Q331-HD

Q331-HD JDSU | Alldatasheet

Document overview

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Technical content

Key Features • Highest commercially available pulse energy and peak power  Tighter process control due to superior energy stability enabled by unique intracavity harmonic generation  Capable of processing widest range of materials due to wide range of pulse energies and repetition rates  High reliability due to low fluence in harmonic crystals and no cavity optic coatings exposed to UV  355 or 532 nm outputs available The JDSU Q Series lasers lead the market for high-power Q-switched diode-pumped UV lasers used for a wide variety of micromachining and solar cell processing applications. Whether for high pulse-energy processing of refractory materials such as silicon; high repetition rate processing of packaging materials such as Kapton; or patterning thin-film solar cells, the Q Series lasers deliver unsurpassed performance combined with industry-leading uptime. Due to the self-stabilizing characteristics of intracavity UV harmonic generation, all Q Series lasers exhibit inherently high pulse-to-pulse energy and long-term output power stability. In addition, the excellent thermal stability of the unique Nd:YAG-based direct-coupled pump (DCP) architecture maintains exceptionally stable beam position and profile, which is important for processes requiring accurate feature placement. These advantages enable Q series lasers to achieve the tightest possible process tolerances for micromachining and other materials processing applications.

Applications

• Solar cell processing  Wafer scribing  Full-cut thin wafer dicing  Low-k dielectric grooving  Micro via drilling  Micromachining of silicon and metals High-Power Q-Switched Diode-Pumped UV Laser Q Series NORTH AMERICA : 800 498-JDSU (5378) WEBSITE : www.jdsu.comWORLDWIDE : +800 5378-JDSU

HIGH-POWER Q-SWITCHED DIODE-PUMPED UV LASER Q Series 355 nm Laser Head (Specifications in inches [mm] unless otherwise noted. Dimensions include mounting pads.) .90 [22.9] 2.19 [55.6] .94 [23.9] 4.82 [122.4] 1.06 [26.9] UMBILICAL CABLE PORT COOLING WATER CONNECTION, 2X 8.75 [222.3] 9.84 [250.0] 10.00 [254.0] LOCATION POINT, 3X .25 [6.4] 5.00 [127.0] 4.92 [125.0] 4.92 [125.0] 5.00 [127.0] 3X, .266 WIDE X .346 LONG SLOT [3X, 6.8 WIDE X 8.8 LONG SLOT] 32.00 [812.8] 3X MOUNTING PADS Detail A Scale 1:2 .669 [17.00] 3.39 [86.1] 2.75 [69.8] 5.50 [139.7] 1.987 [50.47] Laser Center A .040 [1.0] WATER HOSE FITTINGS ELECTRICAL INTERFACE PANEL 21.0

17.3 WATER FILL PORT

[440] [533] 13.00 10.4 [264] [329] 16.80 [426.7] 14.34 [364.2] 3.48 [88.4] .24 [6.1] 3.00 [76.2] .35 [8.9] 18.30 [464.8] 4X, .218 X .375 Power Supply and Chiller (Specifications in inches [mm] unless otherwise noted. )

HIGH-POWER Q-SWITCHED DIODE-PUMPED UV LASER Q30X 355nm Models Typical Performance 100 150 200 250 300 02 0 4 0 6 0 8 0 1 0 0 1 2 0 1 4 0 355-nm Average Power (W) Pulse Repetition Rate (kHz) Pulse Widths (ns) Typical Performance Q301 Q302 Q303 Q304 Q33X Lower Coast 355nm Models Typical Performance Q331 Q332 Q333 120 160 200 02 0 4 0 6 0 8 0 1 0 0 1 2 0 1 4 0 355-nm Average Power (W) Pulse Repetition Rate (kHz) Pulse Widths (ns) Typical Performance

HIGH-POWER Q-SWITCHED DIODE-PUMPED UV LASER Q Series Laser Head Specifications Parameter Q301-HD Q302-HD Q303-HD Q304-HD Wavelength 355 nm 355 nm 355 nm 355 nm Spatial mode TEM00 TEM00 TEM00 TEM00 M-squared1 <1.2 <1.2 <1.2 <1.2 Waist location1 (internal, from beam exit) 42±0.4 cm 42±0.4 cm 42±0.4 cm 42±0.4 cm Waist diameter1, 1/e2 0.26 mm nominal 0.26 mm nominal 0.26 mm nominal 0.25 mm nominal Beam pointing drift, full angle <10 µrad/°C <10 µrad/°C <10 µrad/°C <10 µrad/°C Pointing drift, over 8 hours, full angle2 <50 µrad <50 µrad <50 µrad <50 µrad Beam position accuracy, unit to unit <2.5 mm from nominal <2.5 mm from nominal <2.5 mm from nominal <2.5 mm from nominal Beam pointing accuracy, unit to unit <1° from nominal <1° from nominal <1° from nominal <1° from nominal Repetition rate Internally triggered 5 to 250 kHz 5 to 250 kHz 5 to 250 kHz 5 to 250 kHz Externally triggered 0 to 250 kHz 0 to 250 kHz 0 to 250 kHz 0 to 250 kHz Constant pulse energy range <10 kHz <30 kHz <50 kHz <40 kHz Average output power3 At 10, 20, and 30 kHz ≥10.0, 8.0 and 6.0 W - - At 30, 50, and 70 kHz - ≥8.0, 6.8, and 5.0 W - At 70, 100, and 130 kHz - - ≥6.5, 4.5, and 2.9 W - At 40, 60, and 90 kHz - - - ≥11.0, 9.5, 6.3 W Pulse width4 At 10, 20, and 30 kHz 34±10, 52±15, 69±15 ns - - - At 30, 50, and 70 kHz - 78±20, 107±20, 135±30 ns - - At 70, 100, and 130 kHz - 135±35, 180±45, 225±60 ns - At 40, 60, and 90 kHz - - - 95±30, 130±35, 180±50 ns Pulse energy fluctuations5 At 10, 20, and 30 kHz <1.0%, 10 – 30 kHz - - - At 30, 50, and 70 kHz - <1.5%, 30 – 50 kHz - - At 40, 60, and 90 kHz - - - <1.5%, 40 – 90 kHz Power drift over 8 hours2, 6 <±2% <±2% <±2% <±2% Beam roundness >85% circular >85% circular >85% circular >85% circular Polarization >100:1, horizontal >100:1, horizontal >100:1, horizontal >100:1, horizontal Warm-up time From cold start <20 minutes <20 minutes <20 minutes <20 minutes From standby <10 minutes <10 minutes <10 minutes <10 minutes Operating ambient temperature 15 to 35°C 15 to 35°C 15 to 35°C 15 to 35°C Relative humidity, non-condensing 10 to 80% 10 to 80% 10 to 80% 10 to 80% Weight 14.5 kg 14.5 kg 14.5 kg 14.5 kg 1. Specifications hold over different repetition rate ranges, depending on the laser model, as follows: Q301 from 10 to 30 kHz, for Q302 from 30 to 70 kHz, for Q303 from 70 to 130 kHz, and Q304 from 40 to 90 kHz. 2. Ambient temperature constant ±2°C. 3. Averaged for 1 hour after >80 minutes of continuous operation. 4. Pulse duration measured according to method detailed in JDSU application note titled “Optical Pulse Width Measurement T echniques for Q-Series Lasers.” 5. Pulse Energy Fluctuations = σ / μ x 100%, σ = standard deviation, μ = average pulse energy. 6. Measured after more than 80 minutes of continuous operation.

Q Series Laser Head Specifications Parameter Q331-HD Q332-HD Q333-HD Wavelength 355 nm 355 nm 355 nm Spatial mode TEM00 TEM00 TEM00 M-squared1 <1.2 <1.2 <1.2 Waist location1 (internal, from beam exit) 42±0.4 cm 42±0.4 cm 42±0.4 cm Waist diameter1, 1/e2 0.26 mm nominal 0.26 mm nominal 0.26 mm nominal Beam pointing drift, full angle <10 µrad/°C <10 µrad/°C <10 µrad/°C Pointing drift, over 8 hours, full angle2 <50 µrad <50 µrad <50 µrad Beam position accuracy, unit to unit <2.5 mm from nominal <2.5 mm from nominal <2.5 mm from nominal Beam pointing accuracy, unit to unit <1° from nominal <1° from nominal <1° from nominal Repetition rate Internally triggered 5 to 250 kHz 5 to 250 kHz 5 to 250 kHz Externally triggered 0 to 250 kHz 0 to 250 kHz 0 to 250 kHz Constant pulse energy range <10 kHz <30 kHz <50 kHz Average output power3 At 10, 20, and 30 kHz ≥5.0, 4.0 and 3.0 W - - At 30, 50, and 70 kHz - ≥4.0, 3.4, and 2.5 W - At 70, 100, and 130 kHz - - ≥3.6, 2.5, and 1.6 W Pulse width4 At 10, 20, and 30 kHz 34±10, 52±15, 69±15 ns - - At 30, 50, and 70 kHz - 78±20, 107±20, 135±30 ns - At 70, 100, and 130 kHz - 132±30, 168±40, 204±55 ns Pulse energy fluctuations5 At 10, 20, and 30 kHz <2.0%, 10 – 30 kHz - - At 30, 50, and 70 kHz - <3%, 30 – 50 kHz - Power drift over 8 hours2, 6 <±2% <±2% <±2% Beam roundness >85% circular >85% circular >85% circular Polarization >100:1, horizontal >100:1, horizontal >100:1, horizontal Warm-up time From cold start <20 minutes <20 minutes <20 minutes From standby <10 minutes <10 minutes <10 minutes Operating ambient temperature 15 to 35°C 15 to 35°C 15 to 35°C Relative humidity, non-condensing 10 to 80% 10 to 80% 10 to 80% Weight 14.5 kg 14.5 kg 14.5 kg 1. Specification holds over different repetition rate ranges, depending on the laser model, as follows: Q331 from 10 to 30 kHz, for Q332 from 30 to 70 kHz, for Q333 from 70 to 130 kHz. 2. Ambient temperature constant ±2°C. 3. Averaged for 1 hour after >80 minutes of continuous operation. 4. Pulse duration measured according to method detailed in JDSU application note titled “Optical Pulse Width Measurement T echniques for Q-Series Lasers.” 5. Pulse Energy Fluctuations = σ / μ x 100%, σ = standard deviation, μ = average pulse energy. 6. Measured after more than 80 minutes of continuous operation. Continued HIGH-POWER Q-SWITCHED DIODE-PUMPED UV LASER

HIGH-POWER Q-SWITCHED DIODE-PUMPED UV LASER Q-PS-1000R Power Supply Parameter Specification Front panel/display Power on/off key Sh utter open/closed switch (Status LED) Status Display (4 line x 20 character vacuum fluorescent) RS232 Serial Port Connector (9-pin D-sub) Rear panel RS232 Serial Port Connector (Identical to front panel) Interlock connector (2-pin, 0.1” spacing) Q switch RF connector (SMA connector) Umbilical connector (multi-pin D-shaped) Chiller communication port (9-pin D-sub) Emission indicator connector (2-pin, 0.1” spacing) External control port (10-pin 3M-style) Slot for optional standard or custom interface board (standard with 3 BNC connectors) Ground pin Fuse holder Power Switch Power cord connector Weight 20.5 lbs (9.3 kg) Frequency 100 to 240 V AC, 50 – 60 Hz Power <550 W (400 W typical) Input and Ambient Voltage, frequency 100 to 240 V AC, 50 – 60 Hz Power <550 W (400 W typical) Operating ambient temperature 15 to 35°C Relative humidity, non-condensing 10 – 80% Storage temperature -20 to 55°C QA-CH Chiller Parameter Specification Cooling capacity >300 W Refrigerant R134a Coolant Distilled or tap water Reservoir volume <1 gal (3.8 l) Coolant flow rate <0.4 gpm at 6 psi (1.5 lpm at 0.4 atm) Weight, reservoir empty 121 lbs (55 kg) Hose length Standard: 9.5 ft (2.9 m); optional: 16 ft (4.9 m) Control cable length 10 ft (3.0 m) Input and Ambient Voltage, frequency 1 90 to 110 and 180 to 220 V AC, 50 Hz 105 to 125 and 210 to 250 V AC, 60 Hz Power <1000 W (700 W typical) Operating ambient temperature 15 to 35°C Relative humidity, non-condensing 10 to 80% Storage temperature -20 to 55°C Orientation Upright position only 1. For 200/230 V AC version, the model number is QA-CH-E.

HIGH-POWER Q-SWITCHED DIODE-PUMPED UV LASER

Ordering Information

For more information on this or other products and their availability, please contact your local JDSU account manager or JDSU directly at 1-800-498-JDSU (5378) in North America and +800-5378-JDSU worldwide, or via e-mail at customer.service@jdsu.com. Laser Head Product Code Description Q331-HD 355 nm, 5 W class, 10 to 30 kHz Q332-HD 355 nm, 5 W class, 30 to 70 kHz Q333-HD 355 nm, 5 W class, 70 to 130 kHz Q301-HD 355 nm, 10 W class, 10 to 30 kHz Q302-HD 355 nm, 10 W class, 30 to 70 kHz Q303-HD 355 nm, 10 W class, 70 to 130 kHz Q304-HD 355 nm, 11 W class, 40 to 90 kHz Power Supply Product Code Description QA-CH-A11 Pair of 3 m hoses, straight/straight couplings QA-CH-A12 Pair of 5 m hoses, straight/straight couplings QA-CH-A21 Pair of 3 m hoses,r i g ht-angle/straight couplings QA-CH-A22 Pair of 5 m hoses,r i g ht-angle/straight couplings QA-CH-A31 Pair of 3 m hoses,r i g ht-angle/right-angle couplings QA-CH-A32 Pair of 5 m hoses,r i g ht-angle/right-angle couplings Hose Kit Sample: Q331-HD (355 nm, 10 to 30 kHz laser head), Q-PS-1000R (power supply), Q-PS-A30R (3 meter flex umb cable set), QA-CH (standard voltage configuration chiller), and QA-CH-A11 (3 m hose, straight/straight couplings) Product Code Description Q-PS-1000R Standard power supply Umbilical Cable Product Code Description Q-PS-A30R 3 meter flex umbilical cable set Q-PS-A50R 5 meter flex umbilical cable set Q-PS-A70R 7 meter flex umbilical cable set Q-PS-A100R 10 meter molded umb cable set Product Code Description QA-CH Chiller with standard voltage configuration QA-CH-E Chiller with European voltage configuration Chiller

HIGH-POWER Q-SWITCHED DIODE-PUMPED UV LASER NORTH AMERICA : 800 498-JDSU (5378) WEBSITE : www.jdsu.comWORLDWIDE : +800 5378-JDSU Patent Information The products described in this data sheet are based on JDSU Intellectual Property which includes more than 1,800 United States and foreign registered patents. These patents are relevant to an extensive set of products and/or technology applications including JDSU’s laser products and associated technologies. For further information contact the JDSU Legal Department. Compliance with Regulatory Requirements These laser sources are generic (non-OEM) versions of JDSU diode-pumped, Q-switched laser systems. The lasers are Class IV lasers as defined by the Federal Register 21 CFR 1040.10 Laser Safety Standard. The Standard requires that certain performance features an d laser safety labels be provided on the product. The American National Standards Institute publishes a laser safety standard for users entitled American National Standard for t he Safe Use of Lasers (ANSI Z136.1). JDSU recommends that laser users obtain and follow the procedures described in this ANSI Standard. Warranty JDSU diode-pumped Q Series laser systems are warranted to be free of defects in materials and workmanship for thirteen months from the date of shipment or for 5,000 operating hours, whichever occurs first. Product specifications and descriptions in this document subject to change without notice. © 2009 JDS Uniphase Corporation 10143146 006 0309 QSERIES.DS.CL.AE March 2009