SPD100G

SPD030G ETC1 | Alldatasheet

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Specifications Version 1.0 SPD series -2 – SMARTEC BV, Delpratsingel 26 WWW.SMARTEC.NL

4811 AP Breda, The Netherlands Tel: +31 76 5205353 Tel: +31 76 5205353

SPD series Performance Characteristic at Vcc =5V excitation @ 25 °° C. Parameter Min Typ Max Units. Excitation Voltage 0 5 10 Volts Excitation Current 0 1.5 3.0 mA Offset -50 0 50 mV Temp Coeff Span -27 -22 -17 %FS/100°°C Temp Coeff Offset -7 +7 %FS/100°°C Temp Coeff Resistance 23 28 33 %FS/100°°C Linearity -0.3 ±± 0.1 +0.3 %FS Hysteresis 0.15 % of Range Repeatability 1) ±± 0.2 ±±0.5 FSO Response time (10-90%) 1 ms Bridge resistance 2.7 3.3 4.0 KΩ Pressure overload 1.35 Bar Operating temperature -20 85 °°C Storage temperature -30 125 °°C 1) measured after 1,000 temp. cycles 0 – 70 °C, 106 pressure cycles (10-90% FS) Type Range (Bar) Min Typ(FS) Max Unit 005G 0 - 0.350 70 100 130 mV 015G 0 - 1 100 140 175 mV 030G 0 - 2 120 160 200 mV 100G 0 - 6.5 120 190 240 mV 1 Pa = 0.145. 10 –3 PSI or 1 PSI = 6.89476*103 Pa

1 Bar = 105 Pa = 105 N/m2

Understanding the specifications The available range of SPD series pressure sensors allows for a wide range of applications. In order to get good results, it is very important to fully understand the meaning of the various specifications and their effects on accuracy, especially the ones that deal with temperature coefficients. (Silicon resistors are very temperature dependent).

Specifications Version 1.0 SPD series -3 – SMARTEC BV, Delpratsingel 26 WWW.SMARTEC.NL The excitation of the sensor can be AC or DC. Specifications are given with a DC excitation of 5V. In order to avoid electrical breakdown it is advised not to exceed the maximum values given. Offset The offset value is the electrical output voltage (imbalance) of the pressure sensor when zero pressure is applied. The offset value for the absolute type is determined by extrapolating the measured values at two different pressures (atmospheric air and 0.05 Bar). The pressure in reference chamber is about 25 mTorr (3.33 Pa). Temperature coefficients Silicon resistors are very temperature dependent. The overall drift of the resistors is not of interest to most users (The bridge resistors are located on the same die). The temperature coefficients of the offset and span, however, are very important. All the temperature coefficients are given in percentage of full-scale range (FS) and over a temperature range of 100 °C. The maximum value of the temperature coefficient of the span is minus 27%, which means that worst case the span becomes 27% smaller over the full temperature range of 100 °C. The offset will vary no more than ±7% of the span over the same temperature range. Calculation example (please refer to the parameter table above) Suppose the use of a pressure sensor of type SPD 015G over a temperature range of 100 °C. The typical full scale span is 140 mV. The offset (at a fixed temperature) will be between -50 and +50 mV. Offset When the static part of the offset has been nulled, the offset can still vary ±7% of 140 mV (± 9.8 mV), over the temperature range of 100°C. Span The typical full-scale span is 140 mV and the typical temperature coefficient of the span equals –22 %FS/100 °C. Typically, you would therefore have a span, which varies between 140 mV and 109 mV (140 mV minus 22%), over the full temperature range of 100 °C.

Specifications Version 1.0 SPD series -4 – SMARTEC BV, Delpratsingel 26 WWW.SMARTEC.NL In the worst case scenario the minimum value of the span is 100 mV, which means that the sensor has a span of 100 mV, which could drop to 63mV (100 minus 27%) over the full temperature range of 100 °C. Linearity The linearity is defined as the maximum deviation from the best fitted straight line. Outline drawings and dimensions. Other encapsulations on request. Ordering information Part no . Pressure range SPD005G 0 – 0.35 Bar (Gauge) SPD015G 0 – 1.0 Bar - SPD030G 0 – 2.0 Bar - SPD100G 0 – 6.5 Bar - SPD015A 0 – 1.0 Bar (Absolute) Connection diagram (Top View) pressure port ( ÆÆ 0.8) 1 2 3 vent hole ÆÆ 0.8 6 5 4 2.54(2x) R=1 2.8 6.8 0.5C- ÆÆ 3 All sizes in mm. Wetted materials: glass, ryton, silicon, fluorosilicon and gold 4 out + 5 exc 1 out - 2 exc 0.5 2.54 3.5 Gauge type sensor Absolute type sensor 0.25 0.15±0.1 11±0.5 0.8±0.2 Atmospheric Pressure inlet @bottom