm) Linearity (%FS) -40 -30 -20 -10 Measurement error (µm) Max error: approx.7µm Moving conditionRest state workpiece -400 -300 -200 -100 100 200 300 400 Measurement error (µm) Max error: approx.400µm Moving conditionRest state workpiece Workpiece:SUS304, hairline (parallel) Workpiece:SUS304, hairline (parallel) White ceramic SUS304, mirror finishing SUS304, hairline (orthogonal) SUS304, hairline (parallel) Black rubber White ceramic SUS304, mirror finishing SUS304, hairline (orthogonal) SUS304, hairline (parallel) Black rubber A line beam is used in addition to an emitter beam when dealing with rough surfaces to average out the amount of reflected light and to offset the amount of light received at a high-speed measurement period of 30 µs in order to reduce variations in received light and to enable stable measurements for moving objects. Stable measurements on moving objects * Linearity: The maximum error that occurs for measurements within the measurement range. A linearity of ±0.05% F .S. means that when the LD50L is used for a measurement range of 40 to 50 mm, the maximum error within the measurement range will be 10 µm. Limit of resolution of existing product when workpiece is moving Limit of resolution of the ZX2 when workpiece is moving Stable measurement even for changes in colors and materials or for moving workpieces with CMOS that has a dynamic range of two million times No Variation for Different Workpieces No Variation for Moving Workpieces Easy 4FOTPSDPOGJHVSBUJPOCZKVTUBQVTIJOH UIF4."35CVUUPO Essentially Anyone Can Set Optimum Conditions Easily select smart tuning with one button. 1"51 5IFPQUJNVNTFUUJOHTGPSTUBCMFNFBTVSFNFOUDBOCFBDIJFWFEXJU IPOF TNBSUUVOJOHCVUUPO5IFTFUUJOHTXJMMOPUSFMZPOUIFTLJMMPGUIFVTFS Scene.3 0OFUZQFPGXPSLQJFDF Scene.1 4FWFSBMUZQFTPGXPSLQJFDF Scene.2 4VSGBDFDPOEJUJPOT PGUIFXPSLQJFDFBSFWBSJBCMF Three selectable tunings .PSFBDDVSBUFTFUUJOHTBSFNBEFQPTTJCMFCZUIFUISFFUVOJOH NFUIPETGPSEJ⒎FSFOUXPSLQJFDFUZQFTBOETVSGBDFDPOEJUJPOT 4JOHMFTNBSUUVOJOH #FTUDPOpHVSBUJPOGPSTUBCMFEFUFDUJPO JODBTFPGPCKFDUTEPOPUDIBOHFCZ QVTIJOHUIFCVUUPOGPSPOFTFDPOE .VMUJTNBSUUVOJOH *EFBMDPOpHVSBUJPOGPSTUBCMFEFUFDUJPO PGDIBOHJOHPCKFDUTCZQVTIJOHUIF CVUUPOGPSUISFFTFDPOET "DUJWFTNBSUUVOJOH $POUJOVPVTDPOpHVSBUJPOJNQSPWFNFOU GPSUIFTUBCMFEFUFDUJPOPGBMMMPDBUJPOT CZQVTIJOHUIFCVUUPOGPSpWFTFDPOET

Ordering Information

Sensor Heads [Dimensions➜ page 11] Amplifier Units [Dimensions ➜ page 11] Accessories (sold separately) These are not included with the Sensor Head or Amplifier Unit. Please order as necessary. Calculating Unit [Dimensions ➜ page 12] Communications Interface Unit [Dimensions ➜ page 12] Sensor Head Extension Cables [Dimensions ➜ page 12] Note: Extension cables cannot be coupled and used together. Mounting Brackets [Dimensions ➜ page 13] Appearance Sensing method Beam shape Sensing distance Resolution Model Diffuse reflection type Diffuse- reflective Line beam 1.5 μm ZX2-LD50L 0.5M Spot beam ZX2-LD50 0.5M Line beam 5 μm ZX2-LD100L 0.5M Spot beam ZX2-LD100 0.5M Regular- reflective Spot beam 1.5 μm ZX2-LD50V 0.5M Appearance Power supply Output type Model DC NPN ZX2-LDA11 2M PNP ZX2-LDA41 2M 50±10 mm 100±35 mm 135 48±5mm Appearance Model ZX2-CAL Appearance Type Model RS-232C ZX2-SF11 Cable Length Model 1 m ZX2-XC1R 4 m ZX2-XC4R 9 m ZX2-XC9R 20 m ZX2-XC20R Applicable Sensor Head Appearance Model Remarks ZX2-LD50V ZX2-LD50L ZX2-LD50 E39-L178 Mounting Brackets (1) Nut Plate (1) Phillips screws (M30 ✕ 30) (2) ZX2-LD100L ZX2-LD100 E39-L179

47.47.5mmmm47.5mm 35.5mm 22.6mm * If the room temperature varies 1°C, the measured value varies 0.02% F .S. (corresponding to 4µm for the Model ZX2-LD50) * According to OMRON investigation of CMOS laser displacement sensors performed in Septem ber 2010. Cable can be fed through from the back World smallest* Compact sensor for easy mounting IP67, robot cable & temperature characteristic 0.02% F.S./°C Reliable measurements in harsh environments Spot beam Precise measurement on micro-scale objects Line beam Stable measurement on rough-surfaced objects Regular-reflective Stable wafer measurement Measurement range 50mm ±10mm Resolution 1.5µm Linearity Line beam ±0.05%F.S.*1 Spot beam ±0.10%F.S.*1 Beam size Line beam Approx.60µm×2.6mm Spot beam Approx.60µm dia. ZX2-LD50L Line beam type ZX2-LD50 Spot beam type Measurement range 100mm ±35mm Resolution 5µm Linearity Line beam ±0.05%F.S.*2 Spot beam ±0.10%F.S.*2 Beam size Line beam Approx.110µm×2.7mm Spot beam Approx.110µm dia. ZX2-LD100L Line beam type ZX2-LD100 Spot beam type Measurement range 48mm ±5mm Resolution 1.5µm Linearity Spot beam ±0.3%F.S. Beam size Spot beam Approx.60µm dia. ZX2-LD50V Spot beam type *1 Using 40 to 50mm *2 Using 65 to 100mm (regular-reflective) Sensor Heads for Various Applications-select the Range and Type of Beam New Regular-reflective Sensor Head Desig ned for Optimal Wafer Measurement IP67 protection class enables to use the sensor in harsh environments. A robot cable is used as standard between the head and amplifier, that the unit can be used reliably on moving parts. In addition, as 3D UV bond is used to fix the optical components rather than screws, stress can be controlled and a temperature characteristic 0.02% F .S./°C* is realized. The world’s smallest CMOS laser displacement sensor head is realized in a resin case. Enables to mount the sensor in smallest spaces and to minimize measure- ment errors arising from temperature fluctuations.

Amplifier and Calculating Unit TK A B B A S 38mm 72mm 30mm 31mm 64mm 30mm BANK 3 BANK 2 BANK 0 Ease of Use by “LED Display” and “Calculating Unit” 11-segment LED display for intuitive configuration Easy calculations of measurements Intuitive operation through cross buttons

11 Segment LED Display

Determination output indicators High (orange)/Pass (green)/ Low (orange), two color display Thickness + subtraction mode Perform two calculations with ease Equipped with 4 banks Easy change of setup The 7 segment display on existing models The 11 segment display on model ZX2 Thickness mode The compact housing stays just as it is Sensor 1 Sensor 2 Sensor 1 0 criterion Sensor 2 0 criterion Level difference S = B - AThickness T=K+(A+B) Subtraction mode Existing models ZX2 Built into the unit Amplifier unit Bank unit The calculated results of two sensor heads are displayed on the amplifier unit by just connecting the calculating unit between the two amplifier units. The calculation function can be chosen from the two modes of thickness and subtraction. It is also possible to prevent mutual interference by coupling via the calculating units. (Up to five amplifier units can be connected.) An 11 segment LED display is integrated in the compact housing. Alphanumeric characters can be read with ease and there is no need to refer to a manual. The amplifier unit is equipped with four bank functions. Easy change of setup between four modes is supported by just switching between the bank functions. Comparison of the existing 7 segment LED display and the 11 segment LED display

Diffuse-reflective Sensor Heads Regular-reflective Sensor Head Note: False detection outside the measurement range can occur in the case of an object with high reflectance. *1. Beam size: Defined as 1/e 2 (13.5 %) of the center optical intensity at the minimum value of the measurement range (effective value). False detections can occur in the case there is light leakage outside the defined region and the surroundings of the target object have a high reflectance in comparison to the target object. Correct measurements may not be obtained if the workpiece is smaller than the beam size. *2. Resolution: indicates the degree of fluctuation ( ±3σ) of analog output when connected to the ZX2-LDA. (The measured value is given for the center distance for OMRON’s standard target object (diffuse-reflective models: white ceramic object, regular-reflective models:1/4 λ flat mirror) when the response time of the ZX2-LDA is set to 128 ms.) Indicates the repetition accuracy for when the workpiece is in a state of rest. Not an indication of distance accuracy. Resolution performance may not be satisfied in a strong electromagnetic field. *3. Linearity: indicates the error with respect to the ideal straight line of the displacement output in the case of measuring Omron’ s standard target object. Linearity and measured value may vary depending on target object. F.S. indicates the full scope of the measurement range. (ZX2-LD50(L): 20 mm) *4. Temperature characteristic: Value for the case the space between the sensor head and Omron’ s standard target object is secured by an aluminum jig. (Measured at the measurement center distance) *5. These Sensors are clas sified as Class 2 laser devices for diffuse-reflective models and Class 1 for regular-reflective models under EN 60825- 1 and the regulations of Laser Notice No. 50 for FDA certification. CDRH registration has been completed. Item Model ZX2-LD50L ZX2-LD50 ZX2-LD100L ZX2-LD100 Optical system Diffuse reflective Light source (wave length) Visible-light semiconductor laser with a wavelength of 660 nm and an output of 1mW max. EN class 2, FDA class 2 *5 Measurement center point 50 mm 100 mm Measurement range ±10 mm ±35 mm Beam shape Line Spot Line Spot Resolution *2 1.5 μm5 μm Temperature characteristic *4 0.02% F.S. /°C Ambient illumination Incandescent lamp: 10,000 lx max. (on light receiving side) Ambient temperature Operating: 0 to 50 °C, Storage: −15 to 70 °C (with no icing or condensation) Ambient humidity Operating and storage: 35% to 85% (with no condensation) Dielectric strength 1,000 VAC, 50/60 Hz for 1 min. Vibration resistance (destruction) 10 to 150 Hz, 0.7-mm double amplitude, 80 min. each in X, Y, and Z directions Shock resistance (destruction) 300 m/s2 3 times each in six directions (up/down, left/right, forward/backward) Degree of protection IEC60529, IP67 Connection method Connector connection (standard cable length: 500 mm) Weight (packed state) Approx. 160 g (main unit only: Approx. 75 g) Materials Case and cover: PBT (polybutylene terephtahalate), Optical window: Glass, Internal thread: Brass, Cable: PVC Accessories Instruction sheet, Ferrite core ×1 (made by TDK Corp. ZCAT1730-0730A), Laser warning label (English), FDA Item Model ZX2-LD50V Optical system Regular reflective Light source (wave length) Visible-light semiconductor laser with a wavelength of 660 nm and an output of 0.24 mW max. EN class 1, FDA class 1 *5 Measurement center point 48mm Measurement range ±5mm Beam shape Spot Beam size *1 Approx. 60 μm dia. Resolution *2 1.5 μm Linearity *3 ±0.3%F.S. (entire range) Temperature characteristic *4 0.06%F.S./°C Ambient illumination Incandescent lamp: 10,000lx max. (on light receiving side) Ambient temperature Operating: 0 to 50 °C, Storage: -15 to 70 °C (with no icing or condensation) Ambient humidity Operating and storage: 35% to 85% (with no condensation) Dielectric strength 1,000 VAC, 50/60 Hz for 1 minute Vibration resistance (destruction) 10 to 150 Hz, 0.7-mm double amplitude, 80 minutes, each in X,Y,and Z directions Shock resistance (destruction) 300 m/s2 3 times each in six directions (up/down,left/right,forward/backward) Degree of protection IEC 60529, IP67 Connection method Connector connection (standard cable length: 500 mm) Weight (packed state) Approx.160g (Sensor Head only: Approx.75g) Materials Case and cover: PBT (polybutylene terephtahalate), Optical window: Glass, Internal thread: Brass, Cable: PVC Accessories Instruction sheet, Ferrite core ×1 (made by TDK Corp. ZCAT1730-0730A), Laser warning label (English), FDA

*1. In the case of Omron’s standard target object (white ceramic) *2. Select current output (4 to 20 mA) and voltage output ( ±5V or 1 to 5V) by MENU mode. *3. Calculating unit (ZX2-CAL) is necessary . Calculations are possible for up to two amplifier units. Mutual interference prevention is possible for up to five amplifier units. Calculating Unit ZX2-series Communications Interface Unit Item Model ZX2-LDA11 ZX2-LDA41 Measurement period *1 Min. 30 μs Response time 60 μs, 120 μs, 240 μs, 500 μs, 1 ms, 2 ms, 4 ms, 8 ms, 12 ms, 20 ms, 36 ms, 66 ms, 128 ms, 250 ms, 500ms Analog output *2 4 to 20 mA, Max. load resistance: 300Ω/±5 VDC or 1 to 5 VDC, Output impedance: 100Ω Judgement outputs (HIGH/PASS/LOW: 3 outputs), error output NPN open-collector outputs, 30 VDC, 50 mA max. (residual voltage: 1 V max. for load current 10 mA max., 2V max. for load current above 10 mA) PNP open-collector outputs, 30 VDC, 50 mA max. (residual voltage: 1 V max. for load current 10 mA max., 2 V max. for load current above 10 mA) Laser OFF input, zero reset input, timing input, reset input, bank input ON: Short-circuited with 0-V terminal or 1.2 V or less OFF: Open (leakage current: 0.1 mA max.) ON: Supply voltage short-circuited or supply voltage within -1.2 V OFF: Open (leakage current: 0.1 mA max.) Functions Smart tuning, scaling, sample hold, peak hold, bottom hold, peak-to-peak hold, self-peak hold, self-bottom hold, average hold, zero reset, On-delay timer, OFF-delay timer, keep/clamp switch, (A-B) calculations *3, thickness calculation *3, mutual interference prevention *3, laser deterioration detection, bank function (4 banks), differential function Indications Judgement indicators: HIGH (orange), PASS (green), LOW (orange), 11-segment main display (red), 11-segment sub-display (orange), laser ON (green), zero reset (green), enable (green), menu (green), HIGH threshold (orange), LOW threshold (orange) Power supply voltage 10 to 30 VDC, including 10% ripple (p-p) Power consumption 3,000 mW max. (at 24 VDC: 125 mA max., at 12 VDC: 250 mA max.) Ambient temperature Operating: 0 to 50 °C, Storage: −15 to 70 °C (with no icing or condensation) Ambient humidity Operating and storage: 35% to 85% (with no condensation) Dielectric strength 1,000 VAC, 50/60 Hz for 1 min. Vibration resistance (destruction) 10 to 150 Hz, 0.7-mm double amplitude, 80 min. each in X, Y, and Z directions Shock resistance (destruction) 300 m/s2 3 times each in six directions (up/down, left/right, forward/backward) Degree of protection IEC60529, IP40 Connection method Prewired (standard cable length: 2 m) Weight (packed state) Approx. 200 g (main unit only: Approx. 135 g) Materials Case: PBT (polybutylene terephtahalate), Cover: Polycarbonate, Display: Methacrylic resin, Button: Polyacetal, Cable: PVC Accessories Instruction sheet Item Model ZX2-CAL Applicable Amplifier Units ZX2-LDA11, ZX2-LDA41 Current consumption 12 mA max. (supplied from the Smart Sensor Amplifier Unit) Ambient temperature Operating: 0 to +50°C, storage: -15 to +70°C (with no icing or condensation) Ambient humidity Operating and storage: 35% to 85% (with no condensation) Connection method Connector Dielectric strength 1,000 VAC, 50/60 Hz for 1 minute Vibration resistance (destruction) 10 to 150 Hz, 0.7-mm double amplitude, 80 minutes, each in X,Y,and Z directions Shock resistance (destruction) 300 m/s 2 3 times each in six directions (up/down, left/right, forward/backward) Materials Case: ABS, Display: Methacrylic resin Weight (packed state) Approx. 50g (Calculating Unit only: Approx. 15g) Accessories Instruction sheet Item Model ZX2-SF11 Power supply voltage 10 to 30 V DC ±10% (including 10% ripple (p-p)) (Supplied from Sensor Amplifier.) Power consumption 720 mW max. (at 24 V: 30 mA max., at 12 V: 60 mA max.) (Not including Sensor Amplifier current consumption or output current Applicable Amplifier Units ZX2-LDA@@ (Production after November 2013) Applicable Amplifier Unit versions Sensor Amplifier Unit version: V1.330 or higher (The Sensor Amplifier version is shown on the sub-digital display when the power of the Sensor Amplifier is turned ON.) Max. No. of Amplifier Units 5 Commu- nications functions Port RS-232C (9-pin, D-Sub connector) Communications method Full duplex Synchronization method Start/stop synchronization Transmission code ASCII Baud rate 38,400 (at shipping)/9,600 bps switchable Data bit length 8 bits Parity check None Stop bit length 1 bit Data delimiter Receiving CR or CR + LF is automatically recognized. Sending CR + LF fixed Indicators Power supply: green, Sensor communications: green, Sensor communications error: red, External terminal communications: green, External terminal communications error: red Protective circuits Power supply reverse polarity protection Ambient temperature Operating: 0 to 50°C, storage: -15 to 60°C (with no icing or condensation) Ambient humidity Operating and storage: 35% to 85% (with no condensation) Insulation resistance 20 MΩ min. (at 500 VDC) Dielectric strength 1,000 VAC, 50/60 Hz for 1 min, Leakage current: 10 mA max. Materials Case: PBT (polybutylene terephthalate), Cover: Polycarbonate Accessories Instruction sheet, 2 clamps

Engineering Data (Reference Value) Angle Characteristic The angle characteristic is a plot of the inclination of the sensing object in the measurement range and the maximum value of the error to analog output. Note: SUS304 = Stainless steel SUS304 ZX2-LD50 Side-to-side Inclination Front-to-back Inclination ZX2-LD50L Side-to-side Inclination Front-to-back Inclination ZX2-LD100 Side-to-side Inclination Front-to-back Inclination ZX2-LD100L Side-to-side Inclination Front-to-back Inclination 1.0 0.8 0.6 0.4 0.2 −0.2 −0.4 −0.6 −0.8 −1.0 0−10−20−30−40−50 10 20 30 40 50 White ceramic SUS304, mirror finish Black rubber Error (%F .S.) Angle of Inclination (°) + Inclination - Inclination 1.0 0.8 0.6 0.4 0.2 −0.2 −0.4 −0.6 −0.8 −1.0 0−10−20−30−40−50 10 20 30 40 50 White ceramic SUS304, mirror finish Black rubber Error (%F .S.) Angle of Inclination (°) + Inclination - Inclination 1.0 0.8 0.6 0.4 0.2 −0.2 −0.4 −0.6 −0.8 −1.0 0−10−20−30−40−50 10 20 30 40 50 White ceramic SUS304, mirror finish Black rubber Error (%F .S.) Angle of Inclination (°) + Inclination - Inclination 1.0 0.8 0.6 0.4 0.2 −0.2 −0.4 −0.6 −0.8 −1.0 0−10−20−30−40−50 10 20 30 40 50 White ceramic SUS304, mirror finish Black rubber Error (%F .S.) Angle of Inclination (°) + Inclination - Inclination 1.0 0.8 0.6 0.4 0.2 −0.2 −0.4 −0.6 −0.8 −1.0 0−10−20−30−40−50 10 20 30 40 50 White ceramic SUS304, mirror finish Black rubber Error (%F .S.) Angle of Inclination (°) + Inclination - Inclination 1.0 0.8 0.6 0.4 0.2 −0.2 −0.4 −0.6 −0.8 −1.0 0−10−20−30−40−50 10 20 30 40 50 White ceramic SUS304, mirror finish Black rubber Error (%F .S.) Angle of Inclination (°) + Inclination - Inclination 1.0 0.8 0.6 0.4 0.2 −0.2 −0.4 −0.6 −0.8 −1.0 0−10−20−30−40−50 10 20 30 40 50 White ceramic SUS304, mirror finish Black rubber Error (%F .S.) Angle of Inclination (°) + Inclination - Inclination 1.0 0.8 0.6 0.4 0.2 −0.2 −0.4 −0.6 −0.8 −1.0 0−10−20−30−40−50 10 20 30 40 50 White ceramic SUS304, mirror finish Black rubber Angle of Inclination (°) Error (%F .S.) + Inclination - Inclination

Linearity Characteristic for Different Materials Note: The x-axis displacement indicates the measurement distance displayed by the amplifier unit. The measurement distance displayed by the amplifier unit takes the measurement center distance as 0, and the NEAR and FAR sides from the sensor are displayed by + and −, respectively. ZX2-LD50 0° Inclination −50° Inclination Front-to-back +50° Inclination ZX2-LD50L 0° Inclination −50° Inclination Front-to-back +50° Inclination ZX2-LD100 0° Inclination −50° Inclination Front-to-back +50° Inclination ZX2-LD100L 0° Inclination −50° Inclination Front-to-back +50° Inclination 1.0 0.8 0.6 0.4 0.2 −0.2 −0.4 −0.6 −0.8 −1.0 0° Inclination Measurement center distance FAR side NEAR side White ceramic SUS304, mirror finish Black rubber Error (%F .S.) Displacement (mm) 1.0 0.8 0.6 0.4 0.2 −0.2 −0.4 −0.6 −0.8 −1.0 −50° Inclination Measurement center distance FAR side NEAR side White ceramic SUS304, mirror finish Black rubber Error (%F .S.) Displacement (mm) 1.0 0.8 0.6 0.4 0.2 −0.2 −0.4 −0.6 −0.8 −1.0 +50° Inclination Measurement center distance FAR side NEAR side White ceramic SUS304, mirror finish Black rubber Error (%F .S.) Displacement (mm) 1.0 0.8 0.6 0.4 0.2 −0.2 −0.4 −0.6 −0.8 −1.0 0° Inclination Measurement center distance FAR side NEAR side White ceramic SUS304, mirror finish Black rubber Error (%F .S.) Displacement (mm) Displacement (mm) 1.0 0.8 0.6 0.4 0.2 −0.2 −0.4 −0.6 −0.8 −1.0 −50° Inclination Measurement center distance FAR side NEAR side White ceramic SUS304, mirror finish Black rubber Error (%F .S.) 1.0 0.8 0.6 0.4 0.2 −0.2 −0.4 −0.6 −0.8 −1.0 +50° Inclination Measurement center distance FAR side NEAR side Displacement (mm) White ceramic SUS304, mirror finish Black rubber Error (%F .S.) 1.0 0.8 0.6 0.4 0.2 −0.2 −0.4 −0.6 −0.8 −1.0 35 25 15 5 0−5−15−25−35 0° Inclination Displacement (mm) Measurement center distance FAR side NEAR side White ceramic SUS304, mirror finish Black rubber Error (%F .S.) Displacement (mm) 1.0 0.8 0.6 0.4 0.2 −0.2 −0.4 −0.6 −0.8 −1.0 35 25 15 5−5−15−25−35 −50° Inclination Measurement center distance FAR side NEAR side White ceramic SUS304, mirror finish Black rubber Error (%F .S.) 1.0 0.8 0.6 0.4 0.2 −0.2 −0.4 −0.6 −0.8 −1.0 35 25 15 5−5−15−25−35 +50° Inclination Measurement center distance FAR side NEAR side Displacement (mm) White ceramic SUS304, mirror finish Black rubber Error (%F .S.) 1.0 0.8 0.6 0.4 0.2 −0.2 −0.4 −0.6 −0.8 −1.0 35 25 15 5−5−15−25−35 0 0° Inclination Measurement center distance FAR side NEAR side Displacement (mm) White ceramic SUS304, mirror finish Black rubber Error (%F .S.) 1.0 0.8 0.6 0.4 0.2 −0.2 −0.4 −0.6 −0.8 −1.0 352515 5−5−15−25−35 0 −50° Inclination Measurement center distance FAR side NEAR side Displacement (mm) White ceramic SUS304, mirror finish Black rubber Error (%F .S.) 1.0 0.8 0.6 0.4 0.2 −0.2 −0.4 −0.6 −0.8 −1.0 35 25 15 5 0−5−15−25−35 +50° Inclination Measurement center distance FAR side NEAR side Displacement (mm) White ceramic SUS304, mirror finish Black rubber Error (%F .S.)

Linearity Characteristic for Different Materials Note: The x-axis displacement indicates the measurement distance displayed by the amplifier unit. The measurement distance displayed by the amplifier unit takes the measurement center distance as 0, and the NEAR and FAR sides from the sensor are displayed by + and −, respectively. ZX2-LD50V Side-to-side Inclination for Flat Mirror Front-to-back Inclination for Flat Mirror Side-to-side Inclination for Silicon Wafer Front-to-back Inclination for Silicon Wafer Side-to-side Inclination for Glass Fr ont-to-back Inclination for Glass ZX2-LD50V 0° Inclination Displacement (mm) Measurement center distance FAR side NEAR side Error (%F .S.) 3.0 2.5 2.0 1.5 1.0 0.5 -1.0 -0.5 -1.5 -2.0 -2.5 + Inclination - Inclination -1.0° -0.5° 0.5° 1.0° Displacement (mm) Measurement center distance FAR side NEAR side Error (%F .S.) 3.0 2.5 2.0 1.5 1.0 0.5 -1.0 -0.5 -1.5 -2.0 -2.5 + Inclination 10.5° - Inclination -1.0° -0.5° 0.5° 1.0° Displacement (mm) Measurement center distance FAR side NEAR side Error (%F .S.) 3.0 2.5 2.0 1.5 1.0 0.5 -1.0 -0.5 -1.5 -2.0 -2.5 + Inclination - Inclination -1.0° -0.5° 0.5° 1.0° Displacement (mm) Measurement center distance FAR side NEAR side Error (%F .S.) 3.0 2.5 2.0 1.5 1.0 0.5 -1.0 -0.5 -1.5 -2.0 -2.5 + Inclination 10.5° - Inclination -1.0° -0.5° 0.5° 1.0° Displacement (mm) Measurement center distance FAR side NEAR side Error (%F .S.) 3.0 2.5 2.0 1.5 1.0 0.5 -1.0 -0.5 -1.5 -2.0 -2.5 + Inclination - Inclination -1.0° -0.5° 0.5° 1.0° Displacement (mm) Measurement center distance FAR side NEAR side Error (%F .S.) 3.0 2.5 2.0 1.5 1.0 0.5 -1.0 -0.5 -1.5 -2.0 -2.5 + Inclination 10.5° - Inclination -1.0° -0.5° 0.5° 1.0° Displacement (mm) Measurement center distance FAR side NEAR side Error (%F .S.) 1.0 0.8 0.6 0.4 0.2 -0.2 -0.4 -0.6 -0.8 -1.0 -3-5 -1 1 3 5-4 -2 0 2 4 0° Inclination Flat Mirror Silicon Wafer Glass 10.5°

  • Measurement distance displayed by the amplifier unit. The measurement distance displayed by the amplifier unit takes the measurement center distance as 0, and the NEAR and FAR sides from the sensor are displayed by + and −, respectively. I/O Circuit Diagrams NPN Amplifier Unit (ZX2-LDA11) PNP Amplifier Unit (ZX2-LDA41) Wiring Amplifier Units ZX2-LDA11/ZX2-LDA41 L * +10 mm 0 mm −4 mm −10 mm X Approx. 600 μm Approx. 160 μm Approx. 40 μm Approx. 220 μm Y Approx. 350 μm Approx. 90 μm Approx. 60 μm Approx. 130 μm L * +35 mm 0 mm −20 mm −35 mm X Approx. 1.1 mm Approx. 400 μm Approx. 70 μm Approx. 250 μm Y Approx. 550 μm Approx. 190 μm Approx. 110 μm Approx. 150 μm Beam cross-section Y X L L * +10 mm 0 mm −4 mm −10 mm X Approx. 2.6 mm Approx. 2.6 mm Approx. 2.6 mm Approx. 2.6 mm Y Approx. 350 μm Approx. 90 μm Approx. 60 μm Approx. 130 μm L * +35 mm 0 mm −20 mm −35 mm X Approx. 2.1 mm Approx. 2.5 mm Approx. 2.7 mm Approx. 2.9 mm Y Approx. 550 μm Approx. 190 μm Approx. 110 μm Approx. 150 μm Beam cross-section Y X L 100 Ω Brown: 10 to 30 VDC 10 to

30 VDC

White: HIGH judgement output Load Load Load Load LoadGreen: PASS judgement output Gray: LOW judgement output Y ellow: Error output Blue: GND (0 V) Pink: LD-OFF input Purple: Timing input/BANK input 0 Orange: Zero reset input Red: Reset input/BANK input 1 Current output 4 to 20 mA Current output: 300 Ω or lower Voltage output: 10 kΩ or higher Voltage output ±5 V 1 to 5 V Current/voltage output switch Black: Analog output Shield: Analog GND Internal circuits 100 Ω Brown: 10 to 30 VDC White: HIGH judgement output Load Load Load Load Load Green: PASS judgement output Gray: LOW judgement output Ye l l ow: Error output Blue: GND (0 V) Pink: LD-OFF input Purple: Timing input/BANK input 0 Orange: Zero reset input Red: Reset input/BANK input 1 Current output 4 to 20 mA Internal circuits Current output: 300 Ω or lower Voltage output: 10 kΩ or higher Voltage output ±5 V 1 to 5 V Current/voltage output switch Black: Analog output Shield: Analog GND 10 to GND (0V) HIGH judgement output PASS judgement output LOW judgement output Analog output Error output Analog GND LD-OFF input Zero reset input Timing input/BANK input 0 Reset input/BANK input 1 Black Ye l l ow Shield Pink Orange Purple Red Gray Green White Blue Brown Note: 1. Use a separate stabilized power supply for the Amplifier Unit, particularly when high resolution is required. 2. Wire the Unit correctly. Incorrect wiring may result in damage to the Unit. (Do not allow wiring, particularly the Analog output, to come into contact with other wires.) 3. Use the 0-V ground (blue) for the power supply and use the Analog ground (shield) for Analog output. Each of these grounds must be used for the designed purpose. When not using the Analog output, connect the Analog ground (shield) to the 0-V ground (blue).

For details, refer to common precautions, warranty, limitation of liability, and other related information. Dimensions Units This product is not designed or rated for ensuring safety of persons. Do not use it for such purposes. WARNING Precautions for Correct Use and Other Details Refer to the “Smart Sensors Laser Displacement Sensors CMOS Type ZX2 Series User’s Manual” (Cat. No. Z310). (Unit: mm) Tolerance class IT16 applies to dimensions in thes data sheet unless otherwise specified. Reference surface Reference surface Range indicator Laser warning light Range indicator Reference surface Two, 3.2-dia. (Mounting holes) Emitter axis Receiver axis Emitter axis Vinyl insulated round robot cable, 4.7 dia., 4 conductors (Conductor cross-section: 0.086 mm 2/Insulator diameter: 0.9 mm) Standard length: 0.5 m, Minimum bending radius: 30 mm 9.7 Emitter center 15.1 10.1 4±0.05 Two, M3 Mounting reference surface Mounting reference surface 4±0.0543.5±0.05 4.8 4.8 10.5 7 35.3 16.7 (9.7) L * 27.5 35.535.5 20.9 39.5 47.547.5 28.43 29.8 22.622.6 Sensor Heads ZX2-LD50 ZX2-LD50L ZX2-LD100 ZX2-LD100L ZX2-LD50V * In the case of ZX2-LD50 (L), L=50, A=21 ° In the case of ZX2-LD100 (L), L=100, A=11.5 ° Mounting Dimensions Note: Attach the enclosed ferrite core (16.5 dia., length: 30 mm) to the cable within 100 mm from the Sensor Head. 6.2 4.2 6.1 9.6 Vinyl insulated round cable,5.2 dia., 11 conductors (Conductor cross-section 0.09 mm2/Insulator diameter: 0.7 mm) Standard length: 2 m, Minimum bending radius: 30 mm The analog output line (black) has double shielding and the diameter of the insulator is 2.3 mm. 11.7 15.4 16.6 38.438.4 *110.9 16.9 47.6 7272 (when cover open, 84.6) 34.2 20.7 36.8 3030 Note: Amplifier Units ZX2-LDA11 ZX2-LDA41 *1. Maximum height when cover open: 56 *2. Minimum length when connected: 50

Accessories (sold separately) 15.115.1 Coupled indicators Coupling connectors 3.4 14.4 3030 9.5 24.9 44.05 5757 5 36.7 Calculating Unit ZX2-CAL Amplifier Unit attachment connector (female, 6 poles) Sensor Head attachment connector (male, 6 poles) Vinyl insulated round robot cable, 4.7 dia. (ZX2-XC20R: 5.1 dia.) 12 dia. 29.8 28.9L * 12.6 dia. Sensor Head Extension Cables ZX2-XC1R ZX2-XC4R ZX2-XC9R ZX2-XC20R * Length L is as follows. ZX2-XC1R: 1 m, ZX2-XC4R: 4 m, ZX2-XC9R: 9 m, ZX2-XC20R: 20 m Minimum bending radius: 30 mm Note: Attach the enclosed ferrite cores (16.5 dia., length: 30 mm) within 100 mm of each end of the extension cable. Coupling connector Connector Sensor communications indicator (communications operation) External terminal communications indicator (communications operation) Sensor communications indicator (communications error) External terminal communications indicator (communications error) Power supply indicator 30 15 13.2 (336) 64.3 31.5 36.8 11.7 4.3 3 5 6.55 11.7 2.2 4.2 4.2 (46) (33.1) Vinyl -insulated round cable, 5.23 dia. Standard length 100 mm ZX2-series Communications Interface Unit ZX2-SF11

Material: Stainless steel (SUS304) Thickness: 2.0 mm Material: Stainless steel (SUS304) Thickness: 3.0 mm Accessories: Phillips screws (M3×30): 2 Nut plate: 1 Nut plateMounting Bracket R48.1 3.2 dia. 31.4 (36.4) 3.5 2-R3 54.1 48.1 2-M3 P=0.5 24.5°(Regular-reflective Sensor mounting) 34.7°(Diffuse-reflective Sensor mounting) 2-R3 143.2 3.2 5.2 8.8 16.816.8 16.8(26.4) 9.6 Mounting Bracket E39-L178 Nut plate Use this Mou nting Bracket when installing the ZX2-LD100 (L) as a normal Diffuse-reflective or Reg ular-reflective Sensor Head. Material: Stainless steel (SUS304) Thickness: 2.0 mm Material: Stainless steel (SUS304) Thickness: 3.0 mm Accessories: Phillips screws (M3×30): 2 Nut plate: 1 Mounting Bracket 3.5 54.1 48.1 2-M3 P=0.5 R48.1 31.6 (36.6) 2-R3 3.2 dia. 29.2°(Regular-reflective Sensor mounting) 34.7°(Diffuse-reflective Sensor mounting) 2-R3 143.2 8.8 3.2 5.2 16.816.8 16.8(26.4) 9.6 Mounting Bracket E39-L179 Mounting Bracket Nut plate Phillips screws 22.6 10.5° (32) Installation Method for Regular-reflective Sensor Head Using a E39-L178 Mounting Bracket: Note: When securing the Sensor Head in the Mounting Bracket, insert the screws into the side of the Sensor Head where the warning label is located and secure the Sensor Head into place. *1. The measurement distance reference position is the end of the Mounting Bracket. *2. For the Regulalr-reflectiv e Sensor Heads, rotate the Sensor Head counterclockwise, secure it in place, and then perform any necessary fine adjustments. Mounting Bracket Nut plate Phillips screws (32) 22.6 5.75° Installation Method for Regular-reflective Sensor Heads (Installing a Diffuse-reflective Sensor Head as a Regular-reflective Sensor Head) Using a E39-L179 Mounting Bracket: Note: When securing the Sensor Head in the Mounting Bracket, insert the screws into the side of the Sensor Head where the warning label is located and secure the Sensor Head into place. *1. The measurement distance reference position is the end of the Mounting Bracket. *2. For the IInstalling a Diffuse-reflecti ve Sensor as a Regular-reflective Sensor, rotate the Sensor Head counterclockwise, secure it in place, and then perform any necessary fine adjustments. workpiece Measurement center distance 10.5°10.5° ±0.1°±0.1° (19.85)(19.85) (43.85)(43.85) 79.4±0.0579.4±0.05 4848 * The mounting hole dimensions in parentheses (reference values) are for when the Sensor is installed at 10.5°. Adjust the installation so that the angle is 10.5° ±0.1°. Not Using a Mounting Bracket: Tilt the Sensor Head towards the workpiece as shown below.

(32) 22.6 *1 The measurement distance reference position is the Sensor’s sensing surface. Mounting Bracket Nut plate Phillips screws Installation Method for Diffuse-reflective Sensor Heads Using a E39-L178, E39-L179 Mounting Bracket: Note: When securing the Sensor Head in the Mounting Bracket, insert the screws into the side of the Sensor Head where the warning label is located and secure the Sensor Head into place. workpiece * ZX2-LD50 (L): 50 ZX2-LD100 (L): 100 Measurement center distance 39.5±0.05 4.0 ±0.05 31.5 ±0.05L* Not Using a Mounting Bracket: Mount the Sensor Head in relation to the workpiece as shown below.

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