MTX2-02G JLWORLD | Alldatasheet
Document overview
- Manufacturer or author: Provided By ALLDATASHEET.COM(FREE DATASHEET DOWNLOAD SITE)
- PDF pages: 4
Technical content
1907 Westlands Centre, 20 Westlands Road, Quarry Bay, Hong Kong
Tel : (+852) 2565 6979 Fax : (+852) 2565 0319 Email : sales@jlworld.com Website : www.jlworld.com 060220-A3 Page 1 of 4 MTX2-02G Dual Axis Accelerometer – Low g Dual Axis Silicon Accelerometer Die The MTX2-02G series capacitive silicon accelerometer sensors are manufactured in class 10 clean room using state of the art CMOS and bulk micro-machining capabilities. They are manufactured in six inched wafers, utilizing DRIE techniques and patented processes. An applied force or acceleration (including gravity) causes a capacitance shift in a differential capacitor, which is converted to a pulse density modulation by an integrated ASIC. The XY sensing element is a differential capacitor fabricated in single crystal silicon with a high aspect ratio thereby offering excellent performance in sensitivity and linearity. The sensing element is enclosed in a hermetic wafer-level package using wafer to wafer bonding. This allows it to be assembled in different types of packaging including low cost over-molded plastic packages. Dies are fully probed and inspected and can be shipped in waffle pack. THE MAIN FIELD OF APPLICATIONS − Acceleration Measurement − Vibration measurement − Inclination Measurement
FEATURES
− Excellent accuracy over 2g range − Good temperature performance − Low cost design − Capacitive, high performance − 100% factory tested − High volume manufacturing − Patented process Preliminary
Tel : (+852) 2565 6979 Fax : (+852) 2565 0319 Email : sales@jlworld.com Website : www.jlworld.com 060220-A3 Page 2 of 4 MTX2-02G Dual Axis Accelerometer – Low g DIMENSIONS Plan View (w/o silicon cap) Plan View Dim Typical AA 3688 BB 630 CC 1790 DD 550 EE 510 FF 370 KK 200 LL 358 MM 358 NN 358 OO 358 PP 358 QQ 200 Dim Typical GG 4170 HH (glass substrate) 500 II (silicon device wafer) 30 JJ (silicon cap wafer) 200 Side view All units in um. II JJ HH GG BB DD EE KK LL PP MM NN OO Y YL YM YR XL XM XR AA FF CC QQ Preliminary
Tel : (+852) 2565 6979 Fax : (+852) 2565 0319 Email : sales@jlworld.com Website : www.jlworld.com 060220-A3 Page 3 of 4 MTX2-02G Dual Axis Accelerometer – Low g ELECTRICAL AND DIE LAYOUT YL YM YR XL XM XR Pad Description XL X axis left capacitance (fixed electrode) XR X axis right capacitance(fixed electrode) YL Y axis left capacitance(fixed electrode) YR Y axis right capacitance(fixed electrode) M Common electrode for applying voltage bias (moving electrode) XR XMXL YR YM YL Preliminary
Tel : (+852) 2565 6979 Fax : (+852) 2565 0319 Email : sales@jlworld.com Website : www.jlworld.com 060220-A3 Page 4 of 4 MTX2-02G Dual Axis Accelerometer – Low g TECHNICAL DATA Parameter Min Typical Max Unit Operating Temperature Range -40 - +85 oC Storage Temperature Range -40 - 125 oC Measuring Range -2 - +2 g Probe voltage - 1 - V Leakage current 5 nA Nominal Capacitance @ Capacitance change @1V 100 Preliminary 350 600 fF 4 6 pF