PSMT-4-3X ENTEGRIS | Alldatasheet
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Technical content
ADVANCED MATERIALS HANDLING PrimeLock® Straight Union, Tube, Minimum Length A premium PFA fitting for high-purity and corrosive chemical applications Entegris has supplied innovative connection technology into the high-purity chemical handling markets for over 30 years. Our PrimeLock® fittings (available in sizes from 1/4" to 1½" and 40 mm) are clean, robust, and very easy to assemble. With audible and visual indicators, users can quickly verify the proper makeup of the connection. Heat is not required to assemble this fitting, saving time and money. PrimeLock fittings perform effectively in the most demanding chemical applications at both ambient and elevated temper- atures. The ultraclean design provides enhanced reliability within your system, with an all-PFA wetted construction. PrimeLock fittings are fully tested using our stringent testing and qualification methodology. This extremely robust, clean fitting is the most reliable connection technology on the market.
APPLICATIONS
High-purity, corrosive chemical handling• Semiconductor applications Photolithography○ Bulk chemical delivery○ CMP○ Wet etch and clean○ High-temperature cleaning processes○ Solar, LED, flat panel display• Excellent performance with low surface tension chemistries• PrimeLock straight, minimum tube union, available in sizes up to 1-1/2" FEATURES & BENEFITS Ease of assembly Provides consistent and repeatable fitting makeup All wetted PFA components Offers broad chemical compatibility Robust thread design No cross-threading, quick makeup, increased sealing force Unique seal design Nonwetted insert reduces entrapment, leak points, and flow interruptions No heat required to flare tubing Saves time and money; reduces operator variability Connection verification ring Audible and visual indication of proper fitting makeup Capable of elevated temperature ratings, all sizes Simplifies product selection and is compatible with high-temperature chemical processes Innovative dual-wrench design for 1½" or 40 mm nuts Make it easier to assemble fittings, saving time and money
1/4" - 1 1/4" Sizes 1 1/2" and 40 mm Sizes Materials Body, insert, nut PFA PFA Operating conditions* Media pressure 827 kPa (120 psig) @ 21°C (70°F) 689 kPa (100 psig) @ 21°C (70°F) 276 kPa (40 psig) @ 200°C (392°F) 276 kPa (40 psig) @ 150°C (302°F) Temperature range (fluid) Compliant RoHS RoHS *1 1/4" PrimeLock "SpaceSaver" connections are rated to 586 kPa (85 psig) @ 100°C (212°F). Applicable PFA Tube Dimensions OD OD Tolerance Wall Thickness Wall Thickness Tolerance PERFORMANCE DATA Note: 1 1/4" PrimeLock "SpaceSaver" connections are rated to 586 kPa (85 psig) @ 100°C (212°F). Fittings Reliability Test Results
Test Type Test Conditions Acceptance Criteria Results Burst pressure Media pressure increased until leak occurs No external leakage prior to tube rupturing PASS No external leakage 1/4"-1 1/4": 1241 kPa (180 psig) water @ 23°C (73°F) 1 1/2" and 40 mm: 1034 kPa (150 psig) water @ 23°C (73°F) No external leakage after 1 million cycles @ 1.5 × rated pressure PASS No external leakage 1/4"-1 1/4": 414 kPa (60 psig) hydraulic oil @ 200°C (392°F) Cyclic pressure leak test 1 1/2" and 40 mm: 414 kPa (60 PSIG) hydraulic oil @ 150°C (302°F) No external leakage after 1 million cycles @ 1.5 × rated pressure PASS No external leakage High pressure leak test Submerge fitting Apply nitrogen pressure equaling 80% of the tube burst pressure No external leakage allowed PASS No external leakage Tube pull out test Apply tensile load to tube/fitting until tube separates from fitting 1/4" (178 N) 40 lbf 3/8" (400 N) 90 lbf 1/2" (534 N) 120 lbf 3/4" (890 N) 200 lbf 1" (1112 N) 250 lbf 1 1/4" (1557 N) 350 lbf 1 1/2" and 40 mm (1779 N) 400 lbf PASS Chemical testing Sulfuric acid Fluorosurfactant Copper sulfate 25% TMAH No external leakage after 2 million cycles PASS PASS PASS PASS DIMENSIONS Part Number Leg 1 and Leg 2 Orifice Dimension A PSMT-4-3X 1/4" PrimeLock "SpaceSaver" 0.16" (4.1 mm) 0.43" (11.0 mm) PSMT-6-3X 3/8" PrimeLock "SpaceSaver" 0.25" (6.4 mm) 0.45" (11.4 mm) PSMT-8-3X 1/2" PrimeLock "SpaceSaver" 0.37" (9.4 mm) 0.44" (11.2 mm) PSMT-12-3X 3/4" PrimeLock "SpaceSaver" 0.62" (15.7 mm) 0.36" (9.1 mm) PSMT-16-3X 1" PrimeLock "SpaceSaver" 0.87" (22.1 mm) 0.46" (11.7 mm)
Please call your Regional Customer Service Center today to learn what Entegris can do for you. Visit entegris.com and select the Contact Us link to find the customer service center nearest you. TERMS AND CONDITIONS OF SALE All purchases are subject to Entegris’ Terms and Conditions of Sale. To view and print this information, visit entegris.com and select the Terms & Conditions link in the footer. Corporate Headquarters
129 Concord
Billerica, MA 01821 USA Customer Service Tel +1 952 556 4181 Fax +1 952 556 8022 Toll Free 800 394 4083 Entegris®, the Entegris Rings Design®, and other product names are trademarks of Entegris, Inc. as listed on entegris.com/trademarks. All third-party product names, logos, and company names are trademarks or registered trademarks of their respective owners. Use of them does not imply any affiliation, sponsorship, or endorsement by the trademark owner. ©2011-2022 Entegris, Inc. | All rights reserved. | Printed in the USA | 3110-12402DSA-1222 www.entegris.com DIMENSIONS PSMT-20-3X 1 1/4" PrimeLock "SpaceSaver" 1.10" (27.9 mm) 0.38" (9.7 mm) PSMT-24-3X 1 1/2" PrimeLock "SpaceSaver" 1.33" (33.8 mm) 0.52" (13.2 mm)
ORDERING INFORMATION
PART NUMBER LEG 1 AND LEG 2 PSMT-12-3X 3/4" PrimeLock® "SpaceSaver" PSMT-16-3X 1" PrimeLock® "SpaceSaver" PSMT-20-3X 1 1/4" PrimeLock® "SpaceSaver" PSMT-24-3X 1 1/2" PrimeLock® "SpaceSaver" PSMT-4-3X 1/4" PrimeLock® "SpaceSaver" PSMT-6-3X 3/8" PrimeLock® "SpaceSaver" PSMT-8-3X 1/2" PrimeLock® "SpaceSaver"