MPXM2010 FREESCALE | Alldatasheet

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Technical content

Features

• Temperature Compensated Over 0 °C to +85°C • Available in Easy-to-Use Tape & Reel • Ratiometric to Supply Voltage • Gauge Ported & Non Ported Options Application Examples • Respiratory Diagnostics • Air Movement Control • Controllers • Pressure Switching Figure 1 shows a block diagram of the internal circuitry on the stand-alone pressure sensor chip.

ORDERING INFORMATION

Device Type/Order No. Options Case No. MPXM2010D Non-ported 1320 MPXM2010DT1 Non-ported, Tape and Reel 1320 MPXM2010GS Ported 1320A MPXM2010GST1 Ported, Tape and Reel 1320A MPXM2010 SERIES FREESCALE PREFERRED DEVICE 0 to 10 kPa (0 to 1.45 psi) 25 mV FULL SCALE SPAN (TYPICAL) PIN NUMBERS

1 GND 3 VS

2 +Vout 4 –Vout MPXM2010D/DT1 CASE 1320-02 MPXM2010GS/GST1 CASE 1320A-02 VS Sensing Element GND +Vout –Vout Thin Film Temperature Compensation and Calibration Circuitry Figure 1. Fully Integrated Pressure Sensor Schematic

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proportional to the differential pressure applied. side relative to the pressure side. choices for future use and best overall value. Table 1. Maximum Ratings

  1. Exposure beyond the specified limits may cause permanent damage or degradation to the device.

calculations required are burdensome. calculations are more straightforward for the user. Table 2. Operating Characteristics (V

  1. 1.0 kPa (kiloPascal) equals 0.145 psi.
  2. Device is ratiometric within this specified excitation range. Operating the device above the specified excitation range may induce additional

error due to device self-heating.

  1. Full Scale Span (VFSS) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at
  2. Offset (Voff) is defined as the output voltage at the minimum rated pressure.
  3. Accuracy (error budget) consists of the following:
  • Linearity: Output deviation from a stra ight line relationship with pressure, using end point method, over the specified pressure range.
  • Temperature Hysteresis: Output deviation at any temperature with in the operating temperature range, after the temperature is cycled to and from the minimum or maximum operating temperature points, with zero differential pressure applied.
  • Pressure Hysteresis: Output deviation at any pressure within the specified range, when this pressure is cycled to and from the minimum or maximum rated pressure, at 25°C.
  • TcSpan: Output deviation at full rated pressure over the temperature range of 0 to 85 °C, relative to 25°C.
  • TcOffset: Output deviation with mini mum rated pressure applied, over the temperature range of 0 to 85°C, relative to 25°C. Pressure Hysteresis(5) (0 to 10 kPa) —— ±0.1 — %V FSS Temperature Hysteresis5 (–40°C to +125°C) —— ±0.5 — %V FSS Temperature Effect on Full Scale Span(5) TCVFSS –1.0 — 1.0 %V FSS Temperature Effect on Offset(5) TCVoff –1.0 — 1.0 mV Input Impedance Zin 1000 — 2550 Ω Output Impedance Zout 1400 — 3000 Ω Response Time(6) (10% to 90%) 6. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to a specified step change in pressure. tR —1 . 0—m s Warm-Up ——2 0— m s Offset Stability(7) 7. Offset stability is the product's output deviation when subjec ted to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test. —— ±0.5 — %V FSS

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Figure 2. Linearity Specification Comparison essentially a straight line. transmitted to the silicon diaphragm. Figure 3. Output versus Pressure Differential

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