PHOTRIX

PHOTRIX ADVANCEDENERGY | Alldatasheet

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©2019 Advanced Energy Industries, Inc. The Mikron® PhotriX TM series of infrared thermometers offers best-in-class radiation pyrometry in a robust and flexible package designed for ease of integration. The system can be used as a single channel measurement device or multiple units can be networked together using a mutli-channel interface module. These pyrometers use short wavelength, narrow bandwidth detectors that minimize the effect of emissivity errors and improve accuracy of the measurements. They also offer ambient temperature compensation to combat drift for unmatched long-term stability and reproducibility for long process cycle applications like crystal growth and for repeatable results. PRODUCT HIGHLIGHTS  Lowest temperature capability short wavelength pyrometer  Five spectral response options  Configurable collection optics (lens, lightpipe, and/or fiber optics)  Precision optics with spot size as small as 0.5 mm  High speed (1 ms) TYPICAL APPLICATIONS MIKRON PHOTRIX SERIES Ultra accurate, digital, and precise infrared thermometers with unmatched low temperature capability. Various temperature ranges between 30 to 2600°C (86 to 4712°F). Temperature Ranges Various ranges between 30 and 2600°C (86 to 4712°F) Spectral Ranges 0.65 µm 0.88 µm 0.9 µm 1.55 µm 0.7 to 1.65 µm Measurement Uncertainty ±1.5°C or 0.15% oR Repeatability 0.1°C Optics Configurable collection optics: Fixed optics, lightpipe, or fiber optics with fixed optics or lightpipe Field of View Optics or lightpipes adapted to customers request (min 0.5 mm) AT A GLANCE  Low emissivity metals  Aluminum  Thin-film CIGS solar deposition  Thin-film amorphous silicon deposition  Laser heating processes  CZ crystal growth  Optical fiber drawing  Induction heating

2 advancedenergy.com MIKRON PHOTRIX SERIES Specifications Temperature Range See configuration tables Accuracy ±1.5°C or 0.15% of reading Precision 0.01°C, wavelength, speed and temperature dependent Drift 0.15°C per year Ambient Temperature 10 to 60°C (50 to 140°F) Weight Lightpipe: 310 g (~0.68 lb) Lens: 500 g (~1.10 lb) Output RS232 (standard), Modbus protocol supported, Analog Output (optional) Power 110/220 VAC, 50 Hz and 60 Hz (also accepts 10 to 30 VDC) Response Time User adjustable up to 1 ms TECHNICAL DATA Scope of Delivery  Pyrometer and collection optics with user manual  DIN-rail mount Communications Interface Module (CIM)  Electrical cable (4 m) to connect instrument to CIM  RS232 cable (3 m) to connect CIM to PC  Power supply (standard system includes a universal AC/DC power supply, but CIM can be powered directly with 12 VDC) and North American line cord  PC software included Communication Options  Analog: 4 to 20 mA or 0 to 10 V  Serial: RS232 or RS422  PC based GUI software  Modbus  Easy to use with LabView  Ethernet with optional MCI module WAVELENGTHS Spectral Sensitivity Temperature Range Typical Applications Code Spectral Response Celsius Fahrenheit Min Max Min Max /065 0.65 µm 400 2600 752 4712 High temperature metals, solar, SiC /088 0.88 µm 220 2600 428 4712 Compound semiconductor /090 0.9 µm 210 2600 410 4712 Semiconductor, silicon /155 1.55 µm 70 2600 158 4712 Metal and ceramic processes requiring highest accuracy/precision Standard 0.7 to 1.65 µm 30 2400 86 4352 Low temperature metals, ceramics, and metal oxide processes The PhotriX system is available in five different spectral response ranges. Four of these ranges offer narrow spectral bandpass. Choosing the shortest wavelength possible for an application offers the following benefits:  Better sensitivity with smaller measurement errors due to emissivity uncertainty  Enables use of fiber optics in collection optics path  Ability to measure silicon and other semiconductor materials that are transparent at longer wavelengths 1 Temperature range is configured at factory. Higher temperatures can be special ordered up to 4000°C.

advancedenergy.com 3 MIKRON PHOTRIX SERIES PRODUCT SCHEMATIC mm 84 mm 56 mm 561 mm 53.52 ∅ mm 5.33 ∅ 82 - "8/3 1# daerhT .51-63M ro erutarepA raelC mm 5.02 topS sucoF ecnatsiD gnikroW mm 53.52 ∅ mm511 Vacuum Sleeve Purge gas inlets can optionally be incorporated into the sleeve Sheath (Optional) Available in stainless steel, quartz, or sapphire Lightpipe 2 mm diameter 25.4 mm (1") Standard length Standard dia. 1/4", 3/8", & 1/2" Customer Defined Length Standard diameter 3.8 mm Customer Defined Length Standard lengths available up to 225 mm Lengths up to 375 mm available with extended lead times. Please consult factory. PhotriX Fixed Focus Lens Version  Custom spot sizes and working distances available per OEM requirements  Sensor mounted using integrated threads on body (English or metric threads) mm 84 mm 56 mm 561 mm 53.52 ∅ mm 5.33 ∅ 82 - "8/3 1# daerhT .51-63M ro erutarepA raelC mm 5.02 topS sucoF ecnatsiD gnikroW mm 53.52 ∅ mm511 65 mm Clearance Required for Straight Connector (shown). Optional right angle connector requires 32 mm for clearance. PhotriX Lightpipe Version  Tip of lightpipe positioned close to target  Stainless steel sleeve is used for mounting in vacuum / pressure fittings  Sheaths of stainless steel, quartz, or sapphire are optional  Purging gas can be used to protect against deposition onto the lightpipe optics KEY FEATURES By using both short and narrowband wavelengths, the PhotriX series of pyrometers allows Advanced Energy to push the accuracy of infrared thermometry to the natural limits. The accuracy improvement can be more than an order of magnitude moving from 8 to 14 µm to 0.9 µm (900 nm) measurement wavelengths. Further, the Photrix series’ unmatched signal-to-noise ratio (SNR) allows the measurement of significantly lower temperatures compared to other commercially available sensors using the same short wavelengths.

4 advancedenergy.com MIKRON PHOTRIX SERIES OPTICS The optics capture the thermal radiation from the measurement target and deliver it to the detector. The PhotriX series collection optics can be configured in four distinct forms to better suit an application’s requirements. 1 - Integrated Lens For viewing a small spot on a target from a distance, through windows, or through viewports. Spot sizes as small as 0.5 mm with measurements as low as 65°C (0.7 to 1.65 µm) and 270°C (0.9 µm). Standard working distance between 50 and 200 mm that are factory focused to minimize spot size. 2 - Direct Lightpipe The lightpipe is an optical rod constructed of a single crystal sapphire and designed for direct insertion into process chambers through standard vacuum fittings. Lightpipes can be factory bent, inserted through small holes or vacuum fittings, and can survive harsh temperature and pressure environments. Measurements as low as 30°C (0.7 to 1.65 µm) and 210°C (0.9 µm). 3 - Fiber Optics to Lens For applications with high ambient temperatures or flammable/combustible hazards. The fiber optics allow the electronics to be safely located separate from measurement area. If mechanical space is limited near the measurement area, then fiber optics can offer more flexible integration and mounting options Measurements as low as 65°C (0.7 to 1.65 µm) and 270°C (0.9 µm). 4 - Fiber Optics to Lightpipe Similar to Fiber Optics to Lens, this configuration is also considered for applications with high ambient temperatures or flammable/combustible hazards. The use of a lightpipe is usually in conjunction with a process chamber or reactor. Measurements as low as 60°C (0.7 to 1.65 µm) and 240°C (0.9 µm). Focus Spot Working Distance ANALOG OUTPUT MODULE

14 Bit Voltage / Current Output

shown with fixed focus lens Fiber Optics to Remote Lens Light Pipe Fiber Optics to Light Pipe

advancedenergy.com 5 MIKRON PHOTRIX SERIES PhotriX Integrated Lens Configuration: Temperature Ranges Configuration Part Number Spectral Response Collection Optics Mounting Threads Spot Size Chart Column Temperature Range Min (°C) Max (°C) Min (°F) Max (°F) ML-GAPX-XXX-M 0.7 to 1.65 µm Lens, XXX working distance M36-15 A 65 1000 149 1832 ML-GAPX-XXX-E 0.7 to 1.65 µm Lens, XXX working distance 1-3/8” -28 A 65 1000 149 1832 ML-GAPX-HXXX-M 0.7 to 1.65 µm Lens, XXX working distance M36-15 B 135 2400 275 4352 ML-GAPX-HXXX-E 0.7 to 1.65 µm Lens, XXX working distance 1-3/8” -28 B 135 2400 275 4352 ML-AAPX/088-XXX-M 0.88 µm Lens, XXX working distance M36-15 C 280 2150 536 3902 ML-AAPX/088-XXX-E 0.88 µm Lens, XXX working distance 1-3/8” -28 C 280 2150 536 3902 ML-AAPX/090-XXX-M 0.9 µm Lens, XXX working distance M36-15 C 270 2150 518 3902 ML-AAPX/090-XXX-E 0.9 µm Lens, XXX working distance 1-3/8” -28 C 270 2150 518 3902 ML-GAPX/155-XXX-M 1.55 µm Lens, XXX working distance M36-15 D 125 2600 257 4712 ML-GAPX/155-XXX-E 1.55 µm Lens, XXX working distance 1-3/8” -28 D 125 2600 257 4712 ML-AAPX/088-HXXX-M 0.88 µm Lens, XXX working distance M36-15 E 310 2600 590 4712 ML-AAPX/088-HXXX-E 0.88 µm Lens, XXX working distance 1-3/8” -28 E 310 2600 590 4712 ML-AAPX/090-HXXX-M 0.9 µm Lens, XXX working distance M36-15 E 300 2600 572 4712 ML-AAPX/090-HXXX-E 0.9 µm Lens, XXX working distance 1-3/8” -28 E 300 2600 572 4712 ML-GAPX/155-HXXX-M 1.55 µm Lens, XXX working distance M36-15 F 180 2600 356 4712 ML-GAPX/155-HXXX-E 1.55 µm Lens, XXX working distance 1-3/8” -28 F 180 2600 356 4712

ORDERING INFORMATION

PhotriX Integrated Lens Configuration: Spot Sizes Working Distance A B C D E F mm in mm in mm in mm in mm in mm in mm in Specify lens working distance, XXX, in mm Available Options  Custom spot sizes  Custom field of views

6 advancedenergy.com MIKRON PHOTRIX SERIES PhotriX Direct Lightpipe Configuration Configuration Part Number Spectral Response Description of 2 mm diameter Lightpipe Collection Optics Temperature Range Min (°C) Max (°C) Min (°F) Max (°F) ML-GAPX-LP2-XXX 0.7 to 1.65 µm XXX mm length 30 670 86 1238 ML-GAPX-LP2-XXX-SS-YYY 0.7 to 1.65 µm XXX mm length, with sapphire sheath YYY mm length 30 670 86 1238 ML-GAPX-LP2-XXX-SQ-YYY 0.7 to 1.65 µm XXX mm length, with quartz sheath YYY mm length 30 670 86 1238 ML-AAPX/088-LP2-XXX 0.88 µm XXX mm length 220 1300 428 2372 ML-AAPX/088-LP2-XXX-SS-YYY 0.88 µm XXX mm length, with sapphire sheath YYY mm length 220 1300 428 2372 ML-AAPX/088-LP2-XXX-SQ-YYY 0.88 µm XXX mm length, with quartz sheath YYY mm length 220 1300 428 2372 ML-AAPX/090-LP2-XXX 0.9 µm XXX mm length 210 1300 410 2372 ML-AAPX/090-LP2-XXX-SS-YYY 0.9 µm XXX mm length, with sapphire sheath YYY mm length 210 1300 410 2372 ML-AAPX/090-LP2-XXX-SQ-YYY 0.9 µm XXX mm length, with quartz sheath YYY mm length 210 1300 410 2372 ML-GAPX/155-LP2-XXX 1.55 µm XXX mm length 70 1100 158 2012 ML-GAPX/155-LP2-XXX-SS-YYY-Y 1.55 µm XXX mm length, with sapphire sheath YYY mm length 70 1100 158 2012 ML-GAPX/155-LP2-XXX-SQ-YYY 1.55 µm XXX mm length, with quartz sheath YYY mm length 70 1100 158 2012 ORDERING INFORMATION CONTINUED

1 Directly connected lightpipes have a ~120° viewing angle

 Specify length of lightpipe, XXX, in mm  Specify length of optional sheath, YYY , in mm Options  Bent lightpipe tip  Custom lightpipe and sheath diameters  Purging gas vacuum sleeves PhotriX Integrated Lightpipe Configuration Configuration Part Number Spectral Response Description of 2 mm diameter Lightpipe Collection Optics Temperature Range Min (°C) Max (°C) Min (°F) Max (°F) ML-GAPX-LO-SZ-LP2-XXX 0.7 to 1.65 µm XXX mm length, Z m fiber optic cable with 200 µm core 100 1400 212 2552 ML-GAPX-LO-MZ-LP2-XXX 0.7 to 1.65 µm XXX mm length, Z m fiber optic cable with 600 µm core 65 950 149 1742 ML-GAPX-LO-LZ-LP2-XXX 0.7 to 1.65 µm XXX mm length, Z m fiber optic cable with 1000 µm core 60 900 140 1652 ML-AAPX/088-LO-SZ-LP2-XXX 0.88 µm XXX mm length, Z m fiber optic cable with 200 µm core 300 2600 572 4712 ML-AAPX/088-LO-MZ-LP2-XXX 0.88 µm XXX mm length, Z m fiber optic cable with 600 µm core 265 1900 509 3452 ML-AAPX/088-LO-LZ-LP2-XXX 0.88 µm XXX mm length, Z m fiber optic cable with 1000 µm core 250 1600 482 2912 ML-AAPX/090-LO-SZ-LP2-XXX 0.9 µm XXX mm length, Z m fiber optic cable with 200 µm core 290 2600 554 4712 ML-AAPX/090-LO-SMZ-LP2-XXX 0.9 µm XXX mm length, Z m fiber optic cable with 600 µm core 255 1900 491 3452 ML-AAPX/090-LO-LZ-LP2-XXX 0.9 µm XXX mm length, Z m fiber optic cable with 1000 µm core 240 1600 464 2912 ML-GAPX/155-LO-SZ-LP2-XXX 1.55 µm XXX mm length, Z m fiber optic cable with 200 µm core 155 2600 311 4712 ML-GAPX/155-LO-MZ-LP2-XXX 1.55 µm XXX mm length, Z m fiber optic cable with 600 µm core 115 2400 239 4352 ML-GAPX/155-LO-LZ-LP2-XXX 1.55 µm XXX mm length, Z m fiber optic cable with 1000 µm core 100 1800 212 3272

1 When used with fiber optics, lightpipes have a ~45° viewing angle

 Specify length of lightpipe, XXX, in mm  Specify length of fiber optic cable, Z, in m Options  Bent lightpipe tip  Custom lightpipe and sheath diameters  Custom fiber optic cable assemblies  Purging gas vacuum sleeves

advancedenergy.com 7 MIKRON PHOTRIX SERIES Fiber Optics to Lens Configuration: Temperature Ranges Configuration Part Number Spectral Response Collection Optics Spot Size Chart Column Temperature Range Min (°C) Max (°C) Min (°F) Max (°F) ML-GAPX-LO-SZ-RPY-XXX 0.7 to 1.65 µm XXX mm lens working distance, Z m fiber optic cable with 200 µm core A 115 2600 239 4712 ML-GAPX-LO-MZ-RPY-XXX 0.7 to 1.65 µm XXX mm lens working distance, Z m fiber optic cable with 600 µm core B 80 1300 176 2372 ML-GAPX-LO-LZ-RPY-XXX 0.7 to 1.65 µm XXX mm lens working distance, Z m fiber optic cable with 1000 µm core C 65 1100 149 2012 ML-AAPX/088-LO-SZ-RPY-XXX 0.88 µm XXX mm lens working distance, Z m fiber optic cable with 200 µm core D 345 2600 653 4712 ML-AAPX/088-LO-MZ-RPY-XXX 0.88 µm XXX mm lens working distance, Z m fiber optic cable with 600 µm core E 300 2500 572 4532 ML-AAPX/088-LO-LZ-RPY-XXX 0.88 µm XXX mm lens working distance, Z m fiber optic cable with 1000 µm core F 280 2150 536 3902 ML-AAPX/090-LO-SZ-RPY-XXX 0.9 µm XXX mm lens working distance, Z m fiber optic cable with 200 µm core D 335 2600 635 4712 ML-AAPX/090-LO-MZ-RPY-XXX 0.9 µm XXX mm lens working distance, Z m fiber optic cable with 600 µm core E 290 2500 554 4532 ML-AAPX/090-LO-LZ-RPY-XXX 0.9 µm XXX mm lens working distance, Z m fiber optic cable with 1000 µm core F 270 2150 518 3902 ML-GAPX/155-LO-SZ-RPY-XXX 1.55 µm XXX mm lens working distance, Z m fiber optic cable with 200 µm core G 160 2600 320 4712 ML-GAPX/155-LO-MZ-RPY-XXX 1.55 µm XXX mm lens working distance, Z m fiber optic cable with 600 µm core H 145 2600 293 4712 ML-GAPX/155-LO-LZ-RPY-XXX 1.55 µm XXX mm lens working distance, Z m fiber optic cable with 1000 µm core I 125 2600 257 4712 ORDERING INFORMATION CONTINUED Fiber Optics to Lens Configuration: Spot Sizes Working Distance A B C D E F G H I mm in mm in mm in mm in mm in mm in mm in mm in mm in mm in  Specify length of lightpipe, XXX, in mm  Specify length of fiber optic cable, Z, in m Options  Custom spot sizes and field of views  Fiber bundles  Vacuum compatible fiber optic cables

ENG-Photrix-235-01 6.19 DS TITLE For international contact information, visit advancedenergy .com. sales.support@aei.com +1 970 221 0108 ABOUT ADVANCED ENERGY Advanced Energy (AE) has devoted more than three decades to perfecting power for its global customers. AE designs and manufactures highly engineered, precision power conversion, measurement and control solutions for mission-critical applications and processes. AE’s power solutions enable customer innovation in complex semiconductor and industrial thin film plasma manufacturing processes, demanding high and low voltage applications, and temperature-critical thermal processes. With deep applications know-how and responsive service and support across the globe, AE builds collaborative partnerships to meet rapid technological developments, propel growth for its customers and power the future of technology. Specifications are subject to change without notice. Not responsible for errors or omissions. ©2019 Advanced Energy Industries, Inc. All rights reserved. Advanced Energy®, Mikron®, Photrix TM , and AE® are U.S. trademarks of Advanced Energy Industries, Inc.