PLANARDL-100XY AEROTECH | Alldatasheet
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aerotech.com Aerotech’s PlanarDL-series stages offer excellent geometric and dynamic performance in a compact, low-profile package. A variety of travel and performance options make this stage ideal for applications ranging from surface profilometry to LED wafer scribing. Superior Stage Design The PlanarDL XY design allows for industry-leading planar geometric performance in applications where straightness and flatness of motion are critical. High-precision anti-creep crossed- roller bearings, precision-machined surfaces and Aerotech linear motors driving through the axes’ center-of-stiffness result in a positioning stage with exceptional geometric tolerances. The PlanarDL structural elements are optimized for high-dynamics and high-stiffness for the most demanding dynamic applications. Capable of achieving 1 m/s velocities and 1.5 g accelerations, the PlanarDL enables high-throughput, high-accuracy processing resulting in superior process yield and a low total cost of ownership. Unlike competitive products using recirculating bearings, the anti-creep crossed-roller bearings used in this design permit smooth motion making this an ideal stage solution for challenging scanning applications. Noncontact Direct-Drive Technology Only noncontact, direct-drive technology offers high-speed and accurate positioning coupled with maintenance-free operation and long service life. At the heart of the PlanarDL is Aerotech’s proprietary direct-drive technology. This drive technology allows for unmatched performance compared to other competitive screw-based and linear motor designs. The PlanarDL-200XY and -300XY stages are both available with one or two motors per axis, allowing optimization of each individual axis for the specific application and process. Regardless of the number of motors selected, the resulting drive force acts through the centers of friction and stiffness resulting in superior geometric performance and accuracy. Integrated Cable Management The cable management system on the PlanarDL is integrated into the stage and optimized for long life and performance. Additional standard options are available for extra servo axes or air/vacuum lines for vacuum chucks or other process pneumatics. Extreme Positioning Performance The PlanarDL is available in three positioning performance options. Relying upon decades of experience in system-level design including not only positioning mechanics, but also software and electronics, Aerotech has developed advanced technologies to push the envelope of precision. High-performance -PLUS and -ULTRA options are available to enable accuracies and straightness values down to ±400 nm and orthogonality down to 1 arc second. LINEAR STAGES PLANAR DL SERIES — PRODUCT HIGHLIGHTS — Integrated, low-profile, XY, linear-motor stage Excellent geometric performance (straightness to ±0.4 µm; flatness to ±1 µm) Anti-creep, precision crossed-roller bearings Large selection – nine models in travel and accuracy Aerotech’s PlanarDL – Superior Planar Performance
aerotech.com LINEAR STAGES | PLANAR DL SERIES PlanarDL Series Specifications Mechanical Specifications PlanarDL-100XY PlanarDL-200XY PlanarDL-300XY -PL1 -PL3(1) -PL4(1) -PL1 -PL3(1) -PL4(1) -PL1 -PL3(1) -PL4(1) Travel 100 mm x 100 mm 200 mm x 200 mm 300 mm x 300 mm Bidirectional Repeatability(2) ±0.1 µm Resolution (Minimum Incremental Motion) 3 nm Straightness ±1 µm ±0.4 µm ±1.5 µm ±0.5 µm ±2 µm ±0.75 µm Flatness ±1 µm ±1.5 µm ±2 µm Pitch 12 arc sec 15 arc sec 18 arc sec Roll 12 arc sec 15 arc sec 18 arc sec Yaw 6 arc sec 8 arc sec 10 arc sec Orthogonality 20 arc sec 5 arc sec 1 arc sec 20 arc sec 5 arc sec 1 arc sec 20 arc sec 5 arc sec 1 arc sec Maximum Speed 500 mm/s 750 mm/s 1000 mm/s Maximum Acceleration (No Load; Upper Axis) 1.5 g 1.0 g (x1 Motor) 1.5 g (x2 Motors) 1.0 g (x1 Motor) 1.5 g (x2 Motors) Maximum Force (Continous) 26 N 31 N (x1 Motor)
62 N (x2 Motors)
78 N (x1 Motor)
156 N (x2 Motors)
Load Capacity(3) Horizontal 15 kg 20 kg 30 kg Moving Mass Upper Axis 2.9 kg 6.3 kg (-M1 or -M3 Motor) 7.4 kg (-M2 or -M4 Motor) 16.3 kg (-M1 or -M3 Motor) 19.1 kg (-M2 or -M4 Motor) Lower Axis 8.4 kg 16.8 kg (-M1 Motor) 17.8 kg (-M2 or -M3 Motor) 19.0 kg (-M4 Motors) 45.0 kg (-M1 Motor) 48.1 kg (-M2 or -M3 Motor) 50.9 kg (-M4 Motors) Stage Mass(4) 11 kg 23-25 kg 53-63 kg Material Black Anodized Aluminum MTBF (Mean Time Between Failure) 30,000 Hours Notes: 1. The -PL3 and -PL4 options require the use of an Aerotech controller. 2. Repeatability specification assumes a feedback resolution of 20 nm or less. 3. On-axis loading for orientation listed. 4. Stage mass is a function of motor configuration. 5. Specifications for -PL1 and -PL3 options are per axis measured 25 mm above the tabletop. Specifications for -PL4 are XY measured 25 mm above the tabletop. PlanarDL-200XY with -CMS2 option.
aerotech.com 0 50 100 150 200 250 300 350 400 Applied Load (kg) Offset Distance (mm) PlanarDL-300XY applied load versus offset distance. 0 25 50 75 100 125 150 175 200 Applied Load (kg) Offset Distance (mm) PlanarDL-100XY applied load versus offset distance. 0 50 100 150 200 250 300 Applied Load (kg) Offset Distance (mm) PlanarDL-200XY applied load versus offset distance. Electrical Specifications PlanarDL-100XY PlanarDL-200XY PlanarDL-300XY Drive System Brushless Linear Servomotor Feedback Noncontact Linear Encoder Maximum Bus Voltage 340 VDC Limit Switches 5 V, Normally Closed Home Switch Near Center of XY Travel LINEAR STAGES | PLANAR DL SERIES PlanarDL Series Specifications
aerotech.com LINEAR STAGES | PLANAR DL SERIES PlanarDL-100XY Dimensions 230 230
200 SQ 100 SQ 75 SQ 120 SQ
~450 FROM STAGE 116.9 TYP 48 TYP 58 31.9 A 12X M5X0.8 HELICOIL 7.5 PRIMARY PATTERN
4.5 THRU TYP
37.3 100 TO 101.6 SLOTTED MTG Y / 2 FEEDBACK CONNECTORS MOTOR CONNECTORS 150 TO 152.4 SLOTTED MTG
13 TYP
12 TYP
5.5 TYP
SCALE 1:4 8X M5X0.8 HELICOIL 5 DIMENSIONS: MILLIMETERS MODEL XY NOMINAL TRAVEL XY ELEC LIMIT TRAVEL XY MECH LIMIT TRAVEL PlanarDL-100XY 100 106 110
aerotech.com LINEAR STAGES | PLANAR DL SERIES PlanarDL-100XY-CMS1/2 Dimensions
aerotech.com LINEAR STAGES | PLANAR DL SERIES PlanarDL-200XY Dimensions 335 335 300 SQ 200 SQ
100 SQ 222 SQ
~450 FROM STAGE 150 SQ A 16X M6X1.0 HELICOIL 9 PRIMARY PATTERN 47.7 200 TO 203.2 SLOTTED MTG Y / 2 FEEDBACK CONNECTORS MOTOR CONNECTORS 200 TO 203.2 SLOTTED MTG 17 TYP 13.5 TYP
6.8 TYP
SCALE 1:6 20X M5X0.8 HELICOIL 7.5 8X M6X1.0 HELICOIL 9 DIMENSIONS: MILLIMETERS C REVISIONS MCN REV. DESCRIPTION DATE APPROVED
17938 A STAGE NAME UPDATED: PlanarDL-200XY WAS PLANAR DL-200XY 16DEC16 BMIKLANCIE
ECO0001370 B Cable length updated from 500mm to 450mm 18SEP18 TMITCH ECO0004017 C STAGE IMAGES UPDATED TO REV 2 DESIGN 17-Feb-20 GMATHEWS MODEL XY NOMINAL TRAVEL XY ELEC LIMIT TRAVEL XY MECH LIMIT TRAVEL PlanarDL-200XY 200 206 210 BMIKLANCIE MODEL BY: MODEL FILENAME: PlanarDL-200XY-CAT C PlanarDL-200XY PART CODE: PlanarDL-200XY PlanarDL-200XY-CAT PART NAME: DWG. NO. REV CATALOG DRAWING SHEET 1 OF 1 24-JUN-13 DATE BOCONNOR DRAW BMIKLANCIE BMIKLANCIE NAME CHECK APPR. 24-JUN-13 24-JUN-13 PLACE DRAWING VIEWS BELOW
aerotech.com LINEAR STAGES | PLANAR DL SERIES PlanarDL-200XY-CMS1/2 Dimensions 539 CMS CABLES ~450 FROM STAGE 402 335 335 204 310
35 CABLE LOOP
40 STANDARD
DIMENSIONS: MILLIMETERS -CMS1 -CMS2
aerotech.com LINEAR STAGES | PLANAR DL SERIES PlanarDL-300XY Dimensions 470 470
425 SQ 250 SQ 290 SQ
~450 FROM STAGE A 8X M8X1.25 HELICOIL 12 PRIMARY PATTERN
250 TO 254
200 TO 203.2 SLOTTED MTG X / 2 425 TO 431.8 SLOTTED MTG
9 TYP
17 TYP
21.4 TYP
SCALE 1:8 12X M5X0.8 HELICOIL 7.5 16X M6X1.0 HELICOIL 9 DIMENSIONS: MILLIMETERS C REVISIONS MCN REV. DESCRIPTION DATE APPROVED
17939 A STAGE NAME UPDATED: PlanarDL-300XY WAS PLANAR DL-
ECO0001371 B CORRECTED WIRING DIMENSION FROM 500mm TO 450mm 18SEP18 TMITCH ECO0004017 C STAGE IMAGES UPDATED TO REV 2 DESIGN 17-Feb-20 GMATHEWS MODEL XY NOMINAL TRAVEL XY ELEC LIMIT TRAVEL XY MECH LIMIT TRAVEL PlanarDL-300XY 300 306 310 BMIKLANCIE MODEL BY: MODEL FILENAME: PlanarDL-300XY-CAT C PlanarDL-300XY PART CODE: -CMS1, -CMS2 PlanarDL-300XY PlanarDL-300XY-CAT PART NAME: DWG. NO. REV CATALOG DRAWING SHEET 1 OF 1 24-JUN-13 DATE BOCONNOR DRAW BMIKLANCIE BMIKLANCIE NAME CHECK APPR. 24-JUN-13 24-JUN-13 PLACE DRAWING VIEWS BELOW
aerotech.com LINEAR STAGES | PLANAR DL SERIES PlanarDL-300XY-CMS1/2 Dimensions CMS CABLES ~450 FROM STAGE 537 470 470 724 427 254 50 CABLE LOOP ALLOWANCE 6MM OD TUBING AIR INLET6MM OD TUBING AIR OUTLET SEE STANDARD DRAWING FOR MOUNTING HOLES 114 115 DIMENSIONS: MILLIMETERS -CMS1 -CMS2
aerotech.com PlanarDL Series Ordering Information PlanarDL Two Axis Mechanical-Bearing Direct-Drive Linear Stage PlanarDL-100XY Two axis mechanical-bearing direct-drive linear stage, 100 x 100 mm travel PlanarDL-200XY Two axis mechanical-bearing direct-drive linear stage, 200 x 200 mm travel PlanarDL-300XY Two axis mechanical-bearing direct-drive linear stage, 300 x 300 mm travel Motor (Required) - Not Applicable for PlanarDL-100XY -M1 1 motor on upper axis; 1 motor on lower axis -M2 2 motors on upper axis; 1 motor on lower axis -M3 1 motor on upper axis; 2 motors on lower axis -M4 2 motors on upper axis; 2 motors on lower axis Feedback (Required) -E1 Incremental encoders, 1 Vpp on upper and lower axes -E2 Incremental encoders, 0.1 µm Digital RS422 on upper axis, 1 Vpp on lower axis -E3 Incremental encoders, 1 Vpp on upper axis, 0.1 µm Digital RS422 on lower axis -E4 Incremental encoders, 0.1 µm Digital RS422 on upper and lower axes Cable Management (Optional) -CMS1 Cable management for air/vacuum line -CMS2 Cable management for air/vacuum line and 3rd axis motor/feedback Performance Grade (Required) -PL1 Base performance -PL3 High-accuracy performance, PLUS -PL4 Ultra-high accuracy 2D performance, ULTRA Note: -PL3 and -PL4 performance grades require Aerotech controller. Integration (Required) Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as pos- sible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required, or if you desire custom integration support with your system. -TAS Integration - Test as system Testing, integration, and documentation of a group of components as a complete system that will be used together (ex: drive, controller, and stage). This includes parameter file generation, system tuning, and documentation of the system configuration. -TAC Integration - Test as components Testing and integration of individual items as discrete components that ship together. This is typically used for spare parts, replacement parts, or items that will not be used together. These components may or may not be part of a larger system. LINEAR STAGES | PLANAR DL SERIES