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Document overview

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Technical content

Features

  • Highly reliable, solid state silicon pressure sensors
  • Available in absolute and differential versions
  • Standard pressure ranges: 0 to 100, 0 to 200, and 0 to 700 kPa
  • Nonlinearity < 0.25 %FSO
  • 2X overpressure limit

Applications

  • Process control systems
  • Pneumatic controls
  • Biomedical instruments
  • Hydraulic systems

Description

NovaSensor’s P111 piezoresistive pressure sensors are offered in a miniature 0.10 in x 0.12 in (2.7 mm x 3.2 mm) die. When excited with 1.0 mA, the P111 produces a millivolt output that is proportional to input pressure. The P111 is available as an absolute pressure sensor where the media pressure is referenced to an internal vacuum sealed in the die. The P111 is also available as a differential and gage sensor. With NovaSensor’s SenStable ® process, the P111 will provide very good long-term stability and excellent repeatability. Sensor die have a 63 mil glass con- straint layer. For thicker isolation constraint contact the factory. Amphenol Advanced Sensors

Parameter Value Units Notes General Pressure Range 100 KPa -15 psi (-1 bar)

200 KPa -30 psi (-2 bar)

700 KPa -100 psi (-7 bar)

Maximum Overpressure 2X rated pressure Electrical @ 72°F (25°C) unless noted Excitation 1.0 mA 10 VDC Maximum Input Impedance 5000 ±20% Ω Output Impedance 5000 ±20% Ω Environmental Temperature Range Operating -40 to 257 °F (-40°C to 125°C) Storage -67 to 302 °F (-55°C to 150°C) Mechanical Weight 0.00009 lb (0.04 grams) Media Compatibility Clean dry air, non-corrosive gases Performance Parameters (1) Value (6) Units Notes Zero Offset ±50 mV 1 Full Scale (FS) Output 133 ± 33 mV Linearity 0.25 %FSO 2 Pressure Hysteresis 0.05 %FSO Temperature Coefficient of Zero 30 µV/ V / °C 3 Temperature Coefficient of Resistance 0.27 % /°C 3 Temperature Coefficient of Sensitivity -0.19 %FSO/°C 3 Thermal Hysteresis of Zero 0.2 %FSO 3 Long Term Stability of FSO 0.2 %FSO 4 1. 0 KPaA for absolute sensors, 0 KPaG for differential or gage sensors. 2. Best fit straight line. 3. Between 32°F and 158°F (0°C and 70°C). 4. Typical value over one year. 5. All values measured at 77°F (25°C) and 1 mA excitation, unless otherwise noted. Shipping and Handling All wafers are shipped in protective containers. The wafers are sawn on sticky tape with plastic rings. All wafers are electrically probed and visually inspected. Samples from each wafer verify offset , FS output , and linearity. Electrical rejects are inked with red dots. Visual rejects are inked with blue dots. Each wafer will have the following information: Lot number, wafer number, device number, and the number of good dice. Warranty NovaSensor warrants its products against defects in material and workmanship for 12 months from the date of shipment . Products not subjected to misuse will be repaired or replaced. NovaSensor reserves the right to make changes without further notice to any products herein. NovaSensor makes no warranty, representation or guarantee regarding the suitability of its products for any particular application. NovaSensor does not assume any liability arising out of the application or use of any product or circuit and specifically dis- claims, and all liability, without limitation consequential or incidental damages. The foregoing warranties are exclusive and in lieu of all other warranties, whether written, oral, implied or statutory. No im- plied statutory warranty of merchantability or fitness for a particular purpose shall apply. AAS-920-264B-07/2014 www.amphenol-sensors.com © 2014 Amphenol Corporation. All Rights Reserved. Specifications are subject to change without notice. Other company names and product names used in this document are the registered trademarks or trademarks of their respective owners. Amphenol Advanced Sensors Die dimensions: 0.10 in x 0.12 in x 0.07 in (2.7 mm x 3.2 mm x 2 mm) P111 schematic diagrams

Ordering Information

Minimum Release Quantity: 2 wafers or approximately 900 die Part Number Description 51006 100 KPaD/G 51007 200 KPaD/G 51008 700 KPaD/G 51010 100 KPaA 51011 200 KPaA 51012 700 KPaA