MS54XX TEC | Alldatasheet
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SENSOR SOLUTIONS ///MS54XX Page 1 09/2015 Carrier Full scale pressure High Sensitivity Versions High Linearity Versions Product code Full scale span Linearity Product code Full scale span Linearity Ceramic 1 bar MS5401-AM 240 mV ±0.20 % FS MS5401-BM 150 mV ±0.05 % FS 7 bar MS5407-AM 392 mV ±0.20 % FS 12 bar MS5412-BM 150 mV ±0.05 % FS 70 bar MS5470-AM 310 mV ±0.25 % FS MS54XX Miniature SMD Pressure Sensor SPECIFICATIONS 1, 7, 12, and 70 bar absolute pressure range Uncompensated Piezoresistive silicon micromachined sensor Miniature surface mount Ceramic carrier Low noise, high sensitivity, high linearity The MS54XX SMD pressure sensor series is designed for pressure sensor systems with highest demands on resolution and accuracy. The device consists of a silicon micromachined pressure sensor die mounted on a 6.2 x 6.4 mm ceramic carrier. The MS54XX can be delivered in a high sensitivity version giving a maximal output voltage or in a high linearity version. Both versions provide an output voltage directly proportional to the applied pressure
Miniature SMD Pressure Sensor SENSOR SOLUTIONS ///MS54XX 09/2015 Page 2
FEATURES
Low cost SMD package Small size High reliability, low drift -40 °C to +125 °C operation range Gel protection against humidity and water
APPLICATIONS
Brake systems High resolution altimeters, variometers Barometers Engine management Waterproof watches and diving computers
Miniature SMD Pressure Sensor SENSOR SOLUTIONS ///MS54XX 09/2015 Page 3 PIN CONFIGURATION PIN DESCRIPTION Pin Name Pin No Function OUT- 1 Negative output voltage of Wheatstone bridge GND 2 Ground VS+ 3 Supply voltage of Wheatstone bridge OUT+ 4 Positive output voltage of Wheatstone bridge ABSOLUTE MAXIMUM RATINGS Parameter Symbol Conditions Min Max Unit Supply voltage VS+ Ta = 25 °C - 20 V Storage temperature TS -40 +125 °C Overpressure MS5401-AM MS5401-BM (1) MS5407-AM (2) MS5412-BM MS5470-AM P Ta = 25 °C 180 bar NOTES 1) The MS5401-BM is qualified referring to ISO Standard 2281 and can withstand an absolute pressure of 11 bar in salt water or 100 m water respectively. 2) The MS5407-AM is qualified referring to ISO Standard 2281 and can withstand an absolute pressure of 21 bar in salt water or 200 m water specifically. 3: VS+ 1: OUT- 4: OUT+ 2: GND
Miniature SMD Pressure Sensor SENSOR SOLUTIONS ///MS54XX 09/2015 Page 4
ELECTRICAL CHARACTERISTICS
(Vs+ = 5 V; Ta = 25 °C) Parameter Min Typ Max Unit Notes MS5401-AM Operating pressure range 0 - 1 bar Full-scale span (FS) 190 240 290 mV Sensitivity 190 240 290 mV/bar Linearity - ±0.15 ±0.40 % FS 1, 6 MS5407-AM Operating pressure range 0 - 7 bar Full-scale span (FS) 322 392 462 mV Sensitivity 46 56 66 mV/bar Linearity ±0.15 ±040 % FS 1, 6 MS5470-AM Operating pressure range 0 - 70 bar Full-scale span (FS) 250 310 370 mV Sensitivity 3.6 4.4 5.3 mV/bar Linearity ±0.25 ±0.50 % FS 1, 6 All Ranges Operating temperature range -40 - 125 °C Zero pressure offset -40 0 40 mV Pressure hysteresis - - ±0.20 % FS 2, 6 Temperature hysteresis - 0.3 0.8 % FS 3, 6 Repeatability - - ±0.20 % FS 4, 6 Bridge resistance 3.0 3.4 3.8 kΩ Temperature coefficient of resistance Temperature coefficient of span Temperature coefficient of offset +2'400 -1'500 -80 2'900 -1'900 +3'300 -2'300 +80 ppm/°C ppm/°C µV/°C 5, 6 5, 6 5, 6 NOTES 1) Deviation at one half full-scale pressure from the least squares best line fit over pressure range . 2) Maximum difference of output voltage after 1 pressure cycle at any pressure within the operating press ure range. 3) Maximum difference in offset after one thermal cycle from -40°C to +125°C. 4) Same as 2) after 10 pressure cycles. 5) Slope of the end-point straight line from 25°C to 60°C. 6) Not 100% tested.
Miniature SMD Pressure Sensor SENSOR SOLUTIONS ///MS54XX 09/2015 Page 5 ELECTRICAL CHARACTERISTICS (CONT.) HIGH LINEARITY VERSIONS (Vs+ = 5 V; Ta = 25 °C) Parameter Min Typ Max Unit Notes MS5401-BM Operating pressure range 0 - 1 bar 8 Full-scale span (FS) 120 150 180 mV Sensitivity 120 150 180 mV/bar Linearity - ±0.05 ±0.20 % FS 1, 6 MS5412-BM Operating pressure range 0 - 12 bar 8 Full-scale span (FS) 120 150 180 mV Sensitivity 10 12.5 15 mV/bar Linearity ±0.05 ±0.15 % FS 1, 6 All Ranges Operating temperature range -40 - 125 °C Zero pressure offset -40 0 40 mV Pressure hysteresis - - ±0.20 % FS 2, 6 Temperature hysteresis - 0.3 0.8 % FS 3, 6 Repeatability - - ±0.20 % FS 4, 6, 7 Bridge resistance 3.0 3.4 3.8 kΩ Temperature coefficient of resistance Temperature coefficient of span Temperature coefficient of offset +2'400 -1'500 -80 2'900 -1'900 +3'300 -2'300 +80 ppm/°C ppm/°C µV/°C 5, 6 5, 6 5, 6 NOTES 1) Deviation at one half full-scale pressure from the least squares best line fit over pressure range . 2) Maximum difference of output voltage after 1 pressure cycle at any pressure within the operating pres sure range. 3) Maximum difference in offset after one thermal cycle from -40°C to +125°C. 4) Same as 2) after 10 pressure cycles. 5) Slope of the end-point straight line from 25°C to 60° C. 6) Not 100% tested. 7) MS5412- BM: Max. 0.3% FS 8) This sensor family is optimized for the linearity; it is suitab le for applications with higher pressure where the linearity requirement is less critical.
Miniature SMD Pressure Sensor SENSOR SOLUTIONS ///MS54XX 09/2015 Page 6
APPLICATION INFORMATION
The MS54XX is a miniaturized absolute pressure sensor series which has been designed as a surface mount device (SMD). Its main advantages are the high performance of the semiconductor sensor and a design which makes it suitable for applications requiring small dimensions and cost efficiency. The sensor element of the MS54XX consists of a micromachined silicon membrane w ith borosilicate glass wafer- bonded under vacuum to the back side for reference pressure. Implanted resistors make use of the piezo-res istive effect to sense pressure applied to the membrane. The sensor is mounted using a special process allowing best offset stability making the device suitable for direct PCB assembly. Typical applications for this miniaturized pressure sensor MS54XX are altitude measurements and the measurement of atmospheric reference pressure in medical and industrial equipment as well as in autom otive and household applications, consumer electronics and pneumatics. Full Scale Pressure High Sensitivity Versions (MS54XX-AX) High Linearity Versions (MS54XX-BX) 1 bar Variometer, Altimeter, Barometer High End Altimeter, Medical Instrumentation 7 bar Divers Watch, Tire Pressure, Electronic Scale High End Electronic Scale 12 bar Pneumatic Brake, Diving Computer 70 bar Engine Control, Diving Computer HUMIDITY, WATER PROTECTION MS54XX-XM WITH METAL CAP The MS54XX-AM / - BMXXBA has an anticorrosive and antimagnetic metallic protection cap filled with silicone gel for enhanced protection against humidity. The properties of this gel ensure function of the sensor even when in direct water contact. This feature can be useful for waterproof watches or other applications, where d irect water contact cannot be avoided. Nevertheless the user should avoid drying of hard materi als like for example salt particles on the silicone gel surface. In this case it is advisable to rinse with clean water afterwards. Special care has to be taken not to mechanically damage the gel. Damaged gel may lead to air entrapment and consequently to unstable sensor signal, especially if the damage is close to the sensor surface. The metal cap is fabricated of special anticorrosive alloy in order to avoid any galvanic effects within the end product. The MS5401-BM is qualified referring to the ISO Standard 2281 and can withstan d a pressure of 11 bar in salt water. The concentration of the sea water used for the qualification is 41 g of s ea salt per 1 litre of DI water. The MS5407-BM satisfies salt-water testing with a pressure capability of 21 bar. For underwater operations as specified in ISO Standard 2281 it is important to seal the sensor with a rubber O-ring around the metal cap. Any salt water reaching the contact side (ceramic and pads ) of the sensor could lead to permanent damage. Especially for "water- resistant 100 m" watches and for diving computers, it is recommended to provide a stable mechanical pusher from the backside of the sensor; otherwise the overpressure may push the sensor backwards and even deform the electronic board on which the sensor is mounted. LIGHT SENSITIVITY The MS54XX is sensitive to sunlight (visible and near-infrared spectrum). This is due to the strong photo effect of silicon. As the effect is reversible there will be no damage, but the user has to take care that in the final product the sensor cannot be exposed to direct light during operation as it effects the measuremen t. This can be achieved for instance by placing mechanical parts with holes in such that light cannot pass.
Miniature SMD Pressure Sensor SENSOR SOLUTIONS ///MS54XX 09/2015 Page 7 CONNECTION TO PCB The package outline of the module enables the use of a flexible PCB to connect i t. This can be important for applications in watches and other special devices, and will also reduce mechanical stress on the device. For applications subjected to mechanical shock, it is recommended to enhance the mec hanical reliability of the solder junctions by covering the rim or the corners of MS54XX ceramic substrate with glue or globtop-like material. SOLDERING Please refer to the application note AN808 for all soldering issues. CLEANING The MS54XX has been manufactured under clean-room conditions. Each device is inspected for homogeneity and cleanness of the silicone gel. It is therefore recommended to assemble the sensor un der class 10 000 or better conditions. Should this not be possible, it is recommended to protect the senso r opening during assembly from entering particles and dust. To avoid cleaning of the PCB, solder paste of type “no -clean” must be used. Cleaning might damage the sensor. RECOMMENDED PAD LAYOUT Recommended pad layout for soldering of the MS54XX on a printed circuit board
Miniature SMD Pressure Sensor SENSOR SOLUTIONS ///MS54XX 09/2015 Page 8 PACKAGE OUTLINES CERAMIC CARRIER AND METAL CAP Device package outlines of MS54XX-AM and MS54XX-BM (M = anticorrosive and antimagnetic stainless steel cap)
Miniature SMD Pressure Sensor SENSOR SOLUTIONS ///MS54XX 09/2015 Page 9 PACKING The MS54XX is packed in 51 cm (20-inch) antistatic plastic tubes with rub ber end-plugs of different colors: one green and one black. The dot on the carrier next to Pin 1 is facing the green end-pl ug. Each tube contains 80 sensors. The tubes are marked "ANTISTATIC" and have an information label. See the drawings below for more details. PACKING TUBE OUTLINES All measures in mm 510 8.2 Information label
Miniature SMD Pressure Sensor SENSOR SOLUTIONS ///MS54XX 09/2015 Page 10
ORDERING INFORMATION
Product code Product Art. No Package Delivery Form MS5401-AM Miniature pressure sensor 1 bar, High sensitivity 325401001-00 Ceramic carrier Tube 325401001-50 Ceramic carrier Tape and Reel 325401006-00 Ceramic carrier, without transparent gel Tube MS5401-BM Pressure sensor 1 bar, High linearity 325401000-00 Ceramic carrier Tube 325401000-50 Ceramic carrier Tape and Reel 325401002-00 Ceramic carrier, without transparent gel Tube MS5407-AM Miniature pressure sensor 7 bar, High sensitivity 325407000-00 Ceramic carrier Tube 325407000-50 Ceramic carrier Tape and Reel 325407001-00 Ceramic carrier, without transparent gel Tube MS5412-BM Pressure sensor 12 bar, High linearity 325412000-00 Ceramic carrier Tube 325412000-50 Ceramic carrier Tape and Reel MS5470-AM Miniature pressure sensor 70 bar, High sensitivity 325470000-00 Ceramic carrier Tube AX = high sensitivity BX = high linearity XM = anticorrosive and antimagnetic metallic cap TE.com/sensorsolutions Measurement Specialties, Inc., a TE Connectivity company. Measurement Specialties, TE Connectivity, TE Connectivity (logo) and EVERY CONNECTION COUNTS are trademarks. All other logos, products and/or company names referred to herein might be trademarks of their respective owners. The information given herein, including drawings, illustrations and schematics which are intended for illustration purposes only, is believe d to be reliable. However, TE Connectivity makes no warranties as to its accuracy or completeness and disclaims any liability in connection with its use. TE Connectivity‘s obligation s shall only be as set forth in TE Connectivity‘s Standard Terms and Conditions of Sale for this product and in no case will TE Connectivity be liable for any incidental, indirect or consequential damages arising out of the sale, resale, use or misuse of the product. Users of TE Connectivity products should make their own evaluation to determine the suitability of each such product for the specific application. © 2015 TE Connectivity Ltd. family of companies All Rights Reserved. DA54XX_020 000054XX280 ECN1882 NORTH AMERICA Measurement Specialties, Inc., a TE Connectivity Company
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