MTX1-50G JLWORLD | Alldatasheet
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Technical content
1907 Westlands Centre, 20 Westlands Road, Quarry Bay, Hong Kong
Tel : (+852) 2565 6979 Fax : (+852) 2565 0319 Email : sales@jlworld.com Website : www.jlworld.com 060472-A2 Page 1 of 4 Document #: DS-SDEV-MTX1-50G Rev A MTX1-50G Single Axis Accelerometer – 50 g Single Axis Silicon Accelerometer Die
FEATURES
- Excellent accuracy over 50g range
- Good temperature performance
- Low cost design
- Capacitive, high performance
- 100% factory tested
- High volume manufacturing
- Patented process The MTX1-50G series capac itive silicon accelerometer sensors are manufactured in class 10 clean room using state of the art CMOS and bulk micro-machining capabilities. They are manufactured in six inched wafers, utilizing DRIE techniques and patented processes. An applied force o r acceleration (including gravity) causes a capacitance shift in a differential capacitor, which is converted to a pulse density modulation by an integrated ASIC. The sensing element is a differential capacitor fabricated in single crystal silicon with a high aspect ratio thereby offering excellent performance in sensitivity and linearity. The sensing element is enclosed in a hermetic wafer-level package using wafer to wafer bonding. This allows it to be assembled in different types of packaging including low cost over- molded plastic packages. Dies are fully probed and inspected and can be shipped in waffle pack. THE MAIN FIELD OF APPLICATIONS /checkbld Acceleration Measurement /checkbld Vibration measurement /checkbld Inclination Measurement
Tel : (+852) 2565 6979 Fax : (+852) 2565 0319 Email : sales@jlworld.com Website : www.jlworld.com 060472-A2 Page 2 of 4 Document #: DS-SDEV-MTX1-50G Rev A MTX1-50G Single Axis Accelerometer – 50 g TECHNICAL DATA Maximum ratings Data Temperature=22±2° C, Relative humidity=45±5% Specification Min. Typ. Max. Unit Operating Temperature -40 - +85 ° C Storage Temperature -40 - 125 ° C Specification Min. Typ. Max. Unit Measuring Range -50 - +50 g Probe voltage - 3 5 V Leakage current - - 5 nA Shock survival range - 2000 - g Nominal Capacitance @ 0V 0.5 1 1.5 pF Delta Capacitance 0 200 400 fF Capacitance change @3V 20 50 80 fF Sensitivity 0.7 1 1.3 fF/g
Tel : (+852) 2565 6979 Fax : (+852) 2565 0319 Email : sales@jlworld.com Website : www.jlworld.com 060472-A2 Page 3 of 4 Document #: DS-SDEV-MTX1-50G Rev A MTX1-50G Single Axis Accelerometer – 50 g Plan View (w silicon cap) Dim Typical AA 3020 BB 275 CC 1850 DD 225 EE 220 FF 200 KK 200 LL 200 MM 300 NN 200 OO 300 PP 200 QQ 300 RR 350 DIMENSIONS Side view Plan View (w/o silicon cap) All units in um. II JJ HH GG AA BB CC D EE FF KK LL MM NN OO PP QQ RR XL VCC\` XR Dim Typical GG 2350 HH (glass substrate) 550 II (silicon device wafer) JJ (silicon cap wafer) 450
Tel : (+852) 2565 6979 Fax : (+852) 2565 0319 Email : sales@jlworld.com Website : www.jlworld.com 060472-A2 Page 4 of 4 Document #: DS-SDEV-MTX1-50G Rev A MTX1-50G Single Axis Accelerometer – 50 g ELECTRICAL AND DIE LAYOUT XL VCC\ XR XL VCC\ XR Pad Description XL X axis left capacitance (fixed electrode) XR X axis right capacitance(fixed electrode) VCC Common electrode for applying voltage bias (moving electrode)