MS52XX TEC | Alldatasheet
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SENSOR SOLUTIONS /// MS52XX Page 1 09/2015 Full scale pressure High Sensitivity Version High Linearity Versions Product code Full scale span Linearity Product code Full scale span Linearity 1 bar MS5201-AN 240 mV ±0.20 % FS MS5201-BN 150 mV ±0.05 % FS 12 bar MS5212-BM 150 mV ±0.05 % FS MS52XX SMD Pressure Sensor SPECIFICATIONS 1, and 12 bar absolute pressure range Uncompensated Piezoresistive silicon micromachined sensor Surface mount 7.6 x 7.6 mm Low-noise, high-sensitivity, high-linearity The MS52XX SMD pressure sensor series is designed for pressure systems with the highest demands on resolution and accuracy. The device consists of a silicon micromachined pressure sensor die mounted on a 7.6 x 7.6 mm ceramic carrier protected by a metal cap. The MS52XX can be delivered in a highly-sensitive version giving a maximal output voltage or in a highly-linear version giving a linear output voltage directly proportional to the applied pressure.
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FEATURES
Low-cost SMD ceramic package High-reliability, low-drift -40 °C to +125 °C operation range Optional: Gel protection against humidity and water
APPLICATIONS
Absolute pressure sensor systems High resolution altimeters, variometers Barometers Engine controls Tire pressure PIN CONFIGURATION
SENSOR SOLUTIONS /// MS52XX 09/2015 Page 3 PIN DESCRIPTION Pin Name Pin No Function OUT- 1 Negative output voltage of Wheatstone bridge GND 2 Ground VS+ 3 Supply voltage of Wheatstone bridge OUT+ 4 Positive output voltage of Wheatstone bridge ABSOLUTE MAXIMUM RATINGS Parameter Symbol Conditions Min Max Unit Supply voltage VS+ Ta = 25 °C - 20 V Storage temperature TS -40 +125 °C Overpressure MS5201-AN MS5201-BN MS5212-BM P Ta = 25 °C bar
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ELECTRICAL CHARACTERISTICS
(Vs+ = 5 V; Ta = 25 °C) Parameter Min Typ Max Unit Notes MS5201-AN Operating pressure range 0 - 1 bar Full-scale span (FS) 190 240 290 mV Sensitivity 190 240 290 mV/bar Linearity - ±0.15 ±0.4 % FS 1, 6 Operating temperature range -40 - 125 °C Zero pressure offset -40 0 40 mV Pressure hysteresis - - ±0.20 % FS 2, 6 Temperature hysteresis - 0.3 0.8 % FS 3, 6 Repeatability - - ±0.20 % FS 4, 6 Bridge resistance 3.0 3.4 3.8 kΩ Temperature coefficient of resistance Temperature coefficient of span Temperature coefficient of offset +2'400 -1'500 -80 2'900 -1'900 +3'300 -2'300 +80 ppm/°C ppm/°C µV/°C 5, 6 5, 6 5, 6 NOTES 1) Deviation at one half full-scale pressure from the least squares best line fit over pressure range . 2) Maximum difference of output voltage after 1 pressure cycle at any pressure within the operating press ure range. 3) Maximum difference in offset after one thermal cycle from -40°C to +125°C. 4) Same as 2) after 10 pressure cycles. 5) Slope of the end-point straight line from 25°C to 60°C. 6) Not 100% tested.
SENSOR SOLUTIONS /// MS52XX 09/2015 Page 5 ELECTRICAL CHARACTERISTICS (CONT.) HIGH LINEARITY VERSIONS (Vs+ = 5 V; Ta = 25 °C) Parameter Min Typ Max Unit Notes MS5201-BN Operating pressure range 0 - 1 bar Full-scale span (FS) 120 150 180 mV Sensitivity 120 150 180 mV/bar Linearity - ±0.05 ±0.20 % FS 1, 6 MS5212-BM Operating pressure range 0 - 12 bar Full-scale span (FS) 120 150 180 mV Sensitivity 10 12.5 15 mV/bar Linearity ±0.15 ±0.20 % FS 1, 6 All Ranges Operating temperature range -40 - 125 °C Zero pressure offset -40 0 40 mV Pressure hysteresis - - ±0.20 % FS 2, 6 Temperature hysteresis - 0.3 0.8 % FS 3, 6 Repeatability - - ±0.20 % FS 4, 6, 7 Bridge resistance 3.0 3.4 3.8 kΩ Temperature coefficient of resistance Temperature coefficient of span Temperature coefficient of offset +2'400 -1'500 -80 2'900 -1'900 +3'300 -2'300 +80 ppm/°C ppm/°C µV/°C 5, 6 5, 6 5, 6 NOTES 1) Deviation at one half full-scale pressure from the least squares best line fit over pressure range . 2) Maximum difference of output voltage after 1 pressure cycle at any pressure within the operating press ure range. 3) Maximum difference in offset after one thermal cycle from -40°C to +125°C. 4) Same as 2) after 10 pressure cycles. 5) Slope of the end-point straight line from 25°C to 60°C. 6) Not 100% tested. 7) MS5212-BM: Max. 0.3% FS.
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APPLICATION INFORMATION
The MS52XX is a miniaturized absolute pressure sensor series that has been desi gned for surface mounting applications. Its main advantages are the high reliability of the semiconduc tor sensor and a design which makes it suitable for applications requiring small-scale and cost-efficient solutions. The sensor element of the MS52XX consists of a micromachined silicone membrane with borosilicate glass wafer- bonded under vacuum to the back-side for reference pressure. Implanted resistors make use of the piezo-resistive effect to sense pressure applied to the membrane. The sensor is mounted in a special process allowing best-offset stability making the part suitable for direct PCB assembly. Typical applications for this miniaturized pressure sensor MS52XX are altitude measurements and the measurement of atmospheric reference pressure in medical and industrial equipment as well as in autom otive and industrial applications, consumer electronics and pneumatics. Full Scale Pressure High Sensitivity Version (MS5201-AN) High Linearity Versions (MS5201-BN and MS5212-BM) 1 bar Variometer, altimeter, barometer High end altimeter, medical instrumentation 12 bar Pneumatic brake LIGHT SENSITIVITY The MS52XX is sensitive to sunlight, especially to infrared light sourc es. This is due to the strong photo effect of silicon. As the effect is reversible there will be no damage, but the user has to take care that in the final product the sensor must not be exposed to direct light during operation. This can be achieved for instance by placing mechanical shielding with holes in such way that light cannot go through. CONNECTION TO PCB The package outline of the module allows the use of a flexible PCB to connect it. This can be important for applications in watches and other special devices, and will also reduce mechanical stress on the device. For applications subjected to mechanical shock, it is recommended to enhance the mec hanical reliability of the solder junctions by covering the rim or the corners of MS52XX ceramic substrate with glue or Globtop-like material. SOLDERING Please refer to the application note AN808 for all soldering issues. CLEANING The MS52XX has been manufactured under cleanroom conditions. Each device has b een inspected for the homogeneity and the cleanness of the silicone gel. It is therefore recommended to assemble the sensor under class 10’000 or better condit ions. Should this not be possible, it is recommended to protect the sensor op ening during assembly from entering particles and dust. To avoid cleaning of the PCB, solde r paste of type “no -clean” shall be used. Cleaning may damage the sensor.
SENSOR SOLUTIONS /// MS52XX 09/2015 Page 7 PACKAGE OUTLINES Device package outlines of MS5201-AN and MS5201-BN (Metal cap with nickel finish, gel protection of bonding wires)
SENSOR SOLUTIONS /// MS52XX 09/2015 Page 8 PACKAGE OUTLINES (CONT.) Device package outlines of MS5212-BM (Stainless steel cap, with or without gel protection of bonding wires)
SENSOR SOLUTIONS /// MS52XX 09/2015 Page 9 RECOMMENDED PAD LAYOUT Recommended pad layout for soldering of the MS52XX on a printed circuit board SHIPPING PACKAGE Tape and reel
SENSOR SOLUTIONS /// MS52XX 09/2015 Page 10 PACKAGE (CONT.) Tube
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ORDERING INFORMATION
Product code Product Art. No Package Comments Delivery Form MS5201-AN Pressure sensor 1 bar, High sensitivity 325201002-00 SMD hybrid with solder bumps, Metal cap with nickel finish, drop of gel on sensor, no gel protection of the bonding wires Tube MS5201-BN Pressure sensor 1 bar, High linearity 325201000-00 Tube MS5212-BM transparent gel Pressure sensor 12 bar, High linearity 325212001-00 SMD hybrid with solder bumps, Stainless steel cap, Gel protection of sensor and bonding wires Same sensor for both articles, only the gel protection changes Tube MS5212-BM white gel 325212002-00 Tube MS5212-BM white gel 325212002-50 Tape and reel TE.com/sensorsolutions Measurement Specialties, Inc., a TE Connectivity company. Measurement Specialties, TE Connectivity, TE Connectivity (logo) and EVERY CONNECTION COUNTS are trademarks. All other logos, products and/or company names referred to herein might be trademarks of their respective owners. The information given herein, including drawings, illustrations and schematics which are intended for illustration purposes only, is believe d to be reliable. However, TE Connectivity makes no warranties as to its accuracy or completeness and disclaims any liability in connection with its use. TE Connectivity‘s obligations shall only be as set forth in TE Connectivity‘s Standard Terms and Conditions of Sale for this product and in no case will TE Connectivity be liable for any incidental, indirect or consequential damages arising out of the sale, resale, use or misuse of the product. Users of TE Connectivity products should make their own evaluation to determine the suitability of each such product for the specific application. © 2015 TE Connectivity Ltd. family of companies All Rights Reserved. DA52XXYZ_017 000052XX223 ECN1873 NORTH AMERICA Measurement Specialties, Inc., a TE Connectivity Company
45738 Northport Loop West
Fremont, CA 94538 Tel: +1 800 767 1888 Fax: +1 510 498 1578 e-mail: pfg.cs.amer@meas-spec.com Website: www.meas-spec.com EUROPE Measurement Specialties (Europe), Ltd., a TE Connectivity Company Switzerland Sàrl Ch. Chapons-des-Prés 11 CH-2022 Bevaix Tel: +41 32 847 9550 Fax: + 41 32 847 9569 e-mail: sales.ch@meas-spec.com Website: www.meas-spec.com ASIA Measurement Specialties (China), Ltd., a TE Connectivity Company No. 26 Langshan Road Shenzhen High-Tech Park (North) Nanshan District, Shenzhen, 518057 China Tel: +86 755 3330 5088 Fax: +86 755 3330 5099 e-mail: pfg.cs.asia@meas-spec.com Website: www.meas-spec.com